美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications g#%Egb1  
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目录： z'&tmje[?  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations 6L<QKE=  
                for Nanostructure Fabrication Using Scanning 'Px}#f0IR  
                Probe Microscopy 1 puAjAvIax  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo Mc~L%5  
Chapter 2 Atomic Force Microscope Lithography 33 {,B.OM)J  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park B:96E&  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, kB9@ &t+  
                Sensing, and Modification 65 NjbIt=y  
                C. Santschi, J. Polesel-Maris, J. Brugger, MxDqp;  
                and H. Heinzelmann L/?jtF:o  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered 3Z}v%=5 "  
                Nano-Scale Structures and Devices 127 d7G DIYH<  
               R. Mehta, J. Lund, and B. A. Parviz s`en8%  
Chapter 5 Nanofabrication Based on Self-Assembled *?pnTQs^  
               Alumina Templates 159 = N^Ec[u(l  
               S. Sen and N. A. Kouklin "*LQr~k~}  
Chapter 6 Nanowire Assembly and Integration 187 (#BOcx5J]  
                Z. Gu and D. H. Gracias &$
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Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 Qp9QSyMs}  
                 L. Tong and E. Mazur BtrMv6  
Chapter 8 Extreme Ultraviolet Lithography 235 Rn*@)5  
                 H. Kinoshita !u;gGgQF  
Chapter 9 Electron Projection Lithography 285 ~ycWcZi>  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata mu2|%$C;$  
Chapter 10 Electron Beam Direct Writing 341 @<3kj R?j  
                   K. Yamazaki &2nICAN[  
Chapter 11 Electron Beam Induced Deposition 377 ! u@JH`  
                   K. Mitsuishi 2^%O%Pc  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 NiYT%K%  
                   P. A. Crozier and C. W. Hagen E|A~T7G=  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 #&b<D2d  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 5+2qx)FZ  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces &b'{3o_KN  
                  by Unconventional Lithographic Methods 471 N/eus"O;  
                  R. C. Salvarezza and O. Azzaroni "E@A~<RKP  
Chapter 15 Alternative Nanofabrication Approaches Lvrflx*Q  
f                 or Non-CMOS Applications 499 hka%!W5  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei vVZ+u4y  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems ?{P$|:ha  
                  (NEMS): Emerging Techniques 543 :31?Z(fQ  
                  K. L. Ekinci and J. Brugger {e5-  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享

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