美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 2P\k;T(  
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目录： BR&T,x/d  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations RF3?q6j ,  
                for Nanostructure Fabrication Using Scanning 7D'-^#S5  
                Probe Microscopy 1 'XW[uK]w)  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo -,xCUG<g  
Chapter 2 Atomic Force Microscope Lithography 33 H~Z$pk%  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park y{&k`H  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, 4%!
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                Sensing, and Modification 65 :r4]8X-
 
                C. Santschi, J. Polesel-Maris, J. Brugger, %>,B1nt
 
                and H. Heinzelmann #Z;6f{yWf  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered 8H2zMIB  
                Nano-Scale Structures and Devices 127 XKp$v']u  
               R. Mehta, J. Lund, and B. A. Parviz K4T#8K]aZF  
Chapter 5 Nanofabrication Based on Self-Assembled oJ\)-qSf  
               Alumina Templates 159 TcB^Sctf  
               S. Sen and N. A. Kouklin @|I:A  
Chapter 6 Nanowire Assembly and Integration 187 V[9#+l~#  
                Z. Gu and D. H. Gracias /"~ D(bw0=  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 {;:QY1QT  
                 L. Tong and E. Mazur \R"}=7  
Chapter 8 Extreme Ultraviolet Lithography 235 L >* F8|g  
                 H. Kinoshita MHF31/g\  
Chapter 9 Electron Projection Lithography 285 T >pz/7gb  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata j[E
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Chapter 10 Electron Beam Direct Writing 341 cL+--$L  
                   K. Yamazaki *[ ' n8Z  
Chapter 11 Electron Beam Induced Deposition 377 >Xz=E0;^Ua  
                   K. Mitsuishi bxxazsj^  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 ]lBe   
                   P. A. Crozier and C. W. Hagen 'eM90I%(  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 Z)V m,n
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                    T. Ishitani, T. Ohnishi, and T. Yaguchi FI.Ae/(U  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 0<g;g%   
                  by Unconventional Lithographic Methods 471 $x5,Oen  
                  R. C. Salvarezza and O. Azzaroni 4Sj;38F .1  
Chapter 15 Alternative Nanofabrication Approaches O"'.n5>:`  
f                 or Non-CMOS Applications 499 f82$_1s^  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei |6qxRWT"  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems R,3E_me"}  
                  (NEMS): Emerging Techniques 543 @ve4rc/LI  
                  K. L. Ekinci and J. Brugger M lv  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享