美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications CfjVx  
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目录： Sv03="&  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations N2`u ]*"0  
                for Nanostructure Fabrication Using Scanning M2y"M,k4  
                Probe Microscopy 1 ZTP&*+d  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo \:91BQP c  
Chapter 2 Atomic Force Microscope Lithography 33 fAV=O%^  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park c>e~$b8  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, =j!Ruy1  
                Sensing, and Modification 65 /,2${$c!  
                C. Santschi, J. Polesel-Maris, J. Brugger, fm'Qifq^  
                and H. Heinzelmann %-~T;_.  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered }_o!fV  
                Nano-Scale Structures and Devices 127 cG I^IPI  
               R. Mehta, J. Lund, and B. A. Parviz oS_<;Fj  
Chapter 5 Nanofabrication Based on Self-Assembled ZYD3[" ~x  
               Alumina Templates 159 @@Vf"o+S  
               S. Sen and N. A. Kouklin 7eekTh, ?  
Chapter 6 Nanowire Assembly and Integration 187 i3 n0W1~  
                Z. Gu and D. H. Gracias ;COZH
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Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 QyX ?  
                 L. Tong and E. Mazur XxEKv=_bc  
Chapter 8 Extreme Ultraviolet Lithography 235 ]V
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                 H. Kinoshita QH_I<Y:n  
Chapter 9 Electron Projection Lithography 285 '74-rL:i  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata Qd$!?h  
Chapter 10 Electron Beam Direct Writing 341 B0}f,J\  
                   K. Yamazaki f.&Y_G3a<  
Chapter 11 Electron Beam Induced Deposition 377 Rw\S-z/  
                   K. Mitsuishi CGkCLd*s]  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 5KFd/9  
                   P. A. Crozier and C. W. Hagen 2u|}gZts  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 GS4 HYF  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi /|2#s%|-=  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces FUj4y 9X  
                  by Unconventional Lithographic Methods 471 , *A',  
                  R. C. Salvarezza and O. Azzaroni ONw;NaE,  
Chapter 15 Alternative Nanofabrication Approaches {JlW1;Jc7  
f                 or Non-CMOS Applications 499 Y l1sAf/  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei =D2x@ank[  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems aPMqJ#fIr  
                  (NEMS): Emerging Techniques 543 ZNvnVW<  
                  K. L. Ekinci and J. Brugger 0cm+:  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享