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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
60)iw4<wf j$7Xs" 目录:
fVM`-8ZTq ~(@ E`s&{ &V<W>Y>|l* Chapter 1 Atom, Molecule, and Nanocluster Manipulations
6Kj'ZyVL for Nanostructure Fabrication Using Scanning
Cua%1]"4w Probe Microscopy 1
U7DCx=B A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
;_(PVo Chapter 2 Atomic Force Microscope Lithography 33
ad_`x N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
\xUe/= Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
<uc1D/~^: Sensing, and Modification 65
ejO}t:}P C. Santschi, J. Polesel-Maris, J. Brugger,
n?:= and H. Heinzelmann
gn{=%`[ Chapter 4 Using Biomolecules for Self-Assembly of Engineered
\G2B?>E; Nano-Scale Structures and Devices 127
Go&D[# R. Mehta, J. Lund, and B. A. Parviz
7'-j%!#w Chapter 5 Nanofabrication Based on Self-Assembled
,\aUq|~ Alumina Templates 159
@Fpb-Qd" S. Sen and N. A. Kouklin
: ~ A%# Chapter 6 Nanowire Assembly and Integration 187
62>zt2= Z. Gu and D. H. Gracias
Zv_jy@k Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
p<v.Q L. Tong and E. Mazur
~kCwJ<E Chapter 8 Extreme Ultraviolet Lithography 235
0liR H. Kinoshita
U5]pi+r Chapter 9 Electron Projection Lithography 285
m"9XT)N T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
8V-\e?&^ Chapter 10 Electron Beam Direct Writing 341
2nFy`|aA% K. Yamazaki
fN
"tA Chapter 11 Electron Beam Induced Deposition 377
cM_Fp K. Mitsuishi
oQ7]=| Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
gLSA!#[h P. A. Crozier and C. W. Hagen
6st^4S5 Chapter 13 Focused Ion Beams and Interaction with Solids 431
L@^~N$G&u T. Ishitani, T. Ohnishi, and T. Yaguchi
f):~8_0b Chapter 14 Nano/Microstructuring of Ceramic Surfaces
ItX5JV) by Unconventional Lithographic Methods 471
$oLU; q% R. C. Salvarezza and O. Azzaroni
?QA\G6i4 Chapter 15 Alternative Nanofabrication Approaches
yxBUj*3 f or Non-CMOS Applications 499
^MmC$U^n C. V. Cojocaru, F. Cicoira, and F. Rosei
do-c1;M Chapter 16 Nanofabrication of Nanoelectromechanical Systems
?v-1zCls (NEMS): Emerging Techniques 543
==cd>03() K. L. Ekinci and J. Brugger
xc?}TPpt {FI\~q [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]