Optical Metrology Third Edition WLma)L`L %6}S1fuA Kjell J. G˚asvik
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7{e0^V,\k 4mq+{ c0 Preface to the Third Edition xi
k>I [U}h 1Basics 1
F:"<4hiA " 1.1 Introduction 1
S-&[Tp+N 1.2 Wave Motion. The Electromagnetic Spectrum 1
:Y`cgi0vkd 1.3 The Plane Wave. Light Rays 3
g .ty#Z=: 1.4 Phase Difference 4
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1.5 Complex Notation. Complex Amplitude 5
"E =\Vz 1.6 Oblique Incidence of A Plane Wave 5
Bvj-LT=) 1.7 The Spherical Wave 7
r<,W{Va 1.8 The Intensity 8
2iYf)M C 1.9 Geometrical Optics 8
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[HGGXgN 1.11 A Plane-Wave Set-Up 11
P #m/b< 2 Gaussian Optics 15
}>Gnp c 2.1 Introduction 15
eY^;L_7}p 2.2 Refraction at a Spherical Surface 15
E$"( :%'v 2.2.1 Examples 19
BQq,,i8H 2.3 The General Image-Forming System 19
*u^N_y 2.4 The Image-Formation Process 21
u;rK.3o 2.5 Reflection at a Spherical Surface 23
Ao~ZK[u 2.6 Aspheric Lenses 25
,y@`wq>O 2.7 Stops and Apertures 26
c | OIUc 2.8 Lens Aberrations. Computer Lens Design 28
O *^= 2.9 Imaging and The Lens Formula 29
x;ym_UZ6e 2.10 Standard Optical Systems 30
%y ;E1pva 2.10.1 Afocal Systems. The Telescope 30
oac e!si 2.10.2 The Simple Magnifier 32
Cg[]y1Ne 2.10.3 The Microscope 34
>tTNvb5 3 Interference 37
Q|/uL`_ni 3.1 Introduction 37
,&[2z! 3.2 General Description 37
SA@M J>Z 3.3 Coherence 38
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T 7`9[ 3.5 Interference between other Waves 46
=@$G3DM 3.6 Interferometry 49
7A'd55I4 3.6.1 Wavefront Division 50
fZ!fwg$ 3.6.2 Amplitude Division 51
tr3Rn :0] 3.6.3 The Dual-Frequency Michelson Interferometer 54
Bwv@D4bii 3.6.4 Heterodyne (Homodyne) Detection 55
ma@3 BiM 3.7 Spatial and Temporal Coherence 56
v).V&": 3.8 Optical Coherence Tomography 61
-{H; w=9 4 Diffraction 67
"e. Q iK 4.1 Introduction 67
C;7?TZ&x w 4.2 Diffraction from a Single Slit 67
wG6@. ;3 4.3 Diffraction from a Grating 70
;O` \rP5w 4.3.1 The Grating Equation. Amplitude Transmittance 70
P9h ]B u 4.3.2 The Spatial Frequency Spectrum 73
m:|jv|f 4.4 Fourier Optics 75
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4.5 Optical Filtering 76
*opf~B_e 4.5.1 Practical Filtering Set-Ups 78
t}r`~ AEa! 4.6 Physical Optics Description
h#a;(F4_7 of Image Formation 81
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ww9fT 4.6.1 The Coherent Transfer Function 83
M =Pn8<h~ 4.6.2 The Incoherent Transfer Function 85
0IU>KGJ-0s 4.6.3 The Depth of Focus 88
\z> Re$: 4.7 The Phase-Modulated Sinusoidal Grating 89
v" ' Co6fw 5 Light Sources and Detectors 99
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5.1 Introduction 99
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tre ) 5.2 Radiometry. Photometry 99
-WiOs;2~/ 5.2.1 Lambertian Surface 102
#Hm*<s. 5.2.2 Blackbody Radiator 103
6f1%5&si 5.2.3 Examples 105
h!# (. P 5.3 Incoherent Light Sources 108
O%RkU?ME 5.4 Coherent Light Sources 109
U^jxKBq^ 5.4.1 Stimulated Emission 109
Uawf,57v< 5.4.2 Gas Lasers 112
0uX"KL]Elf 5.4.3 Liquid Lasers 114
.KiJq:$H 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
!]]QbB 5.4.5 Solid-State Lasers 117
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5.4.6 Other Lasers 119
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