资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 Fi\)ka\u
Contents x!pd50-
Preface .................................................................................................... &jQqlQ j
Chapter 1 Introducing Optical Lithography 8x7TK2r
Chapter 2 Exposure Systems f~TkU\Rh
Chapter 3 Image Formation :,R>e}lM
Chapter 4 The Metrics of Lithography .h4Z\R`
Chapter 5 Components in Optical Lithography E?|NYu#I6
Chapter 6 Processing and Optimization b&1hj[`)
Chapter 7 Immersion Lithography O:RN4/17
Chapter 8 Outlook and Successors to Optical Lithography