美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications R]3j6
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目录： ~ +h4i'  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations %<fs \J^k  
                for Nanostructure Fabrication Using Scanning 3!{Tw6A8(  
                Probe Microscopy 1 oX7_v_:J\R  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo xxA^A  
Chapter 2 Atomic Force Microscope Lithography 33 3^5h:OaT  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park 6-FM<@H{  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, WtO@Kf:3GH  
                Sensing, and Modification 65 FmSE]et  
                C. Santschi, J. Polesel-Maris, J. Brugger,  \>||  
                and H. Heinzelmann y?U@F/^}N  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered ae" o|Q  
                Nano-Scale Structures and Devices 127 @WNqD*)1  
               R. Mehta, J. Lund, and B. A. Parviz n|Ts:>`V  
Chapter 5 Nanofabrication Based on Self-Assembled r+k&W  
               Alumina Templates 159 '2 Y8  
               S. Sen and N. A. Kouklin ) ]DqK<-  
Chapter 6 Nanowire Assembly and Integration 187 ESU
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                Z. Gu and D. H. Gracias Rh#`AM`)j  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 9WI5\`*"  
                 L. Tong and E. Mazur ;tQ(l%!  
Chapter 8 Extreme Ultraviolet Lithography 235 a~?B/ g&_  
                 H. Kinoshita p=3t!3  
Chapter 9 Electron Projection Lithography 285 R+z'6&/ =I  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata Kj)sL0  
Chapter 10 Electron Beam Direct Writing 341 Mdq|:^px  
                   K. Yamazaki #+i:s92],  
Chapter 11 Electron Beam Induced Deposition 377 6lT< lzT  
                   K. Mitsuishi Jg)( F|>o  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 $0vWC#.A]  
                   P. A. Crozier and C. W. Hagen %!eRR  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 g/}d> 6  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi hQ(^;QcSu  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces mG$N%
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                  by Unconventional Lithographic Methods 471 .)=*Yr M  
                  R. C. Salvarezza and O. Azzaroni N;,zPWa  
Chapter 15 Alternative Nanofabrication Approaches
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f                 or Non-CMOS Applications 499 y4l-o  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei
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Chapter 16 Nanofabrication of Nanoelectromechanical Systems V'tR \b  
                  (NEMS): Emerging Techniques 543 #!E`%' s]  
                  K. L. Ekinci and J. Brugger QO0@Ax\b  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享