美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
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目录： r8PXdNg  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations iCA!=%M@D  
                for Nanostructure Fabrication Using Scanning B_;W!  
                Probe Microscopy 1 P_:A%T  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo {O\>"2}m'f  
Chapter 2 Atomic Force Microscope Lithography 33 "&jWC  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park ziFg+i%
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Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, N^,@s"g  
                Sensing, and Modification 65 #is1y3yh  
                C. Santschi, J. Polesel-Maris, J. Brugger, B+e$S%HV  
                and H. Heinzelmann v9Kx`{1L  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered Z+jgFl 4  
                Nano-Scale Structures and Devices 127 ?_
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               R. Mehta, J. Lund, and B. A. Parviz i1ph{;C  
Chapter 5 Nanofabrication Based on Self-Assembled z'cK,psq(  
               Alumina Templates 159 h@nNm30i  
               S. Sen and N. A. Kouklin +(>!nsf  
Chapter 6 Nanowire Assembly and Integration 187 j@OGl&'^-  
                Z. Gu and D. H. Gracias hD OEJ  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 k+*DPo@)
 
                 L. Tong and E. Mazur FmU>q)  
Chapter 8 Extreme Ultraviolet Lithography 235 e_Cns
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                 H. Kinoshita rL+K Sb  
Chapter 9 Electron Projection Lithography 285 }(}+I}&~  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata x,kZ>^]&b  
Chapter 10 Electron Beam Direct Writing 341 {+Rf?'JZH  
                   K. Yamazaki Rg/*)SK
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Chapter 11 Electron Beam Induced Deposition 377 o+U]=q*|)$  
                   K. Mitsuishi u_0&`zq  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 yc|j]?  
                   P. A. Crozier and C. W. Hagen 7
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Chapter 13 Focused Ion Beams and Interaction with Solids 431 [Xy^M3
  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi Q~/TqG U  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces $s]c'D)  
                  by Unconventional Lithographic Methods 471 RS`]>K3t  
                  R. C. Salvarezza and O. Azzaroni l=jfgsj
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Chapter 15 Alternative Nanofabrication Approaches %m\dNUz4g  
f                 or Non-CMOS Applications 499 \Qp #utC0s  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei l.tNq$3pS  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems yn;h.m[):  
                  (NEMS): Emerging Techniques 543 g.CUo:c  
                  K. L. Ekinci and J. Brugger !E\xn^  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享