美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications bi4f]^hQz  
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目录： IuF
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations Iq7}   
                for Nanostructure Fabrication Using Scanning M=qb^~ l
 
                Probe Microscopy 1 }~K`/kvs
 
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
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Chapter 2 Atomic Force Microscope Lithography 33 B~ S6R  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 5q9s,r_  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, l:#-d.z#  
                Sensing, and Modification 65 sZ,Y60s8a  
                C. Santschi, J. Polesel-Maris, J. Brugger, r}#\BbCv;7  
                and H. Heinzelmann ev1 W6B-a  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered ~Nf})U  
                Nano-Scale Structures and Devices 127 0+Ta%
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               R. Mehta, J. Lund, and B. A. Parviz ~S,p?I  
Chapter 5 Nanofabrication Based on Self-Assembled _A13[Mt3  
               Alumina Templates 159 GeszgtK{T  
               S. Sen and N. A. Kouklin sg
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Chapter 6 Nanowire Assembly and Integration 187 osARA3\Xt  
                Z. Gu and D. H. Gracias ;W>Cqg=  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 [r+ZE7$2b"  
                 L. Tong and E. Mazur >_OYhgs1w  
Chapter 8 Extreme Ultraviolet Lithography 235 ,)PiP/3B  
                 H. Kinoshita 'r1LSht'  
Chapter 9 Electron Projection Lithography 285 ,Ys"W x  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata gz2\H}  
Chapter 10 Electron Beam Direct Writing 341 eW5SFY.  
                   K. Yamazaki ~/^5) g_  
Chapter 11 Electron Beam Induced Deposition 377 ~qe%Yq  
                   K. Mitsuishi F  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 H]4Hj  
                   P. A. Crozier and C. W. Hagen sGh(#A0Pt  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 3rLTF\  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi ['8!qr  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces su*Pk|6%  
                  by Unconventional Lithographic Methods 471 `qJw|u>YpJ  
                  R. C. Salvarezza and O. Azzaroni @36u8pE  
Chapter 15 Alternative Nanofabrication Approaches gs!(;N\j|  
f                 or Non-CMOS Applications 499 A_Frk'{qhB  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei "&Po,AWa  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems 9zYVC[o  
                  (NEMS): Emerging Techniques 543 4_Dp+
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                  K. L. Ekinci and J. Brugger T~QJO0  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享