Optical Metrology Third Edition vdvnwzp!l 9 Xl#$d5 Kjell J. G˚asvik
4H, c;g=! Spectra Vision AS, Trondheim, Norway
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k6 ;` Xm?N Preface to the Third Edition xi
jQ 'g'c! 1Basics 1
EV Z1Z 1.1 Introduction 1
s@"| o3BX 1.2 Wave Motion. The Electromagnetic Spectrum 1
fap]`P~#L 1.3 The Plane Wave. Light Rays 3
](Wa:U}Xs 1.4 Phase Difference 4
|>x uH#Q 1.5 Complex Notation. Complex Amplitude 5
g.di3GGi 1.6 Oblique Incidence of A Plane Wave 5
*S.FM .r 1.7 The Spherical Wave 7
gCPH>8JwS0 1.8 The Intensity 8
[pp |*@1T 1.9 Geometrical Optics 8
r,.j^a 1.10 The Simple Convex (Positive) Lens 10
,aUbB8 1.11 A Plane-Wave Set-Up 11
f 42F@M(: 2 Gaussian Optics 15
r ~UDK]?V 2.1 Introduction 15
ogQfzk 2.2 Refraction at a Spherical Surface 15
.TdFI"Yn 2.2.1 Examples 19
e21J9e6z 2.3 The General Image-Forming System 19
/bo=,%wJ[ 2.4 The Image-Formation Process 21
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2.5 Reflection at a Spherical Surface 23
5EVypw?]x 2.6 Aspheric Lenses 25
<F&XT@ 2.7 Stops and Apertures 26
}r iM- 2.8 Lens Aberrations. Computer Lens Design 28
7?uDh'utt 2.9 Imaging and The Lens Formula 29
(!5Pl`:j" 2.10 Standard Optical Systems 30
S .x>w/ 2.10.1 Afocal Systems. The Telescope 30
i~v[3 e9y7 2.10.2 The Simple Magnifier 32
LXxQI(RO 2.10.3 The Microscope 34
) V>OND 3 Interference 37
W?aP%D"(i 3.1 Introduction 37
4.wrY6+V 3.2 General Description 37
6pS}\aD 3.3 Coherence 38
o[ks-C>jw 3.4 Interference between two Plane Waves 41
-h m/lxyU 3.4.1 Laser Doppler Velocimetry (LDV) 45
/1{:uh$ 3.5 Interference between other Waves 46
v9r .w- 3.6 Interferometry 49
Y7g%nz[[ 3.6.1 Wavefront Division 50
L-}Uj^yF 3.6.2 Amplitude Division 51
[o(!/38"@= 3.6.3 The Dual-Frequency Michelson Interferometer 54
RV{%@1Pu 3.6.4 Heterodyne (Homodyne) Detection 55
FGP^rTP)e 3.7 Spatial and Temporal Coherence 56
65O 8?I 3.8 Optical Coherence Tomography 61
ulW>8b W& 4 Diffraction 67
_6c/,a8;*J 4.1 Introduction 67
'a JE+ 4.2 Diffraction from a Single Slit 67
n.'Ps+G( 4.3 Diffraction from a Grating 70
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T{^mh(3/" 4.3.2 The Spatial Frequency Spectrum 73
B[ 7,Hy,R 4.4 Fourier Optics 75
#prYZcHv:_ 4.5 Optical Filtering 76
nIlTzrf6 4.5.1 Practical Filtering Set-Ups 78
oxeu%wj_ 4.6 Physical Optics Description
,:J[|9 of Image Formation 81
]R}(CaT1 4.6.1 The Coherent Transfer Function 83
}AB_i'C0 4.6.2 The Incoherent Transfer Function 85
DBaZ cO(U 4.6.3 The Depth of Focus 88
u
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%{ rb,6 5 Light Sources and Detectors 99
$)KO DI>| 5.1 Introduction 99
wy:Gy9\ 5.2 Radiometry. Photometry 99
O wu?ND 5.2.1 Lambertian Surface 102
t}Td$K7 5.2.2 Blackbody Radiator 103
sxR KWM@4 5.2.3 Examples 105
a cke q# 5.3 Incoherent Light Sources 108
Z}vDP^rf 5.4 Coherent Light Sources 109
cU ? F D 5.4.1 Stimulated Emission 109
UNiK6h_% 5.4.2 Gas Lasers 112
F Xr\ 5.4.3 Liquid Lasers 114
U<sGj~"# 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
l/nBin&YGv 5.4.5 Solid-State Lasers 117
P* &0HbJ 5.4.6 Other Lasers 119
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