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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 g|L" |Q  
    ---------------------------------------------------  0].*eM  
    真空术语 :j2G0vHIl(  
    =gL~E9\  
    1.标准环境条件 standard ambient condition: >5G2!Ns'  
    2.气体的标准状态 standard reference conditions forgases: AT.WXP0$A  
    3.压力(压强)p pressure: <7Igd6u  
    4.帕斯卡Pa pascal: doM}vh)6  
    5.托Torr torr: )xtDiDB  
    6.标准大气压atm standard atmosphere: $42%H#  
    7.毫巴mbar millibar: ~{MmUp rS  
    8.分压力 partial pressure: Q(Uj5aX  
    9.全压力 total pressure: 9;,_Q q  
    10.真空 vacuum: (5AgI7I,  
    11.真空度 degree of vacuum: <~ E'% 60;  
    12.真空区域 ranges of vacuum: GjF'03Z4  
    13.气体 gas: cu&tdg^q  
    14.非可凝气体 non-condensable gas: 2Hltgt,  
    15.蒸汽vapor: v}w=I}<x  
    16.饱和蒸汽压saturation vapor pressure: {p#[.E8  
    17.饱和度degree of saturation: 4'L%Wz[6  
    18.饱和蒸汽saturated vapor: i&KD)&9b#  
    19.未饱和蒸汽unsaturated vapor: zSs5F_  
    20.分子数密度n,m-3 number density of molecules: )<W6cDx'H+  
    21.平均自由程ι、λ,m mean free path: &}sC8,Sr  
    22.碰撞率ψ collision rate: 2x3'm  
    23.体积碰撞率χ volume collision rate: &Z Ja}5k!r  
    24.气体量G quantity of gas: erG@8CG  
    25.气体的扩散 diffusion of gas: pC9Ed9uRK  
    26.扩散系数D diffusion coefficient; diffusivity: w783e  
    27.粘滞流 viscous flow: d3 h^L  
    28.粘滞系数η viscous factor: sA6Ku(9  
    29.泊肖叶流 poiseuille flow: sR%,l  
    30.中间流 intermediate flow: MN|8(f5Gs  
    31.分子流 molecular flow: #)im9LLC#  
    32克努曾数 number of knudsen: -.#He  
    33.分子泻流 molecular effusion; effusive flow: ?9<byEO%M  
    34.流逸 transpiration: OW$? 6  
    35.热流逸 thermal transpiration: >we/#C"x  
    36.分子流率qN molecular flow rate; molecular flux: K&{*sa r  
    37.分子流率密度 molecular flow rate density; density of molecular flux: 'W0?XaEk-  
    38.质量流率qm mass flow rare: tF> ?]  
    39.流量qG throughput of gas: :{pJ  
    40.体积流率qV volume flow rate: _VIVZ2mU=  
    41.摩尔流率qυ molar flow rate: `9%Q2Al  
    42.麦克斯韦速度分布 maxwellian velocity distribution: n[2[V*|mI  
    43.传输几率Pc transmission probability: ==d@0`  
    44.分子流导CN,UN molecular conductance: U?dd+2^};t  
    45.流导C,U conductance: (bP\_F5D  
    46.固有流导Ci,Ui intrinsic conductance: ((Bu Bu>  
    47.流阻W resistance: N?j,'gy4  
    48.吸附 sorption: w`~j(G4N  
    49.表面吸附 adsorption: )KvQaC  
    50.物理吸附physisorption: X2#;1 ku  
    51.化学吸附 chemisorption: neC]\B[Xm  
    52.吸收absorption: 3e)3t`  
    53.适应系数α accommodation factor: ,~@0IKIA Q  
    54.入射率υ impingement rate: ,$ICv+7]  
    55.凝结率condensation rate: 5x/q\p-{/  
    56.粘着率 sticking rate: @C),-TM  
    57.粘着几率Ps sticking probability: _J}vPm  
    58.滞留时间τ residence time: eit>4xMu  
    59.迁移 migration: R!7emc0T  
    60.解吸 desorption: =d_@k[8<0  
    61.去气 degassing: qwka77nNT  
    62.放气 outgassing: <L+D  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: @21G[!%J  
    64.蒸发率 evaporation rate: IyE9G:fY  
    65.渗透 permeation: w+vYD2 a  
    66.渗透率φ permeability: G:qkk(6_#  
    67.渗透系数P permeability coefficient &HKrmFgX{  
    2.   1.真空泵 vacuum pumps :z=/z!5:j  
    1-1.容积真空泵 positive displacement pump:  5" U8|  
    ⑴.气镇真空泵 gas ballast vacuum pump: _"`wUMee  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: )4[{+OJa  
    ⑶.干封真空泵 dry-sealed vacuum pump: H9)$ #r6i  
    ⑷.往复真空泵 piston vacuum pump: X/,4hjg  
    ⑸.液环真空泵 liquid ring vacuum pump: Xg#g`m%(M  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: yc,Qz.+g  
    ⑺.定片真空泵 rotary piston vacuum pump: o5+N_5OE}E  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: >iP>v`J  
    ⑼.余摆线真空泵 trochoidal vacuum pump: Py(l+Ik`>  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: {rr ED  
    ⑾.罗茨真空泵 roots vacuum pump: tR#uDE\wR  
    1-2.动量传输泵 kinetic vacuum pump: k|l"Rh<\~  
    ⑴.牵引分子泵molecular drag pump: &o/&T{t}  
    ⑵.涡轮分子泵turbo molecular pump: 1{+Ni{  
    ⑶.喷射真空泵ejector vacuum pump: Tr}@fa  
    ⑷.液体喷射真空泵liquid jet vacuum pump: DvnK_Q!  
    ⑸.气体喷射真空泵gas jet vacuum pump: ]3#_BL)M8p  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : 6.tppAO+  
    ⑺.扩散泵diffusion pump : (E)/' sEb  
    ⑻.自净化扩散泵self purifying diffusion pump: c4CBpi?}  
    ⑼.分馏扩散泵 fractionating diffusion pump : ih1s`CjG  
    ⑽.扩散喷射泵diffusion ejector pump : >*A\/Da]j  
    ⑾.离子传输泵ion transfer pump: D@H'8C\  
    1-3.捕集真空泵 entrapment vacuum pump: rS9*_-NH  
    ⑴吸附泵adsorption pump: 1p,G8v+B  
    ⑵.吸气剂泵 getter pump: R{.wAH(  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : avls[Bq  
    ⑷.吸气剂离子泵getter ion pump: <R~(6krJwZ  
    ⑸.蒸发离子泵 evaporation ion pump: $Vp&Vc8  
    ⑹.溅射离子泵sputter ion pump: Ks09F}  
    ⑺.低温泵cryopump: K)GC&%_$O  
    &K k+RHM  
    2.真空泵零部件 O*oL(dk*8L  
    2-1.泵壳 pump case: eU7RO  
    2-2.入口 inlet: 'dj}- Rs  
    2-3.出口outlet: <2y~7h:  
    2-4.旋片(滑片、滑阀)vane; blade : >'^l>FPc  
    2-5.排气阀discharge valve: ;,*U,eV  
    2-6.气镇阀gas ballast valve: X4i$,$C  
    2-7.膨胀室expansion chamber: M 0->  
    2-8.压缩室compression chamber: qd3B>f  
    2-9.真空泵油 vacuum pump oil: >FHTBh& Y  
    2-10.泵液 pump fluid: fx.FHhVu  
    2-11.喷嘴 nozzle: ' 7>}I{Lq  
    2-13.喷嘴扩张率nozzle expansion rate: LnZz=  
    2-14.喷嘴间隙面积 nozzle clearance area : D]b5*_CT  
    2-15.喷嘴间隙nozzle clearance: r3ZY` zf  
    2-16.射流jet: Q}]:lmqH  
    2-17.扩散器diffuser: r3Z-mJ$:  
    2-18.扩散器喉部diffuser thoat: Ltcr]T(Ic  
    2-19.蒸汽导管vapor tube(pipe;chimney): @tjC{?5Y  
    2-20.喷嘴组件nozzle assembly: CNcH)2Mk  
    2-21.下裙skirt: SVXey?A;CJ  
    _a*Wk  
    3.附件 OY~5o&Oa  
    3-1阱trap: 7+T\  
    ⑴.冷阱 cold trap: ?Pmj}f  
    ⑵.吸附阱sorption trap:  wSV[nK  
    ⑶.离子阱ion trap: lKIHBi  
    ⑷.冷冻升华阱 cryosublimation trap: |#5JI #,vX  
    3-2.挡板baffle: l W&glU(  
    3-3.油分离器oil separator: 3 ;.{ O%bX  
    3-4.油净化器oil purifier: 40%p lNPj  
    3-5.冷凝器condenser: k1-?2kf"{  
    2%vwC]A  
    4.泵按工作分类 -lSm:O@'  
    4-1.主泵main pump: XNu2G19jb  
    4-2.粗抽泵roughing vacuum pump: x+yt| &B  
    4-3.前级真空泵backing vacuum pump: 5bmtUIj  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: [4xN:i  
    4-5.维持真空泵holding vacuum pump: Y<#7E;aL  
    4-6.高真空泵high vacuum pump: IRo[|&c  
    4-7.超高真空泵ultra-high vacuum pump: pJ_Z[}d)c  
    4-8.增压真空泵booster vacuum pump: L/nz95  
    lt0(Kf g  
    5.真空泵特性 :Fj4YP"  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 8Yq6I>@!  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 , {z$M  
    5-3.起动压力starting pressure: aeUm,'Y$  
    5-4.前级压力 backing pressure : NX)7g}S  
    5-5.临界前级压力 critical backing pressure: *+p'CfsSka  
    5-6.最大前级压力maximum backing pressure: b@,=;Y)O  
    5-7.最大工作压力maximum working pressure: _,F wt  
    5-8.真空泵的极限压力ultimate pressure of a pump: uc7np]Z  
    5-9.压缩比compression ratio: wV56LW  
    5-10.何氏系数Ho coefficient: yJb;V#  
    5-11.抽速系数speed factor: DU1,i&(  
    5-12.气体的反扩散back-diffusion of gas: >+oQxml6nI  
    5-13.泵液返流back-streaming of pump fluid: k )){1O  
    5-14.返流率back-streaming rate &Vgjd>  
    5-15.返迁移back-migration: vgE5(fJh  
    5-16.爆腾bumping: :^iR&`2~  
    5-17.水蒸气允许量qm water vapor tolerable load: >b*Pd *f  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: $a5K  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: ~q|^z[7  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump ol`]6"Sc  
    3.   1.一般术语 i@B5B2  
    1-1.压力计pressure gauge: +}9%Duim  
    1-2.真空计vacuum gauge: Nt/*VYUn  
    ⑴.规头(规管)gauge head: pM VeUK?  
    ⑵.裸规nude gauge : 8KoPaq   
    ⑶.真空计控制单元gauge control unit : RNvtgZ}k{X  
    ⑷.真空计指示单元gauge indicating unit : ? # G_ &  
    W=)}=^N0  
    2.真空计一般分类 =}c~BHT  
    2-1.压差式真空计differential vacuum gauge: TvdmgVNP  
    2-2.绝对真空计 absolute vacuum gauge: @RaMO#  
    2-3.全压真空计total pressure vacuum gauge: pbm4C0W}  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: mbS &>  
    2-5.相对真空计relative vacuum gauge : kV<VhBql!  
    };zF&  
    3.真空计特性 PwDQ<   
    3-1.真空计测量范围pressure range of vacuum gauge: A0[flIl  
    3-2.灵敏度系数sensitivity coefficient: b|fq63ar;  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): Lwv9oa|  
    3-5.规管光电流photon current of vacuum gauge head: L YH9P-5H  
    3-6.等效氮压力equivalent nitrogen pressure : * rs_k/2(  
    3-7.X射线极限值 X-ray limit: 'Y"q=@Ei9  
    3-8.逆X射线效应anti X-ray effect: `C!Pe84(  
    3-9.布利尔斯效应blears effect: o-)E_X  
    Z.R^@@RqJ  
    4.全压真空计 "sHD8TUX  
    4-1.液位压力计liquid level manometer: {h@R\bU  
    4-2.弹性元件真空计elastic element vacuum gauge: $ \P!P.  
    4-3.压缩式真空计compression gauge: rqa;MPl  
    4-4.压力天平pressure balance: msoE8YK&tg  
    4-5.粘滞性真空计viscosity gauge :  R6AZIN:  
    4-6.热传导真空计thermal conductivity vacuum gauge : + qS$t  
    4-7.热分子真空计thermo-molecular gauge: fYCAwS{  
    4-8.电离真空计ionization vacuum gauge: +pjD{S~Y  
    4-9.放射性电离真空计radioactive ionization gauge: fwl RwH(  
    4-10.冷阴极电离真空计cold cathode ionization gauge: zSq+#O1#  
    4-11.潘宁真空计penning gauge: 9'4cqR  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: aX  ?ON  
    4-13.放电管指示器discharge tube indicator: ul% q6=f)  
    4-14.热阴极电离真空计hot cathode ionization gauge: X$st{@}ZB  
    4-15.三极管式真空计triode gauge: wL%>  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: m*I5 \  
    4-17.B-A型电离真空计Bayard-Alpert gauge: }QC: !e,yG  
    4-18.调制型电离真空计modulator gauge: PqP)<d '/  
    4-19.抑制型电离真空计suppressor gauge: 1P[!B[;c  
    4-20.分离型电离真空计extractor gauge: oHa6fi  
    4-21.弯注型电离真空计bent beam gauge: Y8CXin h  
    4-22.弹道型电离真空计 orbitron gauge : +"d{P,[3J  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: Y}Qu-fm  
    8`*`4m  
    5.分压真空计(分压分析器) #~ >0Dr  
    5-1.射频质谱仪radio frequency mass spectrometer: &t6L8[#yd  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: (sPZ1Fr\o  
    5-3.单极质谱仪momopole mass spectrometer: 5$O@+W!?@  
    5-4.双聚焦质谱仪double focusing mass spectrometer: [(dAv7YbN  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: q=6M3OnS>  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: B6ys 5eQ  
    5-7.回旋质谱仪omegatron mass spectrometer: m$$U%=r>@  
    5-8.飞行时间质谱仪time of flight mass spectrometer: sa*hoL18  
    -$mzzYH  
    6.真空计校准 7qnw.7p  
    6-1.标准真空计reference gauges: o!j? )0d  
    6-2.校准系统system of calibration: $aVcWz %  
    6-3.校准系数K calibration coefficient: rgOB0[  
    6-4.压缩计法meleod gauge method: ^LnCxA&QH  
    6-5.膨胀法expansion method: Wk$%0xZ7  
    6-6.流导法flow method: 2P]rJ  
    4.   1.真空系统vacuum system ^srx/6X  
    1-1.真空机组pump system: "\e9Y<  
    1-2.有油真空机组pump system used oil : 58=fT1 B  
    1-3.无油真空机组oil free pump system tF=96u_X  
    1-4.连续处理真空设备continuous treatment vacuum plant: N b+zP[C  
    1-5.闸门式真空系统vacuum system with an air-lock: )FgcNB1|7  
    1-6.压差真空系统differentially pumped vacuum system: a7M8sZ?"  
    1-7.进气系统gas admittance system:  okfhd{9  
    .Z9Bbab:  
    2.真空系统特性参量 m@TU2  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : !$&K~>`  
    2-2.抽气装置的抽气量throughput of a pumping unit : zR]l2zL3  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: (Kx3:gs  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: jagsV'o2  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: 4S+P]U*jW  
    2-6.极限压力ultimate pressure: 1vQ*Br  
    2-7.残余压力residual pressure: ]Wfnpqc^  
    2-8.残余气体谱residual gas spectrum: ;[%AeN5W  
    2-9.基础压力base pressure: Wny{qj)=  
    2-10.工作压力working pressure: C !uwD  
    2-11.粗抽时间roughing time: E Xo"F*gW  
    2-12.抽气时间pump-down time: ?L7z\b"_~  
    2-13.真空系统时间常数time constant of a vacuum system: Vbz$dpT  
    2-14.真空系统进气时间venting time: 5J1,Usm  
    esFBWJ  
    3.真空容器 ]BX|G`CCc  
    3-1.真空容器;真空室vacuum chamber: ^Z;5e@S  
    3-2.封离真空装置sealed vacuum device: 2}hEBw68  
    3-3.真空钟罩vacuum bell jar: f`vB$r>  
    3-4.真空容器底板vacuum base plate: , @(lYeD"  
    3-5.真空岐管vacuum manifold: -R| v&h%T  
    3-6.前级真空容器(贮气罐)backing reservoir: *\-6p0~A  
    3-7.真空保护层outer chamber: h\:"k_u#  
    3-8.真空闸室vacuum air lock: {QJJw}!#  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: 1[mX_ }K  
    ~ M@8O  
    4.真空封接和真空引入线 Z+FJ cvYx  
    4-1.永久性真空封接permanent seal : yA =#Ji  
    4.2.玻璃分级过渡封接graded seal : F d *p3a  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: /_>S0  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: a$"3T  
    4-5.陶瓷金属封接ceramic-to-metal seal: Un@dWf6'  
    4-6.半永久性真空封接semi-permanent seal : 5_0Eh!sx  
    4-7.可拆卸的真空封接demountable joint: Np+<)q2  
    4-8.液体真空封接liquid seal THkg,*;:  
    4-9.熔融金属真空封接molten metal seal: ioz4kG!  
    4-10.研磨面搭接封接ground and lapped seal: CKy' 8I9  
    4-11.真空法兰连接vacuum flange connection: +<&_1% 5+  
    4-12.真空密封垫vacuum-tight gasket: XeJn,=  
    4-13.真空密封圈ring gasket: 3Vs8"BFjz  
    4-14.真空平密封垫flat gasket: h 5<46!P  
    4-15.真空引入线feedthrough leadthrough: Jf9a<[CcV  
    4-16.真空轴密封shaft seal: yIA- +# r[  
    4-17.真空窗vacuum window: SwXVa/9a"  
    4-18.观察窗viewing window: V*}ft@GPD  
    (gQP_Oa(  
    5.真空阀门 Ja"?Pb  
    5-1.真空阀门的特性characteristic of vacuum valves: VMXccT9i!  
    ⑴.真空阀门的流导conductance of vacuum valves: fl9`Mgu  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: lvY[E9I0  
    5-2.真空调节阀regulating valve: X0.kQ  
    5-3.微调阀 micro-adjustable valve: BF b<"!Y  
    5-4.充气阀charge valve: Nu/wjx$b  
    5-5.进气阀gas admittance valve: l1l=52r   
    5-6.真空截止阀break valve: +0_e a~{  
    5-7.前级真空阀backing valve: C6Lc   
    5-8.旁通阀 by-pass valve: o#fr5>h-w  
    5-9.主真空阀main vacuum valve: s'b 4Me  
    5-10.低真空阀low vacuum valve: gF# HNv  
    5-11.高真空阀high vacuum valve: %68'+qz  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: C.].HQ  
    5-13.手动阀manually operated valve: |Bz1u|uc  
    5-14.气动阀pneumatically operated valve: ,)@njC?J  
    5-15.电磁阀electromagnetically operated valve: -n FKP&P  
    5-16.电动阀valve with electrically motorized operation: m Q4(<,F  
    5-17.挡板阀baffle valve: %<8`(Uu5  
    5-18.翻板阀flap valve: iO+,U}&  
    5-19.插板阀gate valve: \2)D  
    5-20.蝶阀butterfly valve: Swa0TiT(  
    jVi> 9[rz  
    6.真空管路 ,cE yV74  
    6-1.粗抽管路roughing line: `%;Hj _X}  
    6-2.前级真空管路backing line: lonV_Xx  
    6-3.旁通管路;By-Pass管路 by-pass line: _rM?g1}5j  
    6-4.抽气封口接头pumping stem: ' Dp;fEU$  
    6-5.真空限流件limiting conductance:       UE8j8U'L  
    6-6.过滤器filter: R!f<6l8#W  
    5.   1.一般术语 'b)qP|  
    1-1真空镀膜vacuum coating: `OFW^Esc  
    1-2基片substrate: 5(>SFxz"t  
    1-3试验基片testing substrate: %5RR<[_/;  
    1-4镀膜材料coating material: VKV :U60  
    1-5蒸发材料evaporation material: VWq]w5oQO  
    1-6溅射材料sputtering material: dq,j?~ _}  
    1-7膜层材料(膜层材质)film material: B6=?Qp/f  
    1-8蒸发速率evaporation rate: p<1y$=zS  
    1-9溅射速率sputtering rate: NNt  n  
    1-10沉积速率deposition rate: qG@YNc  
    1-11镀膜角度coating angle: 3ew4QPT'  
    {ETM >  
    2.工艺 HS[($  
    2-1真空蒸膜vacuum evaporation coating: ]Hp>~Zvbb  
    (1).同时蒸发simultaneous evaporation: p8Z?R^$9H  
    (2).蒸发场蒸发evaporation field evaporation: <O5WY37"q  
    (3).反应性真空蒸发reactive vacuum evaporation: o?Aj6fNY?  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: .G.WPVE  
    (5).直接加热的蒸发direct heating evaporation: nr2 Q[9~  
    (6).感应加热蒸发induced heating evaporation: CP~mKmMV  
    (7).电子束蒸发electron beam evaporation: 4-~Z{#-  
    (8).激光束蒸发laser beam evaporation: U% q-#^A  
    (9).间接加热的蒸发indirect heating evaporation: _ f'v>"K  
    (10).闪蒸flash evaportion: > vdmN]  
    2-2真空溅射vacuum sputtering: gg >QXui  
    (1).反应性真空溅射 reactive vacuum sputtering: DQT'OZ :w  
    (2).偏压溅射bias sputtering: {j=`  
    (3).直流二级溅射direct current diode sputtering: dvZH~mF  
    (4).非对称性交流溅射asymmtric alternate current sputtering: h2 KI  
    (5).高频二极溅射high frequency diode sputtering: Cb1w8l0  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: OvAhp&k  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: *,mI=1  
    (8).离子束溅射ion beam sputtering: ~: {05W  
    (9).辉光放电清洗glow discharge cleaning: /a'1 W/^2  
    2-3物理气相沉积PVD physical vapor deposition: MB!9tju  
    2-4化学气相沉积CVD chemical vapor deposition: -8xf}v~u  
    2-5磁控溅射magnetron sputtering: V(_1q  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: "$XX4w M  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: RWc<CQcL"  
    2-8电弧离子镀arc discharge deposition: RFMPh<Ac  
    +? h}e  
    3.专用部件 3w</B- |nQ  
    3-1镀膜室coating chamber: @^A5{qQ\  
    3-2蒸发器装置evaporator device: /M_$4O;*@  
    3-3蒸发器evaporator: =}vT>b  
    3-4直接加热式蒸发器evaporator by direct heat: 1>"-!ADm  
    3-5间接加热式蒸发器evaporator by indirect heat: r/2= nE  
    3-7溅射装置sputtering device: z@yTkH_  
    3-8靶target: ;%9]G|*{  
    3-10时控挡板timing shutter: F}5d>nw  
    3-11掩膜mask: &)Xc'RQ.C  
    3-12基片支架substrate holder: =eDIvNps  
    3-13夹紧装置clamp: CZ<T@k  
    3-14换向装置reversing device: 1~*1W4};F8  
    3-15基片加热装置substrate heating device: J0?kEr  
    3-16基片冷却装置substrate colding device: H/c (m|KK  
    Zz0e4C  
    4.真空镀膜设备 BH">#&j[  
    4-1真空镀膜设备vacuum coating plant: g w" \pD  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: GC{M"q|_  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: |;vQ"8J  
    4-2连续镀膜设备continuous coating plant: gv''A"  
    4-3半连续镀膜设备semi- continuous coating plant y3zP`^  
    6.   1.漏孔 pFvu,Q"  
    1-1漏孔leaks: EU$.{C_O(  
    1-2通道漏孔channel leak: q`VL i  
    1-3薄膜漏孔membrane leak: "j@\a)a  
    1-4分子漏孔molecular leak: .\n` 4A1z  
    1-5粘滞漏孔vixcous leak: l~6K}g?  
    1-6校准漏孔calibrated leak: )th[fUC(  
    1-7标准漏孔reference leak : "9wD|wsz  
    1-8虚漏virtual leak: 5o#JHD  
    1-9漏率leak rate: >2'"}np*  
    1-10标准空气漏率standard air leak rate: zaqX};b  
    1-11等值标准空气漏率equivalent standard air leak rate: 0B}4$STOo[  
    1-12探索(示漏)气体: /|IPBU 5  
    VPe0\?!d  
    2.本底 FJ:^pROpm  
    2-1本底background: 5~L]zE  
    2-2探索气体本底search gas background : u^1#9bAW8  
    2-3漂移drift: }yz>(Pq  
    2-4噪声noise: aQCu3T  
    DxJ;C09xNa  
    3.检漏仪 tAdE<).!  
    3-1检漏仪leak detector: 0zaK&]oY0  
    3-2高频火花检漏仪H.F. spark leak detector: V!W.P  
    3-3卤素检漏仪halide leak detector: \D7bTn  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: Vw;Z0_C  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: *l+#<5x  
    Y`;}w}EcgR  
    4.检漏 n HseA  
    4-1气泡检漏leak detection by bubbles: [3 Pp NCY  
    4-2氨检漏leak detection by ammonia: CM;b_E)9)f  
    4-3升压检漏leak detection of rise pressure: K~N$s "Qx  
    4-4放射性同位素检漏radioactive isotope leak detection: cHs3:F~~  
    4-5荧光检漏fluorescence leak detection Ld4U  
    7.   1.一般术语 i%hCV o  
    1-1真空干燥vacuum drying: 0l!#u`cCI  
    1-2冷冻干燥freeze drying : WYw#mSp  
    1-3物料material: gcJ!_KZK  
    1-4待干燥物料material to be dried: C=: <[_m`  
    1-5干燥物料dried material : &X=7b@r  
    1-6湿气moisture;humidity: szI7 I$Qb  
    1-7自由湿气free moisture: E}@C4pS  
    1-8结合湿气bound moisture: 6 ':iW~iI  
    1-9分湿气partial moisture: ;<[X\;|'  
    1-10含湿量moisture content: OtG\Uw8  
    1-11初始含湿量initial moisture content: g'8Y5x[  
    1-12最终含湿量final residual moisture: j~CnMKN  
    1-13湿度degree of moisture ,degree of humidity : BVQy@:K/  
    1-14干燥物质dry matter : !+l'<*8V  
    1-15干燥物质含量content of dry matter: ?'a8QJo  
     : T*Q2  
    2.干燥工艺 wA) Hot  
    2-1干燥阶段stages of drying : x:Y9z_)O  
    (1).预干燥preliminary dry: (WM3(US|  
    (2).一次干燥(广义)primary drying(in general): C]`uC^6g  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): {/'T:n#  
    (4).二次干燥secondary drying: YR%iZ"`*+O  
    2-2.(1).接触干燥contact drying: +iVEA(0&$  
    (2).辐射干燥 drying by radiation : p3Sh%=HE'  
    (3).微波干燥microwave drying: :E:e ^$p  
    (4).气相干燥vapor phase drying: I6>J.6luF9  
    (5).静态干燥static drying: p_FM 2K7!  
    (6).动态干燥dynamic drying: JJ?{V:  
    2-3干燥时间drying time: g@.$P>Bh  
    2-4停留时间length of stay(in the drying chamber): #[93$)Gd!  
    2-5循环时间cycle time: uO?+vYAN  
    2-6干燥率 dessication ratio : nM,:f)z  
    2-7去湿速率mass flow rate of humidity: swKkY`g  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: *rxr:y#Ve  
    2-9干燥速度 drying speed : dmFn0J-\  
    2-10干燥过程drying process: ?,} u6tH  
    2-11加热温度heating temperature: [>=!$>>;8  
    2-12干燥温度temperature of the material being dried : &V"oJ}M/a  
    2-13干燥损失loss of material during the drying process : oMh$:jR$  
    2-14飞尘lift off (particles): V%Uj\cv  
    2-15堆层厚度thickness of the material: YOCEEh?  
    VYvfx  
    3.冷冻干燥 A1WUK=P  
    3-1冷冻freezing: c}(WniR-"  
    (1).静态冷冻static freezing: Lb*KEF%s  
    (2).动态冷冻dynamic freezing: e8m,q~%#/  
    (3).离心冷冻centrifugal freezing: Ndmt$(b  
    (4).滚动冷冻shell freezing: !Ok(mgV$/  
    (5).旋转冷冻spin-freezing: )*')  
    (6).真空旋转冷冻vacuum spin-freezing: 1+l8%G=hB  
    (7).喷雾冷冻spray freezing: Dk1& <} I  
    (8).气流冷冻air blast freezing: )^2eC<t  
    3-2冷冻速率rate of freezing: tFN >]`Z  
    3-3冷冻物料frozen material: n3^(y"q  
    3-4冰核ice core: DaQ"Df_X  
    3-5干燥物料外壳envelope of dried matter: g=*jKSZ  
    3-6升华表面sublimation front: &C 9hT  
    3-7融化位置freezer burn: NBikYxa  
    h ><Sp*z_V  
    4.真空干燥设备;真空冷冻干燥设备 LPk@t^[  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: FG?Mc'r&  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: kfy!T rf  
    4-3加热表面heating surface: ."Ms7=  
    4-4物品装载面shelf : iD^,O)b  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): nl@an!z  
    4-6单位面积干燥器处理能力throughput per shelf area: RObnu*  
    4-7冰冷凝器ice condenser: tvkdNMyX%9  
    4-8冰冷凝器的负载load of the ice condenser: O-iE0t  
    4-9冰冷凝器的额定负载rated load of the ice condenser +pofN-*%  
    8.   1.一般术语 *~rj!N?;  
    1-1试样sample : d} >Po%r:  
    (1).表面层surface layer: TlG>)Z@/  
    (2).真实表面true surface: TBlSZZ-55]  
    (3).有效表面积effective surface area: q"2QNF'  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: U82a]i0  
    (5).表面粒子密度surface particle density: @]\fO)\f  
    (6).单分子层monolayer: Fs+ tcr/\[  
    (7).表面单分子层粒子密度monolayer density: @W,jy$U  
    (8).覆盖系数coverage ratio: GP:<h@:798  
    1-2激发excitation: 'yo@5*x7  
    (1).一次粒子primary particle: ofvR0yV  
    (2).一次粒子通量primary particle flux: +UzQJt/>>  
    (3).一次粒子通量密度density of primary particle flux: "*g+qll!5d  
    (4).一次粒子负荷primary particle load: i'~-\F!  
    (5).一次粒子积分负荷integral load of primary particle: K)Y& I  
    (6).一次粒子的入射能量energy of the incident primary particle: N?GTfN  
    (7).激发体积excited volume: w5FIHYl6B  
    (8).激发面积excited area: A5l Cc b  
    (9).激发深度excited death: eJDZ| $  
    (10).二次粒子secondary particles: st'T._  
    (11).二次粒子通量secondary particle flux: h my%X`%j  
    (12).二次粒子发射能energy of the emitted secondary particles: ;vx5 =^7P  
    (13).发射体积emitting volume: 3m1g"  
    (14).发射面积emitting area: r(,U{bU<  
    (15).发射深度emitting depth: C@M-_Ud>Q  
    (16).信息深度information depth: V&Y`?Edc  
    (17).平均信息深度mean information depth: n@p]v*  
    1-3入射角angle of incidence: >e]g T  
    1-4发射角angle of emission: #2Rz=QI  
    1-5观测角observation: >w,L=z=  
    1-6分析表面积analyzed surface area: Ee>VA_ss  
    1-7产额 yield : H MOIUd  
    1-8表面层微小损伤分析minimum damage surface analysis: [4KQcmJc#  
    1-9表面层无损伤分析non-destructive surface analysis: b?wrOS  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : lg%fjBY  
    1-11可观测面积observable area: @T1G#[C~t  
    1-12可观测立体角observable solid angle : kG^76dAQL  
    1-13接受立体角;观测立体角angle of acceptance: I8#2+$Be+@  
    1-14角分辨能力angular resolving power: GwWK'F'2  
    1-15发光度luminosity: X><C#G  
    1-16二次粒子探测比detection ratio of secondary particles: UmKE]1Yw4r  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: Iix,}kzss  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: S ?Zh#`(*  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: <JPN< Kv  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: $QbJT`,mr  
    1-21本底压力base pressure:  5"%.8P  
    1-22工作压力working pressure: LKN7L kl  
    %-hSa~20  
    2.分析方法 {X,%GI  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: 8t+eu O  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : /<[0o]  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: ixTjXl2g  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: "&(/bdah?&  
    2-3离子散射表面分析ion scattering spectroscopy: eqtZU\GI>  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: _kKG%U.gbK  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: O>`k@X@9/  
    2-6离子散射谱仪ion scattering spectrometer: e=]SIR()`  
    2-7俄歇效应Auger process: HG"ZN)~  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: .G/Rh92  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: M1jT+  
    2-10光电子谱术photoelectron spectroscopy : :s)cTq|3  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: }n)0}U5;0  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: &X4anH>O  
    2-11光电子谱仪photoelectron spectrometer: 2H%9l@}u  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: y_PA9#v7  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: cXXZ'y>FP  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): G1|1Z5r  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊