资源里面,介绍光刻的比较少, 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 ttlMZLX{TJ
Contents Rx&.,gzj[
Preface .................................................................................................... :2vuc!Pu
Chapter 1 Introducing Optical Lithography wCv9VvF`
Chapter 2 Exposure Systems OuWRLcJ!
Chapter 3 Image Formation E|_8#xvb
Chapter 4 The Metrics of Lithography
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Chapter 5 Components in Optical Lithography /6y{?0S
Chapter 6 Processing and Optimization !a!4^zqp
Chapter 7 Immersion Lithography tr/.pw6
Chapter 8 Outlook and Successors to Optical Lithography