[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms \OP9_J(*  
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High-precision prisms, having maximum angle tolerances Uh*@BmDA  
of 1 to 3 arcsec, find increasing application in optical metrology. NK~PcdGl  
Reported interferometric techniques for measuring mzu<C)9d,
 
the wedge angles of such prisms achieve a precision of up /0 _zXQyV  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques ZlrhC= 0  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric lO[E[c G  
methods have made use of goniometers,2 b9y)wBC%`  
spectrometers,3 master prisms,4,5 and collimators.6 However, J=@x
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in the literature there are few reported methods for ?;_H{/)m  
measuring the pyramidal error, and the majority rely on *(icR  
visual observation,2,7,8 by which it is only possible to measure e^=NL>V6p  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. |e:rYLxm:  
In the new arrangement presented here, one can measure h<)yJh  
the prism angle and the pyramidal error separately or in bTiBmS  
combination. This is possible because the measurements 5\&]J7(  
are made simultaneously but with different techniques.