Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
4;~xRg;u&* |Full Text PDF (586K)| |Buy This Article|
DOtz +>1Yp"> ? Design and Fabrication of Highly Efficient Fan-Out Elements
o]p$
w[5 H. P. Herzig, D. Prongué and R. Dändliker
|goBIp[ axnVAh|}S Institute of Microtechnology, University of Neuchâtel
U!+O+( (Received March 26, 1990; accepted for publication May 19, 1990)
y+B iaD!U Z .`+IN(>E 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307