Optical Metrology Third Edition 2c6g>?
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Kjell J. G˚asvik W-NDBP:
Spectra Vision AS, Trondheim, Norway %\]*OZ7
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Preface to the Third Edition xi <-D/O$q
1Basics 1 ry9T U
1.1 Introduction 1 _XCOSomL`
1.2 Wave Motion. The Electromagnetic Spectrum 1 .X# `k
1.3 The Plane Wave. Light Rays 3 =[b)1FUp
1.4 Phase Difference 4 ]vwW]O7
1.5 Complex Notation. Complex Amplitude 5 n]E?3UGD@W
1.6 Oblique Incidence of A Plane Wave 5 ,]bB9tid
1.7 The Spherical Wave 7 _ODbY;M
1.8 The Intensity 8 I(S`j[U
1.9 Geometrical Optics 8 lpz2 m\
1.10 The Simple Convex (Positive) Lens 10 94B\5I}
1.11 A Plane-Wave Set-Up 11 0a80 LAK
2 Gaussian Optics 15 SkmT`*v@
2.1 Introduction 15 *S2ypzwRZ,
2.2 Refraction at a Spherical Surface 15 "[y-+)WTG
2.2.1 Examples 19 CrwwU7qKL
2.3 The General Image-Forming System 19 BNL;Biyt7
2.4 The Image-Formation Process 21 E?_Z`*h
2.5 Reflection at a Spherical Surface 23 .l.a(_R
2.6 Aspheric Lenses 25 /~zai}
2.7 Stops and Apertures 26 z^T`x_mF
2.8 Lens Aberrations. Computer Lens Design 28 Q~Hy%M%R3
2.9 Imaging and The Lens Formula 29 #O+),,WS
2.10 Standard Optical Systems 30 :j+ ZI3@
2.10.1 Afocal Systems. The Telescope 30 sBcPq SMby
2.10.2 The Simple Magnifier 32 xg3:} LQ
2.10.3 The Microscope 34 q
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3 Interference 37 e)(wss+d7P
3.1 Introduction 37 hEp(A8g)bQ
3.2 General Description 37 zAiXo__x
3.3 Coherence 38 =weSyZ1~
3.4 Interference between two Plane Waves 41 {WYX~Mvvj
3.4.1 Laser Doppler Velocimetry (LDV) 45 E{|W(z,
3.5 Interference between other Waves 46 2nR[Xh?L
3.6 Interferometry 49 H '
3.6.1 Wavefront Division 50 DQr Y*nH
3.6.2 Amplitude Division 51 0tXS3+@n=
3.6.3 The Dual-Frequency Michelson Interferometer 54 Q\ 0cvmU
3.6.4 Heterodyne (Homodyne) Detection 55 [n:<8ho
3.7 Spatial and Temporal Coherence 56 ME*LHr,
3.8 Optical Coherence Tomography 61 g"}%2~Urf
4 Diffraction 67 HhvdqvIEG
4.1 Introduction 67 U
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4.2 Diffraction from a Single Slit 67 2.l:O2<
4.3 Diffraction from a Grating 70 PK `D8)=u
4.3.1 The Grating Equation. Amplitude Transmittance 70 (jAg_$6
4.3.2 The Spatial Frequency Spectrum 73 {0WHn.,2Y
4.4 Fourier Optics 75 NA ~Vg8
4.5 Optical Filtering 76 g\&g N
4.5.1 Practical Filtering Set-Ups 78 eQ]~dA8>
4.6 Physical Optics Description UWd=!h^dt
of Image Formation 81 uC(V
4.6.1 The Coherent Transfer Function 83 =`H@%
4.6.2 The Incoherent Transfer Function 85 7t0er'VC
4.6.3 The Depth of Focus 88 oU.R2\Q
4.7 The Phase-Modulated Sinusoidal Grating 89 <nT
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5 Light Sources and Detectors 99 uFinv2Z'
5.1 Introduction 99 Q o{/@
5.2 Radiometry. Photometry 99 -#N.X_F
5.2.1 Lambertian Surface 102 \D*KGd]M0
5.2.2 Blackbody Radiator 103 V<T9&8l+:
5.2.3 Examples 105 hYG6 pTCb
5.3 Incoherent Light Sources 108 `T5W}p[6
5.4 Coherent Light Sources 109 RwpdRBb
5.4.1 Stimulated Emission 109 <^5Z:n!q
5.4.2 Gas Lasers 112 lww!-(<ww
5.4.3 Liquid Lasers 114 ).`1+b
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 %[ Z \S0C
5.4.5 Solid-State Lasers 117 0tT(W^ho g
5.4.6 Other Lasers 119 sN9&,&W1
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