Optical Metrology Third Edition /jeurCQ8#u
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Kjell J. G˚asvik z930Wi{@
Spectra Vision AS, Trondheim, Norway ,V.X-`Y
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Preface to the Third Edition xi R BwI*~%g{
1Basics 1 ~F+{P4%`<
1.1 Introduction 1 aJOhji<b#L
1.2 Wave Motion. The Electromagnetic Spectrum 1 )g9Zw_3
1.3 The Plane Wave. Light Rays 3 pDCQ?VW
1.4 Phase Difference 4 +Q}Y ?([
1.5 Complex Notation. Complex Amplitude 5 m:)v>v u
1.6 Oblique Incidence of A Plane Wave 5 /b@8#px
1.7 The Spherical Wave 7 E
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1.8 The Intensity 8 a 5:YP
1.9 Geometrical Optics 8 |94"bDL3~
1.10 The Simple Convex (Positive) Lens 10 >j|.pi
1.11 A Plane-Wave Set-Up 11 bQrH8)
2 Gaussian Optics 15 b Zn:q[7
2.1 Introduction 15 ,L6d~>=41
2.2 Refraction at a Spherical Surface 15 4!XB?-.
2.2.1 Examples 19 7Xw;TA
2.3 The General Image-Forming System 19 iLws;3UX;x
2.4 The Image-Formation Process 21 506B=
2.5 Reflection at a Spherical Surface 23 k*w]a
2.6 Aspheric Lenses 25 #78p#E
2.7 Stops and Apertures 26 jY('?3
2.8 Lens Aberrations. Computer Lens Design 28 $[by)
2.9 Imaging and The Lens Formula 29 Gvb>M=9
2.10 Standard Optical Systems 30 k>FMy#N|@
2.10.1 Afocal Systems. The Telescope 30 6p1\#6#@
2.10.2 The Simple Magnifier 32 \=kH7 !
2.10.3 The Microscope 34 B-@6m
3 Interference 37 gah3d*d7
3.1 Introduction 37 <_dyUiT$J
3.2 General Description 37 {W)Kz_
3.3 Coherence 38 (/a2#iW
3.4 Interference between two Plane Waves 41 68[3
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3.4.1 Laser Doppler Velocimetry (LDV) 45 M$B9?N6
3.5 Interference between other Waves 46 +\fr3@Yc
3.6 Interferometry 49 k?;A#L~
3.6.1 Wavefront Division 50 r1\c{5Wt
3.6.2 Amplitude Division 51 Vl%AN;o
3.6.3 The Dual-Frequency Michelson Interferometer 54 m$ )yd~
3.6.4 Heterodyne (Homodyne) Detection 55 d(3F:dbk
3.7 Spatial and Temporal Coherence 56 `TYQ^Zm
3.8 Optical Coherence Tomography 61 =!w5%|r.
4 Diffraction 67 3{LXx
4.1 Introduction 67 @{iws@.
4.2 Diffraction from a Single Slit 67 zH0%;
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4.3 Diffraction from a Grating 70 ug'I:#@2
4.3.1 The Grating Equation. Amplitude Transmittance 70 A[
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4.3.2 The Spatial Frequency Spectrum 73 n#uH^@#0
4.4 Fourier Optics 75 n (7m
4.5 Optical Filtering 76 J;W(}"cFq
4.5.1 Practical Filtering Set-Ups 78 gbsRf&4h
4.6 Physical Optics Description Uq5wN05
of Image Formation 81 `KqMcAW
4.6.1 The Coherent Transfer Function 83 K_{f6c<
4.6.2 The Incoherent Transfer Function 85 w,bILv)
4.6.3 The Depth of Focus 88 peCmb)>Sa
4.7 The Phase-Modulated Sinusoidal Grating 89 6vbWe@#U/
5 Light Sources and Detectors 99 jV]'/X<
5.1 Introduction 99 Jkzt=6WZ0
5.2 Radiometry. Photometry 99 ?&I gD.
5.2.1 Lambertian Surface 102 K{.s{;#
5.2.2 Blackbody Radiator 103 x|d Xa0=N_
5.2.3 Examples 105 LZch7Xe3
5.3 Incoherent Light Sources 108 g]EDL<b
5.4 Coherent Light Sources 109 T]Gxf"mK
5.4.1 Stimulated Emission 109 KE1S5Mck>
5.4.2 Gas Lasers 112 6&M