美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications HvU)GJ u b  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations *%.*vPJ  
                for Nanostructure Fabrication Using Scanning y+_U6rv[  
                Probe Microscopy 1 A}o1I1+  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo \hVFK6  
Chapter 2 Atomic Force Microscope Lithography 33 6\
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                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park !`o=2b=N  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, ~PH
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                Sensing, and Modification 65 f3O'lc3  
                C. Santschi, J. Polesel-Maris, J. Brugger, A.Njn(z?Lz  
                and H. Heinzelmann 'DPSM?]fA  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered ^B7Aam  
                Nano-Scale Structures and Devices 127 4-AmzU  
               R. Mehta, J. Lund, and B. A. Parviz u&:jQ:[  
Chapter 5 Nanofabrication Based on Self-Assembled YZd4% zF  
               Alumina Templates 159 !!AutkEg>  
               S. Sen and N. A. Kouklin /T0|<r!c  
Chapter 6 Nanowire Assembly and Integration 187 (]L=$u4  
                Z. Gu and D. H. Gracias p
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Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 4R.#=]F  
                 L. Tong and E. Mazur !nVuvsbv  
Chapter 8 Extreme Ultraviolet Lithography 235 H Zc;.jJ  
                 H. Kinoshita xK f+.6 wz  
Chapter 9 Electron Projection Lithography 285 Ogb!YF#e  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata V_:/#G]jeG  
Chapter 10 Electron Beam Direct Writing 341 vKxwv YDe  
                   K. Yamazaki RN;Tqq):  
Chapter 11 Electron Beam Induced Deposition 377 o_S8fHqjt  
                   K. Mitsuishi (,
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Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 FD8Hx\oF  
                   P. A. Crozier and C. W. Hagen %%#zO Z  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 JL1Whf  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi #Uo 9BM  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces %q@@0qenv  
                  by Unconventional Lithographic Methods 471 Lgy}Gm8u5  
                  R. C. Salvarezza and O. Azzaroni .Q7z<Q  
Chapter 15 Alternative Nanofabrication Approaches (_D#gr{S=  
f                 or Non-CMOS Applications 499 V@F~Cx  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei +aMPwTF:3  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems p ^Ruf?>  
                  (NEMS): Emerging Techniques 543 &( Z8G~h4  
                  K. L. Ekinci and J. Brugger ?%?@?W>s@  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享