Measuring the angles and pyramidal error of high-precision prisms &"?S0S>r!
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High-precision prisms, having maximum angle tolerances 7tP%tp
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of 1 to 3 arcsec, find increasing application in optical metrology. Nl'@Y^8N
Reported interferometric techniques for measuring we/sv9v} n
the wedge angles of such prisms achieve a precision of up i*((@:
to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques .%EYof
have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric 1{A K=H')
methods have made use of goniometers,2 !<3!ORFO
spectrometers,3 master prisms,4,5 and collimators.6 However, U0;pl2
in the literature there are few reported methods for v&qL r+_7
measuring the pyramidal error, and the majority rely on :Y Ki
visual observation,2,7,8 by which it is only possible to measure S J2l6
pyramidal errors to the order of 1 arcmin ~Ref. 8!. $Jo4n>/
In the new arrangement presented here, one can measure tE#;$Ss
the prism angle and the pyramidal error separately or in T I|h
combination. This is possible because the measurements
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are made simultaneously but with different techniques.
