Optical Metrology Third Edition BSbi.@@tp Xoq mT/P Kjell J. G˚asvik
5W~-|8 m Spectra Vision AS, Trondheim, Norway
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R7-+@ jbK<" T5 Preface to the Third Edition xi
g7nqe~`{ 1Basics 1
Zi~-m]9U 1.1 Introduction 1
@ 8s:,Y_ 1.2 Wave Motion. The Electromagnetic Spectrum 1
(D rDWD4_ 1.3 The Plane Wave. Light Rays 3
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{ 1.4 Phase Difference 4
nPo YjQi 1.5 Complex Notation. Complex Amplitude 5
}_ "<2|~_ 1.6 Oblique Incidence of A Plane Wave 5
8.R~Ys* 1.7 The Spherical Wave 7
+^v]d_~w_ 1.8 The Intensity 8
mzh7E[S_,i 1.9 Geometrical Optics 8
J|GEt@o3 1.10 The Simple Convex (Positive) Lens 10
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P ; 1.11 A Plane-Wave Set-Up 11
dqo&3^px 2 Gaussian Optics 15
l 4`HuNR1 2.1 Introduction 15
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F 2.2 Refraction at a Spherical Surface 15
-McDNM 2.2.1 Examples 19
bP 8O& R 2.3 The General Image-Forming System 19
\" W _\&X 2.4 The Image-Formation Process 21
3 h~U)mg 2.5 Reflection at a Spherical Surface 23
Oe:_B/l 2.6 Aspheric Lenses 25
[j^c&}0 2.7 Stops and Apertures 26
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2.8 Lens Aberrations. Computer Lens Design 28
U>jLh57 2.9 Imaging and The Lens Formula 29
#+]-}v3 2.10 Standard Optical Systems 30
mbh;oX+ 2.10.1 Afocal Systems. The Telescope 30
KOM]7%ys1H 2.10.2 The Simple Magnifier 32
] v{TSP^/ 2.10.3 The Microscope 34
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IzzO 3 Interference 37
:UdH}u!Ek 3.1 Introduction 37
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~TVa)M 3.2 General Description 37
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3.3 Coherence 38
GVl TW?5 3.4 Interference between two Plane Waves 41
)zo O#tX 3.4.1 Laser Doppler Velocimetry (LDV) 45
L-v-KO6 3.5 Interference between other Waves 46
&!pG1Fp9 3.6 Interferometry 49
~\~K ,v 3.6.1 Wavefront Division 50
`tb@x ^ 3.6.2 Amplitude Division 51
~56F<=#, 3.6.3 The Dual-Frequency Michelson Interferometer 54
;^`W X}]C( 3.6.4 Heterodyne (Homodyne) Detection 55
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3VXS 3.7 Spatial and Temporal Coherence 56
loPBHoE3@H 3.8 Optical Coherence Tomography 61
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IJ 4 Diffraction 67
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4.1 Introduction 67
ehCZhi~ 4.2 Diffraction from a Single Slit 67
6*92I 4.3 Diffraction from a Grating 70
+GqV9x 8 4.3.1 The Grating Equation. Amplitude Transmittance 70
7 ,! [oY[ 4.3.2 The Spatial Frequency Spectrum 73
e}Xmb$ 4.4 Fourier Optics 75
,*Z:a 4 4.5 Optical Filtering 76
M m'q4DV^ 4.5.1 Practical Filtering Set-Ups 78
N Dv_@V(D 4.6 Physical Optics Description
F;,LY:s|Z of Image Formation 81
4$=ATa;x- 4.6.1 The Coherent Transfer Function 83
~^u#Q\KE" 4.6.2 The Incoherent Transfer Function 85
+@c-:\K% 4.6.3 The Depth of Focus 88
P)$q 4.7 The Phase-Modulated Sinusoidal Grating 89
V% c1+ h < 5 Light Sources and Detectors 99
wK[Xm'QTPJ 5.1 Introduction 99
4H\+vJPM 5.2 Radiometry. Photometry 99
H LnizE 5.2.1 Lambertian Surface 102
}1 /`<m 5.2.2 Blackbody Radiator 103
H#+?)<UQ 5.2.3 Examples 105
OVE5:)$x 5.3 Incoherent Light Sources 108
yj +HU5L4 5.4 Coherent Light Sources 109
z]J pvw`p 5.4.1 Stimulated Emission 109
Ea7LPHE# 5.4.2 Gas Lasers 112
i[wEH1jR 5.4.3 Liquid Lasers 114
/EpsJb`kj 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
u3>D vl@ 5.4.5 Solid-State Lasers 117
[x.Dw U%S 5.4.6 Other Lasers 119
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