Optical Metrology Third Edition `@%LzeGz UZ";a 453r Kjell J. G˚asvik
wM{s|Ay Spectra Vision AS, Trondheim, Norway
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&3&HY:yF F[MFx^sT{ Preface to the Third Edition xi
eH,or ,r 1Basics 1
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=e 1.1 Introduction 1
Xc.`-J~Il 1.2 Wave Motion. The Electromagnetic Spectrum 1
?4uL-z](V 1.3 The Plane Wave. Light Rays 3
"jCu6Rj d 1.4 Phase Difference 4
c " ,*h 1.5 Complex Notation. Complex Amplitude 5
,z6~?6m 1.6 Oblique Incidence of A Plane Wave 5
0 "#HJA44 1.7 The Spherical Wave 7
vD4*&|8T# 1.8 The Intensity 8
Zd& S @Z 1.9 Geometrical Optics 8
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1.10 The Simple Convex (Positive) Lens 10
{+Jv+J9 1.11 A Plane-Wave Set-Up 11
,,TnIouy 2 Gaussian Optics 15
M%#e1 "n 2.1 Introduction 15
Va8&Z 2.2 Refraction at a Spherical Surface 15
x^CS"v7 2.2.1 Examples 19
Y*hCMy; 2.3 The General Image-Forming System 19
-qoH,4w 2.4 The Image-Formation Process 21
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4 2.5 Reflection at a Spherical Surface 23
s^SJ Y{ 2.6 Aspheric Lenses 25
/R F7j; 2.7 Stops and Apertures 26
ce(#2o&` 2.8 Lens Aberrations. Computer Lens Design 28
N g,j# 2.9 Imaging and The Lens Formula 29
M =W z 2.10 Standard Optical Systems 30
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ne 2.10.1 Afocal Systems. The Telescope 30
mc3"`+o 2.10.2 The Simple Magnifier 32
05[SC}MCA 2.10.3 The Microscope 34
11lsf/IP 3 Interference 37
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v0y(58Rz. 3.2 General Description 37
Xr{v ~bf 3.3 Coherence 38
n`KY9[0U= 3.4 Interference between two Plane Waves 41
#;<Y[hR{P 3.4.1 Laser Doppler Velocimetry (LDV) 45
~ K=b\xc^ 3.5 Interference between other Waves 46
}\LQ3y"[ 3.6 Interferometry 49
H.0K?N&\?> 3.6.1 Wavefront Division 50
,0k;! YK 3.6.2 Amplitude Division 51
snJ129}A 3.6.3 The Dual-Frequency Michelson Interferometer 54
= / 8cp 3.6.4 Heterodyne (Homodyne) Detection 55
E.f%H( b 3.7 Spatial and Temporal Coherence 56
4I7>f]=) 3.8 Optical Coherence Tomography 61
cNH7C"@GVu 4 Diffraction 67
c`W,~[Q<O+ 4.1 Introduction 67
w >YDNOk 4.2 Diffraction from a Single Slit 67
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3Hf Q 4.3 Diffraction from a Grating 70
8_F1AU? u 4.3.1 The Grating Equation. Amplitude Transmittance 70
Q.[0c t 4.3.2 The Spatial Frequency Spectrum 73
(#'>(t(4 4.4 Fourier Optics 75
3sk9`=[{$ 4.5 Optical Filtering 76
*`U~?q} 4.5.1 Practical Filtering Set-Ups 78
Z{R> 4.6 Physical Optics Description
'Vbi VLWD of Image Formation 81
h$*!8=M 4.6.1 The Coherent Transfer Function 83
U~8 g_* 4.6.2 The Incoherent Transfer Function 85
[!z ,lY> 4.6.3 The Depth of Focus 88
j@9T.P1 4.7 The Phase-Modulated Sinusoidal Grating 89
}M+7 T\ J! 5 Light Sources and Detectors 99
_j3f Ar(V 5.1 Introduction 99
Bz zTGWq\ 5.2 Radiometry. Photometry 99
% `3 jL7| 5.2.1 Lambertian Surface 102
M}Sv8D]I 5.2.2 Blackbody Radiator 103
26nx`w?j( 5.2.3 Examples 105
$^ P0F9~0 5.3 Incoherent Light Sources 108
VE24ToI?W" 5.4 Coherent Light Sources 109
MJvp6n 5.4.1 Stimulated Emission 109
#F#%`Rv1 5.4.2 Gas Lasers 112
L$-T,Kze 5.4.3 Liquid Lasers 114
3u;oQ5 <(v 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
XR H!]! 5.4.5 Solid-State Lasers 117
7Wno':w8 5.4.6 Other Lasers 119
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