Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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OG9 '[o`8 H:S<O%f Design and Fabrication of Highly Efficient Fan-Out Elements
0SQrz$y H. P. Herzig, D. Prongué and R. Dändliker
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sC]z} v*OV\h. Institute of Microtechnology, University of Neuchâtel
@]!9;?so (Received March 26, 1990; accepted for publication May 19, 1990)
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