Optical Metrology Third Edition Ul@ZCv+ WSDNTfpI Kjell J. G˚asvik
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%Ts efs?_ Aplqx vth Preface to the Third Edition xi
Uw61X>y= 1Basics 1
P_-zk w 1.1 Introduction 1
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1.2 Wave Motion. The Electromagnetic Spectrum 1
fhH* R*4 1.3 The Plane Wave. Light Rays 3
"T}J|28Z 1.4 Phase Difference 4
b@1 QE 1.5 Complex Notation. Complex Amplitude 5
l*'8B)vN2 1.6 Oblique Incidence of A Plane Wave 5
Z|8f7@k{|+ 1.7 The Spherical Wave 7
Q2 rZMK 1.8 The Intensity 8
)QBsyN<x6 1.9 Geometrical Optics 8
a pY m,_ 1.10 The Simple Convex (Positive) Lens 10
y9 s5{\H 1.11 A Plane-Wave Set-Up 11
/cI]Z^& 2 Gaussian Optics 15
=[1 W .Z t 2.1 Introduction 15
uT-WQ/id 2.2 Refraction at a Spherical Surface 15
[&{"1Z 2.2.1 Examples 19
E\V>3rse 2.3 The General Image-Forming System 19
X/7: * 2.4 The Image-Formation Process 21
1>1 |>% 2.5 Reflection at a Spherical Surface 23
L~mL9 [( , 2.6 Aspheric Lenses 25
~ MhPzu&B 2.7 Stops and Apertures 26
dk(- yv' 2.8 Lens Aberrations. Computer Lens Design 28
Zfb:>J@h6 2.9 Imaging and The Lens Formula 29
#=O0-si ]P 2.10 Standard Optical Systems 30
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2.10.1 Afocal Systems. The Telescope 30
S0 yPg9v 2.10.2 The Simple Magnifier 32
(nE$};c<b2 2.10.3 The Microscope 34
f A 3 3 Interference 37
10[~ki-1; 3.1 Introduction 37
p19 Zxh 3.2 General Description 37
[ B (lJz 3.3 Coherence 38
Hb]7>[L 3.4 Interference between two Plane Waves 41
!Uj !Oy 3.4.1 Laser Doppler Velocimetry (LDV) 45
C*78ZwZ 3.5 Interference between other Waves 46
8\a)}k~4 3.6 Interferometry 49
v5 9> 3.6.1 Wavefront Division 50
b _ u&% 3.6.2 Amplitude Division 51
,LMme}FFeb 3.6.3 The Dual-Frequency Michelson Interferometer 54
DI&xTe9k 3.6.4 Heterodyne (Homodyne) Detection 55
#g |j;{P 3.7 Spatial and Temporal Coherence 56
#qn)Nq( 3.8 Optical Coherence Tomography 61
H a/\&Z( 4 Diffraction 67
_ssHRbE 4.1 Introduction 67
l y%**iN 4.2 Diffraction from a Single Slit 67
cX=` Tl 4.3 Diffraction from a Grating 70
.i. |wY 4.3.1 The Grating Equation. Amplitude Transmittance 70
E"" /dC:B 4.3.2 The Spatial Frequency Spectrum 73
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4.4 Fourier Optics 75
m9q%l_ 4.5 Optical Filtering 76
nQP0< _S 4.5.1 Practical Filtering Set-Ups 78
N%_~cR; 4.6 Physical Optics Description
'|q :h of Image Formation 81
yNT2 kB' 4.6.1 The Coherent Transfer Function 83
Q72wg~% w 4.6.2 The Incoherent Transfer Function 85
P"]+6sm&es 4.6.3 The Depth of Focus 88
}(],*^'u- 4.7 The Phase-Modulated Sinusoidal Grating 89
G|MDo|q] 5 Light Sources and Detectors 99
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EKP 5.1 Introduction 99
=L=#PJAP j 5.2 Radiometry. Photometry 99
y k5P/H) 5.2.1 Lambertian Surface 102
y$ &a(S] 5.2.2 Blackbody Radiator 103
-j$l @2g 5.2.3 Examples 105
FlgB-qR]<n 5.3 Incoherent Light Sources 108
h1kPsg zR 5.4 Coherent Light Sources 109
M!hby3 1 5.4.1 Stimulated Emission 109
* c%@f<R~ 5.4.2 Gas Lasers 112
(gf\VYM-7 5.4.3 Liquid Lasers 114
6vjB; uS[ 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
|{jAMC0# 5.4.5 Solid-State Lasers 117
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5.4.6 Other Lasers 119
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