Optical Metrology Third Edition ~Y[r`]X`"m
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Kjell J. G˚asvik R `5.[?Dt
Spectra Vision AS, Trondheim, Norway
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Preface to the Third Edition xi =`oCLsz=
1Basics 1 dw>C@c#"
1.1 Introduction 1 BGZ# wr u
1.2 Wave Motion. The Electromagnetic Spectrum 1 wQl
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1.3 The Plane Wave. Light Rays 3 C\3rJy(VJ
1.4 Phase Difference 4 <18 (
1.5 Complex Notation. Complex Amplitude 5 caR<Kb:;*
1.6 Oblique Incidence of A Plane Wave 5 H \" sgoJ
1.7 The Spherical Wave 7 ^rR1ZVY
1.8 The Intensity 8 F@7jx:tI
1.9 Geometrical Optics 8 W &W5lArr
1.10 The Simple Convex (Positive) Lens 10 .bl/*s
1.11 A Plane-Wave Set-Up 11 J 9nX"Sb
2 Gaussian Optics 15 IJp-BTO{V
2.1 Introduction 15 #4NaL
2.2 Refraction at a Spherical Surface 15 8mrUotjS
2.2.1 Examples 19 [ZwjOi:)
2.3 The General Image-Forming System 19 VR 8- &N
2.4 The Image-Formation Process 21 pZ{+c
2.5 Reflection at a Spherical Surface 23 ha<[b u e
2.6 Aspheric Lenses 25 e a2ayT
2.7 Stops and Apertures 26 .WJ Y Qi
2.8 Lens Aberrations. Computer Lens Design 28 @Sn(lnl B
2.9 Imaging and The Lens Formula 29 % g$o/A$
2.10 Standard Optical Systems 30 ] )\Pqn(
2.10.1 Afocal Systems. The Telescope 30 a 7 V-C
2.10.2 The Simple Magnifier 32 nsC3
2.10.3 The Microscope 34 / N10
3 Interference 37 i v38p%Zm
3.1 Introduction 37 epe)a
3.2 General Description 37 3BUSv#w{i
3.3 Coherence 38 / &5,3rU.G
3.4 Interference between two Plane Waves 41 SYJD?&C;
3.4.1 Laser Doppler Velocimetry (LDV) 45 m4Qh%}9%
3.5 Interference between other Waves 46 V#$RR!X'
3.6 Interferometry 49 h
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3.6.1 Wavefront Division 50 {*" |#6-
3.6.2 Amplitude Division 51 Xz a(k
3.6.3 The Dual-Frequency Michelson Interferometer 54 7hcYD!DS
3.6.4 Heterodyne (Homodyne) Detection 55 :6
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3.7 Spatial and Temporal Coherence 56 O Rw,)l
3.8 Optical Coherence Tomography 61 ,AFu C <
4 Diffraction 67 g}{aZ$sta
4.1 Introduction 67 :J@ gmY:C
4.2 Diffraction from a Single Slit 67 R4cM%l_#W
4.3 Diffraction from a Grating 70 bl;1i@Z*M
4.3.1 The Grating Equation. Amplitude Transmittance 70 =z69 e%.
4.3.2 The Spatial Frequency Spectrum 73 n0 {i&[I~+
4.4 Fourier Optics 75 6,"Q=9k4[
4.5 Optical Filtering 76 n5NsmVW \x
4.5.1 Practical Filtering Set-Ups 78 }@+0/W?\.
4.6 Physical Optics Description lT?v^\(H
of Image Formation 81 VA_PvL.9
4.6.1 The Coherent Transfer Function 83 .@U@xR u7|
4.6.2 The Incoherent Transfer Function 85 s} ;{ZAtE
4.6.3 The Depth of Focus 88 9~XA q^e
4.7 The Phase-Modulated Sinusoidal Grating 89 *vxk@ `K~
5 Light Sources and Detectors 99 }2.`N%[
5.1 Introduction 99 osAd1<EIC
5.2 Radiometry. Photometry 99 }q`S$P;
5.2.1 Lambertian Surface 102 Vn }0} Jz
5.2.2 Blackbody Radiator 103 u|TeE\0
5.2.3 Examples 105 0&|\N
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5.3 Incoherent Light Sources 108 l<LI7Z]A
5.4 Coherent Light Sources 109 <0&*9ZeD
5.4.1 Stimulated Emission 109 mSF (q78?
5.4.2 Gas Lasers 112 06Sc eq
5.4.3 Liquid Lasers 114 M`!H"R 7
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 0@iY :aF
5.4.5 Solid-State Lasers 117 [D4SW#
5.4.6 Other Lasers 119 <uw9DU7G
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