Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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g| T' oK gReaFnm Design and Fabrication of Highly Efficient Fan-Out Elements
G N{.R7 H. P. Herzig, D. Prongué and R. Dändliker
= F:d#j>F g"#+U7O Institute of Microtechnology, University of Neuchâtel
Nd ( $ s[ (Received March 26, 1990; accepted for publication May 19, 1990)
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http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
