Measuring the angles and pyramidal error of high-precision prisms 9GO}&7
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High-precision prisms, having maximum angle tolerances 0yn[L3x7
of 1 to 3 arcsec, find increasing application in optical metrology. J5O.*&
Reported interferometric techniques for measuring p= {Jf}v
the wedge angles of such prisms achieve a precision of up W0Ktw6
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques /r276Q
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric wz|DT3"Xs
methods have made use of goniometers,2 '9 'l=Sh
spectrometers,3 master prisms,4,5 and collimators.6 However, h aCKv
in the literature there are few reported methods for \,2gTi,=
measuring the pyramidal error, and the majority rely on "\7 v
visual observation,2,7,8 by which it is only possible to measure o*X]b]
pyramidal errors to the order of 1 arcmin ~Ref. 8!. |z:Q(d06
In the new arrangement presented here, one can measure >L8?=>>?\
the prism angle and the pyramidal error separately or in x5oOF7#5
combination. This is possible because the measurements W$r^
are made simultaneously but with different techniques.