Optical Metrology Third Edition *m#Za<_Gv
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Kjell J. G˚asvik @w?P7P<O`
Spectra Vision AS, Trondheim, Norway @0F3$
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Preface to the Third Edition xi HBMhtfWW
1Basics 1 gy_>`16K
1.1 Introduction 1 `tn{ei
1.2 Wave Motion. The Electromagnetic Spectrum 1 xLC3>>P
1.3 The Plane Wave. Light Rays 3 |y2w9n0D
1.4 Phase Difference 4 3h *!V6%q
1.5 Complex Notation. Complex Amplitude 5 6#HK'7ClL
1.6 Oblique Incidence of A Plane Wave 5 v~^{{O
1.7 The Spherical Wave 7 {$wjO7Glp
1.8 The Intensity 8 o:_Xv.HRZo
1.9 Geometrical Optics 8 N9v1[~ bv_
1.10 The Simple Convex (Positive) Lens 10 pNKhc#-w
1.11 A Plane-Wave Set-Up 11 m+Rv+_R
2 Gaussian Optics 15 LL3#5AA"k|
2.1 Introduction 15 dfij|>:*0
2.2 Refraction at a Spherical Surface 15 IWY;="
2.2.1 Examples 19 6,0_)O}\b
2.3 The General Image-Forming System 19 GhIKvX_N
2.4 The Image-Formation Process 21 Y4v|ko`l%
2.5 Reflection at a Spherical Surface 23 9T*v9d
2.6 Aspheric Lenses 25 HlH64w2^R
2.7 Stops and Apertures 26 ]{ntt}3G,
2.8 Lens Aberrations. Computer Lens Design 28 (EI;"N (x
2.9 Imaging and The Lens Formula 29 [x,>?~6ek
2.10 Standard Optical Systems 30 AD|2qM))
2.10.1 Afocal Systems. The Telescope 30 ~V\D|W9
2.10.2 The Simple Magnifier 32 PEW=@xj2y
2.10.3 The Microscope 34 Z\k&gio5C^
3 Interference 37 WjlZ6g2i
3.1 Introduction 37 3GUZ;jdn
3.2 General Description 37 Kq;8=xP[
3.3 Coherence 38 ybY]e; v*O
3.4 Interference between two Plane Waves 41 &M.66O@
3.4.1 Laser Doppler Velocimetry (LDV) 45 pLLGus+W
3.5 Interference between other Waves 46 ~NpA".PB
3.6 Interferometry 49 +Zaj,oEE
3.6.1 Wavefront Division 50 m>MB7,C;N
3.6.2 Amplitude Division 51 BEre*J
3.6.3 The Dual-Frequency Michelson Interferometer 54 -@0GcUE:r
3.6.4 Heterodyne (Homodyne) Detection 55 #?/<
3.7 Spatial and Temporal Coherence 56 v#U"pn|M
3.8 Optical Coherence Tomography 61 tF{D= ;G
4 Diffraction 67 |bO"_U
4.1 Introduction 67 =g|IG
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4.2 Diffraction from a Single Slit 67 a
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4.3 Diffraction from a Grating 70 K|:@Z
4.3.1 The Grating Equation. Amplitude Transmittance 70 .P7"e5ge
4.3.2 The Spatial Frequency Spectrum 73 USM4r!x
4.4 Fourier Optics 75 $w);5o
4.5 Optical Filtering 76 cT!\{~
4.5.1 Practical Filtering Set-Ups 78 lXjXqk\
4.6 Physical Optics Description "O%gFye
of Image Formation 81 JYW)uJ
4.6.1 The Coherent Transfer Function 83 8n*.).33
4.6.2 The Incoherent Transfer Function 85 Fd[zDz
4.6.3 The Depth of Focus 88 7r~~Y%=C|
4.7 The Phase-Modulated Sinusoidal Grating 89 t+1 %RyKFB
5 Light Sources and Detectors 99 F7O(Cy"1
5.1 Introduction 99
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5.2 Radiometry. Photometry 99 ]]oI#*c
5.2.1 Lambertian Surface 102 }wHW7SJ
5.2.2 Blackbody Radiator 103 t3&LO~Ye
5.2.3 Examples 105 tX>
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5.3 Incoherent Light Sources 108 IHcD*zQ
5.4 Coherent Light Sources 109 &3TEfvz
5.4.1 Stimulated Emission 109 hKT
5.4.2 Gas Lasers 112 !g(KK|`,m
5.4.3 Liquid Lasers 114 A*}.EClH
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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5.4.5 Solid-State Lasers 117 er!DYv
5.4.6 Other Lasers 119 ^]W<X"H+Z
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