Optical Lithography - Here is Why - B J Lin 2010 [复制链接]

资源里面，介绍光刻的比较少， 今天分享一本最新介绍光刻技术的英文教材Optical Lithography - Here is Why - B J Lin 2010  7Tr '<(A  
Contents D8w.r"ne  
Preface .................................................................................................... /-lW$.+{?  
Chapter 1 Introducing Optical Lithography lws.;abm%n  
Chapter 2 Exposure Systems 7?k3jDK  
Chapter 3 Image Formation U<XfO'XJ  
Chapter 4 The Metrics of Lithography B(71I;  
Chapter 5 Components in Optical Lithography 9b-4BON{P  
Chapter 6 Processing and Optimization Y=sv   
Chapter 7 Immersion Lithography Su,<idS  
Chapter 8 Outlook and Successors to Optical Lithography

继续〉〉〉

继续。。。。。

,tired >>>

>>>>>>.......

最后一个，发完睡觉le，

好东西啊。 9%^O-8!  
辛苦了

謝謝你讓大家長見識

光刻是个好东西啊，有挑战，不过像天文望远镜一样，很难啊

光刻是个好东西啊，有挑战