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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
N,w6 @Xoh@:j\ 目录:
R}Zaz3( Hd :vi %7 5tv*uz|fv Chapter 1 Atom, Molecule, and Nanocluster Manipulations
8TYh&n=r for Nanostructure Fabrication Using Scanning
HV!P]82Pa Probe Microscopy 1
6No.2Oo A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
ub 2'|CYw Chapter 2 Atomic Force Microscope Lithography 33
~6#mVP5sU) N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
fyUW;dj Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
^I/(9KP# Sensing, and Modification 65
cY} jPDH C. Santschi, J. Polesel-Maris, J. Brugger,
'tTlBf7# and H. Heinzelmann
[vtDtwL Chapter 4 Using Biomolecules for Self-Assembly of Engineered
#~j $J Nano-Scale Structures and Devices 127
>]}VD "\ R. Mehta, J. Lund, and B. A. Parviz
5%S5*c6BD Chapter 5 Nanofabrication Based on Self-Assembled
b5g^{bzwu Alumina Templates 159
F@/syX;bb5 S. Sen and N. A. Kouklin
8;=?F>]xn Chapter 6 Nanowire Assembly and Integration 187
&h[)nD Z. Gu and D. H. Gracias
W9cvxsox Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
L\Oxyi<{ L. Tong and E. Mazur
3>(~5 Chapter 8 Extreme Ultraviolet Lithography 235
-C^qN7Bz H. Kinoshita
R(Vd[EGY Chapter 9 Electron Projection Lithography 285
*QW.#y>"j T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
>ptI!\i} Chapter 10 Electron Beam Direct Writing 341
,S(_YS^m K. Yamazaki
:%Z)u:~': Chapter 11 Electron Beam Induced Deposition 377
#euOq K. Mitsuishi
;2 o{6 Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
$.DD^ "9 P. A. Crozier and C. W. Hagen
f`8fNt Chapter 13 Focused Ion Beams and Interaction with Solids 431
0jpyc T. Ishitani, T. Ohnishi, and T. Yaguchi
ivdPF dJ Chapter 14 Nano/Microstructuring of Ceramic Surfaces
,_,7cor by Unconventional Lithographic Methods 471
Kc9)Lzu+ R. C. Salvarezza and O. Azzaroni
FlS)m` Chapter 15 Alternative Nanofabrication Approaches
@TKQ_7BcB f or Non-CMOS Applications 499
?fs#K;w C. V. Cojocaru, F. Cicoira, and F. Rosei
AF{o=@ Chapter 16 Nanofabrication of Nanoelectromechanical Systems
17Q*
<iCs (NEMS): Emerging Techniques 543
UIQ=b;J9 K. L. Ekinci and J. Brugger
hy"p8j7_ jaThS!>v [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]