Optical Metrology Third Edition P%xz"l i
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Kjell J. G˚asvik x_|: 3I
Spectra Vision AS, Trondheim, Norway 4!tHJCq"
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Preface to the Third Edition xi ti9 cfv>
1Basics 1 xn)r6
1.1 Introduction 1
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1.2 Wave Motion. The Electromagnetic Spectrum 1 =Pg u?WU@
1.3 The Plane Wave. Light Rays 3 3a#j&]
1.4 Phase Difference 4 blA]z!FU
1.5 Complex Notation. Complex Amplitude 5 2F#R;B#2
1.6 Oblique Incidence of A Plane Wave 5 _G5M Q% z
1.7 The Spherical Wave 7 hDs.4MZC`
1.8 The Intensity 8
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1.9 Geometrical Optics 8 QZ54Osdl
1.10 The Simple Convex (Positive) Lens 10 s% ~p?_P
1.11 A Plane-Wave Set-Up 11 )04lf*ti
2 Gaussian Optics 15 ps6c>AN`A&
2.1 Introduction 15 B.J4}Ua
2.2 Refraction at a Spherical Surface 15 ]]Da/^K=Z
2.2.1 Examples 19 dc0R o,
2.3 The General Image-Forming System 19 `g iCytv
2.4 The Image-Formation Process 21 0IEFCDeCO
2.5 Reflection at a Spherical Surface 23 Zm@
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2.6 Aspheric Lenses 25 ^y"$k
2.7 Stops and Apertures 26 nNff~u)I
2.8 Lens Aberrations. Computer Lens Design 28 'E,Bl]8C5
2.9 Imaging and The Lens Formula 29 __V6TDehJ$
2.10 Standard Optical Systems 30 x 1"ikp}
2.10.1 Afocal Systems. The Telescope 30 ;DKwv}
2.10.2 The Simple Magnifier 32 =}~h bPJM
2.10.3 The Microscope 34 gaJIc^O
3 Interference 37 cuP5cL/Y
3.1 Introduction 37 8_tMiIE-pS
3.2 General Description 37 -W+67@(\8H
3.3 Coherence 38 eM vb*X6
3.4 Interference between two Plane Waves 41 Tl3{)(ezx
3.4.1 Laser Doppler Velocimetry (LDV) 45 U {>eE8l
3.5 Interference between other Waves 46 a".uS4x
3.6 Interferometry 49 N+PW, a
3.6.1 Wavefront Division 50 >9g` 9hB
3.6.2 Amplitude Division 51 9c=_p'G3Fw
3.6.3 The Dual-Frequency Michelson Interferometer 54 Y2Y2>^
3.6.4 Heterodyne (Homodyne) Detection 55 ^"%SHs
3.7 Spatial and Temporal Coherence 56 Zh.fv-Ecp
3.8 Optical Coherence Tomography 61
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4 Diffraction 67 sy` : wp
4.1 Introduction 67 k 852M^JP
4.2 Diffraction from a Single Slit 67 (r.{v@h,dV
4.3 Diffraction from a Grating 70 sHrpBm&O4
4.3.1 The Grating Equation. Amplitude Transmittance 70 _r qOzE)
4.3.2 The Spatial Frequency Spectrum 73 7
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4.4 Fourier Optics 75 GfU+'k;9
4.5 Optical Filtering 76 5@Q4[+5&_
4.5.1 Practical Filtering Set-Ups 78 !DCJ2h%E[_
4.6 Physical Optics Description L/GM~*Xp(O
of Image Formation 81 <5(8 LMF
4.6.1 The Coherent Transfer Function 83 lq_W;L
4.6.2 The Incoherent Transfer Function 85 iEki<e/
4.6.3 The Depth of Focus 88 y+?tU SPP
4.7 The Phase-Modulated Sinusoidal Grating 89 .VmI4V?}h
5 Light Sources and Detectors 99 Rhx7eU#&
5.1 Introduction 99 *ftJ (
5.2 Radiometry. Photometry 99 E!VAA=
5.2.1 Lambertian Surface 102 vd /_`l.D
5.2.2 Blackbody Radiator 103 ('uYA&9
5.2.3 Examples 105 fu=}E5ScK
5.3 Incoherent Light Sources 108 RQU5T 2,
5.4 Coherent Light Sources 109 %i%Xi+{3
5.4.1 Stimulated Emission 109 .tN)H1.:B
5.4.2 Gas Lasers 112 ojVpw4y.
5.4.3 Liquid Lasers 114 0mj=\ j
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 gqD`1/
5.4.5 Solid-State Lasers 117 %TG$5' )0
5.4.6 Other Lasers 119 7"xd'\c@
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