Optical Metrology Third Edition +Y|HO[
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Kjell J. G˚asvik VKXZA2<?'
Spectra Vision AS, Trondheim, Norway V0'_PR@;
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Preface to the Third Edition xi ]6 vqgu
1Basics 1 Dt8wd,B
1.1 Introduction 1 H-Z1i
1.2 Wave Motion. The Electromagnetic Spectrum 1 x8wal[6
1.3 The Plane Wave. Light Rays 3 SK_i 3?
1.4 Phase Difference 4 )./.rtP|4
1.5 Complex Notation. Complex Amplitude 5 (8/Qt\3jv
1.6 Oblique Incidence of A Plane Wave 5 HOY9{>E}z
1.7 The Spherical Wave 7 t(F] -[
1.8 The Intensity 8
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1.9 Geometrical Optics 8 13:0%IO
1.10 The Simple Convex (Positive) Lens 10 MX#MDA-4
1.11 A Plane-Wave Set-Up 11 $>mTPNF
2 Gaussian Optics 15 /o=,\kM
2.1 Introduction 15 Q8 r 7
2.2 Refraction at a Spherical Surface 15 o4g<[X)
2.2.1 Examples 19 M=aWL!nJ
2.3 The General Image-Forming System 19 Q&Ox\*sMK
2.4 The Image-Formation Process 21 9p5{,9 .3*
2.5 Reflection at a Spherical Surface 23 9AROvq|#
2.6 Aspheric Lenses 25 $k&}{c8P
2.7 Stops and Apertures 26 #Zy-X_r
2.8 Lens Aberrations. Computer Lens Design 28 Y8yRQ z u
2.9 Imaging and The Lens Formula 29 LYY|8)Nj2"
2.10 Standard Optical Systems 30 Q9
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2.10.1 Afocal Systems. The Telescope 30 `X7ns?
2.10.2 The Simple Magnifier 32 _F1{<" 4
2.10.3 The Microscope 34 #Ua+P(1q
3 Interference 37 ;qF#!Kb5
3.1 Introduction 37 4f?Y'+>Z,
3.2 General Description 37 `kP
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3.3 Coherence 38 t"@: a
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3.4 Interference between two Plane Waves 41 ~CB6+t>
3.4.1 Laser Doppler Velocimetry (LDV) 45 T8i9
3.5 Interference between other Waves 46 6:Nz=sw8
3.6 Interferometry 49 $ N#f)8v
3.6.1 Wavefront Division 50 SEc3`y ;j%
3.6.2 Amplitude Division 51 =Xc[EUi<;g
3.6.3 The Dual-Frequency Michelson Interferometer 54 c=T^)~$$
3.6.4 Heterodyne (Homodyne) Detection 55 Sr`gQ#b@r}
3.7 Spatial and Temporal Coherence 56 zaVDe9B,7
3.8 Optical Coherence Tomography 61 _~`\TS8
4 Diffraction 67 * YFe
4.1 Introduction 67 $MmCh&V
4.2 Diffraction from a Single Slit 67 L:y}
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4.3 Diffraction from a Grating 70 Pb|'f(
4.3.1 The Grating Equation. Amplitude Transmittance 70 Q\~4J1
4.3.2 The Spatial Frequency Spectrum 73 t?0D* !D
4.4 Fourier Optics 75 g& *pk5V>
4.5 Optical Filtering 76 L/w9dk*uv
4.5.1 Practical Filtering Set-Ups 78 k]Y#-Q1p~
4.6 Physical Optics Description |Aw(v6
of Image Formation 81 "kK IVlC
4.6.1 The Coherent Transfer Function 83 _F *("
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4.6.2 The Incoherent Transfer Function 85 ~{[~ =~\u
4.6.3 The Depth of Focus 88 _ID2yJ
4.7 The Phase-Modulated Sinusoidal Grating 89 sM?bUg0w
5 Light Sources and Detectors 99 ,0#5kc*X
5.1 Introduction 99 ?zKVXK7}0
5.2 Radiometry. Photometry 99 .Jz$)R
5.2.1 Lambertian Surface 102 PZF>ia}
5.2.2 Blackbody Radiator 103 )T:{(v7 d`
5.2.3 Examples 105 =>hq0F4[;
5.3 Incoherent Light Sources 108 D4m2*%M
5.4 Coherent Light Sources 109 S #X$QD
5.4.1 Stimulated Emission 109 Z3G>DF:$
5.4.2 Gas Lasers 112 9BGPq) #
5.4.3 Liquid Lasers 114 @\_ tS H
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 2FO.!m
5.4.5 Solid-State Lasers 117 +0=u ]
5.4.6 Other Lasers 119 p1HU2APFP
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