[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms Z}#,E;  
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High-precision prisms, having maximum angle tolerances n_G< /8  
of 1 to 3 arcsec, find increasing application in optical metrology. 02g!mJW>}y  
Reported interferometric techniques for measuring 5Ym/'eT  
the wedge angles of such prisms achieve a precision of up *}BaO*
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to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques vZEeb j  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric  Fa  
methods have made use of goniometers,2 x!6&)T?!n  
spectrometers,3 master prisms,4,5 and collimators.6 However, p3?!}VM!y  
in the literature there are few reported methods for r!/=Iy@  
measuring the pyramidal error, and the majority rely on Rw4"co6  
visual observation,2,7,8 by which it is only possible to measure ~ Iin|  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. UhQsT^b_  
In the new arrangement presented here, one can measure 6{2LV&T=u  
the prism angle and the pyramidal error separately or in &,?bX])  
combination. This is possible because the measurements /_Z--s>j  
are made simultaneously but with different techniques.