Optical Metrology Third Edition w;_ Ds +!<`$+W Kjell J. G˚asvik
A1_x^s Spectra Vision AS, Trondheim, Norway
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p<jr&zVEc> l ghzd6 Preface to the Third Edition xi
5Q88OxH 1Basics 1
o#Y1Uamkf 1.1 Introduction 1
jQDxbkIuzE 1.2 Wave Motion. The Electromagnetic Spectrum 1
pg<>Ow5,~l 1.3 The Plane Wave. Light Rays 3
vuAjAeKm 1.4 Phase Difference 4
V1fPH; 1.5 Complex Notation. Complex Amplitude 5
4EK[gM8 1.6 Oblique Incidence of A Plane Wave 5
3)ip@29F 1.7 The Spherical Wave 7
Nt'5} 1.8 The Intensity 8
XVfQscZe 1.9 Geometrical Optics 8
fP|\1Y?CS 1.10 The Simple Convex (Positive) Lens 10
IlrmXSr 1.11 A Plane-Wave Set-Up 11
9p.>L8 2 Gaussian Optics 15
7^L&YVW 2.1 Introduction 15
)t4C*+9<U 2.2 Refraction at a Spherical Surface 15
BCbW;w8aI 2.2.1 Examples 19
$Yka\tS' 2.3 The General Image-Forming System 19
J]UHq$B 2.4 The Image-Formation Process 21
~IXfID!8 2.5 Reflection at a Spherical Surface 23
twn@~$ 2.6 Aspheric Lenses 25
Ojs\2('u 2.7 Stops and Apertures 26
OrBFe *2y 2.8 Lens Aberrations. Computer Lens Design 28
GZ={G2@=I 2.9 Imaging and The Lens Formula 29
l0_V-|x 2.10 Standard Optical Systems 30
j;3o9!.s: 2.10.1 Afocal Systems. The Telescope 30
>O _ 2.10.2 The Simple Magnifier 32
(tgaH,G 2.10.3 The Microscope 34
V*aTDU%-. 3 Interference 37
3XRG" 3.1 Introduction 37
$enh45Wy 3.2 General Description 37
9 2EMDKJ 3.3 Coherence 38
%c0;Bb- 3.4 Interference between two Plane Waves 41
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3.4.1 Laser Doppler Velocimetry (LDV) 45
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D9SI 3.5 Interference between other Waves 46
0TpA3K 3.6 Interferometry 49
2XtQ"`) 3.6.1 Wavefront Division 50
iCS/~[ 3.6.2 Amplitude Division 51
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3.6.3 The Dual-Frequency Michelson Interferometer 54
"DpQnhvbB 3.6.4 Heterodyne (Homodyne) Detection 55
[xPE?OD 3.7 Spatial and Temporal Coherence 56
f"Iyo:Wt 3.8 Optical Coherence Tomography 61
cF2/}m] 4 Diffraction 67
H/$q]i*#K 4.1 Introduction 67
%?fzT+-=% 4.2 Diffraction from a Single Slit 67
7h2bL6Y88 4.3 Diffraction from a Grating 70
^Ram8fW 4.3.1 The Grating Equation. Amplitude Transmittance 70
%vXQ Sz 4.3.2 The Spatial Frequency Spectrum 73
s,Swlo7D! 4.4 Fourier Optics 75
;qMlGXW*q 4.5 Optical Filtering 76
Mx"tUoU6z 4.5.1 Practical Filtering Set-Ups 78
AqkK`iJ# 4.6 Physical Optics Description
Ei-OuDM;) of Image Formation 81
q4{ t H 4.6.1 The Coherent Transfer Function 83
.Dm{mV@*T 4.6.2 The Incoherent Transfer Function 85
9x!y.gx 4.6.3 The Depth of Focus 88
;Y\,2b, xh 4.7 The Phase-Modulated Sinusoidal Grating 89
$w\ , ."y 5 Light Sources and Detectors 99
L nGSYrx1 5.1 Introduction 99
7Cf(y'w^ 5.2 Radiometry. Photometry 99
B*IDx`^Y 5.2.1 Lambertian Surface 102
U4gJ![>5j 5.2.2 Blackbody Radiator 103
z3]U%y(, 5.2.3 Examples 105
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4*MwK 5.3 Incoherent Light Sources 108
P{18crC[1 5.4 Coherent Light Sources 109
/ 5Loj&!= 5.4.1 Stimulated Emission 109
Hw{Y.@)4R 5.4.2 Gas Lasers 112
*q{UipZbx 5.4.3 Liquid Lasers 114
qgNK!(kWpr 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
L ]c9 5.4.5 Solid-State Lasers 117
?sYjFiE 5.4.6 Other Lasers 119
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