Optical Metrology Third Edition ayp b
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Kjell J. G˚asvik Q/_#k/R
Spectra Vision AS, Trondheim, Norway }#9( Mul
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Preface to the Third Edition xi I/u9RmbU
1Basics 1 i3V/`)iz
1.1 Introduction 1 +!>L Y
1.2 Wave Motion. The Electromagnetic Spectrum 1 ]Bu DaxWN
1.3 The Plane Wave. Light Rays 3 tFU;SBt8Ki
1.4 Phase Difference 4 vgP UIxB@
1.5 Complex Notation. Complex Amplitude 5 :uCdq`SaQl
1.6 Oblique Incidence of A Plane Wave 5 p,#6
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1.7 The Spherical Wave 7 i&ts YnP2
1.8 The Intensity 8 i*t v,f.(
1.9 Geometrical Optics 8 6TFo|z!C
1.10 The Simple Convex (Positive) Lens 10 z4O o@3$\R
1.11 A Plane-Wave Set-Up 11 o\4t4}z~'f
2 Gaussian Optics 15 nsJ :Osq|
2.1 Introduction 15 3A0_C?E
2.2 Refraction at a Spherical Surface 15 2ChWe}f
2.2.1 Examples 19 oj.lj!
2.3 The General Image-Forming System 19 `q ?RF+
2.4 The Image-Formation Process 21 O8 RzU g&
2.5 Reflection at a Spherical Surface 23 a| x8=H
2.6 Aspheric Lenses 25 F?*k}]Gi
2.7 Stops and Apertures 26 mY2:m(9"5
2.8 Lens Aberrations. Computer Lens Design 28 )h"Fl a
2.9 Imaging and The Lens Formula 29 Bhuw(KeB
2.10 Standard Optical Systems 30 jn=ug42d
2.10.1 Afocal Systems. The Telescope 30 O k(47nC
2.10.2 The Simple Magnifier 32 CyTFb$Z
2.10.3 The Microscope 34 WM< \e
3 Interference 37 nk08>veG
3.1 Introduction 37 o <\6Rm
3.2 General Description 37 edN8-P(
3.3 Coherence 38 "@t-Cy:!O
3.4 Interference between two Plane Waves 41 #
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3.4.1 Laser Doppler Velocimetry (LDV) 45 9+VF<;Xw
3.5 Interference between other Waves 46 "P dvmur
3.6 Interferometry 49 0/A-#'>
3.6.1 Wavefront Division 50 & l^n4
3.6.2 Amplitude Division 51 D0%FELG05
3.6.3 The Dual-Frequency Michelson Interferometer 54 kkfC AM
3.6.4 Heterodyne (Homodyne) Detection 55 Fzs>J&sY&
3.7 Spatial and Temporal Coherence 56 y9
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3.8 Optical Coherence Tomography 61 8&Wx@QI
4 Diffraction 67 >\\5"S f
4.1 Introduction 67 -Op@y2+c
4.2 Diffraction from a Single Slit 67 TNsg pJ?\
4.3 Diffraction from a Grating 70 $MT}l
4.3.1 The Grating Equation. Amplitude Transmittance 70 M7 p8^NL
4.3.2 The Spatial Frequency Spectrum 73 aJQXJ,>Lv
4.4 Fourier Optics 75 Q<'@V@H
4.5 Optical Filtering 76 "'a qb~j^
4.5.1 Practical Filtering Set-Ups 78 KZ\dB;W< |
4.6 Physical Optics Description 5`yPT>*#m>
of Image Formation 81 $~hdm$
4.6.1 The Coherent Transfer Function 83 "gg(tp45
4.6.2 The Incoherent Transfer Function 85 N l|^o{#
4.6.3 The Depth of Focus 88 J[+Tj @n'
4.7 The Phase-Modulated Sinusoidal Grating 89 Jk~UEqr+
5 Light Sources and Detectors 99 rG 5i-'
5.1 Introduction 99 U,ELqi \
5.2 Radiometry. Photometry 99 3GINv3_
5.2.1 Lambertian Surface 102 6=BZ~e d
5.2.2 Blackbody Radiator 103 uE"2kn
5.2.3 Examples 105 e5qvyUJM
5.3 Incoherent Light Sources 108 5:_~mlfi
5.4 Coherent Light Sources 109 3DI^y` av
5.4.1 Stimulated Emission 109 Jmy)J!ib*
5.4.2 Gas Lasers 112 Ctj8tK$D
5.4.3 Liquid Lasers 114 Si[eAAd'
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5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114 o @@_J@}#
5.4.5 Solid-State Lasers 117 kI]=&Rw
5.4.6 Other Lasers 119 YiBOi?h9
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