美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applics [复制链接]

美“纳米制造基础及应用” Nanofabrication - Fundamentals & Applications i6`8yw  
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Chapter 1 Atom, Molecule, and Nanocluster Manipulations BLaXp0  
                for Nanostructure Fabrication Using Scanning ejr"(m(Xe  
                Probe Microscopy 1 GE5@XT  
                A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo lh#GD"^(w&  
Chapter 2 Atomic Force Microscope Lithography 33 J1R%w{  
                N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park =r-Wy.a@  
Chapter 3 Scanning Probe Arrays for Nanoscale Imaging, uqQMS&;+,|  
                Sensing, and Modification 65 ^w&TTo(  
                C. Santschi, J. Polesel-Maris, J. Brugger, 2WUBJ-qnuT  
                and H. Heinzelmann 'E&K%/d  
Chapter 4 Using Biomolecules for Self-Assembly of Engineered Tl%4L% bE  
                Nano-Scale Structures and Devices 127 iT5H<uS  
               R. Mehta, J. Lund, and B. A. Parviz cF(9[8c{  
Chapter 5 Nanofabrication Based on Self-Assembled vQ_B2#U:  
               Alumina Templates 159 .9^;? Ts  
               S. Sen and N. A. Kouklin $s]@%6f  
Chapter 6 Nanowire Assembly and Integration 187 +] 5a(/m.~  
                Z. Gu and D. H. Gracias \3LD^[qi  
Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213 CIaabn  
                 L. Tong and E. Mazur rk. UW  
Chapter 8 Extreme Ultraviolet Lithography 235 !k s<VJh  
                 H. Kinoshita ,o}[q92@w  
Chapter 9 Electron Projection Lithography 285 ~IqT>  
                 T. Miura, K. Suzuki, H. Arimoto, and S. Kawata zcZw}  
Chapter 10 Electron Beam Direct Writing 341 ]cA~%$c89s  
                   K. Yamazaki ~o2{Wn["  
Chapter 11 Electron Beam Induced Deposition 377 ,3n}*"K  
                   K. Mitsuishi <.v6w*+{/  
Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399 C,<TAm  
                   P. A. Crozier and C. W. Hagen >{??/fBd-  
Chapter 13 Focused Ion Beams and Interaction with Solids 431 <
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                    T. Ishitani, T. Ohnishi, and T. Yaguchi o>*{5>#k'  
Chapter 14 Nano/Microstructuring of Ceramic Surfaces 'PYl%2  
                  by Unconventional Lithographic Methods 471 eoL)gIM%  
                  R. C. Salvarezza and O. Azzaroni 8/F2V?iT  
Chapter 15 Alternative Nanofabrication Approaches 5Y&@ :Y  
f                 or Non-CMOS Applications 499 ^7''x,I  
                   C. V. Cojocaru, F. Cicoira, and F. Rosei MnS"M[y3  
Chapter 16 Nanofabrication of Nanoelectromechanical Systems =|#-Rm^YB  
                  (NEMS): Emerging Techniques 543 <n:?WP~U  
                  K. L. Ekinci and J. Brugger *AA1e}R{B  
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一直想学习下纳米制造的工艺和理论，谢谢楼主分享