资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 3ZZJYf=
Contents :A[bqRqe
Preface .................................................................................................... ZgXh[UHQy
Chapter 1 Introducing Optical Lithography n53}79Uiz
Chapter 2 Exposure Systems ;m`I}h<
Chapter 3 Image Formation zG@!(
Chapter 4 The Metrics of Lithography (|6qN
Chapter 5 Components in Optical Lithography j zPC9
Chapter 6 Processing and Optimization DV%tby
Chapter 7 Immersion Lithography Tu6he8Q-
Chapter 8 Outlook and Successors to Optical Lithography