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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
pD!j#suMA J|F!$m{ 目录:
`An p;el @?jbah# $:yIe.F Chapter 1 Atom, Molecule, and Nanocluster Manipulations
V|TD+7.`QB for Nanostructure Fabrication Using Scanning
S5:&_&R8[ Probe Microscopy 1
Nt;1&dwUb A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
1*e7NJ/., Chapter 2 Atomic Force Microscope Lithography 33
!ALq?u N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
di(H-=9G62 Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
[ahwJ F#r Sensing, and Modification 65
yFn~rv|&G C. Santschi, J. Polesel-Maris, J. Brugger,
+,g!xv4Q and H. Heinzelmann
k(M"k!M Chapter 4 Using Biomolecules for Self-Assembly of Engineered
wv`ar>qVL Nano-Scale Structures and Devices 127
MJ$.ST R. Mehta, J. Lund, and B. A. Parviz
[%P[ x]- Chapter 5 Nanofabrication Based on Self-Assembled
nly}ly Q/ Alumina Templates 159
wA"d?x S. Sen and N. A. Kouklin
c_>AbF{ Chapter 6 Nanowire Assembly and Integration 187
III:jhh Z. Gu and D. H. Gracias
(! 8y~n1 Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
P @J)S ? L. Tong and E. Mazur
H]W'mm Chapter 8 Extreme Ultraviolet Lithography 235
>oN Wf H. Kinoshita
|&@`~OBa Chapter 9 Electron Projection Lithography 285
G^cMY$?99 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
]0O3kiVQ Chapter 10 Electron Beam Direct Writing 341
!xBJJ/K+| K. Yamazaki
*Z\AO'h=Z Chapter 11 Electron Beam Induced Deposition 377
lWH#/5`h K. Mitsuishi
vL;>A]oM2 Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
B873UN P. A. Crozier and C. W. Hagen
,c0t#KgQ. Chapter 13 Focused Ion Beams and Interaction with Solids 431
bPif"dhHe T. Ishitani, T. Ohnishi, and T. Yaguchi
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Chapter 14 Nano/Microstructuring of Ceramic Surfaces
?p/}eRgi by Unconventional Lithographic Methods 471
DAg* R. C. Salvarezza and O. Azzaroni
Pe-rwM Chapter 15 Alternative Nanofabrication Approaches
cq 5^7. f or Non-CMOS Applications 499
W]Nc6B*gI C. V. Cojocaru, F. Cicoira, and F. Rosei
;" D~F Chapter 16 Nanofabrication of Nanoelectromechanical Systems
7SN61)[m (NEMS): Emerging Techniques 543
E^gN]Z"O K. L. Ekinci and J. Brugger
*2}f $8 $BT[fJ'k [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]