资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 tgnXBWA`!
Contents FgaBwd^W
Preface .................................................................................................... +R$KEGu~0Y
Chapter 1 Introducing Optical Lithography 0[Aa2H*
Chapter 2 Exposure Systems Vtri"G8 aB
Chapter 3 Image Formation 5Px_vtqP
Chapter 4 The Metrics of Lithography (^\i(cfu6Q
Chapter 5 Components in Optical Lithography fsu"Lc
Chapter 6 Processing and Optimization VvKH]>*
Chapter 7 Immersion Lithography [%:NR
Chapter 8 Outlook and Successors to Optical Lithography