Optical Metrology Third Edition |2
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Kjell J. G˚asvik h%E25in
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Preface to the Third Edition xi 3 ^{U:"N0
1Basics 1 +4G uA0N6
1.1 Introduction 1 4Q z
1.2 Wave Motion. The Electromagnetic Spectrum 1 wAVO%8u
1.3 The Plane Wave. Light Rays 3 pE^L Qi
1.4 Phase Difference 4 c)rI[P7Q
1.5 Complex Notation. Complex Amplitude 5 [
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1.6 Oblique Incidence of A Plane Wave 5 ''?.6r
1.7 The Spherical Wave 7 <Zl0$~B:5
1.8 The Intensity 8 ^NHQ[4I
1.9 Geometrical Optics 8 .J&NM(q eZ
1.10 The Simple Convex (Positive) Lens 10 o-( "S|A-
1.11 A Plane-Wave Set-Up 11
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2 Gaussian Optics 15 zb l h_6
2.1 Introduction 15 8 W[QV
2.2 Refraction at a Spherical Surface 15 w^A8ZT0^7
2.2.1 Examples 19 @ns2$(wkm@
2.3 The General Image-Forming System 19 zOg#= ql
2.4 The Image-Formation Process 21 oT\B-lx
2.5 Reflection at a Spherical Surface 23 z]gxkol\
2.6 Aspheric Lenses 25
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2.7 Stops and Apertures 26 V BIPB
2.8 Lens Aberrations. Computer Lens Design 28 0 m";=:(w
2.9 Imaging and The Lens Formula 29 P]yER9'
2.10 Standard Optical Systems 30 uQ5NN*C=
2.10.1 Afocal Systems. The Telescope 30 L)y }
2.10.2 The Simple Magnifier 32 qWw@6VvoQ
2.10.3 The Microscope 34 yE{l
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3 Interference 37 |>j=#2
3.1 Introduction 37 >^+Q`"SN
3.2 General Description 37 u vc0"g1h
3.3 Coherence 38 AY [7yPP
3.4 Interference between two Plane Waves 41 lY?TF
3.4.1 Laser Doppler Velocimetry (LDV) 45 ;yBq'_e3
3.5 Interference between other Waves 46 *q|.H9
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3.6 Interferometry 49 8ENAif
3.6.1 Wavefront Division 50 TcauCL
3.6.2 Amplitude Division 51 I"Ju3o?u
3.6.3 The Dual-Frequency Michelson Interferometer 54 $ daI++v`
3.6.4 Heterodyne (Homodyne) Detection 55 !xj >~7
3.7 Spatial and Temporal Coherence 56 sFC1PdSk4T
3.8 Optical Coherence Tomography 61 0}Kl47 }aD
4 Diffraction 67 5\:#-IYJ
4.1 Introduction 67 K~x G+Kh
4.2 Diffraction from a Single Slit 67 Sn7.KY S
4.3 Diffraction from a Grating 70 azj<aaH
4.3.1 The Grating Equation. Amplitude Transmittance 70 Z TjlGU `
4.3.2 The Spatial Frequency Spectrum 73 ?# ,\,
4.4 Fourier Optics 75 ir \ d8.
4.5 Optical Filtering 76 UrN$nhH
4.5.1 Practical Filtering Set-Ups 78 qe`W~a9x
4.6 Physical Optics Description kki]6_/n
of Image Formation 81 q'C'S#qqn
4.6.1 The Coherent Transfer Function 83 b]hRmW
4.6.2 The Incoherent Transfer Function 85 Vxo3RwmR
4.6.3 The Depth of Focus 88 by>,h4
4.7 The Phase-Modulated Sinusoidal Grating 89 k(u W( 6
5 Light Sources and Detectors 99 +&(sZFW5o
5.1 Introduction 99 *M"lUw#(f
5.2 Radiometry. Photometry 99 0kmVP~K
5.2.1 Lambertian Surface 102 ZZ[5Z =te?
5.2.2 Blackbody Radiator 103 FRs5 Pb1
5.2.3 Examples 105 T{?!sB3
5.3 Incoherent Light Sources 108 "N7C7`izc
5.4 Coherent Light Sources 109 e] **Z,Z
5.4.1 Stimulated Emission 109 8QFY:.h&
5.4.2 Gas Lasers 112 hh:0m\ @<
5.4.3 Liquid Lasers 114 !6f#OAP\
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 `. L8< -]W
5.4.5 Solid-State Lasers 117 A3C<9wXx
5.4.6 Other Lasers 119 dRWp/3 }
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