美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications ^yL6A1  
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目录： z~fZg6  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations ,<Zu4bww  
                for Nanostructure Fabrication Using Scanning O<[h  
                Probe Microscopy 1 xMsSZ{j%5  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo }-4@EC>  
Chapter 2 Atomic Force Microscope Lithography 33 Xo[j*<=0  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park z=%&?V
 
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, g^ .g9"  
                Sensing, and Modification 65 w*#B_6bG  
                C. Santschi, J. Polesel-Maris, J. Brugger, v%
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                and H. Heinzelmann r*_z<^d  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered WRrCrXP  
                Nano-Scale Structures and Devices 127 %EV\nwn6  
               R. Mehta, J. Lund, and B. A. Parviz #@%DY*w]v  
Chapter 5 Nanofabrication Based on Self-Assembled ^F\R
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               Alumina Templates 159 OD{()E?1B  
               S. Sen and N. A. Kouklin J,q6  
Chapter 6 Nanowire Assembly and Integration 187 R. :~e  
                Z. Gu and D. H. Gracias NN>E1d=  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 q9+`pj  
                 L. Tong and E. Mazur RBuerap  
Chapter 8 Extreme Ultraviolet Lithography 235 u*}[fQ`aF  
                 H. Kinoshita r:N =?X`N  
Chapter 9 Electron Projection Lithography 285 8k
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                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata ["O/%6b9+  
Chapter 10 Electron Beam Direct Writing 341 [l# 8}dy  
                   K. Yamazaki b^s978qn#  
Chapter 11 Electron Beam Induced Deposition 377 |z.x M>  
                   K. Mitsuishi 3T1t !q4/5  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 oW ! Z=;  
                   P. A. Crozier and C. W. Hagen Bk)E]Fk|  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 Lsu_f'p0  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi S:5vC{  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces omdoH?  
                  by Unconventional Lithographic Methods 471 80m<OW1  
                  R. C. Salvarezza and O. Azzaroni }`fFzb
  
Chapter 15 Alternative Nanofabrication Approaches =bKz$ _W  
f                 or Non-CMOS Applications 499  _"0,  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei oyw*Z_9~  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems )}!Z^ND*  
                  (NEMS): Emerging Techniques 543 ]F'o  
                  K. L. Ekinci and J. Brugger !V.2~V[^M  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享

3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

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