Optical Metrology Third Edition <wC1+/ ]
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Kjell J. G˚asvik <'-me09C*
Spectra Vision AS, Trondheim, Norway -}J8|gwwp
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Preface to the Third Edition xi epF>z
1Basics 1 X&IY(CX
1.1 Introduction 1 {>Px.%[<
1.2 Wave Motion. The Electromagnetic Spectrum 1 g6 V*wjC
1.3 The Plane Wave. Light Rays 3 .tNB07=7
1.4 Phase Difference 4 J$;)TI
1.5 Complex Notation. Complex Amplitude 5 7h2bL6Y88
1.6 Oblique Incidence of A Plane Wave 5 ^Ram8fW
1.7 The Spherical Wave 7 msylb~ ^
1.8 The Intensity 8 tpN}9N
1.9 Geometrical Optics 8 ;qMlGXW*q
1.10 The Simple Convex (Positive) Lens 10 Mx"tUoU6z
1.11 A Plane-Wave Set-Up 11 A qkK`iJ#
2 Gaussian Optics 15 r . ^&%D
2.1 Introduction 15 .Dm{mV@*T
2.2 Refraction at a Spherical Surface 15 ]_?y[@Z P
2.2.1 Examples 19 [_ d*J/ X
2.3 The General Image-Forming System 19 %u }sVRJ
2.4 The Image-Formation Process 21 R. N*G]K 5
2.5 Reflection at a Spherical Surface 23 ;[9Is\
2.6 Aspheric Lenses 25 9:o3JGHSc
2.7 Stops and Apertures 26 |xm|Q(PG
2.8 Lens Aberrations. Computer Lens Design 28 z3]U% y(,
2.9 Imaging and The Lens Formula 29 Q_.Fw\l$`
2.10 Standard Optical Systems 30 k6BgY|0g C
2.10.1 Afocal Systems. The Telescope 30
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2.10.2 The Simple Magnifier 32 ^~l<N @
2.10.3 The Microscope 34 =*jcO119L
3 Interference 37 -e>)yM `i
3.1 Introduction 37 Qs:r@"hE
3.2 General Description 37 u#~! %~
3.3 Coherence 38 aehMLl9cl
3.4 Interference between two Plane Waves 41 ".f:R9-
3.4.1 Laser Doppler Velocimetry (LDV) 45 3G^Ed)JvE
3.5 Interference between other Waves 46 t;Om9
3.6 Interferometry 49 N &=2 /
3.6.1 Wavefront Division 50 q;.]e#wvh
3.6.2 Amplitude Division 51 K8Zk{on
3.6.3 The Dual-Frequency Michelson Interferometer 54 6^;!9$G|D*
3.6.4 Heterodyne (Homodyne) Detection 55
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3.7 Spatial and Temporal Coherence 56 avu,o
3.8 Optical Coherence Tomography 61 ->=++
4 Diffraction 67 AW5g (
4.1 Introduction 67 b_ yXM
4.2 Diffraction from a Single Slit 67 i5Q<~;Z+
4.3 Diffraction from a Grating 70 6/ipdi[
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4.3.1 The Grating Equation. Amplitude Transmittance 70 Xf9%A2 iB
4.3.2 The Spatial Frequency Spectrum 73 _#m qg]W '
4.4 Fourier Optics 75 dRm'$
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4.5 Optical Filtering 76 *(B[J
4.5.1 Practical Filtering Set-Ups 78 uFZB8+
4.6 Physical Optics Description u V7Hsg9l
of Image Formation 81 ~e9INZe-j
4.6.1 The Coherent Transfer Function 83 mcr#Ze
4.6.2 The Incoherent Transfer Function 85 bK9~C" k
4.6.3 The Depth of Focus 88 MXk. 2
4.7 The Phase-Modulated Sinusoidal Grating 89 X388Gs; e
5 Light Sources and Detectors 99 vfJ k?
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5.1 Introduction 99 }c ;um
5.2 Radiometry. Photometry 99 E^a `IA
5.2.1 Lambertian Surface 102 )O C[;>F7
5.2.2 Blackbody Radiator 103 v qMk)htIz
5.2.3 Examples 105 5l0rw)
5.3 Incoherent Light Sources 108 U^BXCu1km
5.4 Coherent Light Sources 109 :b*`hWnQ
5.4.1 Stimulated Emission 109 Cf[F`pFM
5.4.2 Gas Lasers 112 ;<@6f @
5.4.3 Liquid Lasers 114 k<zGrq=8J
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 h./vTNMc
5.4.5 Solid-State Lasers 117 OG7v'vmY
5.4.6 Other Lasers 119 5'Jh2r
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