Optical Metrology Third Edition ,1K`w:u hS
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Kjell J. G˚asvik f (Su
Spectra Vision AS, Trondheim, Norway z=FOymv C
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Preface to the Third Edition xi 969Y[XQ
1Basics 1 1
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1.1 Introduction 1 ;% <[*T:*'
1.2 Wave Motion. The Electromagnetic Spectrum 1 .&i_~?1 [N
1.3 The Plane Wave. Light Rays 3 ;T\+TZ tI
1.4 Phase Difference 4 zG*
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1.5 Complex Notation. Complex Amplitude 5 73p7]Uo
1.6 Oblique Incidence of A Plane Wave 5 ]t"X~
1.7 The Spherical Wave 7 fxQ4kiI
1.8 The Intensity 8 VbI$#;:[7
1.9 Geometrical Optics 8 [4 v1
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1.10 The Simple Convex (Positive) Lens 10 iSP}kM}
1.11 A Plane-Wave Set-Up 11 :<P3 fW
2 Gaussian Optics 15 1 w!O&kn
2.1 Introduction 15 C~- .zQ$
2.2 Refraction at a Spherical Surface 15 $P h#pM(
2.2.1 Examples 19 |Vo{ {)
2.3 The General Image-Forming System 19 Y" U t
2.4 The Image-Formation Process 21 V(5*Dn84
2.5 Reflection at a Spherical Surface 23 -=W Qed}
2.6 Aspheric Lenses 25 BUs={ "P a
2.7 Stops and Apertures 26 <kCOg8<y
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2.8 Lens Aberrations. Computer Lens Design 28 OLZs}N+ ;]
2.9 Imaging and The Lens Formula 29 ucYweXsO3
2.10 Standard Optical Systems 30 hiKyU! )Hv
2.10.1 Afocal Systems. The Telescope 30 5AbY 59
2.10.2 The Simple Magnifier 32 nw-%!}Ot"
2.10.3 The Microscope 34 JfsvK2I
3 Interference 37 HcQ)XJPK
3.1 Introduction 37 G]n_RP $G
3.2 General Description 37 -pHUC' t
3.3 Coherence 38 yvWM]A
3.4 Interference between two Plane Waves 41 8F
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3.4.1 Laser Doppler Velocimetry (LDV) 45 -A,UqEt
3.5 Interference between other Waves 46 oZ_,WwnE
3.6 Interferometry 49 g#q7~#9
3.6.1 Wavefront Division 50 ]++, 7Z\AU
3.6.2 Amplitude Division 51 ~l8w]R3A
3.6.3 The Dual-Frequency Michelson Interferometer 54 r"9 h pZH
3.6.4 Heterodyne (Homodyne) Detection 55 [XhG7Ly
3.7 Spatial and Temporal Coherence 56 b]4\$ rW7
3.8 Optical Coherence Tomography 61 D>-srzw
4 Diffraction 67 f>iDq C4
4.1 Introduction 67 7?;ZE:
4.2 Diffraction from a Single Slit 67 c'INmc
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4.3 Diffraction from a Grating 70 BJgHel+N
4.3.1 The Grating Equation. Amplitude Transmittance 70 `\r <3?
4.3.2 The Spatial Frequency Spectrum 73 fcTg/EXn
4.4 Fourier Optics 75 $|tk?S ps
4.5 Optical Filtering 76 ,<BV5~T.|
4.5.1 Practical Filtering Set-Ups 78 tM|/OJ7
4.6 Physical Optics Description A*~BkvPr
of Image Formation 81 5\Rg%Ezl
4.6.1 The Coherent Transfer Function 83 pr[V*C/
4.6.2 The Incoherent Transfer Function 85 "/y S HB[
4.6.3 The Depth of Focus 88 kX2Z@
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4.7 The Phase-Modulated Sinusoidal Grating 89 ..R JHa6B
5 Light Sources and Detectors 99 p}Um+I=1
5.1 Introduction 99 3a[ LM!
5.2 Radiometry. Photometry 99 =$y;0]7Lwi
5.2.1 Lambertian Surface 102 m T /^F{c
5.2.2 Blackbody Radiator 103 o)GesgxFa5
5.2.3 Examples 105 ~d3|zlh
5.3 Incoherent Light Sources 108 _< GXR
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5.4 Coherent Light Sources 109 &Oc
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5.4.1 Stimulated Emission 109 bcUSjG>
5.4.2 Gas Lasers 112 qu\U^F
5.4.3 Liquid Lasers 114 D_?dy 4\
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 r PTfwhs
5.4.5 Solid-State Lasers 117 Ng2 Z7k
5.4.6 Other Lasers 119 <KJ|U0/jGd
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