Optical Metrology Third Edition }3j/%oN.(
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Kjell J. G˚asvik k# ZO4
Spectra Vision AS, Trondheim, Norway Qr1%"^4
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Preface to the Third Edition xi Yq4_ss'nB
1Basics 1 BQ,]]}e43z
1.1 Introduction 1 ;"
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1.2 Wave Motion. The Electromagnetic Spectrum 1 7& /iuP$.
1.3 The Plane Wave. Light Rays 3 L{N9h1 ]
1.4 Phase Difference 4 "]JE]n}Ulg
1.5 Complex Notation. Complex Amplitude 5 ]zmY] 5
1.6 Oblique Incidence of A Plane Wave 5 \gki!!HQ
1.7 The Spherical Wave 7 F=Z|Ji#
1.8 The Intensity 8 @G^]kDFM{
1.9 Geometrical Optics 8 w '~f Z*
1.10 The Simple Convex (Positive) Lens 10 0Q_AF`"
1.11 A Plane-Wave Set-Up 11 POfvs]
2 Gaussian Optics 15 HGs.v}@&
2.1 Introduction 15 FGG Fi(
2.2 Refraction at a Spherical Surface 15 E). N u
2.2.1 Examples 19 *I( >[m!
2.3 The General Image-Forming System 19 @sav8 ]
2.4 The Image-Formation Process 21 bT,]= h"0
2.5 Reflection at a Spherical Surface 23 vi[ "G7
2.6 Aspheric Lenses 25 YDyOhv
2.7 Stops and Apertures 26 ]MfT5#(6h
2.8 Lens Aberrations. Computer Lens Design 28 eEb(TG~,Y
2.9 Imaging and The Lens Formula 29 #n]js7
2.10 Standard Optical Systems 30 AVGb;)x#
2.10.1 Afocal Systems. The Telescope 30 !F/;WjHz
2.10.2 The Simple Magnifier 32 } ?$d~]t)
2.10.3 The Microscope 34 )/HSt%>
3 Interference 37 ` fu(
3.1 Introduction 37 7] @vPr;:
3.2 General Description 37 *e H[~ 4
3.3 Coherence 38 8TD:~ee
3.4 Interference between two Plane Waves 41 F +D2
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3.4.1 Laser Doppler Velocimetry (LDV) 45 `LVItP(GUM
3.5 Interference between other Waves 46 %L=ro qz
3.6 Interferometry 49 H\W60|z9
3.6.1 Wavefront Division 50 CA7tI >y_
3.6.2 Amplitude Division 51 =&U JFu
3.6.3 The Dual-Frequency Michelson Interferometer 54 ':R)i.TS
3.6.4 Heterodyne (Homodyne) Detection 55 UaiDo" i
3.7 Spatial and Temporal Coherence 56 ba1zu|@w
3.8 Optical Coherence Tomography 61 K8XX O "
4 Diffraction 67 '=G 4R{
4.1 Introduction 67 iS&fp[Th
4.2 Diffraction from a Single Slit 67 <@.f #
4.3 Diffraction from a Grating 70 AH;0=<n
4.3.1 The Grating Equation. Amplitude Transmittance 70 2BS2$#c>
4.3.2 The Spatial Frequency Spectrum 73 wr~# rfH
4.4 Fourier Optics 75 UN'hnqC
4.5 Optical Filtering 76 Q[; !z1ur
4.5.1 Practical Filtering Set-Ups 78 "S(m1 L?
4.6 Physical Optics Description 2/ PaXI/Z
of Image Formation 81 X<Rh-1$8F
4.6.1 The Coherent Transfer Function 83 ELk$ lm& @
4.6.2 The Incoherent Transfer Function 85 X4!`
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4.6.3 The Depth of Focus 88 0\qbJ
4.7 The Phase-Modulated Sinusoidal Grating 89 -A(] ",*J
5 Light Sources and Detectors 99 f$Q#xlQM
5.1 Introduction 99 / FJAI
5.2 Radiometry. Photometry 99 6k%N\!_TUW
5.2.1 Lambertian Surface 102 lRi-?I| ~9
5.2.2 Blackbody Radiator 103 30-XFl
5.2.3 Examples 105 , b
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5.3 Incoherent Light Sources 108 _ M8 Q%
5.4 Coherent Light Sources 109
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5.4.1 Stimulated Emission 109 5JK{dis]k
5.4.2 Gas Lasers 112 Wo&MHMP
5.4.3 Liquid Lasers 114 tQ< ou,
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 K
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5.4.5 Solid-State Lasers 117 kG[ u$[B
5.4.6 Other Lasers 119 \m1r(*Ar
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