Optical Metrology Third Edition AtW<e;!0te RL3G7 ;X Kjell J. G˚asvik
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"% *4| ]=yPU Preface to the Third Edition xi
^N:bT;;$nZ 1Basics 1
]B r 6!U4~ 1.1 Introduction 1
`%S#XJU 1.2 Wave Motion. The Electromagnetic Spectrum 1
V'&`JZK6 1.3 The Plane Wave. Light Rays 3
.=<<b| 1.4 Phase Difference 4
'Q F@@ 48 1.5 Complex Notation. Complex Amplitude 5
"Z*u2_ H 1.6 Oblique Incidence of A Plane Wave 5
C {8(ew 1.7 The Spherical Wave 7
HH94?& 1.8 The Intensity 8
El#"vIg(\ 1.9 Geometrical Optics 8
"s5[ w+,R 1.10 The Simple Convex (Positive) Lens 10
-7:_Dy 1.11 A Plane-Wave Set-Up 11
._IBO; *@ 2 Gaussian Optics 15
r:Rk!z* 2.1 Introduction 15
~zT7 43 2.2 Refraction at a Spherical Surface 15
E+e:UBeUV 2.2.1 Examples 19
YPNG9^ Y 2.3 The General Image-Forming System 19
&pZn cm 2.4 The Image-Formation Process 21
~V6wcXd 2.5 Reflection at a Spherical Surface 23
ZQY?wO: [ 2.6 Aspheric Lenses 25
MGE8S$Z 2.7 Stops and Apertures 26
24 Uvi:B?~ 2.8 Lens Aberrations. Computer Lens Design 28
G2BB]] m3 2.9 Imaging and The Lens Formula 29
#[.aj2 2.10 Standard Optical Systems 30
5'z D}[2 2.10.1 Afocal Systems. The Telescope 30
];8S<KiS~ 2.10.2 The Simple Magnifier 32
T1_>qnSz 2.10.3 The Microscope 34
ZF~@a+o 3 Interference 37
*$yU|, 3.1 Introduction 37
dNfME*"yN 3.2 General Description 37
K#!c<Li# 3.3 Coherence 38
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FL 3.4.1 Laser Doppler Velocimetry (LDV) 45
5Gw B1}q 3.5 Interference between other Waves 46
/ U5!]7&gB 3.6 Interferometry 49
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EB[K2[9 3.6.1 Wavefront Division 50
^(on"3sG 3.6.2 Amplitude Division 51
hWD%_"yhd 3.6.3 The Dual-Frequency Michelson Interferometer 54
7/b\NLeJ' 3.6.4 Heterodyne (Homodyne) Detection 55
y0_z_S#gO 3.7 Spatial and Temporal Coherence 56
" ';K$&,[ 3.8 Optical Coherence Tomography 61
!}PZCbDhL 4 Diffraction 67
mfCp@1;26 4.1 Introduction 67
'K* . ?M 4.2 Diffraction from a Single Slit 67
,A9_xdv5 4.3 Diffraction from a Grating 70
oo2CF!Xy 4.3.1 The Grating Equation. Amplitude Transmittance 70
<b#1L 4.3.2 The Spatial Frequency Spectrum 73
Dlqvz|X/ 4.4 Fourier Optics 75
S";c7s 4.5 Optical Filtering 76
7w51U mO 4.5.1 Practical Filtering Set-Ups 78
^LAnR>mz^r 4.6 Physical Optics Description
Ssg1p#0J of Image Formation 81
>7,?X_:A-1 4.6.1 The Coherent Transfer Function 83
^Cy=L] 4.6.2 The Incoherent Transfer Function 85
B3g # ) 4.6.3 The Depth of Focus 88
^ZPynduR 4.7 The Phase-Modulated Sinusoidal Grating 89
5/YGu=, 5 Light Sources and Detectors 99
{u)>W@Lr 5.1 Introduction 99
yB2 }[ 1 5.2 Radiometry. Photometry 99
kr>4%Ndm7 5.2.1 Lambertian Surface 102
hnBX enT6 5.2.2 Blackbody Radiator 103
mr2fNA>kR 5.2.3 Examples 105
i# bcjH 5.3 Incoherent Light Sources 108
b>]k=zd 5.4 Coherent Light Sources 109
\ zLKSJ] 5.4.1 Stimulated Emission 109
"el}9OitC 5.4.2 Gas Lasers 112
r&3EM[*Iw 5.4.3 Liquid Lasers 114
buKSZ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
MnTJFo" 5.4.5 Solid-State Lasers 117
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5.4.6 Other Lasers 119
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