Optical Metrology Third Edition *% ]&5 ]D >\Z(b Kjell J. G˚asvik
HvG~bZN Spectra Vision AS, Trondheim, Norway
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F{17 K$y e>H dJ"S` Preface to the Third Edition xi
TwZmZE ?! 1Basics 1
.L3D] 1.1 Introduction 1
]1bN cq2I 1.2 Wave Motion. The Electromagnetic Spectrum 1
ynq^ztBVe 1.3 The Plane Wave. Light Rays 3
/a-OB U 1.4 Phase Difference 4
CDFX >>N 1.5 Complex Notation. Complex Amplitude 5
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i|pi'I j 1.6 Oblique Incidence of A Plane Wave 5
' '|R$9\@ 1.7 The Spherical Wave 7
/n9,XD&) 1.8 The Intensity 8
4:s!mHcz 1.9 Geometrical Optics 8
y(6*)~Dh 1.10 The Simple Convex (Positive) Lens 10
)K 0rPnYV 1.11 A Plane-Wave Set-Up 11
kSqMI'89 2 Gaussian Optics 15
?Hf8<C} 3 2.1 Introduction 15
Q$S|L C 2.2 Refraction at a Spherical Surface 15
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2.2.1 Examples 19
m@`
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FHyyZ{" 2.4 The Image-Formation Process 21
m@ c\<-P 2.5 Reflection at a Spherical Surface 23
&Ht5!zuW, 2.6 Aspheric Lenses 25
ET=-r 2.7 Stops and Apertures 26
^s3 SzB@ 2.8 Lens Aberrations. Computer Lens Design 28
fJOA5( 2.9 Imaging and The Lens Formula 29
}FAO. 2.10 Standard Optical Systems 30
Z'\{hL S 2.10.1 Afocal Systems. The Telescope 30
5 PT*b}g@ 2.10.2 The Simple Magnifier 32
+F t@S(IE 2.10.3 The Microscope 34
_Dg|Iz,Uh 3 Interference 37
sG k'G573 3.1 Introduction 37
OYk/K70l3 3.2 General Description 37
sxn^1|O;m 3.3 Coherence 38
l%xjCuuhU 3.4 Interference between two Plane Waves 41
_*d UH5 3.4.1 Laser Doppler Velocimetry (LDV) 45
A:Kit_A 3.5 Interference between other Waves 46
%D<>F&h 3.6 Interferometry 49
t8z=R6zX 3.6.1 Wavefront Division 50
)p+6y H 3.6.2 Amplitude Division 51
$n9Bp'< 3.6.3 The Dual-Frequency Michelson Interferometer 54
S5xum_Dq 3.6.4 Heterodyne (Homodyne) Detection 55
~g|z7o 3.7 Spatial and Temporal Coherence 56
De:| T8& 3.8 Optical Coherence Tomography 61
lX|d:HFtP 4 Diffraction 67
: x@j)& 4.1 Introduction 67
Jhr3[A 4.2 Diffraction from a Single Slit 67
2 22Mm/QN 4.3 Diffraction from a Grating 70
i.6+ CA 4.3.1 The Grating Equation. Amplitude Transmittance 70
]='z Y3 4.3.2 The Spatial Frequency Spectrum 73
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85]3y%f9 4.5 Optical Filtering 76
` @Tl7I\ 4.5.1 Practical Filtering Set-Ups 78
)i*- j = 4.6 Physical Optics Description
^,N=GZRWW of Image Formation 81
Ga#5xAI{a 4.6.1 The Coherent Transfer Function 83
_|vY)4B 4U 4.6.2 The Incoherent Transfer Function 85
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DmpG35Jk 4.7 The Phase-Modulated Sinusoidal Grating 89
-k"5GUc| 5 Light Sources and Detectors 99
o[E|xw 5.1 Introduction 99
&Uu8wFbIJ 5.2 Radiometry. Photometry 99
K&>+<bJ_ 5.2.1 Lambertian Surface 102
{S5H H" 5.2.2 Blackbody Radiator 103
7C@%1kL 5.2.3 Examples 105
O7D61~G] 5.3 Incoherent Light Sources 108
z ,q1TU 9 5.4 Coherent Light Sources 109
Q"=$.M~ 5.4.1 Stimulated Emission 109
GYK&QYi, 5.4.2 Gas Lasers 112
S K G!DKQ 5.4.3 Liquid Lasers 114
SdQ"S-H 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
,f?+QV\T. 5.4.5 Solid-State Lasers 117
LyA}Nd]pyq 5.4.6 Other Lasers 119
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