Optical Lithography - Here is Why - B J Lin 2010 [复制链接]

资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 Gu2=+?i?h  
Contents lm+s5}*%o  
Preface .................................................................................................... Gsm.a  
Chapter 1 Introducing Optical Lithography k@>(sXs  
Chapter 2 Exposure Systems l Yj$3  
Chapter 3 Image Formation XN3'k[  
Chapter 4 The Metrics of Lithography XF@34b5(  
Chapter 5 Components in Optical Lithography 0juP"v$C>  
Chapter 6 Processing and Optimization |a'$v4dCF  
Chapter 7 Immersion Lithography Fd%JF#
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Chapter 8 Outlook and Successors to Optical Lithography

謝謝你讓大家長見識

i want to learn

a0010085:继续。。。。。 (2011-04-28 00:40)  s}bLA>~Ta  

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llet me see it

分成这么多份。。。

谢谢[楼主s:42]

难度超大，附件超多

好东西啊。 W>'gG}.  
辛苦了

a0010085:继续。。。。。 (2011-04-28 00:40)  -{yG+1  

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居然隐藏了一部分

这个一定要看看！