Optical Metrology Third Edition +
{a :vurU$\ Kjell J. G˚asvik
%(6f Spectra Vision AS, Trondheim, Norway
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EF"ar w2+RX-6Ie Preface to the Third Edition xi
M8KfC! 1Basics 1
}s}9@kl;& 1.1 Introduction 1
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KaI }O 1.2 Wave Motion. The Electromagnetic Spectrum 1
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PKtx 1.3 The Plane Wave. Light Rays 3
!c SD9q* 1.4 Phase Difference 4
mG?a)P 1.5 Complex Notation. Complex Amplitude 5
{H])Fob 1.6 Oblique Incidence of A Plane Wave 5
Y] P}7GZ 1.7 The Spherical Wave 7
OR?8F5o?p 1.8 The Intensity 8
})mez[UmZ 1.9 Geometrical Optics 8
&cpRB&bf 1.10 The Simple Convex (Positive) Lens 10
?a}eRA7 1.11 A Plane-Wave Set-Up 11
{GHGFi`Z 2 Gaussian Optics 15
e% 5! 2.1 Introduction 15
1+y&n? 2.2 Refraction at a Spherical Surface 15
XJ?@l3D: 2.2.1 Examples 19
,x{5,K.yWq 2.3 The General Image-Forming System 19
^<y$+HcH 2.4 The Image-Formation Process 21
8$G$Rdn 2.5 Reflection at a Spherical Surface 23
dcHkb,HsO 2.6 Aspheric Lenses 25
l_,8_u7G 2.7 Stops and Apertures 26
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0\t 2.8 Lens Aberrations. Computer Lens Design 28
c#HocwP@ 2.9 Imaging and The Lens Formula 29
;P2~cQjD; 2.10 Standard Optical Systems 30
gvcT_' 2.10.1 Afocal Systems. The Telescope 30
lPFMNRt~8 2.10.2 The Simple Magnifier 32
KpwUp5K 2.10.3 The Microscope 34
>@oO7<WB 3 Interference 37
3_33@MM 3.1 Introduction 37
e;!<3b 3.2 General Description 37
>`oO(d}n[0 3.3 Coherence 38
Pyyx/u+?@ 3.4 Interference between two Plane Waves 41
57[O)5u.+ 3.4.1 Laser Doppler Velocimetry (LDV) 45
JBoo7a1 3.5 Interference between other Waves 46
X0!48fL* 3.6 Interferometry 49
{|rwIRe 3.6.1 Wavefront Division 50
Qz$.t>@V= 3.6.2 Amplitude Division 51
OmoY] 8N} 3.6.3 The Dual-Frequency Michelson Interferometer 54
NEGpf[$ 3.6.4 Heterodyne (Homodyne) Detection 55
7s.sbP~ 3.7 Spatial and Temporal Coherence 56
V).M\ 3.8 Optical Coherence Tomography 61
l;|1C[V 4 Diffraction 67
As)-a5! 4.1 Introduction 67
MaMs( 4.2 Diffraction from a Single Slit 67
}>0UaK 4.3 Diffraction from a Grating 70
:$}67b)MO 4.3.1 The Grating Equation. Amplitude Transmittance 70
~?L. n:wu 4.3.2 The Spatial Frequency Spectrum 73
F[ ? t"d 4.4 Fourier Optics 75
f3596a 4.5 Optical Filtering 76
z ,ledTl 4.5.1 Practical Filtering Set-Ups 78
l7x%G@1#~W 4.6 Physical Optics Description
vkt)!hl ` of Image Formation 81
+:Y6O'h. 4.6.1 The Coherent Transfer Function 83
Zmp ^!|=X! 4.6.2 The Incoherent Transfer Function 85
F`38sq 4.6.3 The Depth of Focus 88
(TY^
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kw yvd`J8 5 Light Sources and Detectors 99
u;Z~Px4]v 5.1 Introduction 99
?VzST } 5.2 Radiometry. Photometry 99
Ur@'X- 5.2.1 Lambertian Surface 102
Fh?q;oEj 5.2.2 Blackbody Radiator 103
Ng-3|N 5.2.3 Examples 105
Z#Zk) 5.3 Incoherent Light Sources 108
ml3]CcKn 5.4 Coherent Light Sources 109
9^aMmN&6N2 5.4.1 Stimulated Emission 109
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l3-x 5.4.2 Gas Lasers 112
4)"jg[ 5.4.3 Liquid Lasers 114
"urQUpF 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
/sYD+*a 5.4.5 Solid-State Lasers 117
].Et&v 5.4.6 Other Lasers 119
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