Optical Metrology Third Edition J|<C;[du> F _4Et
Kjell J. G˚asvik
t]?{"O1rC Spectra Vision AS, Trondheim, Norway
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P!!O~P <2~DI0pp( Preface to the Third Edition xi
,Z}ST|$u 1Basics 1
KL$> j/qT 1.1 Introduction 1
(!YJ:,!so 1.2 Wave Motion. The Electromagnetic Spectrum 1
y,w_x,m 1.3 The Plane Wave. Light Rays 3
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dx+v d 1.4 Phase Difference 4
#rNc+ 1.5 Complex Notation. Complex Amplitude 5
15yiDI
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CO mu.'%* 1.7 The Spherical Wave 7
5fYWuc9}z 1.8 The Intensity 8
G5 RdytK 1.9 Geometrical Optics 8
k! '+7K. 1.10 The Simple Convex (Positive) Lens 10
1kR. .p<" 1.11 A Plane-Wave Set-Up 11
M9m~ck 2 Gaussian Optics 15
23 #JmR 2.1 Introduction 15
e Z-fy,E 2.2 Refraction at a Spherical Surface 15
uZ'Z-!=CL 2.2.1 Examples 19
G?61P[j7 2.3 The General Image-Forming System 19
VJ_fA}U 2.4 The Image-Formation Process 21
pS}IU{#; 2.5 Reflection at a Spherical Surface 23
"fUNrhCx 2.6 Aspheric Lenses 25
{<-wm-]mo 2.7 Stops and Apertures 26
pZ3sp! 2.8 Lens Aberrations. Computer Lens Design 28
bf {_U%` 2.9 Imaging and The Lens Formula 29
yPs6_Qo!p 2.10 Standard Optical Systems 30
}maD8,:t 2.10.1 Afocal Systems. The Telescope 30
-Dy <B 2.10.2 The Simple Magnifier 32
h.KgHMV` 2.10.3 The Microscope 34
w5
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#y[omla8 3.1 Introduction 37
AO|1m$xf 3.2 General Description 37
o?j8"^!7 3.3 Coherence 38
jb{9W7;RL 3.4 Interference between two Plane Waves 41
*N:0L, 8 3.4.1 Laser Doppler Velocimetry (LDV) 45
;Bj&9DZd 3.5 Interference between other Waves 46
r>TOJVT&] 3.6 Interferometry 49
Cc,V ] 3.6.1 Wavefront Division 50
\i@R5v=zL 3.6.2 Amplitude Division 51
1s(]@gt 3.6.3 The Dual-Frequency Michelson Interferometer 54
AI#.+PrC{/ 3.6.4 Heterodyne (Homodyne) Detection 55
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-!O8V 3.8 Optical Coherence Tomography 61
3 S2Alx!6 4 Diffraction 67
t u{~:Z( 4.1 Introduction 67
Xw< ;)m 4.2 Diffraction from a Single Slit 67
N:k>V4oE 4.3 Diffraction from a Grating 70
r
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N5ZO pRH{ 4.3.2 The Spatial Frequency Spectrum 73
g ,M-[o=Fk 4.4 Fourier Optics 75
"::2] 3e 4.5 Optical Filtering 76
T]tu#h{
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6sQ;Z |!Pz 4.6 Physical Optics Description
u a_w5o7 of Image Formation 81
6
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L?N-uocT 4.6.2 The Incoherent Transfer Function 85
^B} m~qT 4.6.3 The Depth of Focus 88
,+6u6 4.7 The Phase-Modulated Sinusoidal Grating 89
QT^b-~^ 5 Light Sources and Detectors 99
(l-= /6- 5.1 Introduction 99
.74 C~{}$ 5.2 Radiometry. Photometry 99
Yk|.UuXT 5.2.1 Lambertian Surface 102
PlLt^q.z[ 5.2.2 Blackbody Radiator 103
4
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REK):(i7P 5.3 Incoherent Light Sources 108
EA8plQ~GtE 5.4 Coherent Light Sources 109
,(K-;Id4 5.4.1 Stimulated Emission 109
4m91X D 5.4.2 Gas Lasers 112
B>!mD{N 5.4.3 Liquid Lasers 114
JJ_ Z{ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
;
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j7gTV fO 5.4.6 Other Lasers 119
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