Optical Metrology Third Edition ,h wf eHnei F Kjell J. G˚asvik
)K\k6HC. Spectra Vision AS, Trondheim, Norway
g`~lIt[=
WrK^>
Skk3M? Preface to the Third Edition xi
W"}*Q-8W 1Basics 1
)qe$rD;N 1.1 Introduction 1
6>N u=~ 1.2 Wave Motion. The Electromagnetic Spectrum 1
[hv3o0". 1.3 The Plane Wave. Light Rays 3
o{-USUGj7 1.4 Phase Difference 4
x9&tlKKxf 1.5 Complex Notation. Complex Amplitude 5
9/X v&<Tn 1.6 Oblique Incidence of A Plane Wave 5
!g8.8(/t) 1.7 The Spherical Wave 7
9%)& }KK| 1.8 The Intensity 8
&' Nk2{ 1.9 Geometrical Optics 8
b]s1Q
]V 1.10 The Simple Convex (Positive) Lens 10
QLpTz"H 1.11 A Plane-Wave Set-Up 11
T h- vG 2 Gaussian Optics 15
"` ?Wu 2.1 Introduction 15
On96N| 2.2 Refraction at a Spherical Surface 15
?w5nKpG#RI 2.2.1 Examples 19
\ \mO+N47i 2.3 The General Image-Forming System 19
@x-GbK? 2.4 The Image-Formation Process 21
.}hZ7>4- 2.5 Reflection at a Spherical Surface 23
iqv\ag 2.6 Aspheric Lenses 25
;uA_gn! 2.7 Stops and Apertures 26
}Bod#|`
2.8 Lens Aberrations. Computer Lens Design 28
7N~qg 7& 2.9 Imaging and The Lens Formula 29
e,j ?_p 2.10 Standard Optical Systems 30
!,(bXa\^ 2.10.1 Afocal Systems. The Telescope 30
x_H7=\pX] 2.10.2 The Simple Magnifier 32
n`I
jG 2.10.3 The Microscope 34
OTFu4"]M 3 Interference 37
8Jy1=R*S 3.1 Introduction 37
3xCA\* 3.2 General Description 37
^J5V!i$ 3.3 Coherence 38
[2j(\vC! 3.4 Interference between two Plane Waves 41
WCfe!P?g 3.4.1 Laser Doppler Velocimetry (LDV) 45
U-]PWt?C{ 3.5 Interference between other Waves 46
YDzF( ']o: 3.6 Interferometry 49
F0ivL` 3.6.1 Wavefront Division 50
uF.\dY\xv 3.6.2 Amplitude Division 51
pvwnza1 3.6.3 The Dual-Frequency Michelson Interferometer 54
PA-0FlV| 3.6.4 Heterodyne (Homodyne) Detection 55
m{yNnJ3O 3.7 Spatial and Temporal Coherence 56
0Eg r
Q 3.8 Optical Coherence Tomography 61
,E8>:-boL 4 Diffraction 67
eS# 0- 4.1 Introduction 67
{^19.F 4.2 Diffraction from a Single Slit 67
fvBC9^3 4.3 Diffraction from a Grating 70
mBgx17K/-_ 4.3.1 The Grating Equation. Amplitude Transmittance 70
*1$~CC7 4.3.2 The Spatial Frequency Spectrum 73
hpi_0lMkI 4.4 Fourier Optics 75
?yM/j7Xn 4.5 Optical Filtering 76
7Caap/L: 4.5.1 Practical Filtering Set-Ups 78
E~O>m8hF 4.6 Physical Optics Description
xg5@;p of Image Formation 81
.j<B5/+ 4.6.1 The Coherent Transfer Function 83
@/2wmza%2 4.6.2 The Incoherent Transfer Function 85
_.8]7f`*Gc 4.6.3 The Depth of Focus 88
PH4bM 4.7 The Phase-Modulated Sinusoidal Grating 89
]3#
@t:> 5 Light Sources and Detectors 99
Hr,gV2n 5.1 Introduction 99
]}Hv,a
5.2 Radiometry. Photometry 99
Pg8= 5.2.1 Lambertian Surface 102
T^H ) lC#R 5.2.2 Blackbody Radiator 103
mS;Q8Crh 5.2.3 Examples 105
2uR4~XjF 5.3 Incoherent Light Sources 108
)xy{[ K|M( 5.4 Coherent Light Sources 109
y?4=u,{C 5.4.1 Stimulated Emission 109
<W|{)U?p 5.4.2 Gas Lasers 112
Zu73x#pI 5.4.3 Liquid Lasers 114
BL^Hj 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
m3!MHe~t 5.4.5 Solid-State Lasers 117
ph'SS=!. 5.4.6 Other Lasers 119
<EN[s .
Uo)<_nG .
O*Pe[T5x' .