断层面计测系统

Layer Profiling System am
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The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. #UREFwSL  
Features -C$Z%I7 0  
Super depty measurement lu@#
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A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. T W?O  
Vevy weak interference fringe patterns can be capured W-Cf#o  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. #&\hgsw/T  
100 magnification interference is achieved p9<OXeY  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. W%]sI n  
NSIMAGIK compatible system [woR9azC  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. g0.D36  
Specifications of stage \K 01F  
Item    RSY-150    RSY-300 @URLFMFi  
Compressed Air    ≧0.5Mpa SEY  
    Tube: Internal diameter 4mm, External diameter 6mm nLq7J:  
Power Saurce    Single-phase 100V 4KVA C]UBu-]#S  
Clean Room Response    Response to Class 1000 NF=FbvNe  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) eafy5vN[zX  
Stage Unit Weight    About 200kg    About 300kg u!2.[CV  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) n5_r 3{  
Control Rack Unit Weight    About 180kg J
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X-Y Stage     o a,Ju  
X Valid Stroke    ±75mm    ±150mm 4ei .-  
Y Valid Stroke    ±75mm    ±150mm YgaJ*%\  
Maximum Speed    10mm/sec D%LM"p  
Actuator    Ball screw, Open-loop control iUh_rX9A"  
Stage Resolution    1μm/step aDa}@-F&a  
Repeatability    ±1μm \S;
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Z axis     (5d~0  
Valid Stroke    ±50mm XKp%
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Actuator    Grand screw, Open-loop control S>7Zq5*  
Z Axis Resolution    ±1μm/step (Half-step)
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Jog-Dial    100μm/Revolution vII&v+C  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps #;juZ*I  
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日本神津精机中国总代理： %dZD;Vhg  
广州市嘉铭工业器材有限公司     w;Qo9=-  
地  址：广州市广州大道中明月一路20号明月阁2403室 /#$bb4  
联系人：MR.Huang   MSN:htj@kmischina.com l1c&a[M)  
电  话：+86 020-87392866-211  传真：87361189 lg;Y}?P  
E-mail:htj@kmischina.com  Xvs{2  
http:www.kmischina.com