美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications svj0;x5  
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目录： N^@aO&+A  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations  WgayH  
                for Nanostructure Fabrication Using Scanning "qxu9Hg!  
                Probe Microscopy 1 =1e>$E
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                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo #57D10j  
Chapter 2 Atomic Force Microscope Lithography 33 0hoi=W6AQ  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park _I A{I  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, jFPD SR5  
                Sensing, and Modification 65 kr{eC/Q"  
                C. Santschi, J. Polesel-Maris, J. Brugger, TBr@F|RXiO  
                and H. Heinzelmann a
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Chapter 4 Using Biomolecules for Self-Assembly of Engineered sUTfY|<7|  
                Nano-Scale Structures and Devices 127 #*)X+*  
               R. Mehta, J. Lund, and B. A. Parviz @p$$BUb  
Chapter 5 Nanofabrication Based on Self-Assembled ]<g`rR
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               Alumina Templates 159
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               S. Sen and N. A. Kouklin 1_V',0|`>  
Chapter 6 Nanowire Assembly and Integration 187 QsC6\Gt#  
                Z. Gu and D. H. Gracias 0fP-[7P  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 L.R4 iN  
                 L. Tong and E. Mazur H;k-@J  
Chapter 8 Extreme Ultraviolet Lithography 235 2|:xb9#  
                 H. Kinoshita V0/O T~gS8  
Chapter 9 Electron Projection Lithography 285 ]s<}'&  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata C'oNGOEd  
Chapter 10 Electron Beam Direct Writing 341 J0V\_ja-  
                   K. Yamazaki /KLs+^c5  
Chapter 11 Electron Beam Induced Deposition 377 r.#"he_6!.  
                   K. Mitsuishi <o:|0=Swb  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 = k7}[!T  
                   P. A. Crozier and C. W. Hagen EI!e0V1!  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 OK\F  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 'pQ\BH  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 6>R|B?I%  
                  by Unconventional Lithographic Methods 471 d^W1;0  
                  R. C. Salvarezza and O. Azzaroni y>jP]LR4  
Chapter 15 Alternative Nanofabrication Approaches ,,o5hD0V9  
f                 or Non-CMOS Applications 499 b@ S.  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei *C"-$WU3o  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems wr{ [4$O  
                  (NEMS): Emerging Techniques 543 +#=l{_Z,ZJ  
                  K. L. Ekinci and J. Brugger )"4v0dv  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享