Optical Lithography - Here is Why - B J Lin 2010 [复制链接]

资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010 |y
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Contents f_'"KF[%  
Preface .................................................................................................... bQ.nFa']  
Chapter 1 Introducing Optical Lithography >76 |:Nq  
Chapter 2 Exposure Systems 8ds}+TtbY  
Chapter 3 Image Formation |Puj7Ru  
Chapter 4 The Metrics of Lithography LyP`{_"CM  
Chapter 5 Components in Optical Lithography PbEQkjE  
Chapter 6 Processing and Optimization vgAFuQi(  
Chapter 7 Immersion Lithography <kbnu7?a*  
Chapter 8 Outlook and Successors to Optical Lithography

继续〉〉〉

继续。。。。。

,tired >>>

>>>>>>.......

最后一个，发完睡觉le，

好东西啊。 /p[|DJoM  
辛苦了

謝謝你讓大家長見識

光刻是个好东西啊，有挑战，不过像天文望远镜一样，很难啊

光刻是个好东西啊，有挑战