Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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*>qp:;,DKP _&ks1cw Design and Fabrication of Highly Efficient Fan-Out Elements
j+v =Ul|l H. P. Herzig, D. Prongué and R. Dändliker
8k1Dj1@0z %m$Sp47 Institute of Microtechnology, University of Neuchâtel
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_ 5?$ (Received March 26, 1990; accepted for publication May 19, 1990)
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15 oN __GqQUQ 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
