Optical Metrology Third Edition 32anmVnf
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Kjell J. G˚asvik ^c.pvC"4j
Spectra Vision AS, Trondheim, Norway [4B (rra
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Preface to the Third Edition xi !{( crf XB
1Basics 1 +gBD E :
1.1 Introduction 1
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1.2 Wave Motion. The Electromagnetic Spectrum 1 A>S7Ap4z>
1.3 The Plane Wave. Light Rays 3 F &5iA\
1.4 Phase Difference 4 %zEy .7Ux
1.5 Complex Notation. Complex Amplitude 5 {(F}SF{
1.6 Oblique Incidence of A Plane Wave 5 yEJ3O^(F
1.7 The Spherical Wave 7 VB8eGMo
1.8 The Intensity 8 l$l6,OzS@
1.9 Geometrical Optics 8 .Q@]+&`|}i
1.10 The Simple Convex (Positive) Lens 10 &pz`gna
1.11 A Plane-Wave Set-Up 11 <.BY=z=H
2 Gaussian Optics 15 C deV3
2.1 Introduction 15 4 PU@W o
2.2 Refraction at a Spherical Surface 15 & n83 >Q
2.2.1 Examples 19 !&@t
2.3 The General Image-Forming System 19 1{cF/ :o
2.4 The Image-Formation Process 21 w+!V,lU"^
2.5 Reflection at a Spherical Surface 23 L y
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2.6 Aspheric Lenses 25 UN; U+ 5,t
2.7 Stops and Apertures 26 ^n4aoj
2.8 Lens Aberrations. Computer Lens Design 28 hmb=_W
2.9 Imaging and The Lens Formula 29 z
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2.10 Standard Optical Systems 30 X
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2.10.1 Afocal Systems. The Telescope 30 |6Iw \YU
2.10.2 The Simple Magnifier 32 _XrlCLp: d
2.10.3 The Microscope 34 0s}gg[lj
3 Interference 37 _wW"Tn]
3.1 Introduction 37 ?G&J_L=@Y
3.2 General Description 37 PqyR,Bcx0
3.3 Coherence 38 F<2gM# jLB
3.4 Interference between two Plane Waves 41 L/b vM?B^
3.4.1 Laser Doppler Velocimetry (LDV) 45 d=\\ik 8
3.5 Interference between other Waves 46 k4:=y9`R}$
3.6 Interferometry 49 '?{L
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3.6.1 Wavefront Division 50 Q4N0j' QA
3.6.2 Amplitude Division 51 B4m34)EOE
3.6.3 The Dual-Frequency Michelson Interferometer 54 @fVz
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3.6.4 Heterodyne (Homodyne) Detection 55 !|ic {1!_
3.7 Spatial and Temporal Coherence 56 7eZwpg?K
3.8 Optical Coherence Tomography 61 0.(7R,-
4 Diffraction 67 r>"l:GZ
4.1 Introduction 67 DC$> 5FDv
4.2 Diffraction from a Single Slit 67 biQ~q $E
4.3 Diffraction from a Grating 70 { K/xI
4.3.1 The Grating Equation. Amplitude Transmittance 70 O=!Eqa ExW
4.3.2 The Spatial Frequency Spectrum 73 =fhRyU:C[z
4.4 Fourier Optics 75 a][Tb0Ox
4.5 Optical Filtering 76 $O\]cQD`u
4.5.1 Practical Filtering Set-Ups 78 d,j)JnY3V
4.6 Physical Optics Description nnd-d+$
of Image Formation 81 /" &Jf}r
4.6.1 The Coherent Transfer Function 83 ah!RQ2hDrV
4.6.2 The Incoherent Transfer Function 85 HXqG;Fds(
4.6.3 The Depth of Focus 88 O G 7U+d6
4.7 The Phase-Modulated Sinusoidal Grating 89 +~lPf.
5 Light Sources and Detectors 99 N{!@M_C^%R
5.1 Introduction 99 x.(Sv]+[
5.2 Radiometry. Photometry 99 cI <T/~P
5.2.1 Lambertian Surface 102 c^,8eb7c
5.2.2 Blackbody Radiator 103 ^7$Q"
5.2.3 Examples 105 8 ..g\ZT
5.3 Incoherent Light Sources 108 D;DI8.4`N
5.4 Coherent Light Sources 109 #CB`7 }jq
5.4.1 Stimulated Emission 109 09Z\F^*$F
5.4.2 Gas Lasers 112 3.?oG5 P#
5.4.3 Liquid Lasers 114 Hegj_FQ
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 ^p\n/#B
5.4.5 Solid-State Lasers 117 pr1>:0dg
5.4.6 Other Lasers 119 0IbR>zFg.
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