美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications g.64Id  
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目录： qbS'|--wH  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations C%giv9a  
                for Nanostructure Fabrication Using Scanning u~s Sk  
                Probe Microscopy 1 06 QU  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo 0B=[80K;8  
Chapter 2 Atomic Force Microscope Lithography 33 F-_%>KJS  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park >qR7'QwP  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, 81~Kpx  
                Sensing, and Modification 65 b,nn&B5@{  
                C. Santschi, J. Polesel-Maris, J. Brugger, q`XW5VV{K  
                and H. Heinzelmann k*5'L<&  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered Lp_$?MCD.  
                Nano-Scale Structures and Devices 127 ,zQo {.  
               R. Mehta, J. Lund, and B. A. Parviz *yJ[zXXjJ  
Chapter 5 Nanofabrication Based on Self-Assembled kr%2w  
               Alumina Templates 159 ujU=JlJ7dl  
               S. Sen and N. A. Kouklin >DHp*$y  
Chapter 6 Nanowire Assembly and Integration 187 7 _`L$<-n  
                Z. Gu and D. H. Gracias /D]Kkm)  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 / /'Tck  
                 L. Tong and E. Mazur {9L5Q  
Chapter 8 Extreme Ultraviolet Lithography 235 yQ9ZhdQS  
                 H. Kinoshita j`O7=-  
Chapter 9 Electron Projection Lithography 285 h;-a`@rO ;  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata wuA
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Chapter 10 Electron Beam Direct Writing 341 moMYdArj  
                   K. Yamazaki 7|YN:7iA  
Chapter 11 Electron Beam Induced Deposition 377 []|;qHhC~(  
                   K. Mitsuishi 2R]&v;A  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 EFAGP${F  
                   P. A. Crozier and C. W. Hagen Ir5WN_EaS  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 @9Q2$  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi #Z\
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Chapter 14 Nano/Microstructuring of Ceramic Surfaces R[LsE^  
                  by Unconventional Lithographic Methods 471 *5e+@rD`  
                  R. C. Salvarezza and O. Azzaroni MM?`voj~`p  
Chapter 15 Alternative Nanofabrication Approaches 1G;8MPU  
f                 or Non-CMOS Applications 499 Jic}+X*0  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei XF}rd.K:  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems JQ@fuo %  
                  (NEMS): Emerging Techniques 543 !Vheq3"q/  
                  K. L. Ekinci and J. Brugger YD\]{,F|  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享