Optical Metrology Third Edition Y(4#b`k3
8U07]=Bt<
Kjell J. G˚asvik 6NV- &0 _
Spectra Vision AS, Trondheim, Norway |? !Ew# w
^rc!X]C9
nKJJ7 R L
Preface to the Third Edition xi 3P!Jw7e
1Basics 1 @i9T),@
1.1 Introduction 1 Jk) ^6
1.2 Wave Motion. The Electromagnetic Spectrum 1 j 6~#_t[
1.3 The Plane Wave. Light Rays 3 8S>T1st
1.4 Phase Difference 4 Gv!*
Qk4
1.5 Complex Notation. Complex Amplitude 5 M<, E[2op
1.6 Oblique Incidence of A Plane Wave 5 }7Si2S
1.7 The Spherical Wave 7 `V@{#+X
1.8 The Intensity 8 XQu ~/{A=
1.9 Geometrical Optics 8 lbv9 kk[
1.10 The Simple Convex (Positive) Lens 10 05\A 7.iy
1.11 A Plane-Wave Set-Up 11 p
AzPi
2 Gaussian Optics 15 n:GK0wu.s
2.1 Introduction 15 9IKFrCO9,
2.2 Refraction at a Spherical Surface 15 )jK"\'cK
2.2.1 Examples 19 {ZH9W
2.3 The General Image-Forming System 19 )POuH*j
2.4 The Image-Formation Process 21 bGvALz'
2.5 Reflection at a Spherical Surface 23 0)V< )"i
2.6 Aspheric Lenses 25 J(0.eD91v
2.7 Stops and Apertures 26 [e
)j,Q1
2.8 Lens Aberrations. Computer Lens Design 28 bmEo5f~C!
2.9 Imaging and The Lens Formula 29 Zi=Nr3b
2.10 Standard Optical Systems 30 M?4)U"_VE
2.10.1 Afocal Systems. The Telescope 30 U3 e3
2.10.2 The Simple Magnifier 32 ;f7(d\=y
2.10.3 The Microscope 34 ? Ovl(4VG
3 Interference 37
&j,rq?eh$
3.1 Introduction 37 *]fBd<(8
3.2 General Description 37 Bl-nS{9"
3.3 Coherence 38 adh=Kp e!w
3.4 Interference between two Plane Waves 41 d_&R>GmR$
3.4.1 Laser Doppler Velocimetry (LDV) 45 A
e&t#,)
3.5 Interference between other Waves 46 E8WOXoP(
3.6 Interferometry 49 u{'bd;.7
3.6.1 Wavefront Division 50 s#ijpc>h
3.6.2 Amplitude Division 51 q28i9$Yqj\
3.6.3 The Dual-Frequency Michelson Interferometer 54 y88FT#hR|5
3.6.4 Heterodyne (Homodyne) Detection 55 2*-s3 >VK
3.7 Spatial and Temporal Coherence 56 7z"xjA
3.8 Optical Coherence Tomography 61 ?yF)tF+<
4 Diffraction 67 NaSg K
4.1 Introduction 67 .N8AkQ (Ok
4.2 Diffraction from a Single Slit 67
"w0>
4.3 Diffraction from a Grating 70 mHo}, |
4.3.1 The Grating Equation. Amplitude Transmittance 70 ~#dNGWwG
4.3.2 The Spatial Frequency Spectrum 73 p6]4YGw*^
4.4 Fourier Optics 75 <k'=_mC_
4.5 Optical Filtering 76 5 fjeBfy
4.5.1 Practical Filtering Set-Ups 78 6~sb8pK.=
4.6 Physical Optics Description *
c]
:,5
of Image Formation 81 Z9s tB>?
4.6.1 The Coherent Transfer Function 83 bo rt2k
4.6.2 The Incoherent Transfer Function 85 l [?o du4
4.6.3 The Depth of Focus 88 j0!Z 20
4.7 The Phase-Modulated Sinusoidal Grating 89 M"2Tuwz
5 Light Sources and Detectors 99 KFdTw{GlJ7
5.1 Introduction 99 Qwb=N
5.2 Radiometry. Photometry 99 nnX,_5s
5.2.1 Lambertian Surface 102 v2:A 4Pd:+
5.2.2 Blackbody Radiator 103 Tm5]M$)
5.2.3 Examples 105 j^T .7Zv
5.3 Incoherent Light Sources 108 y]aV7
`]
5.4 Coherent Light Sources 109 S,Boutd
5.4.1 Stimulated Emission 109 7jT]J
5.4.2 Gas Lasers 112 1+RG@Cp
5.4.3 Liquid Lasers 114 >tnQuFKg]
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 Mo|[Muj8b
5.4.5 Solid-State Lasers 117 V} Y %9V
5.4.6 Other Lasers 119 Y 9]
. 9D++SU2 :}
. W~ E%Eq3
.
