Optical Metrology Third Edition m|tC24 j V3)2C} Kjell J. G˚asvik
$m$;v<PSe Spectra Vision AS, Trondheim, Norway
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{2d_"lHBt 1Nn@L2b 2 Preface to the Third Edition xi
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dfR!&J 1Basics 1
z`Wt%tL( 1.1 Introduction 1
&7mW9] 1.2 Wave Motion. The Electromagnetic Spectrum 1
E\7m< 'R 1.3 The Plane Wave. Light Rays 3
UKd'+R] 1.4 Phase Difference 4
yc;3Id5?> 1.5 Complex Notation. Complex Amplitude 5
)EM7,xMz 1.6 Oblique Incidence of A Plane Wave 5
!v |ISyK 1.7 The Spherical Wave 7
5v.DX`" 1.8 The Intensity 8
cV
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W[bmzvJ_X 1.10 The Simple Convex (Positive) Lens 10
@r^ !{ 1.11 A Plane-Wave Set-Up 11
pE]?x $ 5U 2 Gaussian Optics 15
% ~ ]xuP[ 2.1 Introduction 15
-XK0KYhgW 2.2 Refraction at a Spherical Surface 15
9 ;t]Hp_+K 2.2.1 Examples 19
'vV$]/wBF 2.3 The General Image-Forming System 19
QWnndI_4p 2.4 The Image-Formation Process 21
G#`\(NW 2.5 Reflection at a Spherical Surface 23
b }9[s 2.6 Aspheric Lenses 25
BbOu /i| 2.7 Stops and Apertures 26
0 *%& > 2.8 Lens Aberrations. Computer Lens Design 28
z$lF)r:Bc 2.9 Imaging and The Lens Formula 29
>Q E{O.Z 2.10 Standard Optical Systems 30
ihe(F 7\U 2.10.1 Afocal Systems. The Telescope 30
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v)mZp 2.10.2 The Simple Magnifier 32
f|EUqu%E 2.10.3 The Microscope 34
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_{? 3.1 Introduction 37
t G.(flW, 3.2 General Description 37
&-yGVx 3.3 Coherence 38
V3 N0Og3 3.4 Interference between two Plane Waves 41
o5o^TW{ 3.4.1 Laser Doppler Velocimetry (LDV) 45
?8@>6 IXn 3.5 Interference between other Waves 46
5A Bhj* 7 3.6 Interferometry 49
l.)}t)my} 3.6.1 Wavefront Division 50
e;YW6}'} 3.6.2 Amplitude Division 51
e&q?} Ho 3.6.3 The Dual-Frequency Michelson Interferometer 54
^H'a4G3 3.6.4 Heterodyne (Homodyne) Detection 55
iTo k[uJ} 3.7 Spatial and Temporal Coherence 56
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gY AF'? 4 Diffraction 67
~ i;fDQ&! 4.1 Introduction 67
0[A9b,MMVO 4.2 Diffraction from a Single Slit 67
@ez Tbc3 4.3 Diffraction from a Grating 70
y %8op:' 4.3.1 The Grating Equation. Amplitude Transmittance 70
cS .i 4.3.2 The Spatial Frequency Spectrum 73
?kw&= T ! 4.4 Fourier Optics 75
M[ 5[ N{ 4.5 Optical Filtering 76
+#J,BKul 4.5.1 Practical Filtering Set-Ups 78
Q />L_S 4.6 Physical Optics Description
\kam c A of Image Formation 81
yR~-k?7b 4.6.1 The Coherent Transfer Function 83
1t[j"CG(o 4.6.2 The Incoherent Transfer Function 85
R5_i15< 4.6.3 The Depth of Focus 88
Pi 2 | 4.7 The Phase-Modulated Sinusoidal Grating 89
,SlN zR 5 Light Sources and Detectors 99
/(C~~XP) 5.1 Introduction 99
4JIYbb-a' 5.2 Radiometry. Photometry 99
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>XW*T5aUA 5.2.2 Blackbody Radiator 103
ra ' 5.2.3 Examples 105
AF,BwL N 5.3 Incoherent Light Sources 108
n"; 02?@F 5.4 Coherent Light Sources 109
;(6g\ 'm 5.4.1 Stimulated Emission 109
{Z;t ^:s# 5.4.2 Gas Lasers 112
_A_ A$N~9 5.4.3 Liquid Lasers 114
BfTcI) 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
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&:*q_$]Oz 5.4.6 Other Lasers 119
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