美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications [6qa"I
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目录： 'X{cDdS^  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations 9@C3jZ+9`H  
                for Nanostructure Fabrication Using Scanning _#9:cH*  
                Probe Microscopy 1 9"R]"v3BA  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo 5=Mm=HyI2  
Chapter 2 Atomic Force Microscope Lithography 33 DHGv< F@  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park {s|rk  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, 13Ga #  
                Sensing, and Modification 65 cs`/^2Vf"#  
                C. Santschi, J. Polesel-Maris, J. Brugger, W<TW6_*e  
                and H. Heinzelmann 1(M0C[P  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered j~V@0z.  
                Nano-Scale Structures and Devices 127 _lb ^  
               R. Mehta, J. Lund, and B. A. Parviz -yeQQ4b  
Chapter 5 Nanofabrication Based on Self-Assembled bJe*J\){  
               Alumina Templates 159 *=0Wh@?0  
               S. Sen and N. A. Kouklin "s2?cQv{#  
Chapter 6 Nanowire Assembly and Integration 187 PRl\W:_t  
                Z. Gu and D. H. Gracias "xZ]i)  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 PaV[{CD  
                 L. Tong and E. Mazur @lAOi1m,,  
Chapter 8 Extreme Ultraviolet Lithography 235 =If% m9  
                 H. Kinoshita MK[l*=\s  
Chapter 9 Electron Projection Lithography 285 4NbX!"0  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata )eGGA6G  
Chapter 10 Electron Beam Direct Writing 341 bv0B  
                   K. Yamazaki n1o/-UY  
Chapter 11 Electron Beam Induced Deposition 377 xBU\$ToC  
                   K. Mitsuishi \(.&E`r  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 g^8dDY[%  
                   P. A. Crozier and C. W. Hagen ,Ihuo5>/z  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 C<fWDLwYqV  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi cO<]%L0  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces sl|s#+Z  
                  by Unconventional Lithographic Methods 471 %@$h?HP  
                  R. C. Salvarezza and O. Azzaroni Dqe)8 r  
Chapter 15 Alternative Nanofabrication Approaches &/=>:ay+#  
f                 or Non-CMOS Applications 499 UT [7 J  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei MLY19;e  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems R B.j@*  
                  (NEMS): Emerging Techniques 543 (}O)pqZ>  
                  K. L. Ekinci and J. Brugger hSaS2RLF  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享