美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications CAX|[  
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目录： .FtW$Y~y  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations aP>%iRk'J!  
                for Nanostructure Fabrication Using Scanning @M?;~M?B]J  
                Probe Microscopy 1 WIa4!\Ky!  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo ^Z$%OM,  
Chapter 2 Atomic Force Microscope Lithography 33 h%8[];*DpN  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park %J5zfNe)&  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, KtG|m'\D  
                Sensing, and Modification 65 nNSq6 Cj  
                C. Santschi, J. Polesel-Maris, J. Brugger, \/xWsbG\  
                and H. Heinzelmann PeEC|&x  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered Pe6MDWR  
                Nano-Scale Structures and Devices 127 4nN%5c~=  
               R. Mehta, J. Lund, and B. A. Parviz 4@&8jZ)a  
Chapter 5 Nanofabrication Based on Self-Assembled E=_M=5]  
               Alumina Templates 159 1 `hj]@.]  
               S. Sen and N. A. Kouklin $8k
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Chapter 6 Nanowire Assembly and Integration 187 A36dj  
                Z. Gu and D. H. Gracias ps\A\aggML  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 U7bbJ>U_|  
                 L. Tong and E. Mazur $Y5R^Y  
Chapter 8 Extreme Ultraviolet Lithography 235 p-POg%|&<  
                 H. Kinoshita }te\) Yk.N  
Chapter 9 Electron Projection Lithography 285 a^hDxeG  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata SzR7:U  
Chapter 10 Electron Beam Direct Writing 341 MDZ,a0?4t  
                   K. Yamazaki kAsYh4[  
Chapter 11 Electron Beam Induced Deposition 377 <5%x3e"7u  
                   K. Mitsuishi T>7$<ulm  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 PHU#$LG  
                   P. A. Crozier and C. W. Hagen dMK|l   
Chapter 13 Focused Ion Beams and Interaction with Solids 431 :P1 J>dcG  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi JL5 )  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces %SaC[9=?  
                  by Unconventional Lithographic Methods 471 OSY$qL2  
                  R. C. Salvarezza and O. Azzaroni pTT7#b(t  
Chapter 15 Alternative Nanofabrication Approaches fjVGps$j  
f                 or Non-CMOS Applications 499 hK5BOq!y  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei iG()"^G  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems uH!uSB2  
                  (NEMS): Emerging Techniques 543 DgQw`D)+  
                  K. L. Ekinci and J. Brugger *p0n{F9  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享