[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms ;M4[Liw~O  
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High-precision prisms, having maximum angle tolerances 8Sj<,+XFq  
of 1 to 3 arcsec, find increasing application in optical metrology. >RkaFcq  
Reported interferometric techniques for measuring 1J"I.  
the wedge angles of such prisms achieve a precision of up ~1wt=Ln>  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques w|s2f`!  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric : #CWiq("%  
methods have made use of goniometers,2 Pg(Y}Tu  
spectrometers,3 master prisms,4,5 and collimators.6 However, $jE<n/8  
in the literature there are few reported methods for H/x0'  
measuring the pyramidal error, and the majority rely on e,_Sj(R8  
visual observation,2,7,8 by which it is only possible to measure 0't)-Pj+,  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. *$fM}6}  
In the new arrangement presented here, one can measure }%/mPbd#  
the prism angle and the pyramidal error separately or in ofQs 
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combination. This is possible because the measurements ZF[W<Q  
are made simultaneously but with different techniques.