Optical Metrology Third Edition 0/HFLz' BN*:*cmUl Kjell J. G˚asvik
TdFU, Spectra Vision AS, Trondheim, Norway
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Preface to the Third Edition xi
<]Td7-n 1Basics 1
yD"]:ts3 1.1 Introduction 1
} c G)$E 1.2 Wave Motion. The Electromagnetic Spectrum 1
bEcs(Mc~ 1.3 The Plane Wave. Light Rays 3
gvP-doA7W 1.4 Phase Difference 4
2u.0AG 1.5 Complex Notation. Complex Amplitude 5
@i ~ A7L0/ 1.6 Oblique Incidence of A Plane Wave 5
kf@JEcKV 1.7 The Spherical Wave 7
dD,}i$ 1.8 The Intensity 8
%ap(=^|5 1.9 Geometrical Optics 8
v_KO xV:<` 1.10 The Simple Convex (Positive) Lens 10
s|%R 1.11 A Plane-Wave Set-Up 11
A]c'T T@6 2 Gaussian Optics 15
X>I3N ?5 2.1 Introduction 15
l uP;P& 2.2 Refraction at a Spherical Surface 15
'T eH(?3G 2.2.1 Examples 19
y[N0P0r l: 2.3 The General Image-Forming System 19
Gz & } OO 2.4 The Image-Formation Process 21
[8T{=+k 2.5 Reflection at a Spherical Surface 23
@)>Z +g 2.6 Aspheric Lenses 25
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2.7 Stops and Apertures 26
;JxL>K( 2.8 Lens Aberrations. Computer Lens Design 28
=p+n(C/ 2.9 Imaging and The Lens Formula 29
AM+5_' S, 2.10 Standard Optical Systems 30
dWz?`B{' 2.10.1 Afocal Systems. The Telescope 30
O9daeIF0# 2.10.2 The Simple Magnifier 32
3ijPm<wn 2.10.3 The Microscope 34
{ Zgd 3 Interference 37
q|*^{(tWs 3.1 Introduction 37
!.P||$x`& 3.2 General Description 37
((ebSu2-?$ 3.3 Coherence 38
:k \#=u( 3.4 Interference between two Plane Waves 41
$udhTI#, 3.4.1 Laser Doppler Velocimetry (LDV) 45
aL1%BGlmZ< 3.5 Interference between other Waves 46
V'9.l6l 3.6 Interferometry 49
gqS9 {K(f 3.6.1 Wavefront Division 50
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+q&Hj|;8r 3.6.4 Heterodyne (Homodyne) Detection 55
I|rb"bG 3.7 Spatial and Temporal Coherence 56
?t YZ/ 3.8 Optical Coherence Tomography 61
cWAw-E5 4 Diffraction 67
R;DU68R 4.1 Introduction 67
=}Tm8b0 4.2 Diffraction from a Single Slit 67
C8K2F5c5 4.3 Diffraction from a Grating 70
^/BGOBK 4.3.1 The Grating Equation. Amplitude Transmittance 70
wPg/.N9H 4.3.2 The Spatial Frequency Spectrum 73
CH 6 m 4.4 Fourier Optics 75
-,bnj^L 4.5 Optical Filtering 76
7^><Vh"qV 4.5.1 Practical Filtering Set-Ups 78
* zp tbZ 4.6 Physical Optics Description
`XxnQng of Image Formation 81
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JmCMF q B9 4.6.2 The Incoherent Transfer Function 85
{R_ > KE1 4.6.3 The Depth of Focus 88
m(8Tup| 4.7 The Phase-Modulated Sinusoidal Grating 89
1Ms]\<^j 5 Light Sources and Detectors 99
@HS*%N"* 5.1 Introduction 99
G(t:s5: 5.2 Radiometry. Photometry 99
f\_RW;y|m 5.2.1 Lambertian Surface 102
]s=|+tz\V 5.2.2 Blackbody Radiator 103
6:5K?Yo 5.2.3 Examples 105
m?kiGC&m 5.3 Incoherent Light Sources 108
D [+LU( 5.4 Coherent Light Sources 109
T#B#q1 / 5.4.1 Stimulated Emission 109
7IxeSxXH 5.4.2 Gas Lasers 112
u ON(La vB 5.4.3 Liquid Lasers 114
VKttJok1 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
`=Ip>7T& 5.4.5 Solid-State Lasers 117
0j@mzd2 5.4.6 Other Lasers 119
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