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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
XA69t2J~F }^n"t>Z8 目录:
s!F8<:FRJD 0Uk;&a0s E(*CEW.V* Chapter 1 Atom, Molecule, and Nanocluster Manipulations
Nh4&3"g| for Nanostructure Fabrication Using Scanning
nx{X^oc8e Probe Microscopy 1
<]`|HJoy A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
/kO%aN Chapter 2 Atomic Force Microscope Lithography 33
9:E.Iy N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
z<.6jx@ Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
Jep/%cT$w Sensing, and Modification 65
W<~u0AyO
3 C. Santschi, J. Polesel-Maris, J. Brugger,
cy2K# and H. Heinzelmann
criNeKa Chapter 4 Using Biomolecules for Self-Assembly of Engineered
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b)J Nano-Scale Structures and Devices 127
o7v9xm+ R. Mehta, J. Lund, and B. A. Parviz
#%z@yg Chapter 5 Nanofabrication Based on Self-Assembled
5'wFZ=>vMt Alumina Templates 159
2jxh7\zE S. Sen and N. A. Kouklin
T{'oR .g, Chapter 6 Nanowire Assembly and Integration 187
-Ji uq Z. Gu and D. H. Gracias
qUQP.4Z9 5 Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
6\QsK96_ L. Tong and E. Mazur
+' .o Chapter 8 Extreme Ultraviolet Lithography 235
eFQz G+/ H. Kinoshita
wu}Zu Chapter 9 Electron Projection Lithography 285
iYr*0:M T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
j#H&~f Chapter 10 Electron Beam Direct Writing 341
Y)AHM0;g K. Yamazaki
*44E'Dxv Chapter 11 Electron Beam Induced Deposition 377
[F,s=,S'M K. Mitsuishi
E@Yq2FBpnn Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
'f7s*VKG P. A. Crozier and C. W. Hagen
&?9~e>.OS Chapter 13 Focused Ion Beams and Interaction with Solids 431
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CC/ T. Ishitani, T. Ohnishi, and T. Yaguchi
A_.}-dzF Chapter 14 Nano/Microstructuring of Ceramic Surfaces
=cx_3gCr{ by Unconventional Lithographic Methods 471
5J6~]J R. C. Salvarezza and O. Azzaroni
T&E'MB Chapter 15 Alternative Nanofabrication Approaches
r!p:73L8 f or Non-CMOS Applications 499
d}^hZ8k| C. V. Cojocaru, F. Cicoira, and F. Rosei
ofCN[u Chapter 16 Nanofabrication of Nanoelectromechanical Systems
XpT~]q} (NEMS): Emerging Techniques 543
Yjx4H K. L. Ekinci and J. Brugger
[O3)s] | &&sm7F% [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]