Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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%9.bu|`KK Y?e3B x7*b Design and Fabrication of Highly Efficient Fan-Out Elements
cWc$yE' H. P. Herzig, D. Prongué and R. Dändliker
[$H( CH` rZ 6@b Institute of Microtechnology, University of Neuchâtel
$1=v.'Y (Received March 26, 1990; accepted for publication May 19, 1990)
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