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真空术语 N, u]2,E
z3[J
sE%
1.标准环境条件 standard ambient condition: 7Wv.-LD6
2.气体的标准状态 standard reference conditions forgases: ]
0L=+=w
3.压力(压强)p pressure: /\Cf*cJ
4.帕斯卡Pa pascal: He8]Eb
5.托Torr torr: Xm< _!=
6.标准大气压atm standard atmosphere: erv94acq
7.毫巴mbar millibar: VJ
h]j(
8.分压力 partial pressure: pC,Z=+:
9.全压力 total pressure: ObZhQ.&
10.真空 vacuum: E"[p_ALdC
11.真空度 degree of vacuum: h}nS&.
12.真空区域 ranges of vacuum: 8wO4;
13.气体 gas: b
IxH0=f
14.非可凝气体 non-condensable gas: 7f3,czW
15.蒸汽vapor: ic}TiTK
16.饱和蒸汽压saturation vapor pressure: &tbAXU5$
17.饱和度degree of saturation: tf54EIy5Y
18.饱和蒸汽saturated vapor: S;t`C~l\
19.未饱和蒸汽unsaturated vapor: M^OYQf
20.分子数密度n,m-3 number density of molecules: A|K=>7n]U
21.平均自由程ι、λ,m mean free path: )^P54_2
22.碰撞率ψ collision rate: ;`xCfOY(
23.体积碰撞率χ volume collision rate: Y6Y"fb%K
24.气体量G quantity of gas: Q)XH5C2X
25.气体的扩散 diffusion of gas: "{+2Q
26.扩散系数D diffusion coefficient; diffusivity: atd;)o0*0
27.粘滞流 viscous flow: mw^>dv?
28.粘滞系数η viscous factor: \7h>9}wGf
29.泊肖叶流 poiseuille flow: ]5@n`;.
30.中间流 intermediate flow: $;(@0UDE
31.分子流 molecular flow: H;<>uELie
32克努曾数 number of knudsen: :B=Gb8?
33.分子泻流 molecular effusion; effusive flow: g/68&
M
34.流逸 transpiration: &:ZR% f
35.热流逸 thermal transpiration: <7)sS<I
36.分子流率qN molecular flow rate; molecular flux: *@^@7`W
37.分子流率密度 molecular flow rate density; density of molecular flux: K 0o F=|
38.质量流率qm mass flow rare: 6DU(KYN
39.流量qG throughput of gas: AB3OG*C9
40.体积流率qV volume flow rate: X}]A_G
41.摩尔流率qυ molar flow rate: PP\ bDEPy
42.麦克斯韦速度分布 maxwellian velocity distribution: a6xo U;T
43.传输几率Pc transmission probability: Yh^8
!
44.分子流导CN,UN molecular conductance: /~".GZ&29
45.流导C,U conductance: :81d~f7
46.固有流导Ci,Ui intrinsic conductance: $8(QBZq
47.流阻W resistance: Tc"J(GWG
48.吸附 sorption:
SmDNN^GR
49.表面吸附 adsorption: :_xfi9L~W0
50.物理吸附physisorption: x%k@&d;z
51.化学吸附 chemisorption: NNr6~m)3v
52.吸收absorption: +w.$"dF!
53.适应系数α accommodation factor: n8)&1
q?V
54.入射率υ impingement rate: )\D{5j
55.凝结率condensation rate: N<b2xT
56.粘着率 sticking rate: w-R.)
57.粘着几率Ps sticking probability: u23_*W\
58.滞留时间τ residence time: zx$1.IM"4
59.迁移 migration: j[R.UB3J
60.解吸 desorption: V'>P lb.A
61.去气 degassing: rp"5176
62.放气 outgassing: jTg~]PQ^
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: PW5)") z
64.蒸发率 evaporation rate: =NY55t.
65.渗透 permeation: X=1o$:7
66.渗透率φ permeability: $mAC8a_Zu
67.渗透系数P permeability coefficient cNwHY
Z'
2. 1.真空泵 vacuum pumps }ssja,;
1-1.容积真空泵 positive displacement pump: 7q;`~tbC
⑴.气镇真空泵 gas ballast vacuum pump: k{vbi-^6rf
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: >`WfY(Lq
⑶.干封真空泵 dry-sealed vacuum pump: ^Lc\{,m
⑷.往复真空泵 piston vacuum pump: <FU?^*~
⑸.液环真空泵 liquid ring vacuum pump: gd7r9yV
⑹.旋片真空泵 sliding vane rotary vacuum pump: +ansN~3
⑺.定片真空泵 rotary piston vacuum pump: H#V&5|K%
⑻.滑阀真空泵 rotary plunger vacuum pump: '@@!lV
⑼.余摆线真空泵 trochoidal vacuum pump: ,YvOk|@R
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: "@hd\w{.
⑾.罗茨真空泵 roots vacuum pump: Q~0>GOq*
1-2.动量传输泵 kinetic vacuum pump: T\$i=,_$
⑴.牵引分子泵molecular drag pump: _4)z:?G5
⑵.涡轮分子泵turbo molecular pump: %1jcY0zEQ
⑶.喷射真空泵ejector vacuum pump: |LbAW/9a
⑷.液体喷射真空泵liquid jet vacuum pump: <B0f
⑸.气体喷射真空泵gas jet vacuum pump: lqMr@
:t
⑹.蒸汽喷射真空泵vapor jet vacuum pump : rq!*unJ
⑺.扩散泵diffusion pump : NZ i3U
⑻.自净化扩散泵self purifying diffusion pump: $Z;/Sh
⑼.分馏扩散泵 fractionating diffusion pump : 2IM31 .
⑽.扩散喷射泵diffusion ejector pump : jZkc
yx
⑾.离子传输泵ion transfer pump: *5k40?w
1-3.捕集真空泵 entrapment vacuum pump: 2YKa <?_
⑴吸附泵adsorption pump: 9`N5$;NzY
⑵.吸气剂泵 getter pump: dTK0lgkUE
⑶.升华(蒸发)泵 sublimation (evaporation)pump : &*7KQd
⑷.吸气剂离子泵getter ion pump: z#o''
⑸.蒸发离子泵 evaporation ion pump: M$Z2"F;
⑹.溅射离子泵sputter ion pump: @j}%{Km]Y
⑺.低温泵cryopump: MA:5'n
P$k*!j_W
2.真空泵零部件 D@68_sn
2-1.泵壳 pump case: ,I5SAd|dX
2-2.入口 inlet: 1F5KDWtE
2-3.出口outlet: Q*%}w_D6f
2-4.旋片(滑片、滑阀)vane; blade : J@$~q}iG
2-5.排气阀discharge valve: f4Y)GO<R]
2-6.气镇阀gas ballast valve:
HrsG^x
2-7.膨胀室expansion chamber: a=j'G]=
2-8.压缩室compression chamber: D 6y,Q
2-9.真空泵油 vacuum pump oil:
`a MU 2
2-10.泵液 pump fluid: "#o..?K
2-11.喷嘴 nozzle: z
dgS@g
2-13.喷嘴扩张率nozzle expansion rate: ;TWLo_
2-14.喷嘴间隙面积 nozzle clearance area : p+V#86(3
2-15.喷嘴间隙nozzle clearance: "t.`/4R2w
2-16.射流jet: =gQ9>An
2-17.扩散器diffuser: -GCo`PR?b
2-18.扩散器喉部diffuser thoat: Su2{ nNC>
2-19.蒸汽导管vapor tube(pipe;chimney): 6^'BTd
2-20.喷嘴组件nozzle assembly: I@9'd$YY
2-21.下裙skirt: 6u+aP
ySmbX
3.附件 2NMs-Zs
3-1阱trap: eyyME c!
⑴.冷阱 cold trap: 'v V7@@
⑵.吸附阱sorption trap: b@;Wh-{d
⑶.离子阱ion trap: W~ET/h
⑷.冷冻升华阱 cryosublimation trap: [MFnS",7c
3-2.挡板baffle: ,.W7Z~z
3-3.油分离器oil separator: I8
:e`L
3-4.油净化器oil purifier: qtZ?
kJ
3-5.冷凝器condenser: 6qH0]7m aI
n^T,R
4.泵按工作分类 bu]"?bc
4-1.主泵main pump: <ErX<(0`ig
4-2.粗抽泵roughing vacuum pump: I}
jgz
4-3.前级真空泵backing vacuum pump: MY@&^71i4
4-4.粗(低)真空泵 roughing(low)vacuum pump:
zd=O;T;.
4-5.维持真空泵holding vacuum pump: _rwJ:r
4-6.高真空泵high vacuum pump: Y/FPkH4
4-7.超高真空泵ultra-high vacuum pump:
L\PmT
4-8.增压真空泵booster vacuum pump: c[,h|~K/_?
2aM7zP[Z
5.真空泵特性 u##th8h4U
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: m|aK_
5-2.真空泵的抽气量Q throughput of vacuum pump:。 E7MSoBX9M
5-3.起动压力starting pressure: cQK-Euum
5-4.前级压力 backing pressure : :D) (3U5
5-5.临界前级压力 critical backing pressure: A#=TR_@:
5-6.最大前级压力maximum backing pressure: 3x0t[{l
5-7.最大工作压力maximum working pressure: sF{aG6u
5-8.真空泵的极限压力ultimate pressure of a pump: EsMX#1>/m
5-9.压缩比compression ratio: hGz_F/
5-10.何氏系数Ho coefficient: 'k X8}bx
5-11.抽速系数speed factor: (.ir"\k1(
5-12.气体的反扩散back-diffusion of gas: #s\@fp7A
5-13.泵液返流back-streaming of pump fluid: P0n1I7|
5-14.返流率back-streaming rate 9 %T??-
5-15.返迁移back-migration: oBkhb
5-16.爆腾bumping: u=.8M`FxP
5-17.水蒸气允许量qm water vapor tolerable load: f82%nT
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: } a9Ah:.7/
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: gJ
\6cZD
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump C!VhVOy>d
3. 1.一般术语 lvO6&sF1
1-1.压力计pressure gauge: #J"xByQKK
1-2.真空计vacuum gauge: ?RsrY4P
⑴.规头(规管)gauge head: zw>L0gC
⑵.裸规nude gauge : LjI`$r.B
⑶.真空计控制单元gauge control unit : \Oeo"|
⑷.真空计指示单元gauge indicating unit : b6N[t _,
y7,I10:D
2.真空计一般分类 m2j&0z
2-1.压差式真空计differential vacuum gauge: l6/VJ~(}'
2-2.绝对真空计 absolute vacuum gauge: y|5L%,i
2-3.全压真空计total pressure vacuum gauge: 51jgx,-|$
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: s?w2^<P
2-5.相对真空计relative vacuum gauge : 9n&
&`r
r)*23 &Ojs
3.真空计特性 ("9bV8:@B
3-1.真空计测量范围pressure range of vacuum gauge: h'y%TOob
3-2.灵敏度系数sensitivity coefficient: Y[{:?i~9,
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): vd%g'fTy9
3-5.规管光电流photon current of vacuum gauge head: v>8C}d^
3-6.等效氮压力equivalent nitrogen pressure : O3} JOv_
3-7.X射线极限值 X-ray limit: 0MW W(
;
3-8.逆X射线效应anti X-ray effect: $DL}jH^S
3-9.布利尔斯效应blears effect: b@Ej$t&
3uLG$`N
4.全压真空计 'C1lP)S5
4-1.液位压力计liquid level manometer: oD)]4|
4-2.弹性元件真空计elastic element vacuum gauge: mmTpF]t
?`
4-3.压缩式真空计compression gauge: $DY#04Je\=
4-4.压力天平pressure balance: -S'KxC
4-5.粘滞性真空计viscosity gauge : ldA_mj{
4-6.热传导真空计thermal conductivity vacuum gauge : 0!hr9Y]Lx
4-7.热分子真空计thermo-molecular gauge: 1BSd9Ydj
4-8.电离真空计ionization vacuum gauge: ~:ASv>m
4-9.放射性电离真空计radioactive ionization gauge: [,o:nry'a
4-10.冷阴极电离真空计cold cathode ionization gauge: J:Cr.K`
4-11.潘宁真空计penning gauge: \SWTP1
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: 7>N~l
4-13.放电管指示器discharge tube indicator: 0#*6:{/^
4-14.热阴极电离真空计hot cathode ionization gauge: #e'>9T
4-15.三极管式真空计triode gauge: +fP.Ewi
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: ;TAj;Tf]H
4-17.B-A型电离真空计Bayard-Alpert gauge: ;4nY{)bD
4-18.调制型电离真空计modulator gauge: a-{|/
n%
4-19.抑制型电离真空计suppressor gauge: ,mHME~
4-20.分离型电离真空计extractor gauge: Ykxk`SJ
4-21.弯注型电离真空计bent beam gauge: cQ8[XNa
4-22.弹道型电离真空计 orbitron gauge : (95|DCL
4-23.热阴极磁控管真空计hot cathode magnetron gauge: YX$(Sc3.6
vpQ&vJfR
5.分压真空计(分压分析器) 0<,{poMM
5-1.射频质谱仪radio frequency mass spectrometer: &<A,\M
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: L;Ff(0x|
5-3.单极质谱仪momopole mass spectrometer: 6{h\CU}"
5-4.双聚焦质谱仪double focusing mass spectrometer: /<rvaR
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: 6G8No-#y
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: orGMzC 2
5-7.回旋质谱仪omegatron mass spectrometer: r,6~%T0
5-8.飞行时间质谱仪time of flight mass spectrometer: D2$9$xeR
3~>-A=
6.真空计校准 RkYdK$|K
6-1.标准真空计reference gauges: 6/UOzV,[
6-2.校准系统system of calibration: IMf|/a9-
6-3.校准系数K calibration coefficient:
^^a6 (b
6-4.压缩计法meleod gauge method: 3&hR#;,"X
6-5.膨胀法expansion method: IZZAR
6-6.流导法flow method: thjr1y.e
4. 1.真空系统vacuum system sxNf"C=-.
1-1.真空机组pump system: Y2`sL,'h
1-2.有油真空机组pump system used oil : r2-iISxg+
1-3.无油真空机组oil free pump system KF%BX~80C
1-4.连续处理真空设备continuous treatment vacuum plant: jPWONz(#
1-5.闸门式真空系统vacuum system with an air-lock: %3z[;&*3O
1-6.压差真空系统differentially pumped vacuum system: DbMVbgz<e
1-7.进气系统gas admittance system: [\8rh^LFi
dbf<k%i6
2.真空系统特性参量 (xfc_h*xA
2-1.抽气装置的抽速volume flow rate of a pumping unit : $$9H1)Ny
2-2.抽气装置的抽气量throughput of a pumping unit : iLy^U*yK
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 20c5U%
2-4.真空系统的漏气速率leak throughput of a vacuum system: "qmSwdM
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: +Mo4g2W
2-6.极限压力ultimate pressure: lc,k-}n
2-7.残余压力residual pressure: NI?O
2-8.残余气体谱residual gas spectrum: MBWoPK
2-9.基础压力base pressure: .p[uIRd`
2-10.工作压力working pressure: &g:( I
2-11.粗抽时间roughing time: 8zK#./0\
2-12.抽气时间pump-down time: &~:EmLgv
2-13.真空系统时间常数time constant of a vacuum system: Ip
t;NlR
2-14.真空系统进气时间venting time: hek+zloB+
zluq2r
3.真空容器 9UM)"I&k
3-1.真空容器;真空室vacuum chamber: t&?jJ7 (&8
3-2.封离真空装置sealed vacuum device: L=lSW7R
3-3.真空钟罩vacuum bell jar: ;Q{D]4
3-4.真空容器底板vacuum base plate: FLmD?nw
3-5.真空岐管vacuum manifold: W@R7CQE@
3-6.前级真空容器(贮气罐)backing reservoir: @)pC3Vi^
3-7.真空保护层outer chamber: +hRy{Ps/
3-8.真空闸室vacuum air lock: |8` }8vo)
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: M5I`i{Gw
F_@B ` ,
4.真空封接和真空引入线 x6cG'3&T
4-1.永久性真空封接permanent seal : }qWnn>h9xv
4.2.玻璃分级过渡封接graded seal : U$y9f
4-3.压缩玻璃金属封接compression glass-to-metal seal: bxE~tsM"@Y
4-4.匹配式玻璃金属封接matched glass-to-metal seal: PzJ(Q
4-5.陶瓷金属封接ceramic-to-metal seal: K|%Am4
4-6.半永久性真空封接semi-permanent seal : j2G^sj"|
4-7.可拆卸的真空封接demountable joint: ffP]U4
4-8.液体真空封接liquid seal RP~nLh3=\
4-9.熔融金属真空封接molten metal seal: 6wp1jN
4-10.研磨面搭接封接ground and lapped seal: B-
@bU@H
4-11.真空法兰连接vacuum flange connection: 6,q0F*q
4-12.真空密封垫vacuum-tight gasket: N@thewt|
4-13.真空密封圈ring gasket: Z_GGH2u
4-14.真空平密封垫flat gasket: 8F[];LF>
4-15.真空引入线feedthrough leadthrough: ,!Wo6{'
4-16.真空轴密封shaft seal: ?o(284sV3
4-17.真空窗vacuum window: 'Xik2PaO
4-18.观察窗viewing window: [{Wo:c9Qq1
Ta[2uv>
5.真空阀门 0moA mfc
5-1.真空阀门的特性characteristic of vacuum valves: jf)cDj2
⑴.真空阀门的流导conductance of vacuum valves: EjfQF C
⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: kn:hxdZ
5-2.真空调节阀regulating valve: 2TGND-(j
5-3.微调阀 micro-adjustable valve: +3o
vO$g
5-4.充气阀charge valve: lw3H
8[
5-5.进气阀gas admittance valve: 7rD 8
5-6.真空截止阀break valve: A;8kC}
5-7.前级真空阀backing valve: ^_#wo"
5-8.旁通阀 by-pass valve: b36{vcs~
5-9.主真空阀main vacuum valve: EMnz;/dMt
5-10.低真空阀low vacuum valve: (Z<@dkO?)
5-11.高真空阀high vacuum valve: b_sasZo
5-12.超高真空阀;UHV阀 ultra-high vacuum valve: <VZ43I
5-13.手动阀manually operated valve: 8Yc-3ozH
5-14.气动阀pneumatically operated valve: DOyO`TJi
5-15.电磁阀electromagnetically operated valve: ^p(aZj3k
5-16.电动阀valve with electrically motorized operation: 2S_u/32]W
5-17.挡板阀baffle valve: Ucv7`W
gr
5-18.翻板阀flap valve: 4}C
\N
5-19.插板阀gate valve: Z"c-Ly{vEj
5-20.蝶阀butterfly valve: A{>w5T
]sEuh~F
6.真空管路 2Pb+/1*ix
6-1.粗抽管路roughing line: Q m*z
6-2.前级真空管路backing line: gq?O}gVD
6-3.旁通管路;By-Pass管路 by-pass line: 4-
QlIIf
6-4.抽气封口接头pumping stem: J4eU6W+ {
6-5.真空限流件limiting conductance: EY]H*WJJ
6-6.过滤器filter: <Y6Vfee,&
5. 1.一般术语
kb 74:
1-1真空镀膜vacuum coating: d>u^7:
1-2基片substrate: y)K Iz
1-3试验基片testing substrate: 2|7:`e~h
1-4镀膜材料coating material: 0WzoI2Q
1-5蒸发材料evaporation material: $-/-%=
1-6溅射材料sputtering material: yLf9cS6=
1-7膜层材料(膜层材质)film material:
IZrcn
1-8蒸发速率evaporation rate: 9 ] N{8
1-9溅射速率sputtering rate: }t#|+T2f
1-10沉积速率deposition rate: Pfs_tu
1-11镀膜角度coating angle: 2XL^A[?
I;}U/'RR>
2.工艺 Sm[#L`eqW
2-1真空蒸膜vacuum evaporation coating: {
1~]}K2
(1).同时蒸发simultaneous evaporation: [? "hmSJ
(2).蒸发场蒸发evaporation field evaporation: }c||$
(3).反应性真空蒸发reactive vacuum evaporation: 3B;Gm<fJ9N
(4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: Yt*NIwWr
(5).直接加热的蒸发direct heating evaporation: MMk9rBf
(6).感应加热蒸发induced heating evaporation: V=fu[#<@Ig
(7).电子束蒸发electron beam evaporation: E
uO:}[
(8).激光束蒸发laser beam evaporation: V}TPt6C2
(9).间接加热的蒸发indirect heating evaporation: j)G%I y[`
(10).闪蒸flash evaportion: G[e,7jev
2-2真空溅射vacuum sputtering: pS-o*!\C.
(1).反应性真空溅射 reactive vacuum sputtering: Zz (qc5o,F
(2).偏压溅射bias sputtering: <VU-ja*(J
(3).直流二级溅射direct current diode sputtering: +|;Ri68
(4).非对称性交流溅射asymmtric alternate current sputtering: ?#c "wA&
(5).高频二极溅射high frequency diode sputtering: POm;lM$
(6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: xuHP4$<h3
(7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: Qxy~%;X
(8).离子束溅射ion beam sputtering: EO(l?Fgw]$
(9).辉光放电清洗glow discharge cleaning: +)h# !/
2-3物理气相沉积PVD physical vapor deposition: 1\Bh-tzB
2-4化学气相沉积CVD chemical vapor deposition: gLSI?
2-5磁控溅射magnetron sputtering: JK,^:tgm
2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: _!|$ i
2-7空心阴极离子镀HCD hollow cathode discharge deposition: 6Jy%4]wK
2-8电弧离子镀arc discharge deposition: ;~
Xjk
?lqqu#;8
3.专用部件 O:+y/c
3-1镀膜室coating chamber: "r;cH5 3
3-2蒸发器装置evaporator device: %;]/Z%!
3-3蒸发器evaporator: ^x*J4jl
3-4直接加热式蒸发器evaporator by direct heat: .z$UNB(!M
3-5间接加热式蒸发器evaporator by indirect heat: %1cxZxGT
3-7溅射装置sputtering device: +?t&
7={~
3-8靶target: K~]Xx~F
3-10时控挡板timing shutter: x-@?:P*
3-11掩膜mask: "=%YyH~WY
3-12基片支架substrate holder: V@LBy1z
3-13夹紧装置clamp: >g+Y//Z
3-14换向装置reversing device: y+wy<[u
3-15基片加热装置substrate heating device: J7wwM'\
3-16基片冷却装置substrate colding device: G@e;ms1
aA*h *
4.真空镀膜设备 H[g i`{c
4-1真空镀膜设备vacuum coating plant: _eQ-'")
(1).真空蒸发镀膜设备vacuum evaporation coating plant: 6t<[-
(2).真空溅射镀膜设备vacuum sputtering coating plant: N1E9w:T`
4-2连续镀膜设备continuous coating plant: IN;!s#cl:
4-3半连续镀膜设备semi- continuous coating plant }|-8-;
6. 1.漏孔 {>64-bU
1-1漏孔leaks: Grw[h
1-2通道漏孔channel leak: V[^AV"V
1-3薄膜漏孔membrane leak: 1h162
1-4分子漏孔molecular leak: \Rt>U|%
1-5粘滞漏孔vixcous leak: #mM9^LJ
1-6校准漏孔calibrated leak: %;_EWs/z8
1-7标准漏孔reference leak : O d6'bO;G
1-8虚漏virtual leak: 3?gfDJfE
1-9漏率leak rate: -'oxenu
1-10标准空气漏率standard air leak rate: MD;,O3Ge
1-11等值标准空气漏率equivalent standard air leak rate: Z 5wDf+
1-12探索(示漏)气体: <vs*aFq
lZ"C~B}9:I
2.本底 ,DWq
2-1本底background: cjLA7I.O
2-2探索气体本底search gas background : "FE%k>aV@v
2-3漂移drift: LEg|R+6E
2-4噪声noise: 4
q % Gc
HWL? doM
3.检漏仪 K^/.v<w
3-1检漏仪leak detector: DDT]A<WUV
3-2高频火花检漏仪H.F. spark leak detector: SoCN.J30
3-3卤素检漏仪halide leak detector: +U1fa9NSn
3-4氦质谱检漏仪helium mass spectrometer leak detector: q|lP?-j
3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: C{-Dv-<A>
8SiWAOQAL
4.检漏 a*,V\l|6
4-1气泡检漏leak detection by bubbles: 4dz Ym+vJm
4-2氨检漏leak detection by ammonia: EcR[b@YI
4-3升压检漏leak detection of rise pressure: uW(Ngcpr
4-4放射性同位素检漏radioactive isotope leak detection: 925T#%y
4-5荧光检漏fluorescence leak detection )>rYp
)
7. 1.一般术语 1 j|XC
1-1真空干燥vacuum drying: Q\^BOdX^`
1-2冷冻干燥freeze drying : 'o8,XBv-
1-3物料material: /HSg)
1-4待干燥物料material to be dried: zyK11
1-5干燥物料dried material : 527u d^:
1-6湿气moisture;humidity: '7]9q#{su
1-7自由湿气free moisture: sWq}/!@&
1-8结合湿气bound moisture: {v3@g[:|
1-9分湿气partial moisture: Ox aS<vQ3
1-10含湿量moisture content: EL
*l5!Iu
1-11初始含湿量initial moisture content: zs-,Y@ZL
1-12最终含湿量final residual moisture: NUi&x