Optical Metrology Third Edition %Xfy .v
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Kjell J. G˚asvik s`63
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Spectra Vision AS, Trondheim, Norway o NqIrYH'
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Preface to the Third Edition xi L $ki>._i\
1Basics 1 =)Z~ w`
1.1 Introduction 1 ' ] $mt
1.2 Wave Motion. The Electromagnetic Spectrum 1 pX LXkF?
1.3 The Plane Wave. Light Rays 3 zS<idy F`
1.4 Phase Difference 4 .s8u? 1b
1.5 Complex Notation. Complex Amplitude 5 76B A1x+G
1.6 Oblique Incidence of A Plane Wave 5 ZtofDp5 B
1.7 The Spherical Wave 7 ^|j
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1.8 The Intensity 8 )ld`2)
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1.9 Geometrical Optics 8 La 9:qpj
1.10 The Simple Convex (Positive) Lens 10 aWTvowA
1.11 A Plane-Wave Set-Up 11 'U/X<LCl
2 Gaussian Optics 15 C =zc6C,
2.1 Introduction 15 +F@ ZVMp
2.2 Refraction at a Spherical Surface 15 :|PI_
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2.2.1 Examples 19 u`~,`z^{n
2.3 The General Image-Forming System 19 RJ 0:O
2.4 The Image-Formation Process 21 tB/' 3#o
2.5 Reflection at a Spherical Surface 23 *\"+/
2.6 Aspheric Lenses 25 N` xXH
2.7 Stops and Apertures 26 U6K!FOND
2.8 Lens Aberrations. Computer Lens Design 28 <#%kmYSL
2.9 Imaging and The Lens Formula 29 FesUE_L2$
2.10 Standard Optical Systems 30 #-{^={p "
2.10.1 Afocal Systems. The Telescope 30 I\WBPI
2.10.2 The Simple Magnifier 32 kBr?Q
2.10.3 The Microscope 34 ';iLk[
3 Interference 37 Jnl#d0)
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3.1 Introduction 37 <R.Ipyt.
3.2 General Description 37 'eDV-cB
3.3 Coherence 38 \s^4f#
3.4 Interference between two Plane Waves 41 ?j|i|WUD
3.4.1 Laser Doppler Velocimetry (LDV) 45 :9Mqwgk,;3
3.5 Interference between other Waves 46 v~`'!N8
3.6 Interferometry 49 2'T uS?
3.6.1 Wavefront Division 50 m#a1N
3.6.2 Amplitude Division 51 g), t
3.6.3 The Dual-Frequency Michelson Interferometer 54 ee\xj$,
3.6.4 Heterodyne (Homodyne) Detection 55 ?
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3.7 Spatial and Temporal Coherence 56 wG}Rh,
3.8 Optical Coherence Tomography 61 fj:q_P67o
4 Diffraction 67 Uf\,U8U B
4.1 Introduction 67 m>&:)K}m
4.2 Diffraction from a Single Slit 67 J S#AoPWA
4.3 Diffraction from a Grating 70 ;!Q}g1 9C
4.3.1 The Grating Equation. Amplitude Transmittance 70 V PaW-o
4.3.2 The Spatial Frequency Spectrum 73 J[{?Y'RUM
4.4 Fourier Optics 75 ds
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4.5 Optical Filtering 76 ZMGthI}~-
4.5.1 Practical Filtering Set-Ups 78 U])$#/ v
4.6 Physical Optics Description +LB2V3UZ
of Image Formation 81 zn2 Qp
4.6.1 The Coherent Transfer Function 83 3u@=]0ZN
4.6.2 The Incoherent Transfer Function 85 : @]%n~x
4.6.3 The Depth of Focus 88 9? .
4.7 The Phase-Modulated Sinusoidal Grating 89 UtYwG#/w
5 Light Sources and Detectors 99 }zy h!
5.1 Introduction 99 =.\ PG [
5.2 Radiometry. Photometry 99 @; `d\lQ
5.2.1 Lambertian Surface 102 )Nnrs a
5.2.2 Blackbody Radiator 103 -APbN(Vi
5.2.3 Examples 105 HMl
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5.3 Incoherent Light Sources 108
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5.4 Coherent Light Sources 109 !.@F,wZvY
5.4.1 Stimulated Emission 109 #H-EOXy
5.4.2 Gas Lasers 112 Mi:i1i
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5.4.3 Liquid Lasers 114 vTq
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5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 B'8T+qvA
5.4.5 Solid-State Lasers 117 ~fY\;
5.4.6 Other Lasers 119 fp?cb2'7
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