Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309 |Next Article| |Table of Contents|
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@ywtL8"1~ +7w5m Design and Fabrication of Highly Efficient Fan-Out Elements
^OQP;5 #K H. P. Herzig, D. Prongué and R. Dändliker
n',X,P0 ' F.^ 8/> Institute of Microtechnology, University of Neuchâtel
AVDhgJv (Received March 26, 1990; accepted for publication May 19, 1990)
6k;5T @Nsn0-B?ne 链接:
http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307