Optical Metrology Third Edition GZzBATx
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Kjell J. G˚asvik $SfYO!n7Q
Spectra Vision AS, Trondheim, Norway dM)x|b3z
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Preface to the Third Edition xi Lq]t6o ]
1Basics 1 f ^|r*@o
1.1 Introduction 1 CfEACH4_
1.2 Wave Motion. The Electromagnetic Spectrum 1 a/TeBx#yG
1.3 The Plane Wave. Light Rays 3 fb? YDM
1.4 Phase Difference 4 cP^c}e*;NS
1.5 Complex Notation. Complex Amplitude 5 W *~[KdgC
1.6 Oblique Incidence of A Plane Wave 5 0S#T}ITm4Z
1.7 The Spherical Wave 7 w`X0^<Fv
1.8 The Intensity 8 RC~ C}
1.9 Geometrical Optics 8 J;GYo|8
1.10 The Simple Convex (Positive) Lens 10 2Dw}o;1'
1.11 A Plane-Wave Set-Up 11
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2 Gaussian Optics 15 ]PQ6 em
2.1 Introduction 15 ZmAo9>'Kg
2.2 Refraction at a Spherical Surface 15 g_;4@jwTP"
2.2.1 Examples 19 R 6
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2.3 The General Image-Forming System 19 cCv@f ks
2.4 The Image-Formation Process 21 _g%,/y 9y
2.5 Reflection at a Spherical Surface 23 j2s{rQQ
2.6 Aspheric Lenses 25 - +fW/Uo
2.7 Stops and Apertures 26 iC 4rzgq
2.8 Lens Aberrations. Computer Lens Design 28 TEQs 9-Uy
2.9 Imaging and The Lens Formula 29 -\~HAnh
2.10 Standard Optical Systems 30 ,qwVDYJ
2.10.1 Afocal Systems. The Telescope 30 K$c?:?wmo
2.10.2 The Simple Magnifier 32 ?X@uR5?{
2.10.3 The Microscope 34 mbXW$E-&R2
3 Interference 37 !@[@&.
3.1 Introduction 37 `{H!V~ 42
3.2 General Description 37 < Y)A ez
3.3 Coherence 38 e4<St`K
3.4 Interference between two Plane Waves 41 .o)
3.4.1 Laser Doppler Velocimetry (LDV) 45 G]T&{3g-.
3.5 Interference between other Waves 46 G;AJBs>Y}
3.6 Interferometry 49 G2w0r,[
3.6.1 Wavefront Division 50 B4{F) Zb
3.6.2 Amplitude Division 51 `<(o;*&Gd
3.6.3 The Dual-Frequency Michelson Interferometer 54 lyw)4;wt\
3.6.4 Heterodyne (Homodyne) Detection 55 I[KAW"
3.7 Spatial and Temporal Coherence 56 =8A L>:_
3.8 Optical Coherence Tomography 61 "c*#Z P
4 Diffraction 67 5`)[FCQ
4.1 Introduction 67 LF ;gdF%@
4.2 Diffraction from a Single Slit 67 nU /x,W[}
4.3 Diffraction from a Grating 70 FDTC?Ii O
4.3.1 The Grating Equation. Amplitude Transmittance 70 jH[{V[<# X
4.3.2 The Spatial Frequency Spectrum 73 ;CDa*(e
4.4 Fourier Optics 75 ; aDYw [
4.5 Optical Filtering 76 KouIzWf.
4.5.1 Practical Filtering Set-Ups 78 zKFiCP
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4.6 Physical Optics Description &W%fsy<
of Image Formation 81 &IP`j~ b
4.6.1 The Coherent Transfer Function 83 #YK=e&da
4.6.2 The Incoherent Transfer Function 85 h 3V;
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4.6.3 The Depth of Focus 88 }[: i!t.m
4.7 The Phase-Modulated Sinusoidal Grating 89 V3$zlzSm,
5 Light Sources and Detectors 99 P.3kcZ
5.1 Introduction 99 +kx#"L:
5.2 Radiometry. Photometry 99 xG|lmYt76
5.2.1 Lambertian Surface 102 H={5>;8G
5.2.2 Blackbody Radiator 103 N3ccn
5.2.3 Examples 105 &XB1=b5
5.3 Incoherent Light Sources 108 B6 U4>ZN
5.4 Coherent Light Sources 109 Vkl]&mYRz
5.4.1 Stimulated Emission 109 h%&2M58:
5.4.2 Gas Lasers 112 .e|\Bf0P
5.4.3 Liquid Lasers 114 9, $
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5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 p{;FO?
5.4.5 Solid-State Lasers 117 ?:Rw[T@
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5.4.6 Other Lasers 119 !=]cASPGD
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