Optical Metrology Third Edition OOus*ooo2
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Kjell J. G˚asvik Y#-pK)EeU
Spectra Vision AS, Trondheim, Norway uhmSp+%
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Preface to the Third Edition xi L|2WTyMU
1Basics 1 ss7Z-A 4z
1.1 Introduction 1 1NlpOVq:)
1.2 Wave Motion. The Electromagnetic Spectrum 1 h7\1 6j
1.3 The Plane Wave. Light Rays 3 6O'B:5~[2
1.4 Phase Difference 4 l(tMo7iPa
1.5 Complex Notation. Complex Amplitude 5 7tT L,Nxe
1.6 Oblique Incidence of A Plane Wave 5 lS`VJA6l.
1.7 The Spherical Wave 7 nfr..4,:
1.8 The Intensity 8 YQfQ[{kp
1.9 Geometrical Optics 8 Fmrl*tr
1.10 The Simple Convex (Positive) Lens 10 $xj> j
1.11 A Plane-Wave Set-Up 11 A}03s6^i;
2 Gaussian Optics 15 Q
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2.1 Introduction 15 K&vqk/JW1
2.2 Refraction at a Spherical Surface 15 qZ+^ND(I
2.2.1 Examples 19 :"oUn BY%
2.3 The General Image-Forming System 19 n<7R6)j6
2.4 The Image-Formation Process 21 y"0! 7^
2.5 Reflection at a Spherical Surface 23 9d,2d5Y
2.6 Aspheric Lenses 25 0R?LWm
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2.7 Stops and Apertures 26
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2.8 Lens Aberrations. Computer Lens Design 28 ZEU/6.
2.9 Imaging and The Lens Formula 29 5./(n7d_
2.10 Standard Optical Systems 30 I 9r> 3?
2.10.1 Afocal Systems. The Telescope 30 5l ( NX
2.10.2 The Simple Magnifier 32 yYZ0o.<&T*
2.10.3 The Microscope 34 w8AHs/'r
3 Interference 37 W \yaovAt
3.1 Introduction 37 3H/4$XJB
3.2 General Description 37 Q pbzx/2h
3.3 Coherence 38 Rlf#)4
3.4 Interference between two Plane Waves 41 M6b6lhg
3.4.1 Laser Doppler Velocimetry (LDV) 45 {BJn9B
3.5 Interference between other Waves 46 -jsk-,
3.6 Interferometry 49 K~>ESMZ5
3.6.1 Wavefront Division 50 =ar rp:
3.6.2 Amplitude Division 51 a<`s'N1G
3.6.3 The Dual-Frequency Michelson Interferometer 54 {5gh.
3.6.4 Heterodyne (Homodyne) Detection 55 Uu3< S
3.7 Spatial and Temporal Coherence 56 -} *Y fwK
3.8 Optical Coherence Tomography 61 0V:PRq;v0
4 Diffraction 67 V2|XcR
4.1 Introduction 67 "*aL(R
4.2 Diffraction from a Single Slit 67 Bl)DuCV
4.3 Diffraction from a Grating 70 b6UD!tXp
4.3.1 The Grating Equation. Amplitude Transmittance 70 5S ?+03h~
4.3.2 The Spatial Frequency Spectrum 73 4ky@rcD 1
4.4 Fourier Optics 75 %CiZ>`5n#
4.5 Optical Filtering 76 </8F
4.5.1 Practical Filtering Set-Ups 78 4! KUPgg
4.6 Physical Optics Description f"G?#dW/1
of Image Formation 81 a5xp[TlXn.
4.6.1 The Coherent Transfer Function 83 5 }t}Wc8
4.6.2 The Incoherent Transfer Function 85 f '<MDLl
4.6.3 The Depth of Focus 88 &a hZ_9Q
4.7 The Phase-Modulated Sinusoidal Grating 89 6> Szxkz
5 Light Sources and Detectors 99 \.<V ~d?
5.1 Introduction 99 mN:p=.&
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5.2 Radiometry. Photometry 99 nE3'm[)
5.2.1 Lambertian Surface 102 KoNJ;YiKtN
5.2.2 Blackbody Radiator 103 SBBi"U:
5.2.3 Examples 105 #2023Zo]
5.3 Incoherent Light Sources 108 9n${M:F
5.4 Coherent Light Sources 109 k/ 9S
5.4.1 Stimulated Emission 109 nZ 0rxx[V?
5.4.2 Gas Lasers 112 )N4_SA
5.4.3 Liquid Lasers 114 Gw oN=
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 ;:l\_b'Z}
5.4.5 Solid-State Lasers 117 n^ AQ !wC
5.4.6 Other Lasers 119 ^l4=/=RR
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