美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications F20-!b  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations Afhx`J1KO  
                for Nanostructure Fabrication Using Scanning la|l9N^,  
                Probe Microscopy 1 >8;%F<o2  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo Jd2Y)  
Chapter 2 Atomic Force Microscope Lithography 33 &`Z)5Ww  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park )0d".Q|v4  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, m:O2_%\l  
                Sensing, and Modification 65 {!Z_&i5  
                C. Santschi, J. Polesel-Maris, J. Brugger, PjZvLK@a9)  
                and H. Heinzelmann $hp?5KM  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered by<@Zwtf  
                Nano-Scale Structures and Devices 127 QR$sIu@%  
               R. Mehta, J. Lund, and B. A. Parviz *"sDaN0@R  
Chapter 5 Nanofabrication Based on Self-Assembled A?k,}~  
               Alumina Templates 159 9,>Y  
               S. Sen and N. A. Kouklin "(&`muIc  
Chapter 6 Nanowire Assembly and Integration 187 ayz1i:Q|  
                Z. Gu and D. H. Gracias WzbN=& C]h  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 M]TVaN$v#  
                 L. Tong and E. Mazur PlRs-%d  
Chapter 8 Extreme Ultraviolet Lithography 235 |F{E4mg(o  
                 H. Kinoshita sZBO_](S  
Chapter 9 Electron Projection Lithography 285 HwMsP$`q  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata IMrOPwjc  
Chapter 10 Electron Beam Direct Writing 341 2MzFSmhc"  
                   K. Yamazaki ?'m5)Z{  
Chapter 11 Electron Beam Induced Deposition 377 vUx$[/<  
                   K. Mitsuishi /M `y LI  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 E?D{/k,zZ  
                   P. A. Crozier and C. W. Hagen 7$P(1D4  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 B_jI!i{N%o  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi b=\3N3OX  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces zn$Ld,  
                  by Unconventional Lithographic Methods 471
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                  R. C. Salvarezza and O. Azzaroni rWKLxK4oU  
Chapter 15 Alternative Nanofabrication Approaches &n kGdHX/a  
f                 or Non-CMOS Applications 499 &-Er n/[  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei u`,R0=<
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Chapter 16 Nanofabrication of Nanoelectromechanical Systems 3zF7V:XH  
                  (NEMS): Emerging Techniques 543 Qh%vh;|^  
                  K. L. Ekinci and J. Brugger 3"
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享