[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms 6H9]]Unju  
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High-precision prisms, having maximum angle tolerances p`ZGV97  
of 1 to 3 arcsec, find increasing application in optical metrology. /FXfu  
Reported interferometric techniques for measuring 4iPg_+  
the wedge angles of such prisms achieve a precision of up }jXUd=.Nu  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques V)@scB|>,  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 7tnzgtal  
methods have made use of goniometers,2 'S ;vv]}Gs  
spectrometers,3 master prisms,4,5 and collimators.6 However, =1uI >[aN  
in the literature there are few reported methods for Y`RfE  
measuring the pyramidal error, and the majority rely on OuH]Y70(  
visual observation,2,7,8 by which it is only possible to measure n[7zK'%Dxg  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. 6<GWDO  
In the new arrangement presented here, one can measure J)+eEmrU  
the prism angle and the pyramidal error separately or in sRG3`>1  
combination. This is possible because the measurements mI18A#[ 3  
are made simultaneously but with different techniques.