Optical Metrology Third Edition np8gKVD
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Kjell J. G˚asvik F<qz[,]|-j
Spectra Vision AS, Trondheim, Norway K
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Preface to the Third Edition xi Pb1*\+
1Basics 1 U.DDaT1
1.1 Introduction 1 l038%U~U!
1.2 Wave Motion. The Electromagnetic Spectrum 1 `%+Wz0(K
1.3 The Plane Wave. Light Rays 3 Xc?&_\. +
1.4 Phase Difference 4 Lv|q
1.5 Complex Notation. Complex Amplitude 5 iV&6nh(
1.6 Oblique Incidence of A Plane Wave 5 %p2Sh)@M
1.7 The Spherical Wave 7 )%`^xR
1.8 The Intensity 8 "uaMk}[ <!
1.9 Geometrical Optics 8 H."EUcE{
1.10 The Simple Convex (Positive) Lens 10 j@SQ~AS
1.11 A Plane-Wave Set-Up 11 W3MU1gl6k{
2 Gaussian Optics 15 >8k_n
2.1 Introduction 15 Tk5W'p|6f
2.2 Refraction at a Spherical Surface 15 a-=8xs'
2.2.1 Examples 19 /ro=?QYb
2.3 The General Image-Forming System 19 Cj{1H([-
2.4 The Image-Formation Process 21 ,n3a
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2.5 Reflection at a Spherical Surface 23 2/"u5
2.6 Aspheric Lenses 25 (C@m Lu)
2.7 Stops and Apertures 26 ";3zXk[#
2.8 Lens Aberrations. Computer Lens Design 28 uI1q>[
2.9 Imaging and The Lens Formula 29 ,N!o
2.10 Standard Optical Systems 30 b:tob0TB
2.10.1 Afocal Systems. The Telescope 30 G#d{,3Gq1
2.10.2 The Simple Magnifier 32 umt.Um.m2
2.10.3 The Microscope 34 45,1-? -!
3 Interference 37 j)<IRD^
3.1 Introduction 37 ;#vKi0V7
3.2 General Description 37 *Zt#U#
3.3 Coherence 38 f;W|\z'
3.4 Interference between two Plane Waves 41 LUM@#3&
3.4.1 Laser Doppler Velocimetry (LDV) 45 59"UL\3
3.5 Interference between other Waves 46 ^/\Of{OZ-
3.6 Interferometry 49 `$W_R[
3.6.1 Wavefront Division 50 /5Oa,NS7
3.6.2 Amplitude Division 51 u>kN1k Q8
3.6.3 The Dual-Frequency Michelson Interferometer 54 P<M?Qd1.
3.6.4 Heterodyne (Homodyne) Detection 55 kXi6lh
3.7 Spatial and Temporal Coherence 56 19E8'@
3.8 Optical Coherence Tomography 61 P)Rh=U
4 Diffraction 67 Y]/%t{Y
4.1 Introduction 67 6W]9$n\"?
4.2 Diffraction from a Single Slit 67 0n;<
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4.3 Diffraction from a Grating 70 E5I"%9X0H
4.3.1 The Grating Equation. Amplitude Transmittance 70 I%sFqh>
4.3.2 The Spatial Frequency Spectrum 73 &jslyQ#
4.4 Fourier Optics 75 }BZ"S-hZ
4.5 Optical Filtering 76 ?o81E2TJO
4.5.1 Practical Filtering Set-Ups 78 nxWY7hU
4.6 Physical Optics Description AiEd!u.
of Image Formation 81 gMWjk7
4.6.1 The Coherent Transfer Function 83 psg)*'r
4.6.2 The Incoherent Transfer Function 85 [AYOYENp-
4.6.3 The Depth of Focus 88 Ye2 {f"F
4.7 The Phase-Modulated Sinusoidal Grating 89 ]rWgSID
5 Light Sources and Detectors 99 1(I6.BHW
5.1 Introduction 99 vms|x wb
5.2 Radiometry. Photometry 99 {2=jAz'?
5.2.1 Lambertian Surface 102 G6/p1xy>o:
5.2.2 Blackbody Radiator 103 bdC8zDD
5.2.3 Examples 105 x:),P-~w
5.3 Incoherent Light Sources 108 S-
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5.4 Coherent Light Sources 109 8Kg n"M3
5.4.1 Stimulated Emission 109 lQ" p !
5.4.2 Gas Lasers 112 _+K_5IO4
5.4.3 Liquid Lasers 114 pA9+Cr!0Q
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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5.4.5 Solid-State Lasers 117 @D{KdyW
5.4.6 Other Lasers 119 YG@t5j#b
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