美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications Y{Ap80'\6  
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目录： ^<V9'Ut  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations lHBI  
                for Nanostructure Fabrication Using Scanning a,'Cyv">  
                Probe Microscopy 1 90 {tIX  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo T)u4S[ &  
Chapter 2 Atomic Force Microscope Lithography 33 2iXoj&3e  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park :,]S}R  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, /dHs &SU,  
                Sensing, and Modification 65 vM0_>1nN  
                C. Santschi, J. Polesel-Maris, J. Brugger, dK?);*w]  
                and H. Heinzelmann u,i]a#K  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered f|0lj   
                Nano-Scale Structures and Devices 127 8q_0,>w%  
               R. Mehta, J. Lund, and B. A. Parviz H9"=  p  
Chapter 5 Nanofabrication Based on Self-Assembled Y'm=etE  
               Alumina Templates 159 \&|CM8A  
               S. Sen and N. A. Kouklin &a~=
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Chapter 6 Nanowire Assembly and Integration 187 Zy$Lrr!  
                Z. Gu and D. H. Gracias c;!g  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 P@ypk^v  
                 L. Tong and E. Mazur ;i)KHj'  
Chapter 8 Extreme Ultraviolet Lithography 235 4_Rdp`x#J  
                 H. Kinoshita ~@c-*  
Chapter 9 Electron Projection Lithography 285 U^#?&u  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata XSD%
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Chapter 10 Electron Beam Direct Writing 341 >S&U.  
                   K. Yamazaki #a}N"*P  
Chapter 11 Electron Beam Induced Deposition 377 n E:'Zxj  
                   K. Mitsuishi R8sck)k'}  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 `q?RF+  
                   P. A. Crozier and C. W. Hagen O8RzUg&  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 a|x8=H  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi 8GB]95JWwp  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces =:K@zlO:  
                  by Unconventional Lithographic Methods 471 N=fz/CD)I  
                  R. C. Salvarezza and O. Azzaroni d.}}s$Q  
Chapter 15 Alternative Nanofabrication Approaches mUwUs~PjA  
f                 or Non-CMOS Applications 499 h)B!LAr  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 3ut_Bt\  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems mCk5B*Jy  
                  (NEMS): Emerging Techniques 543 JLUms  
                  K. L. Ekinci and J. Brugger rc~Y=m
 
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享