Optical Metrology Third Edition i q`}c
|c PC9,;T&7_ Kjell J. G˚asvik
m-t:'B Spectra Vision AS, Trondheim, Norway
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z}E_wg 4Ly>x>b< Preface to the Third Edition xi
6f +aGz 1Basics 1
i#-v4g 1.1 Introduction 1
ZWkRoJXNi 1.2 Wave Motion. The Electromagnetic Spectrum 1
mB-,\{) 1.3 The Plane Wave. Light Rays 3
k[@P526 1.4 Phase Difference 4
1<ag=D`F_" 1.5 Complex Notation. Complex Amplitude 5
JP8}+ 1.6 Oblique Incidence of A Plane Wave 5
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$Ivjcs: 1.9 Geometrical Optics 8
oPi>]#X 1.10 The Simple Convex (Positive) Lens 10
@HS*%N"* 1.11 A Plane-Wave Set-Up 11
HoPpUq5, 2 Gaussian Optics 15
?4':~;~ 2.1 Introduction 15
\D|IN'!D 2.2 Refraction at a Spherical Surface 15
D[+LU( 2.2.1 Examples 19
T#B#q1/ 2.3 The General Image-Forming System 19
7IxeSxXH 2.4 The Image-Formation Process 21
z>N[veX% 2.5 Reflection at a Spherical Surface 23
VKttJok1 2.6 Aspheric Lenses 25
`=Ip>7T& 2.7 Stops and Apertures 26
(H_dZL 2.8 Lens Aberrations. Computer Lens Design 28
B[L m}B[ 2.9 Imaging and The Lens Formula 29
m|q,ixg 2.10 Standard Optical Systems 30
h]<S0/ 2.10.1 Afocal Systems. The Telescope 30
G[KjK$.Ts? 2.10.2 The Simple Magnifier 32
2u$-(JfoS 2.10.3 The Microscope 34
rxyv+@~Nc 3 Interference 37
|<Ls;:5. 3.1 Introduction 37
Ic(qA{SM 3.2 General Description 37
Um+_S@h 3.3 Coherence 38
]c>@RXY' 3.4 Interference between two Plane Waves 41
D;YfQQr 3.4.1 Laser Doppler Velocimetry (LDV) 45
m]jA( 3.5 Interference between other Waves 46
|mtW) 3.6 Interferometry 49
| In{5Ek 3.6.1 Wavefront Division 50
egu{}5 3.6.2 Amplitude Division 51
LhO\a 3.6.3 The Dual-Frequency Michelson Interferometer 54
R&cTMd 3.6.4 Heterodyne (Homodyne) Detection 55
XmQ;Roe 3.7 Spatial and Temporal Coherence 56
PIH\*2\/ 3.8 Optical Coherence Tomography 61
MT/jpx 4 Diffraction 67
u[)X="-e# 4.1 Introduction 67
$5pCfW8> 4.2 Diffraction from a Single Slit 67
5&8E{YXr 4.3 Diffraction from a Grating 70
v*.R<-X: 4.3.1 The Grating Equation. Amplitude Transmittance 70
}T[@G6# 4.3.2 The Spatial Frequency Spectrum 73
|jIH gm 4.4 Fourier Optics 75
\9[vi +T 4.5 Optical Filtering 76
\=0;EI-j 4.5.1 Practical Filtering Set-Ups 78
Wx0i_HFR 4.6 Physical Optics Description
b d 1^ of Image Formation 81
=n,;S W 4.6.1 The Coherent Transfer Function 83
q=3>ij{v 4.6.2 The Incoherent Transfer Function 85
p-$C*0{ 4.6.3 The Depth of Focus 88
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0GEfl/ 4.7 The Phase-Modulated Sinusoidal Grating 89
PtkMzhX 5 Light Sources and Detectors 99
WRZpu95v 5.1 Introduction 99
a{ST4d'T 5.2 Radiometry. Photometry 99
Bj7*2} 5.2.1 Lambertian Surface 102
P8m0]T.&x 5.2.2 Blackbody Radiator 103
[WDzaRzd 5.2.3 Examples 105
oEX,\@+u 5.3 Incoherent Light Sources 108
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]y{tMC 5.4.1 Stimulated Emission 109
6SCjlaGW5 5.4.2 Gas Lasers 112
-f |/#1 5.4.3 Liquid Lasers 114
k1,k 9BK 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
})OS2F 5.4.5 Solid-State Lasers 117
NAo.79 5.4.6 Other Lasers 119
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