[论文]Measuring the angles and pyramidal error of high-precision prisms [复制链接]

Measuring the angles and pyramidal error of high-precision prisms ;tlvf?0!  
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High-precision prisms, having maximum angle tolerances 13kl\<6  
of 1 to 3 arcsec, find increasing application in optical metrology. )m|)cLT&  
Reported interferometric techniques for measuring ^8OK.iC  
the wedge angles of such prisms achieve a precision of up rytves%;C  
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques zt6GJz1q  
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric ]v=A}}kS  
methods have made use of goniometers,2 !ap}+_IA7^  
spectrometers,3 master prisms,4,5 and collimators.6 However, h:xvnyaI  
in the literature there are few reported methods for +87|gC7B  
measuring the pyramidal error, and the majority rely on 3%P<F>6 J  
visual observation,2,7,8 by which it is only possible to measure Fsz;T;  
pyramidal errors to the order of 1 arcmin ~Ref. 8!. G0)}?5L1J  
In the new arrangement presented here, one can measure 3s;^p,9 Y  
the prism angle and the pyramidal error separately or in x.8fxogz  
combination. This is possible because the measurements )\Am:?RH;  
are made simultaneously but with different techniques.