美“
纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
DuQ:82 3b =7-kD3 目录:
qX[C% e5ww~%, eo"XHP7ja Chapter 1 Atom, Molecule, and Nanocluster Manipulations
TQ {8 ee{ for Nanostructure Fabrication Using Scanning
]<fZW"W<q Probe Microscopy 1
f,-'eW/j A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
,
d4i0;2}+ Chapter 2 Atomic Force Microscope Lithography 33
) I.uqG N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
q|
*nd!y' Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
9<Th: t|w Sensing, and Modification 65
p1ER<_fp C. Santschi, J. Polesel-Maris, J. Brugger,
itO1ROmu and H. Heinzelmann
M|$A)D1 Chapter 4 Using Biomolecules for Self-Assembly of Engineered
<&t[E0mU Nano-Scale Structures and Devices 127
yN}<l% R. Mehta, J. Lund, and B. A. Parviz
=G rg Chapter 5 Nanofabrication Based on Self-Assembled
xtXK3[s Alumina Templates 159
V5I xZn% S. Sen and N. A. Kouklin
x1#6~283 Chapter 6 Nanowire Assembly and Integration 187
]RW*3X Z. Gu and D. H. Gracias
rN {5^+w Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
xz/G$7q7 L. Tong and E. Mazur
,=}+.ax Chapter 8 Extreme Ultraviolet Lithography 235
C[JPohm H. Kinoshita
X=JAyxY Chapter 9 Electron Projection Lithography 285
\'nE{ T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
~^eC?F( Chapter 10 Electron Beam Direct Writing 341
vRO`hGH K. Yamazaki
TrHUM4 Chapter 11 Electron Beam Induced Deposition 377
xSjs+Y;Mu K. Mitsuishi
j 2Jew Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
o6:p2W P. A. Crozier and C. W. Hagen
~eGtoEY Chapter 13 Focused Ion Beams and Interaction with Solids 431
pkA(\0E8 T. Ishitani, T. Ohnishi, and T. Yaguchi
!=+hU/e Chapter 14 Nano/Microstructuring of Ceramic Surfaces
\88IFE by Unconventional Lithographic Methods 471
`XbV*{7 R. C. Salvarezza and O. Azzaroni
EPeV1$ Chapter 15 Alternative Nanofabrication Approaches
ns8I_H f or Non-CMOS Applications 499
FBI^}^#_ C. V. Cojocaru, F. Cicoira, and F. Rosei
^eqq|(<K Chapter 16 Nanofabrication of Nanoelectromechanical Systems
wQ9fPOm (NEMS): Emerging Techniques 543
]<E\J+5K K. L. Ekinci and J. Brugger
t*!Q9GC_ Gh{vExH@5( [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]