美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications zUJPINDb  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations h.aXW]]}(P  
                for Nanostructure Fabrication Using Scanning cb_nlG!  
                Probe Microscopy 1 R|!4k
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                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo oMF[<Xf  
Chapter 2 Atomic Force Microscope Lithography 33 |Q#CQz  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park fZ  pUnc  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, ]"U/3dL5  
                Sensing, and Modification 65 l gTw>r   
                C. Santschi, J. Polesel-Maris, J. Brugger, uSNlI78D  
                and H. Heinzelmann DbH'Qs?z  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered S| l%JM^  
                Nano-Scale Structures and Devices 127 -KiI&Q  
               R. Mehta, J. Lund, and B. A. Parviz kC0^2./p  
Chapter 5 Nanofabrication Based on Self-Assembled ^xF-IA#ZeB  
               Alumina Templates 159 eu?DSad  
               S. Sen and N. A. Kouklin 8>ODtKI*  
Chapter 6 Nanowire Assembly and Integration 187 v cb}Gk  
                Z. Gu and D. H. Gracias jGOE CKP  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 \Oa11c`6  
                 L. Tong and E. Mazur nbSu|sX~r5  
Chapter 8 Extreme Ultraviolet Lithography 235 Z(o]8*;Ai  
                 H. Kinoshita VKHzGfv  
Chapter 9 Electron Projection Lithography 285 lAZBlO  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata b@)nB  
Chapter 10 Electron Beam Direct Writing 341 cK1RmL"3  
                   K. Yamazaki d{RMX<;G  
Chapter 11 Electron Beam Induced Deposition 377 :X#'ELo|  
                   K. Mitsuishi <l^#FH  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 &uG@I=}TIY  
                   P. A. Crozier and C. W. Hagen 5@{~830  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 ;%$wA5"2M  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi `'/1Ij+  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces uE,j$d  
                  by Unconventional Lithographic Methods 471 ?bl9e&
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                  R. C. Salvarezza and O. Azzaroni  uE3xzF  
Chapter 15 Alternative Nanofabrication Approaches qJEtB;J'  
f                 or Non-CMOS Applications 499 8jU6N*p/  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei ZTK)N  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems r[RO"Ej"  
                  (NEMS): Emerging Techniques 543 {@T<eb$d  
                  K. L. Ekinci and J. Brugger H.[t&VO  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享