Optical Metrology Third Edition V 1/p_)A
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Kjell J. G˚asvik Zsx3/}
Spectra Vision AS, Trondheim, Norway =r9r~SR#
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Preface to the Third Edition xi !)pdamdA
1Basics 1 Ef)yQ
1.1 Introduction 1 2VGg 6%
1.2 Wave Motion. The Electromagnetic Spectrum 1 f-SuM% S_
1.3 The Plane Wave. Light Rays 3 Hy_;nN+e
1.4 Phase Difference 4 ;j%BK(5
1.5 Complex Notation. Complex Amplitude 5 yZkyC'/
1.6 Oblique Incidence of A Plane Wave 5 +>\id~c(
1.7 The Spherical Wave 7 !mMpb/&&S
1.8 The Intensity 8 \ck+GW4&
1.9 Geometrical Optics 8 fo0+dzazY
1.10 The Simple Convex (Positive) Lens 10 {d<;BLA
1.11 A Plane-Wave Set-Up 11 r]Lc9dL
2 Gaussian Optics 15 7.g[SBUOG
2.1 Introduction 15 oCS2E =O&
2.2 Refraction at a Spherical Surface 15 T~:|!`
2.2.1 Examples 19 _iV]_\0W2
2.3 The General Image-Forming System 19 .2)
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2.4 The Image-Formation Process 21 bm% $86
2.5 Reflection at a Spherical Surface 23 iyta;dw9
2.6 Aspheric Lenses 25 nh>K`+>co
2.7 Stops and Apertures 26 ._O
2.8 Lens Aberrations. Computer Lens Design 28 hrGH}CU"
2.9 Imaging and The Lens Formula 29 T r0B[QF
2.10 Standard Optical Systems 30 $*R/tJ.
2.10.1 Afocal Systems. The Telescope 30 U}k9 Py
2.10.2 The Simple Magnifier 32 'T<iHV&
2.10.3 The Microscope 34 Q'O[R+YT ,
3 Interference 37 QPtGdd
3.1 Introduction 37 sarq`%zrk
3.2 General Description 37 %zk$}}ti.
3.3 Coherence 38 re?s.djT
3.4 Interference between two Plane Waves 41 :Bu2,EL*O
3.4.1 Laser Doppler Velocimetry (LDV) 45 f"1>bW>R+
3.5 Interference between other Waves 46 \*f;X aa
3.6 Interferometry 49 '6y}ZE[
3.6.1 Wavefront Division 50 ?L&|Uw+
3.6.2 Amplitude Division 51 rgmF: C
3.6.3 The Dual-Frequency Michelson Interferometer 54 4k-+?L!/G
3.6.4 Heterodyne (Homodyne) Detection 55 D,qu-k[jMI
3.7 Spatial and Temporal Coherence 56 3psU?8(
3.8 Optical Coherence Tomography 61 G6@M&u5RT
4 Diffraction 67 l>*"mh
4.1 Introduction 67 OyV<u@[i
4.2 Diffraction from a Single Slit 67 kHw_ S-
4.3 Diffraction from a Grating 70 R218(8S
4.3.1 The Grating Equation. Amplitude Transmittance 70 'R`tLN
4.3.2 The Spatial Frequency Spectrum 73 ^sN (
4.4 Fourier Optics 75 ABE@n%|`
4.5 Optical Filtering 76 ;2'q_Btk4
4.5.1 Practical Filtering Set-Ups 78 M])dJ9&e
4.6 Physical Optics Description <Rh6r}f
of Image Formation 81 =0uAE7q(9
4.6.1 The Coherent Transfer Function 83 <S?ddp2
4.6.2 The Incoherent Transfer Function 85 8#!i[UFdj
4.6.3 The Depth of Focus 88 e@:sR
4.7 The Phase-Modulated Sinusoidal Grating 89 ^j-3av=
5 Light Sources and Detectors 99 w2_bd7Wp<
5.1 Introduction 99 nWQ;9_qBB
5.2 Radiometry. Photometry 99 5p.rwNE
5.2.1 Lambertian Surface 102 >D201&*G%
5.2.2 Blackbody Radiator 103 /|6;Z}2
5.2.3 Examples 105 3gd&i
5.3 Incoherent Light Sources 108 J{^RkGF
5.4 Coherent Light Sources 109 GFr|E8
5.4.1 Stimulated Emission 109 S26MDLk`R3
5.4.2 Gas Lasers 112 s(X;Eha
5.4.3 Liquid Lasers 114 P ;IrBq6|o
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 Reatdh
5.4.5 Solid-State Lasers 117 V< k8N^
5.4.6 Other Lasers 119 P#=`2a#G
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