Optical Metrology Third Edition L_ K\i? f\U&M,L\ ' Kjell J. G˚asvik
bXwoJ2 Spectra Vision AS, Trondheim, Norway
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K[ |;m`874 Preface to the Third Edition xi
"IS^a jaq 1Basics 1
$YY)g$ 1.1 Introduction 1
'Sy *'& 1.2 Wave Motion. The Electromagnetic Spectrum 1
SuH.lCF-g 1.3 The Plane Wave. Light Rays 3
Wo+CQH6( 1.4 Phase Difference 4
2qMsa>~ 1.5 Complex Notation. Complex Amplitude 5
33'lZ ubV 1.6 Oblique Incidence of A Plane Wave 5
v#]v,C-* 1.7 The Spherical Wave 7
u<=KC/vZe 1.8 The Intensity 8
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Df:7P> 1.10 The Simple Convex (Positive) Lens 10
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)Q CM2 2 Gaussian Optics 15
l()MYuLNV 2.1 Introduction 15
qJXsf M6 2.2 Refraction at a Spherical Surface 15
pNE\@U|4E 2.2.1 Examples 19
k7|z$=zY 2.3 The General Image-Forming System 19
q6JW@GT 2.4 The Image-Formation Process 21
(S)E |;f%C 2.5 Reflection at a Spherical Surface 23
1~5q :X 2.6 Aspheric Lenses 25
R 4$Q3vcH 2.7 Stops and Apertures 26
,' r L'Ys 2.8 Lens Aberrations. Computer Lens Design 28
dEd ]U49u 2.9 Imaging and The Lens Formula 29
t)gi.Ed1"L 2.10 Standard Optical Systems 30
\btR^;_\A 2.10.1 Afocal Systems. The Telescope 30
,mjfZ*N 2.10.2 The Simple Magnifier 32
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ca/o#9:N`: 3 Interference 37
hQ}7Z&O 3.1 Introduction 37
SU%rWH 3.2 General Description 37
d9-mWz(V+ 3.3 Coherence 38
s w.AfRQP 3.4 Interference between two Plane Waves 41
n^pZXb;Y 3.4.1 Laser Doppler Velocimetry (LDV) 45
Uy59zB2|= 3.5 Interference between other Waves 46
fQW_YQsb 3.6 Interferometry 49
ke9QT#~p!- 3.6.1 Wavefront Division 50
Go\} A:| s 3.6.2 Amplitude Division 51
H/Ec^Lc+_ 3.6.3 The Dual-Frequency Michelson Interferometer 54
(!VMnLlXRK 3.6.4 Heterodyne (Homodyne) Detection 55
p 37zz4 3.7 Spatial and Temporal Coherence 56
oa &z/`@ 3.8 Optical Coherence Tomography 61
0i*'N ch#i 4 Diffraction 67
+eBMn(7Cgv 4.1 Introduction 67
kUg+I_j6* 4.2 Diffraction from a Single Slit 67
HLSfoQ&)v 4.3 Diffraction from a Grating 70
6/mkJj+" 4.3.1 The Grating Equation. Amplitude Transmittance 70
@UpC{M--Wr 4.3.2 The Spatial Frequency Spectrum 73
yD[zzEuQ 4.4 Fourier Optics 75
xdL/0 N3 4.5 Optical Filtering 76
,zN3? /7 4.5.1 Practical Filtering Set-Ups 78
p` ADro* 4.6 Physical Optics Description
m +Q5vkW of Image Formation 81
Fo e>}6~{? 4.6.1 The Coherent Transfer Function 83
x A& 4.6.2 The Incoherent Transfer Function 85
XJmFJafQD 4.6.3 The Depth of Focus 88
b$? Xn {Y 4.7 The Phase-Modulated Sinusoidal Grating 89
`& u<aLA 5 Light Sources and Detectors 99
Z(Eke 5.1 Introduction 99
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>lraYMc<rZ 5.2.1 Lambertian Surface 102
;V(H7
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-7I1Lh#M 5.2.3 Examples 105
Jtp>m?1Ve 5.3 Incoherent Light Sources 108
y8w0eq94 5.4 Coherent Light Sources 109
ha|@ X p 5.4.1 Stimulated Emission 109
\-Iny=$ 5.4.2 Gas Lasers 112
-}Cc"qm 5.4.3 Liquid Lasers 114
&r'{(O8$N 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
/ lLov . 5.4.5 Solid-State Lasers 117
b|sc'eP#? 5.4.6 Other Lasers 119
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