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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
oIduxbAp {$wjO7Glp 目录:
1#ft#-g} ^Gqt+K% P3=W|81e Chapter 1 Atom, Molecule, and Nanocluster Manipulations
SF>c\eTtx for Nanostructure Fabrication Using Scanning
pNKhc#-w Probe Microscopy 1
}3OKC2K~ A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
f>N!wgo[ Chapter 2 Atomic Force Microscope Lithography 33
3 yB!M N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
`nZ )> Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
d%o&+l# Sensing, and Modification 65
;<(W% _ C. Santschi, J. Polesel-Maris, J. Brugger,
zc;|fHW~O and H. Heinzelmann
CW,Wx: Y Chapter 4 Using Biomolecules for Self-Assembly of Engineered
/so8WRu. Nano-Scale Structures and Devices 127
(w}H]LQ R. Mehta, J. Lund, and B. A. Parviz
FgB&b Chapter 5 Nanofabrication Based on Self-Assembled
%'X[^W Alumina Templates 159
PEc=\? S. Sen and N. A. Kouklin
j'HZ\_ Chapter 6 Nanowire Assembly and Integration 187
-}KC=,]vh Z. Gu and D. H. Gracias
FW21 U< Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
\Hn>oonph L. Tong and E. Mazur
xo7Kn+ Kl Chapter 8 Extreme Ultraviolet Lithography 235
3 U7*>H H. Kinoshita
_Nqt21sL Chapter 9 Electron Projection Lithography 285
ZOZ+ Y\uU T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
DF*:_B) Chapter 10 Electron Beam Direct Writing 341
Bi
@2 K. Yamazaki
[O?z@)dx Chapter 11 Electron Beam Induced Deposition 377
T Kg aV;92 K. Mitsuishi
XBp? w Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
-De9_0#R P. A. Crozier and C. W. Hagen
U
G~b a Chapter 13 Focused Ion Beams and Interaction with Solids 431
LdL/399< T. Ishitani, T. Ohnishi, and T. Yaguchi
Pc
NkAo Chapter 14 Nano/Microstructuring of Ceramic Surfaces
{/
BT9|LI by Unconventional Lithographic Methods 471
6jC`8l: R. C. Salvarezza and O. Azzaroni
<gQIq{B? Chapter 15 Alternative Nanofabrication Approaches
RsY3V=u f or Non-CMOS Applications 499
!'cl"\h C. V. Cojocaru, F. Cicoira, and F. Rosei
Z2'Bk2 L Chapter 16 Nanofabrication of Nanoelectromechanical Systems
@tZ&2RY1 (NEMS): Emerging Techniques 543
(q(~de K. L. Ekinci and J. Brugger
.O0+H+ 4UW_Do [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]