[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms 5%+T~ E*  
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High-precision prisms, having maximum angle tolerances & yw-y4 =  
of 1 to 3 arcsec, find increasing application in optical metrology. 6I 2`m(5  
Reported interferometric techniques for measuring 48w3gye  
the wedge angles of such prisms achieve a precision of up SkN^ytKE  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques -Xx,"[sN\w  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric yKq;EcVx  
methods have made use of goniometers,2 ];oED?I  
spectrometers,3 master prisms,4,5 and collimators.6 However, I7]45pF  
in the literature there are few reported methods for >Utn[']~  
measuring the pyramidal error, and the majority rely on im*XS@Uj  
visual observation,2,7,8 by which it is only possible to measure k98-
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pyramidal errors to the order of 1 arcmin ~Ref. 8!. Hs2L$TX  
In the new arrangement presented here, one can measure
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the prism angle and the pyramidal error separately or in BXLhi(.s  
combination. This is possible because the measurements US4X CJxB  
are made simultaneously but with different techniques.