Optical Metrology Third Edition pm*xb]8y (i34sqV$m Kjell J. G˚asvik
%_+2@\ Spectra Vision AS, Trondheim, Norway
P<l&0dPO8
A<5ZF27 &Q;sSIc Preface to the Third Edition xi
_,xc[ 07 1Basics 1
$ACvV"b 1.1 Introduction 1
<,Ue
0 1.2 Wave Motion. The Electromagnetic Spectrum 1
Ge-CY 1.3 The Plane Wave. Light Rays 3
bvv|;6 1.4 Phase Difference 4
"^w]_^GD$d 1.5 Complex Notation. Complex Amplitude 5
6l5:1|8b,! 1.6 Oblique Incidence of A Plane Wave 5
^T ?RK"p 1.7 The Spherical Wave 7
DF1I[b=] 1.8 The Intensity 8
;3d"wW]}7K 1.9 Geometrical Optics 8
Xf02"PXC 1.10 The Simple Convex (Positive) Lens 10
:rHJ4Tl 1.11 A Plane-Wave Set-Up 11
S0~2{G"v 2 Gaussian Optics 15
0~ZFv Wv 2.1 Introduction 15
XWA:J^ 2.2 Refraction at a Spherical Surface 15
W%T>SpFl 2.2.1 Examples 19
jX3,c%aQ5e 2.3 The General Image-Forming System 19
2"Ecd 2.4 The Image-Formation Process 21
q*F{/N** 2.5 Reflection at a Spherical Surface 23
q#vQv5 2.6 Aspheric Lenses 25
lDOCmdt@N 2.7 Stops and Apertures 26
giZP.C"0 2.8 Lens Aberrations. Computer Lens Design 28
]$Yvj!K*Q 2.9 Imaging and The Lens Formula 29
[`^a=:* 2.10 Standard Optical Systems 30
Cnbz=z 2.10.1 Afocal Systems. The Telescope 30
S{;sUGcu 2.10.2 The Simple Magnifier 32
iVB86XZ` 2.10.3 The Microscope 34
|+iws8xK? 3 Interference 37
4 !y%O 3.1 Introduction 37
xnmmXtk 3.2 General Description 37
MYla OT 3.3 Coherence 38
Po ZuMF 3.4 Interference between two Plane Waves 41
<F}_ /q1 3.4.1 Laser Doppler Velocimetry (LDV) 45
AWP"b?^G| 3.5 Interference between other Waves 46
oASY7k_3 3.6 Interferometry 49
/LO-HnJ 3.6.1 Wavefront Division 50
1#.>a$> 3.6.2 Amplitude Division 51
Zb1<:[ 3.6.3 The Dual-Frequency Michelson Interferometer 54
i'9vL:3 3.6.4 Heterodyne (Homodyne) Detection 55
2^^`n1?' 3.7 Spatial and Temporal Coherence 56
~(Q)"s\1I 3.8 Optical Coherence Tomography 61
2Ou[u#H 4 Diffraction 67
_9=Yvc= 4.1 Introduction 67
Ezr:1 GJ 4.2 Diffraction from a Single Slit 67
H-~6Z",1 4.3 Diffraction from a Grating 70
@xbQ Ye%J 4.3.1 The Grating Equation. Amplitude Transmittance 70
vH#huZA?7 4.3.2 The Spatial Frequency Spectrum 73
~ ip,Nl 4.4 Fourier Optics 75
.v$D13L(o 4.5 Optical Filtering 76
A<1hOSCz\ 4.5.1 Practical Filtering Set-Ups 78
bsB*533 4.6 Physical Optics Description
R $&o*K`? of Image Formation 81
%]>KvoA 4.6.1 The Coherent Transfer Function 83
+n#V[~~8AI 4.6.2 The Incoherent Transfer Function 85
/4g1zrU 4.6.3 The Depth of Focus 88
+tVaBhd! 4.7 The Phase-Modulated Sinusoidal Grating 89
Cq'KoN%nQ 5 Light Sources and Detectors 99
huJ&]"C 5.1 Introduction 99
my}-s 5.2 Radiometry. Photometry 99
Fxm$9(Y 5.2.1 Lambertian Surface 102
cUvz2TK 5.2.2 Blackbody Radiator 103
<-[wd.M_ 5.2.3 Examples 105
=>M^02" 5.3 Incoherent Light Sources 108
*g6n 5.4 Coherent Light Sources 109
a'2$nbp} 5.4.1 Stimulated Emission 109
CitDm1DXt/ 5.4.2 Gas Lasers 112
kP-3"ACG 5.4.3 Liquid Lasers 114
8=gjY\Dp 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
a>GyO&+Dkg 5.4.5 Solid-State Lasers 117
zxC#0@qX07 5.4.6 Other Lasers 119
w]]8dz .
\4v]7SV .
>[_f3;P .