Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
*FmY4w |Full Text PDF (586K)| |Buy This Article|
^FIpkhw ewvFUD'j Design and Fabrication of Highly Efficient Fan-Out Elements
ot8UuBq H. P. Herzig, D. Prongué and R. Dändliker
R %aed>zo $!H;,Jxv Institute of Microtechnology, University of Neuchâtel
aHuZzYQ*"j (Received March 26, 1990; accepted for publication May 19, 1990)
L9W'TvTwo M&wf4)*%0+ 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
