Optical Metrology Third Edition 49eD1h3'X[ kpuz]a7pK Kjell J. G˚asvik
_?nL+\'V Spectra Vision AS, Trondheim, Norway
1 v y* {D 
kBS9tKBWg n3WlZ!$ Preface to the Third Edition xi
:: ` HQ@^ 1Basics 1
%mW{n8W3{ 1.1 Introduction 1
!M(xG%M-V 1.2 Wave Motion. The Electromagnetic Spectrum 1
Ao 'l"- 1.3 The Plane Wave. Light Rays 3
28-RC>,@} 1.4 Phase Difference 4
EAUEQk?9 1.5 Complex Notation. Complex Amplitude 5
VG5i{1
0 1.6 Oblique Incidence of A Plane Wave 5
_T60;ZI+^ 1.7 The Spherical Wave 7
)+#` CIv 1.8 The Intensity 8
yNPVOp* 1.9 Geometrical Optics 8
/l3V3 B7 1.10 The Simple Convex (Positive) Lens 10
-abt:or 1.11 A Plane-Wave Set-Up 11
nkPh,X\N0 2 Gaussian Optics 15
dRYqr}!%n 2.1 Introduction 15
KM , \ 2.2 Refraction at a Spherical Surface 15
!t"4!3 2.2.1 Examples 19
y
R qL9t 2.3 The General Image-Forming System 19
|]b sCmD 2.4 The Image-Formation Process 21
p%ki>p )E| 2.5 Reflection at a Spherical Surface 23
PI { bmZ 2.6 Aspheric Lenses 25
}{Pp]*I<A 2.7 Stops and Apertures 26
JtE M,tK 2.8 Lens Aberrations. Computer Lens Design 28
6jaEv# 2.9 Imaging and The Lens Formula 29
xo^b&ktQd 2.10 Standard Optical Systems 30
l$KA)xbI 2.10.1 Afocal Systems. The Telescope 30
A`%k:@ 2.10.2 The Simple Magnifier 32
w7L{_aom 2.10.3 The Microscope 34
)$2QZ
qX 3 Interference 37
hgG9m[?K 3.1 Introduction 37
ic:zsuEm 3.2 General Description 37
iT+8|Yia 3.3 Coherence 38
S O/c}vnBB 3.4 Interference between two Plane Waves 41
H*n-_{h"t 3.4.1 Laser Doppler Velocimetry (LDV) 45
= jN.1} 3.5 Interference between other Waves 46
.^` {1% 3.6 Interferometry 49
`v!urE/gg% 3.6.1 Wavefront Division 50
yZY \MB/ 3.6.2 Amplitude Division 51
:U|1 xgB 3.6.3 The Dual-Frequency Michelson Interferometer 54
P\tB~SZ* 3.6.4 Heterodyne (Homodyne) Detection 55
bIDj[-CDG 3.7 Spatial and Temporal Coherence 56
Q-okt RK 3.8 Optical Coherence Tomography 61
),% %$G\ 4 Diffraction 67
fUWG*o9 4.1 Introduction 67
bW427B0 4.2 Diffraction from a Single Slit 67
P8:dU(nlW 4.3 Diffraction from a Grating 70
~7w" nIs<c 4.3.1 The Grating Equation. Amplitude Transmittance 70
^CYl \.Y@ 4.3.2 The Spatial Frequency Spectrum 73
v4TQX<0s 4.4 Fourier Optics 75
CZwX TH e 4.5 Optical Filtering 76
B3`5 O[ 6 4.5.1 Practical Filtering Set-Ups 78
Vr)S{k-Q 4.6 Physical Optics Description
o'aEY<mZ7 of Image Formation 81
Y1\ }5k{> 4.6.1 The Coherent Transfer Function 83
Evq IcZ 4.6.2 The Incoherent Transfer Function 85
P bn*_/H 4.6.3 The Depth of Focus 88
/{ J4:N'B> 4.7 The Phase-Modulated Sinusoidal Grating 89
L<cx:Vz 5 Light Sources and Detectors 99
HVCe;eI 5.1 Introduction 99
}0*@fO 5.2 Radiometry. Photometry 99
J1U/.`Oy 5.2.1 Lambertian Surface 102
p$c6<'UqH 5.2.2 Blackbody Radiator 103
2 RX;Ob_ 5.2.3 Examples 105
HyQJXw?A: 5.3 Incoherent Light Sources 108
NR6#g,+7 5.4 Coherent Light Sources 109
C==hox7b 5.4.1 Stimulated Emission 109
cl3K<'D 5.4.2 Gas Lasers 112
ub0.J#j@ 5.4.3 Liquid Lasers 114
8 FK/~,I 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
7aRi 5 5.4.5 Solid-State Lasers 117
_.Nbt(mz 5.4.6 Other Lasers 119
ys^oG$lq .
Y] _ruDIW .
_"yh.N& .
