Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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s+yBxgQ/ 00%$?Fyk Design and Fabrication of Highly Efficient Fan-Out Elements
2OAh7 '8< H. P. Herzig, D. Prongué and R. Dändliker
[LL"86D 9C-F%te7 Institute of Microtechnology, University of Neuchâtel
:?@d\c ' (Received March 26, 1990; accepted for publication May 19, 1990)
VpWax]' ;T"}dJel# 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307
