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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
L(X}37 [?(qhp! 目录:
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Mf "{d[V(lE" l{VJaZ $M Chapter 1 Atom, Molecule, and Nanocluster Manipulations
F=f9##Y?7M for Nanostructure Fabrication Using Scanning
K6@ %@v Probe Microscopy 1
jS5K:yx< A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
lE*.9T Chapter 2 Atomic Force Microscope Lithography 33
yVJ)JhV N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
tf1Y5P$ Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
Q8]S6,pt Sensing, and Modification 65
f9hH{(A C. Santschi, J. Polesel-Maris, J. Brugger,
AJ6O>Euq and H. Heinzelmann
@V+KL>Qw Chapter 4 Using Biomolecules for Self-Assembly of Engineered
;<%d^ Nano-Scale Structures and Devices 127
NH1ak(zHW R. Mehta, J. Lund, and B. A. Parviz
[|YJg]i- Chapter 5 Nanofabrication Based on Self-Assembled
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ehnH Alumina Templates 159
4 XGEw9`3 S. Sen and N. A. Kouklin
Nov
An+ Chapter 6 Nanowire Assembly and Integration 187
#vViEBVeN Z. Gu and D. H. Gracias
%WYveY Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
O<XNI(@ L. Tong and E. Mazur
?3i<^@? Chapter 8 Extreme Ultraviolet Lithography 235
akwS;|SZ H. Kinoshita
/)rv Ndn Chapter 9 Electron Projection Lithography 285
LrV|Y~ T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
H{_6e6`e. Chapter 10 Electron Beam Direct Writing 341
y@Td]6|f K. Yamazaki
-&QpQ7q1 Chapter 11 Electron Beam Induced Deposition 377
-NDB.~E^DJ K. Mitsuishi
cO-^#di Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
C.se/\PE P. A. Crozier and C. W. Hagen
0f;|0siTAm Chapter 13 Focused Ion Beams and Interaction with Solids 431
t,kai6UM T. Ishitani, T. Ohnishi, and T. Yaguchi
:K!L-*>A9 Chapter 14 Nano/Microstructuring of Ceramic Surfaces
KnK\X>: by Unconventional Lithographic Methods 471
b'RBel;W R. C. Salvarezza and O. Azzaroni
R]o2_r7N"} Chapter 15 Alternative Nanofabrication Approaches
lnV!Xuf f or Non-CMOS Applications 499
"2T* w~V&y C. V. Cojocaru, F. Cicoira, and F. Rosei
@^HZTuP2; Chapter 16 Nanofabrication of Nanoelectromechanical Systems
lW]&a"1$ (NEMS): Emerging Techniques 543
T3-/+4$0v K. L. Ekinci and J. Brugger
ETfoL.d$( VZ2CWE)t [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]