[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms TWy1)30x  
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High-precision prisms, having maximum angle tolerances &kP>qTI^p~  
of 1 to 3 arcsec, find increasing application in optical metrology. BzDS  
Reported interferometric techniques for measuring Q9( eH2=  
the wedge angles of such prisms achieve a precision of up  A/9 wr  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques dG1qrh9_
-  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric xMe[/7)4  
methods have made use of goniometers,2 ST{<G  
spectrometers,3 master prisms,4,5 and collimators.6 However, , =#'?>Kq  
in the literature there are few reported methods for lm$T`:c  
measuring the pyramidal error, and the majority rely on co: W!  
visual observation,2,7,8 by which it is only possible to measure /gxwp:&lY  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 5'X.Z:  
In the new arrangement presented here, one can measure ]1X];x&e  
the prism angle and the pyramidal error separately or in kc}e},k  
combination. This is possible because the measurements DwoO([&I  
are made simultaneously but with different techniques.