美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications 3D\I#g  
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目录： )O_Y(^+ $  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations 2?HLEiI1  
                for Nanostructure Fabrication Using Scanning "_9Dau$  
                Probe Microscopy 1 D].1X0^hp  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo )4DF9JpD  
Chapter 2 Atomic Force Microscope Lithography 33 { c]y<q  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park Og^b'Kx/  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, 32dR`qb  
                Sensing, and Modification 65 Z5+qb  
                C. Santschi, J. Polesel-Maris, J. Brugger, BaqRAO7  
                and H. Heinzelmann nqr[HFWs  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered +Ge-!&.;A  
                Nano-Scale Structures and Devices 127 'b%S3)}  
               R. Mehta, J. Lund, and B. A. Parviz p*vEVo  
Chapter 5 Nanofabrication Based on Self-Assembled |o6B:NH,rg  
               Alumina Templates 159 )/Ul"QF  
               S. Sen and N. A. Kouklin f~t*8rG~m  
Chapter 6 Nanowire Assembly and Integration 187 u>d,6 !
 
                Z. Gu and D. H. Gracias lLl^2[4k5  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 ]M#_o]  
                 L. Tong and E. Mazur FL-sXg  
Chapter 8 Extreme Ultraviolet Lithography 235 U#-89.x  
                 H. Kinoshita
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Chapter 9 Electron Projection Lithography 285 `Fnt#F}  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata fmFh.m.+N  
Chapter 10 Electron Beam Direct Writing 341 F`+}p-  
                   K. Yamazaki d'q,:="c  
Chapter 11 Electron Beam Induced Deposition 377 :Fu.S1j$  
                   K. Mitsuishi dy`K5lC@  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 >}Fe9Y.o  
                   P. A. Crozier and C. W. Hagen g"^<LX-  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 oF8#gn_  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi ?o?~Df&  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 9F@Q  
                  by Unconventional Lithographic Methods 471 yMB*/vs  
                  R. C. Salvarezza and O. Azzaroni rISg`
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Chapter 15 Alternative Nanofabrication Approaches .gzNdSE  
f                 or Non-CMOS Applications 499 UTC|8  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 1ti+ Q0~  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems CM|?;PBuv  
                  (NEMS): Emerging Techniques 543 >+LFu?y  
                  K. L. Ekinci and J. Brugger 09HlL=0q  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享

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