美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications XUT\nN-N  
QcQ|,lA.HI  
目录： @V-CG!  
b511qc"i>M  
dfq5P!'  
Chapter 1 Atom, Molecule, and Nanocluster Manipulations $T0|zPK5  
                for Nanostructure Fabrication Using Scanning X_eV<]zA+  
                Probe Microscopy 1 pf`li]j'V  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo [0e]zyB+  
Chapter 2 Atomic Force Microscope Lithography 33 Lsozl<@  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 3,B[%!3d  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, ;3_Q7;y  
                Sensing, and Modification 65 T't^pO-`  
                C. Santschi, J. Polesel-Maris, J. Brugger, l9.wMs*`X  
                and H. Heinzelmann 7iKbd  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered ?Xo9,4V1  
                Nano-Scale Structures and Devices 127 &WHEP
dD  
               R. Mehta, J. Lund, and B. A. Parviz =;$&:Zjy/%  
Chapter 5 Nanofabrication Based on Self-Assembled ;mb 6i_  
               Alumina Templates 159 f i!wrvO  
               S. Sen and N. A. Kouklin !J'xk  
Chapter 6 Nanowire Assembly and Integration 187 -}juj;IVv  
                Z. Gu and D. H. Gracias {w^flizY  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 ,O(XNA(C  
                 L. Tong and E. Mazur <s#}`R.#2  
Chapter 8 Extreme Ultraviolet Lithography 235 (<.1o_Q-LU  
                 H. Kinoshita J:mOg95<  
Chapter 9 Electron Projection Lithography 285 MJXm7<(  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata #PA"l`"  
Chapter 10 Electron Beam Direct Writing 341 Aq|LeH  
                   K. Yamazaki 5J&n<M0G1  
Chapter 11 Electron Beam Induced Deposition 377 ]@ [=FK^  
                   K. Mitsuishi {hRAR8  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 hoeTJ/;dm  
                   P. A. Crozier and C. W. Hagen gi@+27;  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 LZ ID|
-  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 4!gyFi6$  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces nw5#/5xw  
                  by Unconventional Lithographic Methods 471 %NS]z;G  
                  R. C. Salvarezza and O. Azzaroni ,?#-1uIGL>  
Chapter 15 Alternative Nanofabrication Approaches m9xu$z|e  
f                 or Non-CMOS Applications 499 9au)K!hN  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 4'rk3nT8  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems 9Jk(ID'c  
                  (NEMS): Emerging Techniques 543 [bT@Y:X@`  
                  K. L. Ekinci and J. Brugger ohM'Fx"q  
Cm;N5i  

一直想学习下纳米制造的工艺和理论，谢谢楼主分享

3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

附件11-13

附件6-10