Optical Metrology Third Edition yU|=)p5
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Kjell J. G˚asvik a! g j _
Spectra Vision AS, Trondheim, Norway yRy^'E~
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Preface to the Third Edition xi AB+HyZ*//
1Basics 1 Hu LvMYF
1.1 Introduction 1 c8h71Cr
1.2 Wave Motion. The Electromagnetic Spectrum 1 lk4U/:
1.3 The Plane Wave. Light Rays 3 7hlzuZob+y
1.4 Phase Difference 4 TUN6`/"
1.5 Complex Notation. Complex Amplitude 5 ^6@6BYf)
1.6 Oblique Incidence of A Plane Wave 5 G? +0#?'Y
1.7 The Spherical Wave 7 v 8U&{pD,
1.8 The Intensity 8 L_5o7~` 0
1.9 Geometrical Optics 8 XyYP!<].C
1.10 The Simple Convex (Positive) Lens 10 8}aSSL]
1.11 A Plane-Wave Set-Up 11 @yNC Wa~N
2 Gaussian Optics 15 (j&7 `9<5
2.1 Introduction 15 9]gV#uF
2.2 Refraction at a Spherical Surface 15 uWLf9D "
2.2.1 Examples 19 Hy1pIU sx
2.3 The General Image-Forming System 19 t=IM" ZgfL
2.4 The Image-Formation Process 21 C]a iu
2.5 Reflection at a Spherical Surface 23 t vp kc;
2.6 Aspheric Lenses 25 af_b G;
2.7 Stops and Apertures 26 PG{"GiZz=
2.8 Lens Aberrations. Computer Lens Design 28 'tDVSj
2.9 Imaging and The Lens Formula 29 !-Uq# Ea0/
2.10 Standard Optical Systems 30 w""
2.10.1 Afocal Systems. The Telescope 30 $Yj4&Two<
2.10.2 The Simple Magnifier 32 ~. E r
2.10.3 The Microscope 34 Wb#ON|.2
3 Interference 37 QSx4M
3.1 Introduction 37 r!c7{6N
3.2 General Description 37 3oC ^"723
3.3 Coherence 38 X\|h :ce
3.4 Interference between two Plane Waves 41 ob K6GG?ZE
3.4.1 Laser Doppler Velocimetry (LDV) 45 yK>s]65&
3.5 Interference between other Waves 46 a?X #G/)
3.6 Interferometry 49 QV8;c^EZ
3.6.1 Wavefront Division 50 XZ 4 H(Cj
3.6.2 Amplitude Division 51 $aY:Z_ s
3.6.3 The Dual-Frequency Michelson Interferometer 54 /h ,-J 8[
3.6.4 Heterodyne (Homodyne) Detection 55 F~l:W QAj
3.7 Spatial and Temporal Coherence 56 6'|NALW
3.8 Optical Coherence Tomography 61 7#sb },J{
4 Diffraction 67 LIh71Vg/cc
4.1 Introduction 67 :?$ <:
4.2 Diffraction from a Single Slit 67 \ eCQL(_
4.3 Diffraction from a Grating 70 ]m\:XhI*<
4.3.1 The Grating Equation. Amplitude Transmittance 70 i}kMo@
4.3.2 The Spatial Frequency Spectrum 73 gcF V$
4.4 Fourier Optics 75 J %P{/ nR
4.5 Optical Filtering 76 <-xu*Fc
4.5.1 Practical Filtering Set-Ups 78 d[&Ah~,
4.6 Physical Optics Description p><DA fB
of Image Formation 81 XBos ^Q
4.6.1 The Coherent Transfer Function 83 7jPn6uz>w
4.6.2 The Incoherent Transfer Function 85 m8 Ti{w(
4.6.3 The Depth of Focus 88 aFDCVm%U|
4.7 The Phase-Modulated Sinusoidal Grating 89 89fl\1 8%
5 Light Sources and Detectors 99 *cc|(EM
5.1 Introduction 99 , QHn} 3fW
5.2 Radiometry. Photometry 99 J
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5.2.1 Lambertian Surface 102 vb2aj!8_?
5.2.2 Blackbody Radiator 103 ~c'R7E&Bfa
5.2.3 Examples 105 9S{?@*V
5.3 Incoherent Light Sources 108 J:2Su1"ODh
5.4 Coherent Light Sources 109 p/?TU
5.4.1 Stimulated Emission 109 8zH/ a
5.4.2 Gas Lasers 112 fqZ+CzH
5.4.3 Liquid Lasers 114 &$. x1$%
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 ?v Z5 ^k
5.4.5 Solid-State Lasers 117 qR8 BS4q_p
5.4.6 Other Lasers 119 hJ0m;j&4y
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