Optical Metrology Third Edition 2pH2s\r<UJ .Ff;St Kjell J. G˚asvik
P~iu|j Spectra Vision AS, Trondheim, Norway
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%I;ej{*c SQWwxFJ Preface to the Third Edition xi
o\1"ux;b 1Basics 1
TZi%,yK 1.1 Introduction 1
KWCA9.w4q 1.2 Wave Motion. The Electromagnetic Spectrum 1
_sbZyL 1.3 The Plane Wave. Light Rays 3
x "]%q^x 1.4 Phase Difference 4
'wvZnb 1.5 Complex Notation. Complex Amplitude 5
'y}l9alF 1.6 Oblique Incidence of A Plane Wave 5
? QwDV` 1.7 The Spherical Wave 7
'g^;_=^G 1.8 The Intensity 8
}E[S%W[ 1.9 Geometrical Optics 8
lLxKC7b 1.10 The Simple Convex (Positive) Lens 10
thOQcOf0$ 1.11 A Plane-Wave Set-Up 11
;n00kel$ 2 Gaussian Optics 15
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D. 2.1 Introduction 15
r75,mX 2.2 Refraction at a Spherical Surface 15
> YKvwbCf8 2.2.1 Examples 19
Yb]eWLv 2.3 The General Image-Forming System 19
[ahD%UxO5 2.4 The Image-Formation Process 21
<<6i6b 2.5 Reflection at a Spherical Surface 23
hZVF72D26 2.6 Aspheric Lenses 25
D@!`b6 2.7 Stops and Apertures 26
0SwWLq 2.8 Lens Aberrations. Computer Lens Design 28
AVGb;)x# 2.9 Imaging and The Lens Formula 29
`]#D dJ_| 2.10 Standard Optical Systems 30
Z 3m5D K 2.10.1 Afocal Systems. The Telescope 30
@ >%I\ 2.10.2 The Simple Magnifier 32
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pi q%b] 3 Interference 37
aU<0<Dx 3.1 Introduction 37
36@)a5 3.2 General Description 37
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ah>;wW!6/ 3.4 Interference between two Plane Waves 41
8OqG{jmG 3.4.1 Laser Doppler Velocimetry (LDV) 45
IfF<8~~E 3.5 Interference between other Waves 46
6{8qATLR 3.6 Interferometry 49
[a53H$`\5 3.6.1 Wavefront Division 50
1RY}mq 3.6.2 Amplitude Division 51
%E3|b6k\ 3.6.3 The Dual-Frequency Michelson Interferometer 54
v:PNt#Ta 3.6.4 Heterodyne (Homodyne) Detection 55
X4!`
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br.jj 3.8 Optical Coherence Tomography 61
"(F>?pq 4 Diffraction 67
R;.zS^LL 4.1 Introduction 67
@2v L'6 4.2 Diffraction from a Single Slit 67
p~J`}>yo 4.3 Diffraction from a Grating 70
.M!6${N); 4.3.1 The Grating Equation. Amplitude Transmittance 70
rV<yM$IA 4.3.2 The Spatial Frequency Spectrum 73
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IVzJ| 4.5 Optical Filtering 76
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t/yGMR= 4.6 Physical Optics Description
/k|y \'< of Image Formation 81
s4Lqam! 4.6.1 The Coherent Transfer Function 83
ajq [ID 4.6.2 The Incoherent Transfer Function 85
PaP47>( 4.6.3 The Depth of Focus 88
'IY?7+[ 4.7 The Phase-Modulated Sinusoidal Grating 89
Aa[p7{e 5 Light Sources and Detectors 99
+v2Fr} 5.1 Introduction 99
/zMiy? 5.2 Radiometry. Photometry 99
8`Q8Mct$< 5.2.1 Lambertian Surface 102
KFCrJ) 5.2.2 Blackbody Radiator 103
;Xk-hhR 5.2.3 Examples 105
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##~Y.9 5.3 Incoherent Light Sources 108
fWhw I+ 5.4 Coherent Light Sources 109
1q0DOf]!T 5.4.1 Stimulated Emission 109
(zIP@ H 5.4.2 Gas Lasers 112
P95U{ 5.4.3 Liquid Lasers 114
Q#Q]xJH 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
XrS. [ 5.4.5 Solid-State Lasers 117
<e-9We." 5.4.6 Other Lasers 119
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