断层面计测系统

Layer Profiling System Dp)=0<$y  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. B"!l2  
Features aX5 z&r:{  
Super depty measurement n/+.s(7c  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. G LIi6  
Vevy weak interference fringe patterns can be capured 4lKq{X5<  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. 0:9.;x9_  
100 magnification interference is achieved ";3zXk[#  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. `< xn8h9p  
NSIMAGIK compatible system nlW +.a[  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. "#{4d),r  
Specifications of stage hRUhX[  
Item    RSY-150    RSY-300 45,1-? -!  
Compressed Air    ≧0.5Mpa &e#~<Wm82  
    Tube: Internal diameter 4mm, External diameter 6mm ;#vKi0V7  
Power Saurce    Single-phase 100V 4KVA q,93nhs "  
Clean Room Response    Response to Class 1000 ]x(e&fyHB  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) m^ tFi7c  
Stage Unit Weight    About 200kg    About 300kg L.S;J[a;  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) TFkZpe;  
Control Rack Unit Weight    About 180kg '}B+r@YCN  
X-Y Stage     1*9U1\z  
X Valid Stroke    ±75mm    ±150mm YoBPLS`K  
Y Valid Stroke    ±75mm    ±150mm e\!0<d  
Maximum Speed    10mm/sec B?'#4J  
Actuator    Ball screw, Open-loop control inh=WUEW  
Stage Resolution    1μm/step eHn7iuS8  
Repeatability    ±1μm A v2 08}Y  
Z axis     }bdmomV  
Valid Stroke    ±50mm + HK8jCa  
Actuator    Grand screw, Open-loop control ]G5w6&d  
Z Axis Resolution    ±1μm/step (Half-step) I%sFqh>  
Jog-Dial    100μm/Revolution &jslyQ#  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps }BZ"S-hZ  
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日本神津精机中国总代理： :6vm+5!  
广州市嘉铭工业器材有限公司     l49*<nkmq  
地  址：广州市广州大道中明月一路20号明月阁2403室 GP?M!C,/}k  
联系人：MR.Huang   MSN:htj@kmischina.com j4jTSLQ\  
电  话：+86 020-87392866-211  传真：87361189 wt!nMQ  
E-mail:htj@kmischina.com /aZ+T5O  
http:www.kmischina.com