Measuring the angles and pyramidal error of high-precision prisms o(2tRDT\_b
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High-precision prisms, having maximum angle tolerances Rk1B \L|M
of 1 to 3 arcsec, find increasing application in optical metrology. .U66Uet>RX
Reported interferometric techniques for measuring ?|&plf |
the wedge angles of such prisms achieve a precision of up \Mujx3Fmvx
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques isdEs k#A.
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric fP6]z y^ *
methods have made use of goniometers,2 @YH<Hc
spectrometers,3 master prisms,4,5 and collimators.6 However, EB/.M+~a
in the literature there are few reported methods for qtx5N)J6
measuring the pyramidal error, and the majority rely on &$'=SL(Z
visual observation,2,7,8 by which it is only possible to measure ~#doJ:^H3
pyramidal errors to the order of 1 arcmin ~Ref. 8!. R)%1GG4
In the new arrangement presented here, one can measure v,\2$q/
the prism angle and the pyramidal error separately or in DeMF<)#
combination. This is possible because the measurements g _2m["6*
are made simultaneously but with different techniques.
