Optical Metrology Third Edition >~I#JQ%
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Kjell J. G˚asvik vQ:wW',i
Spectra Vision AS, Trondheim, Norway z]kwRWe`j
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Preface to the Third Edition xi 9-0<*)"b>
1Basics 1 KZ=u54
1.1 Introduction 1 1/B]TT
1.2 Wave Motion. The Electromagnetic Spectrum 1 n( g)UNx
1.3 The Plane Wave. Light Rays 3 L}'Yd'
1.4 Phase Difference 4 *7ZGq(O
1.5 Complex Notation. Complex Amplitude 5 V=pMq?Nr
1.6 Oblique Incidence of A Plane Wave 5 Hd9XfU
1.7 The Spherical Wave 7 ^ eQFg>
1.8 The Intensity 8 F{<5aLaYti
1.9 Geometrical Optics 8 ? ^M
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1.10 The Simple Convex (Positive) Lens 10 :Sr?6FPc
1.11 A Plane-Wave Set-Up 11 5?WYsj"
2 Gaussian Optics 15 33Jd!orXU
2.1 Introduction 15 bEm7QgV{X
2.2 Refraction at a Spherical Surface 15 U- i.(UyZ
2.2.1 Examples 19 "~F3*lk#E
2.3 The General Image-Forming System 19 7R}9oK_I
2.4 The Image-Formation Process 21 4({( i
2.5 Reflection at a Spherical Surface 23 ,`k _|//}=
2.6 Aspheric Lenses 25 RK[D_SmS
2.7 Stops and Apertures 26 lVz9k
2.8 Lens Aberrations. Computer Lens Design 28 `v d= ec
2.9 Imaging and The Lens Formula 29 <$%X<sDkq
2.10 Standard Optical Systems 30 x2co>.i
2.10.1 Afocal Systems. The Telescope 30 WJ |:kuF
2.10.2 The Simple Magnifier 32 rcV-_+KE(B
2.10.3 The Microscope 34 ^$v3eKA
3 Interference 37 n]Zk;%yL
3.1 Introduction 37 e,>%Z@92(
3.2 General Description 37 NYwR2oX
3.3 Coherence 38 ~@T <gA9V
3.4 Interference between two Plane Waves 41 >nzu],U
3.4.1 Laser Doppler Velocimetry (LDV) 45 ';0 qj$ #
3.5 Interference between other Waves 46 "13 "`!m
3.6 Interferometry 49 w~z[wm Okp
3.6.1 Wavefront Division 50 `ltN,? /
3.6.2 Amplitude Division 51 `lO(s%HC
3.6.3 The Dual-Frequency Michelson Interferometer 54 (a@?s$LG
3.6.4 Heterodyne (Homodyne) Detection 55
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3.7 Spatial and Temporal Coherence 56 O}Hf62"
3.8 Optical Coherence Tomography 61 #sTEQjJ,J
4 Diffraction 67 c~0{s>
4.1 Introduction 67 !M7<BD};
4.2 Diffraction from a Single Slit 67 $<nCXVqL,
4.3 Diffraction from a Grating 70 \ \06T `
4.3.1 The Grating Equation. Amplitude Transmittance 70 S4N(cn&
4.3.2 The Spatial Frequency Spectrum 73 oRM)% N#
4.4 Fourier Optics 75 j~E",7Q'
4.5 Optical Filtering 76 33'Y [4
4.5.1 Practical Filtering Set-Ups 78 :`\)
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4.6 Physical Optics Description RBwO+J53y
of Image Formation 81 >5hhd 38
4.6.1 The Coherent Transfer Function 83 j'?7D0>
4.6.2 The Incoherent Transfer Function 85 mj&57D\fq
4.6.3 The Depth of Focus 88 Bj Wr5SJ
4.7 The Phase-Modulated Sinusoidal Grating 89 ?m7:if+ y
5 Light Sources and Detectors 99 R!(ZMRMn
5.1 Introduction 99 8j5<6Cv_
5.2 Radiometry. Photometry 99 a (IY\q[Wh
5.2.1 Lambertian Surface 102 ~1
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5.2.2 Blackbody Radiator 103 Z(u5$<up
5.2.3 Examples 105 Es5f*P0
5.3 Incoherent Light Sources 108 7y^%7U \
5.4 Coherent Light Sources 109 #m<tJnEO
5.4.1 Stimulated Emission 109 GsQ*4=C
5.4.2 Gas Lasers 112 KS}hU~
5.4.3 Liquid Lasers 114 31WC=ur5
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 @{hd{>K*
5.4.5 Solid-State Lasers 117 ]:(W_ qEA
5.4.6 Other Lasers 119 69m
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