Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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SM2N3"\ >(wQx05^D Design and Fabrication of Highly Efficient Fan-Out Elements
Yyr9Kj: H. P. Herzig, D. Prongué and R. Dändliker
Q\T?t DvB{N`COd Institute of Microtechnology, University of Neuchâtel
c b&Yf1 (Received March 26, 1990; accepted for publication May 19, 1990)
6x=w-32+ y
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