Optical Metrology Third Edition Z"u|-RoBV H{ 4/~Z Kjell J. G˚asvik
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H& Spectra Vision AS, Trondheim, Norway
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(qky&}H ~l@-gAyw Preface to the Third Edition xi
5( }Qg9% 1Basics 1
Wt8 = j1> 1.1 Introduction 1
iI.d8}A 1.2 Wave Motion. The Electromagnetic Spectrum 1
zV<vwIUrr 1.3 The Plane Wave. Light Rays 3
b#2 $Pd:( 1.4 Phase Difference 4
Ov5 *&* P 1.5 Complex Notation. Complex Amplitude 5
0u7\*I y 1.6 Oblique Incidence of A Plane Wave 5
nOE 1bf^l 1.7 The Spherical Wave 7
hV6=-QL*B 1.8 The Intensity 8
T M1D|H 1.9 Geometrical Optics 8
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11 = 1.10 The Simple Convex (Positive) Lens 10
m EM/}]2 1.11 A Plane-Wave Set-Up 11
M^$liS.D 2 Gaussian Optics 15
f|&ga'5g& 2.1 Introduction 15
-Jj" JN. 2.2 Refraction at a Spherical Surface 15
,aLdW,<6 2.2.1 Examples 19
(H*d">`mz 2.3 The General Image-Forming System 19
#FHyP1uyc 2.4 The Image-Formation Process 21
oB8x_0#n 2.5 Reflection at a Spherical Surface 23
[61T$ . 2.6 Aspheric Lenses 25
\a| bx4M 2.7 Stops and Apertures 26
> dTJ 2.8 Lens Aberrations. Computer Lens Design 28
nLfITr|5 2.9 Imaging and The Lens Formula 29
xqA XfJ. 2.10 Standard Optical Systems 30
J% t[ { 2.10.1 Afocal Systems. The Telescope 30
N+[ |"v 2.10.2 The Simple Magnifier 32
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2.10.3 The Microscope 34
L9FijF7 3 Interference 37
)&$Zt( 3.1 Introduction 37
tHj |_t 3.2 General Description 37
&d8z`amP 3.3 Coherence 38
@}^eyS$|! 3.4 Interference between two Plane Waves 41
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3.4.1 Laser Doppler Velocimetry (LDV) 45
*YI>Q@F9 3.5 Interference between other Waves 46
3X,SCG 3.6 Interferometry 49
OG jeE4 3.6.1 Wavefront Division 50
<f'2dT@6 3.6.2 Amplitude Division 51
NP {O 3.6.3 The Dual-Frequency Michelson Interferometer 54
0qV"R7TW 3.6.4 Heterodyne (Homodyne) Detection 55
).Ei:/*j 3.7 Spatial and Temporal Coherence 56
b [MdA|C%j 3.8 Optical Coherence Tomography 61
2EdKxw3$] 4 Diffraction 67
J:c]z9&! 4.1 Introduction 67
&>Ko}? w 4.2 Diffraction from a Single Slit 67
l*yh(3~} 4.3 Diffraction from a Grating 70
N]k(8K 4.3.1 The Grating Equation. Amplitude Transmittance 70
SuHv{u45 4.3.2 The Spatial Frequency Spectrum 73
H(1( H0Kj" 4.4 Fourier Optics 75
;goR0PN 4.5 Optical Filtering 76
zJp@\Yo+ 4.5.1 Practical Filtering Set-Ups 78
eqL~h1^Co 4.6 Physical Optics Description
77 Fpb?0` of Image Formation 81
\G}$+ 4.6.1 The Coherent Transfer Function 83
l^F%fIRp) 4.6.2 The Incoherent Transfer Function 85
@"`{gdB$ 4.6.3 The Depth of Focus 88
LQnkpy3A 4.7 The Phase-Modulated Sinusoidal Grating 89
^rKA=siz 5 Light Sources and Detectors 99
R`RLq1WA 5.1 Introduction 99
B f_o Ic 5.2 Radiometry. Photometry 99
nA\9UD<G. 5.2.1 Lambertian Surface 102
LE|*Je3a 5.2.2 Blackbody Radiator 103
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;,8bb(j 5.3 Incoherent Light Sources 108
#0hX'8];( 5.4 Coherent Light Sources 109
B~/ LAD_ 5.4.1 Stimulated Emission 109
ww]^H$In 5.4.2 Gas Lasers 112
r*'X ]q|L+ 5.4.3 Liquid Lasers 114
C XQPbt[5 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
w
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>tq,F"2amC 5.4.6 Other Lasers 119
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