Optical Metrology Third Edition w Y#E ?,
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Kjell J. G˚asvik Z;i:](
Spectra Vision AS, Trondheim, Norway ^~dWU>
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Preface to the Third Edition xi e(sk[guvX
1Basics 1 dG{A~Z z
1.1 Introduction 1 :h$$J
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1.2 Wave Motion. The Electromagnetic Spectrum 1 a [C@
1.3 The Plane Wave. Light Rays 3 \RiP
1.4 Phase Difference 4 ixFi{_
1.5 Complex Notation. Complex Amplitude 5 @F eTz[
1.6 Oblique Incidence of A Plane Wave 5 2T35{Q!=F
1.7 The Spherical Wave 7 =(Mch ~
1.8 The Intensity 8 f 2.HF@
1.9 Geometrical Optics 8 ^#$n~]s
1.10 The Simple Convex (Positive) Lens 10 b sX[UF
1.11 A Plane-Wave Set-Up 11 A<{{iBEI`
2 Gaussian Optics 15 Ie_wHcM<
2.1 Introduction 15 t!XwW$@
2.2 Refraction at a Spherical Surface 15 WLT"ji0w2
2.2.1 Examples 19 Wc#24:OKe3
2.3 The General Image-Forming System 19 sT)CxOV
2.4 The Image-Formation Process 21 E
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2.5 Reflection at a Spherical Surface 23 Nc`L;CP
2.6 Aspheric Lenses 25 %Zi} MPx
2.7 Stops and Apertures 26 }OUt sh ]y
2.8 Lens Aberrations. Computer Lens Design 28 # ] QZ
2.9 Imaging and The Lens Formula 29 fex@,I&
2.10 Standard Optical Systems 30 cr3^6H B
2.10.1 Afocal Systems. The Telescope 30 py4 h(04u
2.10.2 The Simple Magnifier 32 ?
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2.10.3 The Microscope 34 xp t:BB o
3 Interference 37 ]esC[r]PJ
3.1 Introduction 37 HtFD lvdy]
3.2 General Description 37 DVA:Cmh\
3.3 Coherence 38 ~Y;*u]^
3.4 Interference between two Plane Waves 41 icgfB-1|i
3.4.1 Laser Doppler Velocimetry (LDV) 45 uFE)17E
3.5 Interference between other Waves 46 6Oq 7#3]
3.6 Interferometry 49 ~ }P,.QQ
3.6.1 Wavefront Division 50 5+vaE
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3.6.2 Amplitude Division 51 mt
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3.6.3 The Dual-Frequency Michelson Interferometer 54 I,tud!p`
3.6.4 Heterodyne (Homodyne) Detection 55 ^!d3=}:0
3.7 Spatial and Temporal Coherence 56 .nJz G
3.8 Optical Coherence Tomography 61 `3pW]&
4 Diffraction 67 d=(mw_-?
4.1 Introduction 67 *w&e\i|7
4.2 Diffraction from a Single Slit 67 qPNR`%}Q
4.3 Diffraction from a Grating 70 ?4 ,T}@P
4.3.1 The Grating Equation. Amplitude Transmittance 70 #"!<W0
4.3.2 The Spatial Frequency Spectrum 73 %EH )&k
4.4 Fourier Optics 75 8tL~FiHb"
4.5 Optical Filtering 76 By |4 m
4.5.1 Practical Filtering Set-Ups 78 Xvu(vA
4.6 Physical Optics Description &d!GImcxQ
of Image Formation 81 S[gx{Bxiw
4.6.1 The Coherent Transfer Function 83 a(nlTMfu
4.6.2 The Incoherent Transfer Function 85 -RwE% cr
4.6.3 The Depth of Focus 88 \e*]Ls#jS
4.7 The Phase-Modulated Sinusoidal Grating 89 :Ye ! w$r
5 Light Sources and Detectors 99 `?]k { l1R
5.1 Introduction 99 sC'` ~}C
5.2 Radiometry. Photometry 99 lxx2H1([
5.2.1 Lambertian Surface 102 0J9x9j`&j
5.2.2 Blackbody Radiator 103 V
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5.2.3 Examples 105 @"A4$`Xi3
5.3 Incoherent Light Sources 108 iS^QTuk3%
5.4 Coherent Light Sources 109 C dn J&N{
5.4.1 Stimulated Emission 109 +7Gwg
5.4.2 Gas Lasers 112 Ud?Q%) X
5.4.3 Liquid Lasers 114 .('SW\u-
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 us-L] S+lm
5.4.5 Solid-State Lasers 117 |Cv!, ]9:r
5.4.6 Other Lasers 119 Wr
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