[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms }KT$J G?  
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High-precision prisms, having maximum angle tolerances U2CC#,b!(  
of 1 to 3 arcsec, find increasing application in optical metrology. Q\N
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Reported interferometric techniques for measuring g |H  
the wedge angles of such prisms achieve a precision of up ,aIkiT  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques P"o|kRO  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric *Ea)b-  
methods have made use of goniometers,2 AnK X4Q  
spectrometers,3 master prisms,4,5 and collimators.6 However, Wevd6)\  
in the literature there are few reported methods for .&I!2F  
measuring the pyramidal error, and the majority rely on >XX93  
visual observation,2,7,8 by which it is only possible to measure Q$sC%P(y  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 0.2stBw  
In the new arrangement presented here, one can measure xzOn[.Fi  
the prism angle and the pyramidal error separately or in AGKT*l.-  
combination. This is possible because the measurements "c.-`1,t  
are made simultaneously but with different techniques.