Optical Metrology Third Edition ~;I{d7z,; ;NJM3 g0I Kjell J. G˚asvik
Git2Cet Spectra Vision AS, Trondheim, Norway
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d7c m?+ v g tJ+GjN Preface to the Third Edition xi
nDchLVw 1Basics 1
iN`L* h 1.1 Introduction 1
kS7T ' [d 1.2 Wave Motion. The Electromagnetic Spectrum 1
/_bM~g 1.3 The Plane Wave. Light Rays 3
|4Q><6 "G 1.4 Phase Difference 4
pk=z<OTb 1.5 Complex Notation. Complex Amplitude 5
}Ty_ } 6a5 1.6 Oblique Incidence of A Plane Wave 5
.Qj`_q6= 1.7 The Spherical Wave 7
] @1ncn7N 1.8 The Intensity 8
|om3* ]7 1.9 Geometrical Optics 8
LyXABQ] 1.10 The Simple Convex (Positive) Lens 10
bL7mlh 1.11 A Plane-Wave Set-Up 11
`+@%l*TQ 2 Gaussian Optics 15
`V0]t_*D 2.1 Introduction 15
%}&9[# 2.2 Refraction at a Spherical Surface 15
.^1=*j(; 2.2.1 Examples 19
X4*/h$48 w 2.3 The General Image-Forming System 19
Y!s/uvRI 2.4 The Image-Formation Process 21
BQ&h&57K 2.5 Reflection at a Spherical Surface 23
1-gX=8 ]] 2.6 Aspheric Lenses 25
*m]%eU( 2.7 Stops and Apertures 26
{gi"ktgk 2.8 Lens Aberrations. Computer Lens Design 28
X}bgRz j 2.9 Imaging and The Lens Formula 29
ck<4_?1] 2.10 Standard Optical Systems 30
Z#W `0 G>' 2.10.1 Afocal Systems. The Telescope 30
Bp6Evi 2.10.2 The Simple Magnifier 32
E3KPJ`=!*" 2.10.3 The Microscope 34
S"Zs'7dy` 3 Interference 37
TT&!WbA-Hk 3.1 Introduction 37
A><%"9p Z 3.2 General Description 37
G6Fg<g9: 3.3 Coherence 38
,|c_l) 3.4 Interference between two Plane Waves 41
z?YGE iR/} 3.4.1 Laser Doppler Velocimetry (LDV) 45
cRfX 3.5 Interference between other Waves 46
>"nk}@ 3.6 Interferometry 49
y.oJzU[p% 3.6.1 Wavefront Division 50
Y2D ) $ 3.6.2 Amplitude Division 51
uc"u@ _M 3.6.3 The Dual-Frequency Michelson Interferometer 54
`RzM)ILl 3.6.4 Heterodyne (Homodyne) Detection 55
=O _[9kuJ 3.7 Spatial and Temporal Coherence 56
Hm^p^,}_x 3.8 Optical Coherence Tomography 61
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^@ 4 Diffraction 67
yq,5M1 vR 4.1 Introduction 67
_bz,G"w+: 4.2 Diffraction from a Single Slit 67
?x/ L"h&Kp 4.3 Diffraction from a Grating 70
Q Y fS- 4.3.1 The Grating Equation. Amplitude Transmittance 70
fu&]t8MJC 4.3.2 The Spatial Frequency Spectrum 73
a:]yFi:Su 4.4 Fourier Optics 75
+16 23E 4.5 Optical Filtering 76
[E /3&3 4.5.1 Practical Filtering Set-Ups 78
U)o8Tr 4.6 Physical Optics Description
f3 h9CV of Image Formation 81
J/*[wj 4.6.1 The Coherent Transfer Function 83
nBj7 Q!lW 4.6.2 The Incoherent Transfer Function 85
QBo^{], 4.6.3 The Depth of Focus 88
wIiT
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_0` O } 5 Light Sources and Detectors 99
\^:f4Z T 5.1 Introduction 99
: R&tO3_F 5.2 Radiometry. Photometry 99
8UZE C-K 5.2.1 Lambertian Surface 102
?k?Hp:8?= 5.2.2 Blackbody Radiator 103
yI;Q b7|^ 5.2.3 Examples 105
d$Xvax,C 5.3 Incoherent Light Sources 108
cK } Qu 5.4 Coherent Light Sources 109
\dMsv1\ 5.4.1 Stimulated Emission 109
=w5w =qB 5.4.2 Gas Lasers 112
#,;k>2j0 5.4.3 Liquid Lasers 114
X[[=YCi0 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
/4 f;Niem 5.4.5 Solid-State Lasers 117
m
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