Optical Metrology Third Edition " @Te!.~A. =e ;\I/ Kjell J. G˚asvik
\!631FcQ Spectra Vision AS, Trondheim, Norway
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2 3>lE}^G u `("x5sa Preface to the Third Edition xi
>j$f$*x 1Basics 1
< rCl 1.1 Introduction 1
%GHHnf%2Z 1.2 Wave Motion. The Electromagnetic Spectrum 1
4q~l ?*S 1.3 The Plane Wave. Light Rays 3
55yP.@i9J 1.4 Phase Difference 4
t( ZiQ<A 1.5 Complex Notation. Complex Amplitude 5
[bv.` 1.6 Oblique Incidence of A Plane Wave 5
57HMWlg 1.7 The Spherical Wave 7
@NV$!FB< 1.8 The Intensity 8
< xc"y|7X 1.9 Geometrical Optics 8
O81})r *Y 1.10 The Simple Convex (Positive) Lens 10
Nzr zLK 1.11 A Plane-Wave Set-Up 11
6}| /~n 2 Gaussian Optics 15
8LkC/ 2.1 Introduction 15
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K` U\+AE 2.2.1 Examples 19
(6.0gB$aTu 2.3 The General Image-Forming System 19
ss-B e 2.4 The Image-Formation Process 21
IG#=}q 2.5 Reflection at a Spherical Surface 23
-EITz 2.6 Aspheric Lenses 25
qk:F6kL\` 2.7 Stops and Apertures 26
g3Ff<P P 2.8 Lens Aberrations. Computer Lens Design 28
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\DfvNeF 2.10 Standard Optical Systems 30
q A G0t{K 2.10.1 Afocal Systems. The Telescope 30
M/B_-8B_D 2.10.2 The Simple Magnifier 32
Y6g[y\*t 2.10.3 The Microscope 34
yqB{QFXO 3 Interference 37
} F@`A?k 3.1 Introduction 37
g fO.Ky6 3.2 General Description 37
<Q szmE 3.3 Coherence 38
M,mj{OY~x 3.4 Interference between two Plane Waves 41
b z<wihZj 3.4.1 Laser Doppler Velocimetry (LDV) 45
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a2x2N_\=/D 3.6 Interferometry 49
Ij4\* D! 3.6.1 Wavefront Division 50
)B8[ w 3.6.2 Amplitude Division 51
# Dy;x\a 3.6.3 The Dual-Frequency Michelson Interferometer 54
)V9$ P) 3.6.4 Heterodyne (Homodyne) Detection 55
i(Y P(8 3.7 Spatial and Temporal Coherence 56
*D`,z3/* 3.8 Optical Coherence Tomography 61
hJaqW'S 4 Diffraction 67
*]F3pP[ 4.1 Introduction 67
Url8 Z\;aM 4.2 Diffraction from a Single Slit 67
_}Z *%sT 4.3 Diffraction from a Grating 70
WL$WWA08_ 4.3.1 The Grating Equation. Amplitude Transmittance 70
9]hc{\ 4.3.2 The Spatial Frequency Spectrum 73
8mx5K-/,y^ 4.4 Fourier Optics 75
Pyk~ V)~M 4.5 Optical Filtering 76
:Z`4ea"w 4.5.1 Practical Filtering Set-Ups 78
NUm3E4 4.6 Physical Optics Description
YBg\L$| n of Image Formation 81
e6{/e +/R 4.6.1 The Coherent Transfer Function 83
:*Ckq~[Hg 4.6.2 The Incoherent Transfer Function 85
] niWR l 4.6.3 The Depth of Focus 88
S
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;'cv?3Y 5 Light Sources and Detectors 99
@tp/0E? 5.1 Introduction 99
rLP4l~V 5.2 Radiometry. Photometry 99
U:8^>_ 5.2.1 Lambertian Surface 102
zwAuF%U 5.2.2 Blackbody Radiator 103
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b6 g,mzqu 5.3 Incoherent Light Sources 108
U6_1L,W 5.4 Coherent Light Sources 109
!%5{jO1 5.4.1 Stimulated Emission 109
}V 9146 5.4.2 Gas Lasers 112
)[zyvU. J3 5.4.3 Liquid Lasers 114
2X6y^f';\ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
]4hXK!^Uu 5.4.5 Solid-State Lasers 117
iiRK3m 5.4.6 Other Lasers 119
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