断层面计测系统

Layer Profiling System F^CR$L& K  
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. +!mEP>  
Features k [iT']  
Super depty measurement sBa&]9
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A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of  flat display panels such as plasma displays. elz0t<V  
Vevy weak interference fringe patterns can be capured yX.; x 0  
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified. sAS[wcOQ  
100 magnification interference is achieved U+,RP$r@  
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult. -I[KIeF  
NSIMAGIK compatible system '"T9y=9]s  
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible.
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Specifications of stage 1 %8JMq\  
Item    RSY-150    RSY-300 ?2,{+d |  
Compressed Air    ≧0.5Mpa p8j*m~4B  
    Tube: Internal diameter 4mm, External diameter 6mm x/0loW?q^  
Power Saurce    Single-phase 100V 4KVA x/ix%!8J  
Clean Room Response    Response to Class 1000 VIg6'  
Stage Unit Size    600(W)×500(D)×1400(H)    1200(W)×800(D)×1500(H) 3)y=}jw  
Stage Unit Weight    About 200kg    About 300kg /[A#iTe  
Control Rack Unit Size    570(W)×750(D)×1850(H)    5700(W)×750(D)×1850(H)

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Control Rack Unit Weight    About 180kg B.:1fT7lI  
X-Y Stage     kK:U+`+  
X Valid Stroke    ±75mm    ±150mm JCci*F#r  
Y Valid Stroke    ±75mm    ±150mm G5ShheZd  
Maximum Speed    10mm/sec EHK+qrym  
Actuator    Ball screw, Open-loop control 4 %V9  
Stage Resolution    1μm/step g(i8HU*{q  
Repeatability    ±1μm ]3~u @6  
Z axis     xnHB <xrE}  
Valid Stroke    ±50mm Ygc|9}  
Actuator    Grand screw, Open-loop control ueEf>0  
Z Axis Resolution    ±1μm/step (Half-step) =1y~Qlu  
Jog-Dial    100μm/Revolution qWJHb Dd  
Joy-Stick    Hi-speed setting: 80000pps, Low-speed setting: 200pps MT6"b  

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日本神津精机中国总代理： R_b4S%jhx  
广州市嘉铭工业器材有限公司     <[K3Prf C  
地  址：广州市广州大道中明月一路20号明月阁2403室 wVs"+4l<  
联系人：MR.Huang   MSN:htj@kmischina.com A4(k<<xjE  
电  话：+86 020-87392866-211  传真：87361189 Mh MXn;VKj  
E-mail:htj@kmischina.com \BX9Wn*)a  
http:www.kmischina.com