美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 6F@zCv"w  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations `Ev A\f  
                for Nanostructure Fabrication Using Scanning jl;kcGE  
                Probe Microscopy 1 HiQoRk  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo JZs|~@  
Chapter 2 Atomic Force Microscope Lithography 33 fR+Ov8PCq  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park $ /}:P  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, *37LN  
                Sensing, and Modification 65 7JxE|G  
                C. Santschi, J. Polesel-Maris, J. Brugger, L@)b%Q@a  
                and H. Heinzelmann +^/Nil  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered ~C}
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                Nano-Scale Structures and Devices 127 4RK.Il*d  
               R. Mehta, J. Lund, and B. A. Parviz uAW*5 `[  
Chapter 5 Nanofabrication Based on Self-Assembled  1m&!l6Jk  
               Alumina Templates 159 DQ}_9?3  
               S. Sen and N. A. Kouklin FBR$,j;Y  
Chapter 6 Nanowire Assembly and Integration 187 zF[3%qZE:T  
                Z. Gu and D. H. Gracias a)I=U[  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 WE+sFaKq-  
                 L. Tong and E. Mazur Qh)|FQ[s$r  
Chapter 8 Extreme Ultraviolet Lithography 235 )![f\!'PI  
                 H. Kinoshita ;J,,f1Vw  
Chapter 9 Electron Projection Lithography 285 Uq9,(tV`6g  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata [_g#x(=  
Chapter 10 Electron Beam Direct Writing 341 {{^Mr)]5K  
                   K. Yamazaki ?)A]q' O  
Chapter 11 Electron Beam Induced Deposition 377 :J=+;I(UI  
                   K. Mitsuishi L#t-KLJ  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 
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                   P. A. Crozier and C. W. Hagen DBj;P|L_  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 (hhdbf  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi X";QA":  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces qP7&LtU  
                  by Unconventional Lithographic Methods 471 :0J-ek.;  
                  R. C. Salvarezza and O. Azzaroni 0Zc*YdH  
Chapter 15 Alternative Nanofabrication Approaches fl pXVtsQ  
f                 or Non-CMOS Applications 499 x?k  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei afxj[;p!  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems "<cB73tY  
                  (NEMS): Emerging Techniques 543 +t7c&td\  
                  K. L. Ekinci and J. Brugger hO+O0=$}wN  

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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享