Optical Metrology Third Edition 3y$6}Kp4? EGFP$nvq Kjell J. G˚asvik
Qa2p34Z/ Spectra Vision AS, Trondheim, Norway
B(FM~TVZ
!:xE
X~ tpzh Preface to the Third Edition xi
%c$|.TkX 1Basics 1
*\+oe+ 3 1.1 Introduction 1
LO%e1y 1.2 Wave Motion. The Electromagnetic Spectrum 1
mo
tW7|p.e 1.3 The Plane Wave. Light Rays 3
>sAaLR4 1.4 Phase Difference 4
8t< X 1.5 Complex Notation. Complex Amplitude 5
M4;M.zxJv 1.6 Oblique Incidence of A Plane Wave 5
( ,mV6U% 1.7 The Spherical Wave 7
n<)A5UB5- 1.8 The Intensity 8
s7jNRY V 1.9 Geometrical Optics 8
GM8>u O 1.10 The Simple Convex (Positive) Lens 10
MdEds|D 1.11 A Plane-Wave Set-Up 11
LH`$<p2''r 2 Gaussian Optics 15
q$H@W.f 2.1 Introduction 15
li{<F{7 2.2 Refraction at a Spherical Surface 15
u46Z}~xf b 2.2.1 Examples 19
lpB:lRM 2.3 The General Image-Forming System 19
A#Ga!a 2.4 The Image-Formation Process 21
C\Ob!sv%H 2.5 Reflection at a Spherical Surface 23
@az<D7j2 2.6 Aspheric Lenses 25
3,!IV"_ 2.7 Stops and Apertures 26
Y[VXx8"p 2.8 Lens Aberrations. Computer Lens Design 28
8Bc2?NI= 2.9 Imaging and The Lens Formula 29
V2;Nv\J\ 2.10 Standard Optical Systems 30
<%|u1cn~!v 2.10.1 Afocal Systems. The Telescope 30
@qWClr{` 2.10.2 The Simple Magnifier 32
U0|bKU 2.10.3 The Microscope 34
2t0VbAO1{ 3 Interference 37
yI!W658$6 3.1 Introduction 37
Jv%)UR.] 3.2 General Description 37
]A\qI>, 3.3 Coherence 38
^?q(fK% 3.4 Interference between two Plane Waves 41
iB~dO @ 3.4.1 Laser Doppler Velocimetry (LDV) 45
fS8Pi,! 3.5 Interference between other Waves 46
2h}FotlO 3.6 Interferometry 49
W<O/LHKHdn 3.6.1 Wavefront Division 50
z#n+iC$9 3.6.2 Amplitude Division 51
.W9
*- 3.6.3 The Dual-Frequency Michelson Interferometer 54
1 K^-tms 3.6.4 Heterodyne (Homodyne) Detection 55
wT3D9N. 3.7 Spatial and Temporal Coherence 56
0>;[EFL 3.8 Optical Coherence Tomography 61
)Fqtb;W= 4 Diffraction 67
8MU7|9 Q 4.1 Introduction 67
"*c&[ALw 4.2 Diffraction from a Single Slit 67
7bVKH[ 4.3 Diffraction from a Grating 70
1} _<q k9 4.3.1 The Grating Equation. Amplitude Transmittance 70
y+7+({w< 4.3.2 The Spatial Frequency Spectrum 73
}lq$Fi/ 4.4 Fourier Optics 75
OB+ cE4$ 4.5 Optical Filtering 76
.345%j 4.5.1 Practical Filtering Set-Ups 78
J!Rqm!)q 4.6 Physical Optics Description
`USze0"t0: of Image Formation 81
Q/HEWk 4.6.1 The Coherent Transfer Function 83
l4I',79l 4.6.2 The Incoherent Transfer Function 85
<P*7u\9& 4.6.3 The Depth of Focus 88
Ir-
1@_1Q 4.7 The Phase-Modulated Sinusoidal Grating 89
OzxiT + 5 Light Sources and Detectors 99
ne[H `7c 5.1 Introduction 99
Y{t}sO%A 5.2 Radiometry. Photometry 99
`$JOFLa 5.2.1 Lambertian Surface 102
Hg\H>Z 5.2.2 Blackbody Radiator 103
hy~KY6Ta 5.2.3 Examples 105
,W]}mqV%.' 5.3 Incoherent Light Sources 108
:efDPNm5 5.4 Coherent Light Sources 109
dJb7d` 5.4.1 Stimulated Emission 109
F"tM?V.| 5.4.2 Gas Lasers 112
-O@/S9]S) 5.4.3 Liquid Lasers 114
'1G0YfG}n 5.4.4 Semiconductor Diode Lasers. Light Emitting Diodes 114
~jWpD7px 5.4.5 Solid-State Lasers 117
f8f|'v| 5.4.6 Other Lasers 119
JvJ)}d$,& .
G he@m6|D .
ILHn~d IC .