资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 rkbl/py
Contents xqU^I5Z
Preface .................................................................................................... {kT#o3,>w6
Chapter 1 Introducing Optical Lithography $/MY,:*e
Chapter 2 Exposure Systems K@y-)I2]
Chapter 3 Image Formation (tgEa{rPAP
Chapter 4 The Metrics of Lithography fYv ;TV>73
Chapter 5 Components in Optical Lithography \-DM-NrZ1U
Chapter 6 Processing and Optimization p.qrf7N$
Chapter 7 Immersion Lithography qT
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Chapter 8 Outlook and Successors to Optical Lithography