Optical Metrology Third Edition F8.Fp[_tM .Q4EmpByCg Kjell J. G˚asvik
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n Spectra Vision AS, Trondheim, Norway
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`G,\=c~{A Gw$U0 HA[, Preface to the Third Edition xi
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q22?kT 1Basics 1
0OP6VZ\ 1.1 Introduction 1
5_#wOz0u$ 1.2 Wave Motion. The Electromagnetic Spectrum 1
LsoP >vJG 1.3 The Plane Wave. Light Rays 3
~}(}:#>T 1.4 Phase Difference 4
XzkC ]e' 1.5 Complex Notation. Complex Amplitude 5
zN0^FXGD 1.6 Oblique Incidence of A Plane Wave 5
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C([TolZ 1.9 Geometrical Optics 8
}qRYXjS 1.10 The Simple Convex (Positive) Lens 10
xbSix:R=Z 1.11 A Plane-Wave Set-Up 11
X*/jna"* 2 Gaussian Optics 15
FlttqQQdf 2.1 Introduction 15
Y 8EL 2.2 Refraction at a Spherical Surface 15
+<(N]w* 2.2.1 Examples 19
^3^n|T7le 2.3 The General Image-Forming System 19
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U[OM\ 2.4 The Image-Formation Process 21
+m^ gj:yL 2.5 Reflection at a Spherical Surface 23
UzWf_r 2.6 Aspheric Lenses 25
=LC:1zn4 2.7 Stops and Apertures 26
aTxss:7] 2.8 Lens Aberrations. Computer Lens Design 28
TkM8GK-3 2.9 Imaging and The Lens Formula 29
bODCC5yL 2.10 Standard Optical Systems 30
W c{<DE?J 2.10.1 Afocal Systems. The Telescope 30
5(]=?$$*t 2.10.2 The Simple Magnifier 32
WnyEdYA 2.10.3 The Microscope 34
AQw1,tGV 3 Interference 37
%A|9=x* 3.1 Introduction 37
KY~p>Jmh 3.2 General Description 37
gG!L#J? 3.3 Coherence 38
:?S1#d_ 3.4 Interference between two Plane Waves 41
~xerZQgc 3.4.1 Laser Doppler Velocimetry (LDV) 45
5hF
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4"nb>tA 3.6 Interferometry 49
%wzDBsX 3.6.1 Wavefront Division 50
<%Zg;]2H` 3.6.2 Amplitude Division 51
J^m#984 3.6.3 The Dual-Frequency Michelson Interferometer 54
wM9HZraB< 3.6.4 Heterodyne (Homodyne) Detection 55
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3.8 Optical Coherence Tomography 61
;'~U5Po8 4 Diffraction 67
]%>7OH' 4.1 Introduction 67
hd^?mZ 4.2 Diffraction from a Single Slit 67
M_lQ^7/ 4.3 Diffraction from a Grating 70
N_Q)AXr) 4.3.1 The Grating Equation. Amplitude Transmittance 70
(NR8B9qLN 4.3.2 The Spatial Frequency Spectrum 73
^lud2x$O^C 4.4 Fourier Optics 75
j")#"& m 4.5 Optical Filtering 76
@~,&E*X! . 4.5.1 Practical Filtering Set-Ups 78
7Ko<,Kp2b 4.6 Physical Optics Description
c5C 2xE}T of Image Formation 81
jM]B\cvN 4.6.1 The Coherent Transfer Function 83
TwJiYXHw? 4.6.2 The Incoherent Transfer Function 85
iI\bD 4.6.3 The Depth of Focus 88
$a.fQ<,\X 4.7 The Phase-Modulated Sinusoidal Grating 89
dCc"Qr[k 5 Light Sources and Detectors 99
JcV'O)& 5.1 Introduction 99
X67^@~l 5.2 Radiometry. Photometry 99
1?%Q"*Y& 5.2.1 Lambertian Surface 102
Hz~?"ts@; 5.2.2 Blackbody Radiator 103
u5zL;C3O 5.2.3 Examples 105
&B?TX. 5.3 Incoherent Light Sources 108
UVa:~c$U4 5.4 Coherent Light Sources 109
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$23*:)&J4 5.4.2 Gas Lasers 112
r&!Ebe- 5.4.3 Liquid Lasers 114
cBcfGNTJ~ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
M~/7thP{ 5.4.5 Solid-State Lasers 117
11Sflj 5.4.6 Other Lasers 119
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