Optical Metrology Third Edition W!9~bBF', W>{&"
5 Kjell J. G˚asvik
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\ Spectra Vision AS, Trondheim, Norway
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^ -~=U^2tC Ha ZV 7 Preface to the Third Edition xi
WyQ8}]1 b 1Basics 1
{~g7&+9x* 1.1 Introduction 1
-g 9 CW[ 1.2 Wave Motion. The Electromagnetic Spectrum 1
_Y6Ezh. 1.3 The Plane Wave. Light Rays 3
#sv}%oV,F 1.4 Phase Difference 4
?6N\AM ' 1.5 Complex Notation. Complex Amplitude 5
=/ !A 1.6 Oblique Incidence of A Plane Wave 5
j[$+DCO#|m 1.7 The Spherical Wave 7
XCn;<$3w 1.8 The Intensity 8
:m'(8s8 1.9 Geometrical Optics 8
q~AvxO 1.10 The Simple Convex (Positive) Lens 10
+Ezl.O@z 1.11 A Plane-Wave Set-Up 11
e cvZwL 2 Gaussian Optics 15
=''*'a- P 2.1 Introduction 15
=:xJZy$ 2.2 Refraction at a Spherical Surface 15
m^/>C -&C 2.2.1 Examples 19
b-c6.aKf| 2.3 The General Image-Forming System 19
oOXJ7 |n 2.4 The Image-Formation Process 21
Tn3C0 2.5 Reflection at a Spherical Surface 23
j~ ;y~Cx? 2.6 Aspheric Lenses 25
DEfh R?v 2.7 Stops and Apertures 26
>A 6PH*x 2.8 Lens Aberrations. Computer Lens Design 28
<x$f D37 2.9 Imaging and The Lens Formula 29
xw1,Wbu] 2.10 Standard Optical Systems 30
%$_?%X0=t 2.10.1 Afocal Systems. The Telescope 30
NY[48H 2.10.2 The Simple Magnifier 32
<X97 W \ 2.10.3 The Microscope 34
0q1 +5 3 Interference 37
;gRPTk$X3 3.1 Introduction 37
q} g0-Da 3.2 General Description 37
vL "n oLs 3.3 Coherence 38
=7 -k D3 3.4 Interference between two Plane Waves 41
%uP/v\l 3.4.1 Laser Doppler Velocimetry (LDV) 45
8L@@UUjr 3.5 Interference between other Waves 46
{+9t!' 3.6 Interferometry 49
N =8CVI 3.6.1 Wavefront Division 50
3VQmo\li 3.6.2 Amplitude Division 51
}4Gn$'e 3.6.3 The Dual-Frequency Michelson Interferometer 54
cZt5;"xgr] 3.6.4 Heterodyne (Homodyne) Detection 55
!E *IktAI 3.7 Spatial and Temporal Coherence 56
-fK_F6_\] 3.8 Optical Coherence Tomography 61
]zvOM ^l~ 4 Diffraction 67
cf_X=;yaqy 4.1 Introduction 67
kY~yA2*G 4.2 Diffraction from a Single Slit 67
<%`z:G3 4.3 Diffraction from a Grating 70
$@dPIq4o;} 4.3.1 The Grating Equation. Amplitude Transmittance 70
}L5;=A']S 4.3.2 The Spatial Frequency Spectrum 73
$T2zs$ 4.4 Fourier Optics 75
g-+/zEOUS 4.5 Optical Filtering 76
U4e9[=q`' 4.5.1 Practical Filtering Set-Ups 78
P\
2Bx *e 4.6 Physical Optics Description
!<>`G0 of Image Formation 81
# k mI#W"^ 4.6.1 The Coherent Transfer Function 83
2l8z/o 7v 4.6.2 The Incoherent Transfer Function 85
/-3)^R2H 4.6.3 The Depth of Focus 88
DsiyN:o'+ 4.7 The Phase-Modulated Sinusoidal Grating 89
8O*O 5 5 Light Sources and Detectors 99
Pv8AWQQJ 5.1 Introduction 99
CT{ X$N 5.2 Radiometry. Photometry 99
OadGwa\:s 5.2.1 Lambertian Surface 102
-]MZP:s 5.2.2 Blackbody Radiator 103
*>j4tA{b@v 5.2.3 Examples 105
) . H nK 5.3 Incoherent Light Sources 108
w:9n/[ 5.4 Coherent Light Sources 109
79M` ?xm 5.4.1 Stimulated Emission 109
JG'&anbm 5.4.2 Gas Lasers 112
~eGtoEY 5.4.3 Liquid Lasers 114
pkA(\0E8 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
ZpU4"x> 5.4.5 Solid-State Lasers 117
'p'nAB''! 5.4.6 Other Lasers 119
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