Optical Lithography - Here is Why - B J Lin 2010 [复制链接]

资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 Fpeokr"i  
Contents
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Preface .................................................................................................... 8ZM#.yBB  
Chapter 1 Introducing Optical Lithography 7
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Chapter 2 Exposure Systems 6iF&!Fd>J  
Chapter 3 Image Formation |>m'szca4  
Chapter 4 The Metrics of Lithography Q6e7Z-8  
Chapter 5 Components in Optical Lithography 6-J}ZfGj  
Chapter 6 Processing and Optimization @7.7+blS"H  
Chapter 7 Immersion Lithography - _6`0  
Chapter 8 Outlook and Successors to Optical Lithography

继续〉〉〉

继续。。。。。

,tired >>>

>>>>>>.......

最后一个，发完睡觉le，

好东西啊。 2&:z[d}~H  
辛苦了

謝謝你讓大家長見識

光刻是个好东西啊，有挑战，不过像天文望远镜一样，很难啊

光刻是个好东西啊，有挑战