断层面计测系统

Layer Profiling System CFqoD l  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. R|H9AM ~E  
Features evPr~_  
Super depty measurement "s2?cQv{#  
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. AY:3o3M  
Vevy weak interference fringe patterns can be capured Mw
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Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. 0CI?[R\  
100 magnification interference is achieved VE^NSkOa&  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. ?*E Y~'I  
NSIMAGIK compatible system exV6&bdu  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible. i0,{*LD%^  
Specifications of stage 4cL NPl<  
Item    RSY-150    RSY-300 3tI=?E#  
Compressed Air    ≧0.5Mpa r9@O`i  
    Tube: Internal diameter 4mm, External diameter 6mm .%`|vGF  
Power Saurce    Single-phase 100V 4KVA y4)M,+O5  
Clean Room Response    Response to Class 1000 qf+jfc(Iby  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) aGNVqS%y  
Stage Unit Weight    About 200kg    About 300kg Pca~V>Hd  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H)
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Control Rack Unit Weight    About 180kg SqFya
 
X-Y Stage     GmtMA|  
X Valid Stroke    ±75mm    ±150mm :ORCsl6-  
Y Valid Stroke    ±75mm    ±150mm 7CUu:6%  
Maximum Speed    10mm/sec &T]+g8''  
Actuator    Ball screw, Open-loop control %0INtq  
Stage Resolution    1μm/step ~j3B'  
Repeatability    ±1μm shxr^  
Z axis     28SlFu?  
Valid Stroke    ±50mm wQ!~c2a<8  
Actuator    Grand screw, Open-loop control 3/:O8H  
Z Axis Resolution    ±1μm/step (Half-step) 1O45M/5\o  
Jog-Dial    100μm/Revolution \8Mkb]QA  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps [{N i94:d  
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日本神津精机中国总代理： MjE.pb  
广州市嘉铭工业器材有限公司     twt Bt L  
地  址：广州市广州大道中明月一路20号明月阁2403室 'LFHZ&-  
联系人：MR.Huang   MSN:htj@kmischina.com 66D<Up'K  
电  话：+86 020-87392866-211  传真：87361189 p\:_E+lsU  
E-mail:htj@kmischina.com i2.y)K)  
http:www.kmischina.com