Optical Metrology Third Edition C~C}b
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Kjell J. G˚asvik v% mAU3M
Spectra Vision AS, Trondheim, Norway "O`{ QVg:
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Preface to the Third Edition xi + -[M 7J
1Basics 1 wUnz D)
1.1 Introduction 1 {9yv3[f3
1.2 Wave Motion. The Electromagnetic Spectrum 1 ^|h5*Tb
1.3 The Plane Wave. Light Rays 3 Y}G 9(Ci&
1.4 Phase Difference 4 |AY`OVgcKD
1.5 Complex Notation. Complex Amplitude 5 /}%$fB
1.6 Oblique Incidence of A Plane Wave 5 K^H{B& b8
1.7 The Spherical Wave 7 $d<vPpJ3
1.8 The Intensity 8 0+a -l[!p
1.9 Geometrical Optics 8 7d44i
1.10 The Simple Convex (Positive) Lens 10 (k{rn3,
1.11 A Plane-Wave Set-Up 11 |sQC: y>
2 Gaussian Optics 15 zQ;jaS3 hf
2.1 Introduction 15 [2]Ti_
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2.2 Refraction at a Spherical Surface 15 ~/R,oQ1!g}
2.2.1 Examples 19 j gcI|?yL
2.3 The General Image-Forming System 19 ,\HZIl[8
2.4 The Image-Formation Process 21 p2v+sWO
2.5 Reflection at a Spherical Surface 23 'qhi8=*
2.6 Aspheric Lenses 25 &rdz({
2.7 Stops and Apertures 26 =}b DT2Nb
2.8 Lens Aberrations. Computer Lens Design 28 '<Nhq_u{
2.9 Imaging and The Lens Formula 29 >8I?YT.
2.10 Standard Optical Systems 30 pzkl ;"gK
2.10.1 Afocal Systems. The Telescope 30 Z6.0X{6 nA
2.10.2 The Simple Magnifier 32 xq U@87[_
2.10.3 The Microscope 34 XI4le=^EM
3 Interference 37 =5 a|'O
3.1 Introduction 37 TLBIM
3.2 General Description 37 .7h:/d
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3.3 Coherence 38 (qf%,F, _L
3.4 Interference between two Plane Waves 41
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3.4.1 Laser Doppler Velocimetry (LDV) 45
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3.5 Interference between other Waves 46 *bi!iz5F
3.6 Interferometry 49 oWJ0>)
3.6.1 Wavefront Division 50 q%G"P*g$(
3.6.2 Amplitude Division 51 | )"`v'8>
3.6.3 The Dual-Frequency Michelson Interferometer 54 k9V#=,K0
3.6.4 Heterodyne (Homodyne) Detection 55 hKG)*
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3.7 Spatial and Temporal Coherence 56 Ukf4Q\@w
3.8 Optical Coherence Tomography 61 b7thu5
4 Diffraction 67 \`FpBE_e)
4.1 Introduction 67 h kifd4#
4.2 Diffraction from a Single Slit 67 ^Po^Co
4.3 Diffraction from a Grating 70 G*oqhep
4.3.1 The Grating Equation. Amplitude Transmittance 70 %K9 9_ Cl3
4.3.2 The Spatial Frequency Spectrum 73 Cb`2" mpWS
4.4 Fourier Optics 75 =vd9mb-
4.5 Optical Filtering 76 e`N /3q7
4.5.1 Practical Filtering Set-Ups 78 rc_K|Df
4.6 Physical Optics Description 8ZnHp~
of Image Formation 81 i! |OFU6
4.6.1 The Coherent Transfer Function 83 jrF#DDH?I
4.6.2 The Incoherent Transfer Function 85 D lD;rL=
4.6.3 The Depth of Focus 88 g>@T5&1q*
4.7 The Phase-Modulated Sinusoidal Grating 89 RotWMGNK
5 Light Sources and Detectors 99 lQkCA-
5.1 Introduction 99 r5 k{mV+
5.2 Radiometry. Photometry 99 _LYI #D
5.2.1 Lambertian Surface 102 VL[ }
5.2.2 Blackbody Radiator 103 ZxDh94w/
5.2.3 Examples 105 KOYU'hw
5.3 Incoherent Light Sources 108 PP]Z~ne0X
5.4 Coherent Light Sources 109 X:0-FCT;\
5.4.1 Stimulated Emission 109 dKG 2f
5.4.2 Gas Lasers 112 kMCg fL
5.4.3 Liquid Lasers 114 AW6 "1(D
5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 IP#?$X
5.4.5 Solid-State Lasers 117 h'wI
5.4.6 Other Lasers 119 v` G [6Z
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