美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications {P(IA2J'S  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations NcRY Ch  
                for Nanostructure Fabrication Using Scanning KG)Y{-Ao  
                Probe Microscopy 1 oQFpIX;\m  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo j =[Td  
Chapter 2 Atomic Force Microscope Lithography 33 4LKOBiEM  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park RVX-3FvP  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, dAohj QH:  
                Sensing, and Modification 65 N!^U{;X7/  
                C. Santschi, J. Polesel-Maris, J. Brugger, %q(n'^#Z.y  
                and H. Heinzelmann Qq^>7OU>Co  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered !)KX?i[Q  
                Nano-Scale Structures and Devices 127 M
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               R. Mehta, J. Lund, and B. A. Parviz :!J!l u  
Chapter 5 Nanofabrication Based on Self-Assembled e>y"V;Mj  
               Alumina Templates 159 7J7uHl`yq`  
               S. Sen and N. A. Kouklin W/xb[w9v  
Chapter 6 Nanowire Assembly and Integration 187 Fp|x,-  
                Z. Gu and D. H. Gracias qzsS"=5  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 KGzBK:  
                 L. Tong and E. Mazur a{,EX[~b  
Chapter 8 Extreme Ultraviolet Lithography 235 -0Y8/6](  
                 H. Kinoshita tb^3-ZUb  
Chapter 9 Electron Projection Lithography 285 L0_R2EA  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata PtwE[YDu  
Chapter 10 Electron Beam Direct Writing 341 X{<j%PdC  
                   K. Yamazaki \} P}H  
Chapter 11 Electron Beam Induced Deposition 377 sf@g $  
                   K. Mitsuishi Z#nj[r!l}  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 Ga"$_DyM  
                   P. A. Crozier and C. W. Hagen jvCk+n[  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 mS0*%[S {  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 7[ *,t  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces J*A<F'^F1  
                  by Unconventional Lithographic Methods 471 @ 4j#X  
                  R. C. Salvarezza and O. Azzaroni iVREkZ2SC  
Chapter 15 Alternative Nanofabrication Approaches %dKUB4  
f                 or Non-CMOS Applications 499 TBvv(_  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 7Oru{BQ">  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems mdtq-v  
                  (NEMS): Emerging Techniques 543 0ppZ~}&  
                  K. L. Ekinci and J. Brugger  J$v0  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享