断层面计测系统

Layer Profiling System 'b8R#R\P  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. `koOp  
Features joe9.{  
Super depty measurement ows^W8-w  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. $v FrUv  
Vevy weak interference fringe patterns can be capured F vj{@B!  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. doLkrEm&
 
100 magnification interference is achieved >Cvjs  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. d{W}p~UbH  
NSIMAGIK compatible system ;U |NmC+  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. rxQ<4  
Specifications of stage L*P_vCC  
Item    RSY-150    RSY-300 W3^.5I  
Compressed Air    ≧0.5Mpa Ru:n~77{  
    Tube: Internal diameter 4mm, External diameter 6mm qc3~cH.@  
Power Saurce    Single-phase 100V 4KVA |Z d]=tue  
Clean Room Response    Response to Class 1000 G OpjRA@  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) fVYiwE=F  
Stage Unit Weight    About 200kg    About 300kg jM*AL X  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H) 7k `_#  
Control Rack Unit Weight    About 180kg 3:UA<&=s  
X-Y Stage     ^b=XV&{q  
X Valid Stroke    ±75mm    ±150mm K${}r0   
Y Valid Stroke    ±75mm    ±150mm VQ2Fnb4  
Maximum Speed    10mm/sec oB4#J*  
Actuator    Ball screw, Open-loop control 2sUbiDe-  
Stage Resolution    1μm/step sv' Gt1&"Z  
Repeatability    ±1μm z4g+2f7h-X  
Z axis     Fqo&3+J4  
Valid Stroke    ±50mm 0F^]A"kF  
Actuator    Grand screw, Open-loop control 7ZQ'h3K  
Z Axis Resolution    ±1μm/step (Half-step) Hr6wgYPi  
Jog-Dial    100μm/Revolution }hCaNQ&jH  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps y5_XHi@u~o  
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日本神津精机中国总代理： xo(k?+P>.  
广州市嘉铭工业器材有限公司     ?s%v 3T  
地  址：广州市广州大道中明月一路20号明月阁2403室 ' X}7]y  
联系人：MR.Huang   MSN:htj@kmischina.com U,HIB^= R  
电  话：+86 020-87392866-211  传真：87361189 XoJgs$3B  
E-mail:htj@kmischina.com K}Na3}m  
http:www.kmischina.com