Optical Metrology Third Edition *RllKP Y)
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Kjell J. G˚asvik l\DcXgD
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Spectra Vision AS, Trondheim, Norway XIRvIwO
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Preface to the Third Edition xi DlF6tcoI
1Basics 1 B.Y8O^rx
1.1 Introduction 1 '\wZKY VN
1.2 Wave Motion. The Electromagnetic Spectrum 1 ',l}$]y5
1.3 The Plane Wave. Light Rays 3 &57s //PrX
1.4 Phase Difference 4 k.6gX < T
1.5 Complex Notation. Complex Amplitude 5 + \s&v!
1.6 Oblique Incidence of A Plane Wave 5 2S@aG%-)
1.7 The Spherical Wave 7 &fRZaq'2R
1.8 The Intensity 8 EHlkt,h*
1.9 Geometrical Optics 8 TD^w|U.
1.10 The Simple Convex (Positive) Lens 10 p->b Vt
1.11 A Plane-Wave Set-Up 11 D=_FrEM_IA
2 Gaussian Optics 15 ]1dnp ]r
2.1 Introduction 15 ,@Ae o9}
2.2 Refraction at a Spherical Surface 15 L EJn
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2.2.1 Examples 19 nJr:U2d
2.3 The General Image-Forming System 19 V6a+VfH
2.4 The Image-Formation Process 21 ;0JK>c
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2.5 Reflection at a Spherical Surface 23 D:.1Be`Tv
2.6 Aspheric Lenses 25 +AkMU|6
2.7 Stops and Apertures 26 ^b& U0k$R
2.8 Lens Aberrations. Computer Lens Design 28 >!BZ>G2
2.9 Imaging and The Lens Formula 29 bKac?y~S_
2.10 Standard Optical Systems 30
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2.10.1 Afocal Systems. The Telescope 30 yr[HuwU
2.10.2 The Simple Magnifier 32 }~+_|
2.10.3 The Microscope 34 .?dYY;P
3 Interference 37 b75en{aDi*
3.1 Introduction 37 }WM!e"
3.2 General Description 37 K0 -AP
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3.3 Coherence 38 .]y"04@]
3.4 Interference between two Plane Waves 41 R.)w
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3.4.1 Laser Doppler Velocimetry (LDV) 45 i"OY =iw-N
3.5 Interference between other Waves 46 v?<Tkw ^F
3.6 Interferometry 49 5hg
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3.6.1 Wavefront Division 50 `S:LuU8e
3.6.2 Amplitude Division 51
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3.6.3 The Dual-Frequency Michelson Interferometer 54 %O02xr=
3.6.4 Heterodyne (Homodyne) Detection 55 hNUkaP
3.7 Spatial and Temporal Coherence 56 up
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3.8 Optical Coherence Tomography 61 t<H@c9{;*
4 Diffraction 67 5$<Ozkj(
4.1 Introduction 67 1Farix1YDq
4.2 Diffraction from a Single Slit 67 ^#p+#_*V
4.3 Diffraction from a Grating 70 bc%N !d
4.3.1 The Grating Equation. Amplitude Transmittance 70 -XMWN$Ah
4.3.2 The Spatial Frequency Spectrum 73 ?7cT$ /4
4.4 Fourier Optics 75 TBu[3X%
4.5 Optical Filtering 76 nv}z%.rRUj
4.5.1 Practical Filtering Set-Ups 78 +xojn v
4.6 Physical Optics Description 2y#[uSq B
of Image Formation 81 mj|TWDcj+
4.6.1 The Coherent Transfer Function 83 g>;u} +lO
4.6.2 The Incoherent Transfer Function 85 ]v|n'D-?
4.6.3 The Depth of Focus 88 z z 2'h>
4.7 The Phase-Modulated Sinusoidal Grating 89 f;cY&GC
5 Light Sources and Detectors 99
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5.1 Introduction 99 ~F^7L5d}C
5.2 Radiometry. Photometry 99 p{W'[A{J .
5.2.1 Lambertian Surface 102 C~q&
5.2.2 Blackbody Radiator 103 ) N kf'&
5.2.3 Examples 105 A#x_>fV
5.3 Incoherent Light Sources 108 `71(wf1q[f
5.4 Coherent Light Sources 109 Q%. F Mf
5.4.1 Stimulated Emission 109 Cs?[
5.4.2 Gas Lasers 112 atYe$Db
5.4.3 Liquid Lasers 114 ;)ji3 M
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 %}1 v- z
5.4.5 Solid-State Lasers 117 hVf ;{p
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5.4.6 Other Lasers 119 D{G~7 P\.
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