Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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VlV)$z_ 8k%H[Smn: Design and Fabrication of Highly Efficient Fan-Out Elements
"&Ff[O* H. P. Herzig, D. Prongué and R. Dändliker
G ;jF9i 9kUV1? Institute of Microtechnology, University of Neuchâtel
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IF$u (Received March 26, 1990; accepted for publication May 19, 1990)
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