Optical Metrology Third Edition ^lZ7% 6
%r.C9 Kjell J. G˚asvik
F02TM#Zi Spectra Vision AS, Trondheim, Norway
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4~$U#$u_ ~uZ9%UB_m Preface to the Third Edition xi
^%Cd@!dk 1Basics 1
7_qsVhh]$E 1.1 Introduction 1
oPa oQbR(A 1.2 Wave Motion. The Electromagnetic Spectrum 1
c7@/<*E+ 1.3 The Plane Wave. Light Rays 3
>yT1oD0+x 1.4 Phase Difference 4
SnXM`v, 1.5 Complex Notation. Complex Amplitude 5
`fX\pOk~e 1.6 Oblique Incidence of A Plane Wave 5
+MaEet 1.7 The Spherical Wave 7
H*3u]Ebh 1.8 The Intensity 8
_ eBNbO_J 1.9 Geometrical Optics 8
ps,Kj3^T< 1.10 The Simple Convex (Positive) Lens 10
;'V[8`Z@ 1.11 A Plane-Wave Set-Up 11
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g+ 2 Gaussian Optics 15
<b_K*]Z 2.1 Introduction 15
Nv;'Ys P 2.2 Refraction at a Spherical Surface 15
1EQ:@1 2.2.1 Examples 19
y $uq`FW 2.3 The General Image-Forming System 19
fSVM[ 2.4 The Image-Formation Process 21
xy!E_CuC$ 2.5 Reflection at a Spherical Surface 23
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' 2.6 Aspheric Lenses 25
vShB26b 2.7 Stops and Apertures 26
Bd=K40Z: 2.8 Lens Aberrations. Computer Lens Design 28
P(8
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US9aW)8 2.10 Standard Optical Systems 30
*& );-r`. 2.10.1 Afocal Systems. The Telescope 30
d$+0;D4E 2.10.2 The Simple Magnifier 32
uTrzC+\aU 2.10.3 The Microscope 34
*9=}f;~ 3 Interference 37
<'sm($.2 3.1 Introduction 37
l,b,U/3R. 3.2 General Description 37
rOEBL|P0 3.3 Coherence 38
s Iaehe'B 3.4 Interference between two Plane Waves 41
Xg_l4!T_l 3.4.1 Laser Doppler Velocimetry (LDV) 45
IV':sNV 3.5 Interference between other Waves 46
&{a#8sbf#c 3.6 Interferometry 49
$qZ6i 3.6.1 Wavefront Division 50
ZK'WKC 3.6.2 Amplitude Division 51
KOXG=P0 3.6.3 The Dual-Frequency Michelson Interferometer 54
f8r7SFwUv 3.6.4 Heterodyne (Homodyne) Detection 55
$/#[,1 3.7 Spatial and Temporal Coherence 56
zlQBBm;fE 3.8 Optical Coherence Tomography 61
lcReRcjm 4 Diffraction 67
I D-I<Ev 4.1 Introduction 67
xpuTh"ED 4.2 Diffraction from a Single Slit 67
|+sAqx1IF 4.3 Diffraction from a Grating 70
ls9Y? 4.3.1 The Grating Equation. Amplitude Transmittance 70
3jJV5J'" 4.3.2 The Spatial Frequency Spectrum 73
p*YV*Arv 4.4 Fourier Optics 75
B]gyj 4.5 Optical Filtering 76
]qq2VO<b 4.5.1 Practical Filtering Set-Ups 78
MuzQz.C 4.6 Physical Optics Description
S-Vxlku] of Image Formation 81
bvhV 4.6.1 The Coherent Transfer Function 83
XA. 1Y) 4.6.2 The Incoherent Transfer Function 85
>zfx2wh\a 4.6.3 The Depth of Focus 88
})(robBkA 4.7 The Phase-Modulated Sinusoidal Grating 89
|{ZdAr.; 5 Light Sources and Detectors 99
FBouXu# 5.1 Introduction 99
lm&^`Bn) 5.2 Radiometry. Photometry 99
r#w 7qEtD 5.2.1 Lambertian Surface 102
[GI2%uA0 5.2.2 Blackbody Radiator 103
0xCe6{86 5.2.3 Examples 105
TEj"G7]1$A 5.3 Incoherent Light Sources 108
pTTM(Hrx 5.4 Coherent Light Sources 109
w6mYLK% 5.4.1 Stimulated Emission 109
NzM ,0q 5.4.2 Gas Lasers 112
>MRuoJ 5.4.3 Liquid Lasers 114
==%5Ci7qMy 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
jMS>B)'TO 5.4.5 Solid-State Lasers 117
K g.O2F77 5.4.6 Other Lasers 119
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