Optical Metrology Third Edition K= nDC.
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Kjell J. G˚asvik C&R U
Spectra Vision AS, Trondheim, Norway DvB{N`COd
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Preface to the Third Edition xi o if|X7H;
1Basics 1 Cb`, N
1.1 Introduction 1 L F } d
1.2 Wave Motion. The Electromagnetic Spectrum 1 )tnbl"0
1.3 The Plane Wave. Light Rays 3 YOj&1ymBZ
1.4 Phase Difference 4 odC"#Rb
1.5 Complex Notation. Complex Amplitude 5 \ 7>*ULP
1.6 Oblique Incidence of A Plane Wave 5 B]: |;d
1.7 The Spherical Wave 7 /BD'{tZ]Sl
1.8 The Intensity 8 Zq<j}vVJ
1.9 Geometrical Optics 8 -mn/Yv
1.10 The Simple Convex (Positive) Lens 10 *|<~IQg
1.11 A Plane-Wave Set-Up 11 'b z&m( !
2 Gaussian Optics 15 D~U RY_[A
2.1 Introduction 15 C "B'Dj
2.2 Refraction at a Spherical Surface 15 p<#aXs jy
2.2.1 Examples 19 kh:_,g
2.3 The General Image-Forming System 19 0I<L<^s3^U
2.4 The Image-Formation Process 21 _cj=}!I
2.5 Reflection at a Spherical Surface 23 _ DT,iF*6
2.6 Aspheric Lenses 25 DR:DXJc
2.7 Stops and Apertures 26 &qWB\m
2.8 Lens Aberrations. Computer Lens Design 28 (GC5r#AnS
2.9 Imaging and The Lens Formula 29 9==4T$nM[
2.10 Standard Optical Systems 30 ,aGIq. *v
2.10.1 Afocal Systems. The Telescope 30 xkii Qs)
2.10.2 The Simple Magnifier 32 wy#>Aq
2.10.3 The Microscope 34 7 9@CO6
3 Interference 37 oz) 4YBf
3.1 Introduction 37 WZPj?ou`G
3.2 General Description 37 qtozMa
3.3 Coherence 38 s%`l>#H
3.4 Interference between two Plane Waves 41 5`+9 <8V
3.4.1 Laser Doppler Velocimetry (LDV) 45 cz /cY:o)
3.5 Interference between other Waves 46 C.ji]P#
3.6 Interferometry 49 7 pQ 5`;P
3.6.1 Wavefront Division 50 bv '>4a
3.6.2 Amplitude Division 51 {*TB }Xsr,
3.6.3 The Dual-Frequency Michelson Interferometer 54 |N"K83_pr
3.6.4 Heterodyne (Homodyne) Detection 55 ]@<VLP?
3.7 Spatial and Temporal Coherence 56 B["+7\c<~
3.8 Optical Coherence Tomography 61
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4 Diffraction 67 CEaAtAM
4.1 Introduction 67 $p4e8j[EJ
4.2 Diffraction from a Single Slit 67 qlYi:uygY
4.3 Diffraction from a Grating 70 v<g=uEpN
4.3.1 The Grating Equation. Amplitude Transmittance 70 +Ln^<!P
4.3.2 The Spatial Frequency Spectrum 73 oe2*$\?.
4.4 Fourier Optics 75 B5vLV@>]
4.5 Optical Filtering 76 fpf,gb8[$n
4.5.1 Practical Filtering Set-Ups 78 Z |Rc54Ct
4.6 Physical Optics Description `[(XZhN
of Image Formation 81 &Tuj`DL
4.6.1 The Coherent Transfer Function 83 &*ocr &
4.6.2 The Incoherent Transfer Function 85 !#W>x49}
4.6.3 The Depth of Focus 88 9T5 F0?qd
4.7 The Phase-Modulated Sinusoidal Grating 89 ^>Z_3 {s:$
5 Light Sources and Detectors 99 l&U$L N$*e
5.1 Introduction 99 0m4M@94
5.2 Radiometry. Photometry 99 { +w.Z,D"
5.2.1 Lambertian Surface 102 4:NMZ `~
5.2.2 Blackbody Radiator 103 h
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5.2.3 Examples 105 h8 N|m0W
5.3 Incoherent Light Sources 108 SJa>!]U'xI
5.4 Coherent Light Sources 109 %aMC[ i
5.4.1 Stimulated Emission 109 =FV(m
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5.4.2 Gas Lasers 112 EFh^C.S8
5.4.3 Liquid Lasers 114 0RMW>v/7kL
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 Kc2y
5.4.5 Solid-State Lasers 117 gjN'D!'E1D
5.4.6 Other Lasers 119 lG Wz
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