资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 6Lq`zU^
Contents m.m6.
Preface .................................................................................................... `K.C>68
Chapter 1 Introducing Optical Lithography B&6NjLV
Chapter 2 Exposure Systems jj2iF/
Chapter 3 Image Formation w8 :[w
Chapter 4 The Metrics of Lithography (6ga*5<
Chapter 5 Components in Optical Lithography `5Kg[nB:
Chapter 6 Processing and Optimization D :U6r^c
Chapter 7 Immersion Lithography E .Xp\Dm71
Chapter 8 Outlook and Successors to Optical Lithography