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纳米制造基础及应用” Nanofabrication - Fundamentals & Applications
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目录:
5\!t!FL_ .kwz$b+h b-!+Q) Chapter 1 Atom, Molecule, and Nanocluster Manipulations
;|yd}q=p for Nanostructure Fabrication Using Scanning
<e&88{jJ Probe Microscopy 1
\G4L+Q/13 A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
vNWCv Chapter 2 Atomic Force Microscope Lithography 33
y-#{v.|L N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
I'h|7y\ Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
v;6O# ta' Sensing, and Modification 65
}^Ymg7wA C. Santschi, J. Polesel-Maris, J. Brugger,
6&9}M Oc and H. Heinzelmann
v[l={am{/ Chapter 4 Using Biomolecules for Self-Assembly of Engineered
t_xO-fT) Nano-Scale Structures and Devices 127
=`st1K R. Mehta, J. Lund, and B. A. Parviz
n3z]&J5fr Chapter 5 Nanofabrication Based on Self-Assembled
]`+J!G, Alumina Templates 159
/E %^s3S. S. Sen and N. A. Kouklin
I@/s&$H`l Chapter 6 Nanowire Assembly and Integration 187
0%(.$c>:f Z. Gu and D. H. Gracias
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SV<qg Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
9B)<7JJX!J L. Tong and E. Mazur
7jS`4, Chapter 8 Extreme Ultraviolet Lithography 235
1Zo"Xb H. Kinoshita
~fF_]UVq3 Chapter 9 Electron Projection Lithography 285
#@UzOQ> T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
w;p~|! Chapter 10 Electron Beam Direct Writing 341
mVsghDESJ) K. Yamazaki
dje}CbZ Chapter 11 Electron Beam Induced Deposition 377
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g K. Mitsuishi
wZnv*t_ Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
BcaX:C?f P. A. Crozier and C. W. Hagen
A.5`+ Chapter 13 Focused Ion Beams and Interaction with Solids 431
#d* )W3e2{ T. Ishitani, T. Ohnishi, and T. Yaguchi
*Dhy a g Chapter 14 Nano/Microstructuring of Ceramic Surfaces
I.>SC by Unconventional Lithographic Methods 471
y#iQ R. C. Salvarezza and O. Azzaroni
Dt~ |)L+ Chapter 15 Alternative Nanofabrication Approaches
)`,Y^`F2 f or Non-CMOS Applications 499
MJ_]N+ C. V. Cojocaru, F. Cicoira, and F. Rosei
ZnNl3MKV Chapter 16 Nanofabrication of Nanoelectromechanical Systems
&UxI62[k (NEMS): Emerging Techniques 543
W[SZZV_(tu K. L. Ekinci and J. Brugger
MO-7yp:K ~YQH] [ 此帖被wildcat在2009-11-17 18:36重新编辑 ]