Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
6i@ub %qq |Full Text PDF (586K)| |Buy This Article|
UFZ"C, o0 ;7b>Tv Design and Fabrication of Highly Efficient Fan-Out Elements
sV0Z H. P. Herzig, D. Prongué and R. Dändliker
l^ 4OC p?rK`$U+J Institute of Microtechnology, University of Neuchâtel
K _-MkY?+ (Received March 26, 1990; accepted for publication May 19, 1990)
e& J3N qMgfMhQ7DU 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
