[未解决]求一篇Japanese Journal of Applied Physics上的文章，谢谢呀！ [复制链接]

Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309  |Next Article|  |Table of Contents| #.a4}ya19  
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Design and Fabrication of Highly Efficient Fan-Out Elements `;5UlkVZ5  
H. P. Herzig, D. Prongué and R. Dändliker BJ~Q\Si6  
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Institute of Microtechnology, University of Neuchâtel uoaF(F-  
(Received March 26, 1990; accepted for publication May 19, 1990) #y}@FG  
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链接:http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307