Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
Gsn$r(m{K |Full Text PDF (586K)| |Buy This Article|
1-V"uLy@gC <$(y6+lY Design and Fabrication of Highly Efficient Fan-Out Elements
s<>d&W 0= H. P. Herzig, D. Prongué and R. Dändliker
]!q>@b k?Kt*T Institute of Microtechnology, University of Neuchâtel
Ptm=c6H(' (Received March 26, 1990; accepted for publication May 19, 1990)
j*\oK@ N TcojA{V$ 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307