美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 3_ko=& B$  
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目录： O9_SVX
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations >Ft)v  
                for Nanostructure Fabrication Using Scanning ;Pe=cc"@  
                Probe Microscopy 1 [I`:%y  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo jGe%'AN\  
Chapter 2 Atomic Force Microscope Lithography 33 z['2  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park }/MmuPp  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, $+$4W\-=X  
                Sensing, and Modification 65 pKaU [1x?%  
                C. Santschi, J. Polesel-Maris, J. Brugger, 'PWA  
                and H. Heinzelmann H:cAORLB  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered ~]SCf@
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                Nano-Scale Structures and Devices 127  Lr0:yo  
               R. Mehta, J. Lund, and B. A. Parviz vH/RP  
Chapter 5 Nanofabrication Based on Self-Assembled yX/{eX5dr  
               Alumina Templates 159 O~mQ\GlW  
               S. Sen and N. A. Kouklin z! :0%qu  
Chapter 6 Nanowire Assembly and Integration 187 LZ RP}|  
                Z. Gu and D. H. Gracias ch33+~Nn  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 z `jLKPP!=  
                 L. Tong and E. Mazur ^0&jy:{  
Chapter 8 Extreme Ultraviolet Lithography 235 oSIP{lfp2Q  
                 H. Kinoshita
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Chapter 9 Electron Projection Lithography 285 7[I +1  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata JJ9R, 8n6  
Chapter 10 Electron Beam Direct Writing 341 )YW"Zo8~!1  
                   K. Yamazaki a[p$e?gka  
Chapter 11 Electron Beam Induced Deposition 377 e8S4=W  
                   K. Mitsuishi AkCy C1  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 -F_cBu81V  
                   P. A. Crozier and C. W. Hagen C-XJe~  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 {.ypZ8JU  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi m|3Q'  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces Z<,Hz+  
                  by Unconventional Lithographic Methods 471 aJ}hlM>  
                  R. C. Salvarezza and O. Azzaroni i|m8#*Hd  
Chapter 15 Alternative Nanofabrication Approaches kPoz&e_@  
f                 or Non-CMOS Applications 499 WyRSy-{U(}  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei b[<L l%K  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems vo(:g6$  
                  (NEMS): Emerging Techniques 543 L7R!,  
                  K. L. Ekinci and J. Brugger sDAP'&  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享