美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications G
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目录： `gqBJi  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations ;VS;),h/  
                for Nanostructure Fabrication Using Scanning /vPh_1  
                Probe Microscopy 1 9bjjo;A  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo z Q NL){  
Chapter 2 Atomic Force Microscope Lithography 33 )rD] y2^<  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park ".| 9h  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, pTZPOv#?Q  
                Sensing, and Modification 65 
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                C. Santschi, J. Polesel-Maris, J. Brugger, zQxZR}'  
                and H. Heinzelmann P,!W\N%3  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered o_U=]mEDY  
                Nano-Scale Structures and Devices 127 T3['6%  
               R. Mehta, J. Lund, and B. A. Parviz r&"}zyL  
Chapter 5 Nanofabrication Based on Self-Assembled `Oys&]vb  
               Alumina Templates 159 D_O%[u
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               S. Sen and N. A. Kouklin EF0{o_
  
Chapter 6 Nanowire Assembly and Integration 187 kgK7 T  
                Z. Gu and D. H. Gracias hC}A%_S  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 W<;i~W
 
                 L. Tong and E. Mazur -$;H_B+.  
Chapter 8 Extreme Ultraviolet Lithography 235 ;^:~xJFx|  
                 H. Kinoshita 'q1)W'  
Chapter 9 Electron Projection Lithography 285 J),7ukLu^  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata .CI]8O"3y  
Chapter 10 Electron Beam Direct Writing 341

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                   K. Yamazaki e~J% NU'&  
Chapter 11 Electron Beam Induced Deposition 377 H7"I+qE-G  
                   K. Mitsuishi '2zo  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 MLmc]nL=  
                   P. A. Crozier and C. W. Hagen `a:@[0r0U  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 FqsG#6|x  
                    T. Ishitani, T. Ohnishi, and T. Yaguchi .x6*9z#q  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces EBw}/y{Kt  
                  by Unconventional Lithographic Methods 471 \WouTn  
                  R. C. Salvarezza and O. Azzaroni M O* m@  
Chapter 15 Alternative Nanofabrication Approaches |IH-a"  
f                 or Non-CMOS Applications 499 yt C{,g>  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei 9R>A,x(
  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems 4'+/R%jk"  
                  (NEMS): Emerging Techniques 543 B/E1nBobC  
                  K. L. Ekinci and J. Brugger wx(|$2{h  
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3X!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!

一直想学习下纳米制造的工艺和理论，谢谢楼主分享