美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications tmJgm5v  
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目录： A}5fCx.{  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations 1A<,TFg  
                for Nanostructure Fabrication Using Scanning o''wCr%  
                Probe Microscopy 1 ;%!B[+ut"  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo c</1  
Chapter 2 Atomic Force Microscope Lithography 33 ;%Hf)F  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park >cN~U
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Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, *7
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                Sensing, and Modification 65 /i_ @  
                C. Santschi, J. Polesel-Maris, J. Brugger, P0Z!?`e=M  
                and H. Heinzelmann /6+NU^  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered -#s [F S  
                Nano-Scale Structures and Devices 127 M4m$\~zf  
               R. Mehta, J. Lund, and B. A. Parviz 8VQ 24r  
Chapter 5 Nanofabrication Based on Self-Assembled yT8=l"-[G  
               Alumina Templates 159 Bs;|D  
               S. Sen and N. A. Kouklin tPfFqqT  
Chapter 6 Nanowire Assembly and Integration 187 =ll=)"O  
                Z. Gu and D. H. Gracias '5KeL3J;  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 e]Fp=*#  
                 L. Tong and E. Mazur Kw5Lhc1V  
Chapter 8 Extreme Ultraviolet Lithography 235 f)Xr!7  
                 H. Kinoshita IMGP
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Chapter 9 Electron Projection Lithography 285 6oD\-H  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata `ln1$  
Chapter 10 Electron Beam Direct Writing 341 ArK]0$T  
                   K. Yamazaki )|bC^{kH!l  
Chapter 11 Electron Beam Induced Deposition 377 z
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                   K. Mitsuishi 'gso'&Uaj  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 ut2~rRiK  
                   P. A. Crozier and C. W. Hagen G?c-79]U  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 k1 -~  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi qe$^q  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces #z'uRHx%=0  
                  by Unconventional Lithographic Methods 471 3)=c]@N0  
                  R. C. Salvarezza and O. Azzaroni %G3(,Qz  
Chapter 15 Alternative Nanofabrication Approaches I5m][~6.?  
f                 or Non-CMOS Applications 499 .TJEUK  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei mLk(y*  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems K(}AX+rIg  
                  (NEMS): Emerging Techniques 543 e8=YGx^o`  
                  K. L. Ekinci and J. Brugger 790-)\:CY  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享