Optical Metrology Third Edition B&0W P5OF CjP<'0gT Kjell J. G˚asvik
SW'eTG Spectra Vision AS, Trondheim, Norway
`|nCnT'
i. (Af$ IF\ @uo` Preface to the Third Edition xi
-B&(&R 1Basics 1
k+w Ji 1.1 Introduction 1
rD a{Ve 1.2 Wave Motion. The Electromagnetic Spectrum 1
j%^4
1 y 1.3 The Plane Wave. Light Rays 3
J p+'"a 1.4 Phase Difference 4
FO:L+&hr?> 1.5 Complex Notation. Complex Amplitude 5
=!xX{o?64 1.6 Oblique Incidence of A Plane Wave 5
g$?^bu dxv 1.7 The Spherical Wave 7
&tvp)B?cWk 1.8 The Intensity 8
c@3 5\!9 1.9 Geometrical Optics 8
G8klWZAJ 1.10 The Simple Convex (Positive) Lens 10
3?I! 1.11 A Plane-Wave Set-Up 11
6[c|14l 2 Gaussian Optics 15
=\5WYC 2.1 Introduction 15
#~"IlBk\ 2.2 Refraction at a Spherical Surface 15
L\:m)g,F. 2.2.1 Examples 19
40h$-
VYT/ 2.3 The General Image-Forming System 19
/pPH D] 2.4 The Image-Formation Process 21
,)#rD9ZnC 2.5 Reflection at a Spherical Surface 23
a*U[;( 2.6 Aspheric Lenses 25
A@)Q-V8*9s 2.7 Stops and Apertures 26
#]tDxZ]
6 2.8 Lens Aberrations. Computer Lens Design 28
WcNQF!f 2.9 Imaging and The Lens Formula 29
}RI_k&; 2.10 Standard Optical Systems 30
a'?;;ZC- 2.10.1 Afocal Systems. The Telescope 30
": M]3. 2.10.2 The Simple Magnifier 32
}3X/"2SW^ 2.10.3 The Microscope 34
~44u_^a 3 Interference 37
,#3Aaw 3.1 Introduction 37
A+* lV*@0 3.2 General Description 37
+u0of^}= 3.3 Coherence 38
'WP~-}( 3.4 Interference between two Plane Waves 41
N'WTIM3W 3.4.1 Laser Doppler Velocimetry (LDV) 45
bHnKtaK4c 3.5 Interference between other Waves 46
>,]a>V 3.6 Interferometry 49
bXF8V 3.6.1 Wavefront Division 50
*pa hZiO 3.6.2 Amplitude Division 51
1Ys=KA-!_x 3.6.3 The Dual-Frequency Michelson Interferometer 54
K?'m#}] 3.6.4 Heterodyne (Homodyne) Detection 55
Yu_*P-Ja6 3.7 Spatial and Temporal Coherence 56
V=8db%^ 3.8 Optical Coherence Tomography 61
;QXg*GNAv$ 4 Diffraction 67
s_NY#MPz[ 4.1 Introduction 67
p7Wt(A 4.2 Diffraction from a Single Slit 67
5S!#^>_ 4.3 Diffraction from a Grating 70
t"GnmeH
i 4.3.1 The Grating Equation. Amplitude Transmittance 70
qP#LJPaS 4.3.2 The Spatial Frequency Spectrum 73
JHa1lj 4.4 Fourier Optics 75
\{ EVRRXn 4.5 Optical Filtering 76
(x2?{\? 4.5.1 Practical Filtering Set-Ups 78
/e>%yq<9B 4.6 Physical Optics Description
cmXbkM of Image Formation 81
.>R`#@+I 4.6.1 The Coherent Transfer Function 83
P-4$Qksx 4.6.2 The Incoherent Transfer Function 85
2.%)OC!q&5 4.6.3 The Depth of Focus 88
<jV,VKL# 4.7 The Phase-Modulated Sinusoidal Grating 89
vK)'3% 5 Light Sources and Detectors 99
Y
bJg{Sb 5.1 Introduction 99
aJ(/r.1G 5.2 Radiometry. Photometry 99
H^n@9U;[K 5.2.1 Lambertian Surface 102
hE(R[hc 5.2.2 Blackbody Radiator 103
m*_X PY 5.2.3 Examples 105
,EEAxmf 5.3 Incoherent Light Sources 108
YgcW1}
5.4 Coherent Light Sources 109
p\=T#lb 5.4.1 Stimulated Emission 109
9$HKP9G 5.4.2 Gas Lasers 112
PSq?8. 5.4.3 Liquid Lasers 114
; H ;h[ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
*zPqXtw!j 5.4.5 Solid-State Lasers 117
B.G6vx4yp 5.4.6 Other Lasers 119
Vhv'Z\ .
@l j| .
$4g{4-) .