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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 -Kc-eU-&q  
    --------------------------------------------------- wXZ-%,R -D  
    真空术语 <B fwR$  
    },"g*  
    1.标准环境条件 standard ambient condition: `C()H@;  
    2.气体的标准状态 standard reference conditions forgases:  I&v B\A  
    3.压力(压强)p pressure: m2}&5vD8-  
    4.帕斯卡Pa pascal: *PI3L/*  
    5.托Torr torr: D H.ljGb  
    6.标准大气压atm standard atmosphere: [Ytia#Vv  
    7.毫巴mbar millibar: %*/[aq,#  
    8.分压力 partial pressure: ._R82 gy  
    9.全压力 total pressure: 3a5H<3w_  
    10.真空 vacuum: >:xnjEsi$/  
    11.真空度 degree of vacuum: F0!r9U((  
    12.真空区域 ranges of vacuum: F?dTCa  
    13.气体 gas: kQb0pfYs  
    14.非可凝气体 non-condensable gas: s R~&S))  
    15.蒸汽vapor: ~ 52  
    16.饱和蒸汽压saturation vapor pressure: hh?'tb{  
    17.饱和度degree of saturation: =?2y <B  
    18.饱和蒸汽saturated vapor: lfKknp#B/O  
    19.未饱和蒸汽unsaturated vapor: p<+]+,|\~:  
    20.分子数密度n,m-3 number density of molecules: /qCYNwWH9  
    21.平均自由程ι、λ,m mean free path: H{V-C_  
    22.碰撞率ψ collision rate: m0edkt-x  
    23.体积碰撞率χ volume collision rate: hw7_8pAbh  
    24.气体量G quantity of gas: lAGxE-B^a"  
    25.气体的扩散 diffusion of gas: {NFeX'5bP  
    26.扩散系数D diffusion coefficient; diffusivity: 226s:\d  
    27.粘滞流 viscous flow: G'epsD,.bX  
    28.粘滞系数η viscous factor: lt*k(JD  
    29.泊肖叶流 poiseuille flow: 7q?Yd AUz  
    30.中间流 intermediate flow: *K)v&}uw  
    31.分子流 molecular flow: l&rDa=m.J  
    32克努曾数 number of knudsen: <hea%6  
    33.分子泻流 molecular effusion; effusive flow: yO6i "3  
    34.流逸 transpiration: :@/fy}!  
    35.热流逸 thermal transpiration: ?1{`~)"  
    36.分子流率qN molecular flow rate; molecular flux: 5[3hw4  
    37.分子流率密度 molecular flow rate density; density of molecular flux: }n.h)Oz  
    38.质量流率qm mass flow rare: a_ P[J8j  
    39.流量qG throughput of gas: *Z]| Z4Q/`  
    40.体积流率qV volume flow rate: A`r9"([-A  
    41.摩尔流率qυ molar flow rate: j@ "`!uPz  
    42.麦克斯韦速度分布 maxwellian velocity distribution: . 9 NS  
    43.传输几率Pc transmission probability: 9,Mp/.T"\  
    44.分子流导CN,UN molecular conductance: *HC8kD a%$  
    45.流导C,U conductance: {7wvC)WW  
    46.固有流导Ci,Ui intrinsic conductance: V ;6M[ic}  
    47.流阻W resistance: bDkE*4SRX  
    48.吸附 sorption: miKi$jC}vq  
    49.表面吸附 adsorption: .~8+s.y  
    50.物理吸附physisorption: rEf\|x=st:  
    51.化学吸附 chemisorption: EH:1Z*|Z{\  
    52.吸收absorption: NWg\{a  
    53.适应系数α accommodation factor: HB}gn2 .1&  
    54.入射率υ impingement rate: PYUY bRn  
    55.凝结率condensation rate: 9JtvHUkO  
    56.粘着率 sticking rate: V588Leb?  
    57.粘着几率Ps sticking probability: YfalsQ8  
    58.滞留时间τ residence time:  )L!R~F C  
    59.迁移 migration: g-^m\>B  
    60.解吸 desorption: Jv<)/Km`  
    61.去气 degassing: q+z\Y?  
    62.放气 outgassing: ]~zJ7I  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: pd1m/:  
    64.蒸发率 evaporation rate: )eEvyU  
    65.渗透 permeation: {|gJC>f@  
    66.渗透率φ permeability: U{_s1  
    67.渗透系数P permeability coefficient EVL;"   
    2.   1.真空泵 vacuum pumps G"[pr%?  
    1-1.容积真空泵 positive displacement pump: qWpCe*C  
    ⑴.气镇真空泵 gas ballast vacuum pump: OgS8.wX  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: 9O Q4\  
    ⑶.干封真空泵 dry-sealed vacuum pump: >FHsZKJ  
    ⑷.往复真空泵 piston vacuum pump: @e,Zmx  
    ⑸.液环真空泵 liquid ring vacuum pump: $ ddYH  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: 2P ?Iu&  
    ⑺.定片真空泵 rotary piston vacuum pump: w3N%J>4_E  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: Ltw7b  
    ⑼.余摆线真空泵 trochoidal vacuum pump: 713M4CtJ  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: ,m?D\Pru  
    ⑾.罗茨真空泵 roots vacuum pump: LPn }QzH  
    1-2.动量传输泵 kinetic vacuum pump: +E~`H^  
    ⑴.牵引分子泵molecular drag pump: ])L'Rk#4  
    ⑵.涡轮分子泵turbo molecular pump: |w2AB7EU  
    ⑶.喷射真空泵ejector vacuum pump: pCUOeQL(  
    ⑷.液体喷射真空泵liquid jet vacuum pump: h /QP=Zd  
    ⑸.气体喷射真空泵gas jet vacuum pump: mv.I.EL  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : I0vn d7  
    ⑺.扩散泵diffusion pump : X@&uu0JJ  
    ⑻.自净化扩散泵self purifying diffusion pump: )JQQ4D  
    ⑼.分馏扩散泵 fractionating diffusion pump : FBAC9}V"  
    ⑽.扩散喷射泵diffusion ejector pump : &] 6T^.  
    ⑾.离子传输泵ion transfer pump: *F*fH>?C#  
    1-3.捕集真空泵 entrapment vacuum pump: $tHwJ!<$&  
    ⑴吸附泵adsorption pump: .K1E1Z_  
    ⑵.吸气剂泵 getter pump: *UoHzaIqz  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : $-?5Q~  
    ⑷.吸气剂离子泵getter ion pump: Y^Q|l%Qrb  
    ⑸.蒸发离子泵 evaporation ion pump: cu^*x/0,  
    ⑹.溅射离子泵sputter ion pump: Sc$wR{W<:  
    ⑺.低温泵cryopump: ~&lJT  
    _0q~s@-  
    2.真空泵零部件 w%dIe!sV  
    2-1.泵壳 pump case: |Du13i4].&  
    2-2.入口 inlet: Ju7C?)x  
    2-3.出口outlet: zZc@;S#  
    2-4.旋片(滑片、滑阀)vane; blade : yO;C3q  
    2-5.排气阀discharge valve: (+8xUc(w  
    2-6.气镇阀gas ballast valve: #Rx"L&3Ue  
    2-7.膨胀室expansion chamber: /)?P>!#;\  
    2-8.压缩室compression chamber: r&3o~!  
    2-9.真空泵油 vacuum pump oil: Fg\| e%  
    2-10.泵液 pump fluid: ^s~n[  
    2-11.喷嘴 nozzle: E9B*K2l^{  
    2-13.喷嘴扩张率nozzle expansion rate: `ab\i`g9  
    2-14.喷嘴间隙面积 nozzle clearance area : x<j"DS}S)D  
    2-15.喷嘴间隙nozzle clearance: "E|r3cN  
    2-16.射流jet: ,e FQ}&^A  
    2-17.扩散器diffuser: UxcDDa/j2T  
    2-18.扩散器喉部diffuser thoat: 9>&tMq  
    2-19.蒸汽导管vapor tube(pipe;chimney): ,PMb9 O\B  
    2-20.喷嘴组件nozzle assembly: MupW=3.38  
    2-21.下裙skirt: QiE<[QP{g  
    +F~0\#d  
    3.附件 -Bo~"q  
    3-1阱trap: d6@jEa-  
    ⑴.冷阱 cold trap: 9X$#x90  
    ⑵.吸附阱sorption trap: @ZkAul0@  
    ⑶.离子阱ion trap: )*K<;WI WH  
    ⑷.冷冻升华阱 cryosublimation trap: n *i'vtQ8  
    3-2.挡板baffle: T$^>Fiz{Se  
    3-3.油分离器oil separator: X ' #$e{  
    3-4.油净化器oil purifier: -j`!(IJ  
    3-5.冷凝器condenser: q= yZx)  
    ZE8/ m")  
    4.泵按工作分类 Qyv'nx0=  
    4-1.主泵main pump: a][pTC\rb  
    4-2.粗抽泵roughing vacuum pump: Z0ncN])  
    4-3.前级真空泵backing vacuum pump: h lkvk]v  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: E/7vIg F  
    4-5.维持真空泵holding vacuum pump: $EQT"ZX>%i  
    4-6.高真空泵high vacuum pump: a()6bRc~T  
    4-7.超高真空泵ultra-high vacuum pump: FQ^<,  
    4-8.增压真空泵booster vacuum pump: _(6B.  
    [7e{=\`=  
    5.真空泵特性 c2/R]%`)9  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: H6ky)kF&  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 `\ef0  
    5-3.起动压力starting pressure: (9KDtr*(2i  
    5-4.前级压力 backing pressure : RO%tuU,-  
    5-5.临界前级压力 critical backing pressure: up &NCX  
    5-6.最大前级压力maximum backing pressure: -4vHK!l  
    5-7.最大工作压力maximum working pressure:  ^%5~ ;  
    5-8.真空泵的极限压力ultimate pressure of a pump: 6MQs \J6.  
    5-9.压缩比compression ratio: ii_|)udz  
    5-10.何氏系数Ho coefficient: O2q=gYX>\  
    5-11.抽速系数speed factor: MvZ+n  
    5-12.气体的反扩散back-diffusion of gas: fVH*dX'Jz  
    5-13.泵液返流back-streaming of pump fluid: /lr1hW~Dbk  
    5-14.返流率back-streaming rate jSie&V@px  
    5-15.返迁移back-migration: x&R9${e%  
    5-16.爆腾bumping: KUp   
    5-17.水蒸气允许量qm water vapor tolerable load: M<A;IOpR+  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: *(d6Z#  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: 8tLT'2+H#  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump \!UF|mD^tG  
    3.   1.一般术语 rnn2u+OG   
    1-1.压力计pressure gauge: Ha)3i{OM  
    1-2.真空计vacuum gauge: H@%7\g,`  
    ⑴.规头(规管)gauge head: U] V3DDN  
    ⑵.裸规nude gauge : U|Bsa(?nx  
    ⑶.真空计控制单元gauge control unit : I|g@W_  
    ⑷.真空计指示单元gauge indicating unit : 0i8[=  
    A6^p}_  
    2.真空计一般分类 'v\1:zi  
    2-1.压差式真空计differential vacuum gauge: Rwc[:6;fn  
    2-2.绝对真空计 absolute vacuum gauge: s[G |q5n  
    2-3.全压真空计total pressure vacuum gauge: ),cQUB  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: dGbU{#"3s  
    2-5.相对真空计relative vacuum gauge : AI1@-  
    [&h#iTRT  
    3.真空计特性 ^&+zA,aL,A  
    3-1.真空计测量范围pressure range of vacuum gauge: u}K5/hC  
    3-2.灵敏度系数sensitivity coefficient: xm<v"><  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): FOOQ'o[}  
    3-5.规管光电流photon current of vacuum gauge head: Js\-['`  
    3-6.等效氮压力equivalent nitrogen pressure : /S:w&5e  
    3-7.X射线极限值 X-ray limit: {S5RK-ax  
    3-8.逆X射线效应anti X-ray effect: LP^p~5Az  
    3-9.布利尔斯效应blears effect: 5h`m]#YEG  
    +1otn~(E  
    4.全压真空计 V";mWws+?#  
    4-1.液位压力计liquid level manometer: 5f;n<EP y  
    4-2.弹性元件真空计elastic element vacuum gauge: &Ki> h  
    4-3.压缩式真空计compression gauge: K0tV'Ml#"  
    4-4.压力天平pressure balance: Sm$p\ORa  
    4-5.粘滞性真空计viscosity gauge : T;i?w  
    4-6.热传导真空计thermal conductivity vacuum gauge : 0JmFQ ^g(  
    4-7.热分子真空计thermo-molecular gauge: f{)+-8  
    4-8.电离真空计ionization vacuum gauge: 9#v-2QY  
    4-9.放射性电离真空计radioactive ionization gauge: oN *SRaAp  
    4-10.冷阴极电离真空计cold cathode ionization gauge: 9{_8cpm4  
    4-11.潘宁真空计penning gauge: l6iw=b[?  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: JB&G~7Q85  
    4-13.放电管指示器discharge tube indicator: S5uJX#*;  
    4-14.热阴极电离真空计hot cathode ionization gauge: {eEBrJJeB  
    4-15.三极管式真空计triode gauge: \Dn&"YG7  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: CQ@LmTW[  
    4-17.B-A型电离真空计Bayard-Alpert gauge: 2>F\&  
    4-18.调制型电离真空计modulator gauge: }5Yj  
    4-19.抑制型电离真空计suppressor gauge: *:a'GC%/  
    4-20.分离型电离真空计extractor gauge: PeO]lq  
    4-21.弯注型电离真空计bent beam gauge: JZ`>|<W  
    4-22.弹道型电离真空计 orbitron gauge : cNe0x2Z$?  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: P+[QI U  
    ^#]c0  
    5.分压真空计(分压分析器) Z:K+I+:t  
    5-1.射频质谱仪radio frequency mass spectrometer: hT?6sWa  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: +T9Q_e*  
    5-3.单极质谱仪momopole mass spectrometer: O`cdQu  
    5-4.双聚焦质谱仪double focusing mass spectrometer: k/%#>  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: he"L*p*H  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: `YPe^!` $  
    5-7.回旋质谱仪omegatron mass spectrometer: Z;#%t.  
    5-8.飞行时间质谱仪time of flight mass spectrometer: 1Fv8T'  
    rvW!7 -R  
    6.真空计校准 x Sv-;!y  
    6-1.标准真空计reference gauges: zJ5hvDmC  
    6-2.校准系统system of calibration: 85'nXYN{d  
    6-3.校准系数K calibration coefficient: rVY?6OMkd  
    6-4.压缩计法meleod gauge method: ! 0^;;'  
    6-5.膨胀法expansion method: 'iJDWxCD  
    6-6.流导法flow method: f0vJm  
    4.   1.真空系统vacuum system M&r2:Whk  
    1-1.真空机组pump system: n|WfaJQZ  
    1-2.有油真空机组pump system used oil : m# JI!_~!  
    1-3.无油真空机组oil free pump system _1ew(x2J  
    1-4.连续处理真空设备continuous treatment vacuum plant: YydA6IK4  
    1-5.闸门式真空系统vacuum system with an air-lock: 2Zy_5>~  
    1-6.压差真空系统differentially pumped vacuum system: WJfES2N  
    1-7.进气系统gas admittance system: ]Kv q |}=  
    1pK6=-3w3  
    2.真空系统特性参量 5k]XQxc6_  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : +]c/&Xo!  
    2-2.抽气装置的抽气量throughput of a pumping unit : ^5>s7SGB"  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 9e!vA6Fx  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: e&0K;yU  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: ld.7`)  
    2-6.极限压力ultimate pressure: OOokhZd`  
    2-7.残余压力residual pressure: X1oGp+&  
    2-8.残余气体谱residual gas spectrum: b^x07lO  
    2-9.基础压力base pressure: ,9d9_c.T  
    2-10.工作压力working pressure: +c--&tBo  
    2-11.粗抽时间roughing time: _-O cc=Z  
    2-12.抽气时间pump-down time: gw^'{b  
    2-13.真空系统时间常数time constant of a vacuum system: 2:Q(Gl`<l  
    2-14.真空系统进气时间venting time: }k7_'p&yk  
     Hy]  
    3.真空容器 VevNG *  
    3-1.真空容器;真空室vacuum chamber: 'f+NW &   
    3-2.封离真空装置sealed vacuum device: ~M5:=zKQ  
    3-3.真空钟罩vacuum bell jar: *t(4 $  
    3-4.真空容器底板vacuum base plate: _1aGtX|W  
    3-5.真空岐管vacuum manifold: dQD$K|aUp  
    3-6.前级真空容器(贮气罐)backing reservoir: 'Dath>Y=  
    3-7.真空保护层outer chamber: ='}#`',  
    3-8.真空闸室vacuum air lock: $ KB  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: aE)by-'  
    yS!(Ap  
    4.真空封接和真空引入线 3-C\2  
    4-1.永久性真空封接permanent seal : {:bN/zV#  
    4.2.玻璃分级过渡封接graded seal : )#C mQXgG  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: E)W@{?.o#  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: T  p<s1'"  
    4-5.陶瓷金属封接ceramic-to-metal seal: e4\dpvL  
    4-6.半永久性真空封接semi-permanent seal : (?>cn_m  
    4-7.可拆卸的真空封接demountable joint: l+zb~  
    4-8.液体真空封接liquid seal _'!kuE,*1  
    4-9.熔融金属真空封接molten metal seal: wfR&li{  
    4-10.研磨面搭接封接ground and lapped seal: ;JT(3yK4>p  
    4-11.真空法兰连接vacuum flange connection: 7C7>y/uS  
    4-12.真空密封垫vacuum-tight gasket: irKIy  
    4-13.真空密封圈ring gasket: &eQJfc\a  
    4-14.真空平密封垫flat gasket: booRrTS  
    4-15.真空引入线feedthrough leadthrough: bcH_V| 5}  
    4-16.真空轴密封shaft seal: ^:KO_{3E  
    4-17.真空窗vacuum window: I[d]!YI}F  
    4-18.观察窗viewing window: QM'X@  
    X(Qu{HhI  
    5.真空阀门 eg<pa'Hw  
    5-1.真空阀门的特性characteristic of vacuum valves: 7 ^$;  
    ⑴.真空阀门的流导conductance of vacuum valves: @MbVWiv  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: MsOs{2 )2  
    5-2.真空调节阀regulating valve: r2\c'9uH  
    5-3.微调阀 micro-adjustable valve: 8 lT{1ro  
    5-4.充气阀charge valve: o6a0'vU><  
    5-5.进气阀gas admittance valve: ]s_8A`vm  
    5-6.真空截止阀break valve: )8,|-o=  
    5-7.前级真空阀backing valve: I :l01W;  
    5-8.旁通阀 by-pass valve: DHw<%Z-J  
    5-9.主真空阀main vacuum valve: Z[?mc|*x  
    5-10.低真空阀low vacuum valve: Z7a945Jd  
    5-11.高真空阀high vacuum valve: @S^ASDuQU7  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: pQa:pX  
    5-13.手动阀manually operated valve: 56}X/u  
    5-14.气动阀pneumatically operated valve: rD &D)w  
    5-15.电磁阀electromagnetically operated valve: ezm&]F`  
    5-16.电动阀valve with electrically motorized operation: @'6"7g  
    5-17.挡板阀baffle valve: J G$Z.s  
    5-18.翻板阀flap valve: Bc5+ss  
    5-19.插板阀gate valve: "ju'UOcS/  
    5-20.蝶阀butterfly valve: wT,R0~V0  
    w@-M{?R  
    6.真空管路 g)"gw+ZFc  
    6-1.粗抽管路roughing line: bHE2,;o  
    6-2.前级真空管路backing line: 3=mr "&]r:  
    6-3.旁通管路;By-Pass管路 by-pass line: v,@F|c?_S  
    6-4.抽气封口接头pumping stem: kz} R[7  
    6-5.真空限流件limiting conductance:       V3Z]DA  
    6-6.过滤器filter: hz:pbes  
    5.   1.一般术语 xc @Ss[  
    1-1真空镀膜vacuum coating: oUZoj2G1  
    1-2基片substrate: Yk!/ow@.  
    1-3试验基片testing substrate: 3FE(}G  
    1-4镀膜材料coating material: (p#0)C  
    1-5蒸发材料evaporation material: 4?\:{1X=  
    1-6溅射材料sputtering material: >l']H*&B<  
    1-7膜层材料(膜层材质)film material: Of,2Q#oji  
    1-8蒸发速率evaporation rate: &7e)O=  
    1-9溅射速率sputtering rate: (V:E2WR  
    1-10沉积速率deposition rate: S$,'Q^~K  
    1-11镀膜角度coating angle: WJH\~<{mP  
    GL Mm(  
    2.工艺 zi9[)YqxPH  
    2-1真空蒸膜vacuum evaporation coating: &ANP`=  
    (1).同时蒸发simultaneous evaporation: :aCrX  
    (2).蒸发场蒸发evaporation field evaporation: Yr.sm!xA  
    (3).反应性真空蒸发reactive vacuum evaporation: Qn@Pd*DR  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: MK #wut  
    (5).直接加热的蒸发direct heating evaporation: 46@{5)Tq  
    (6).感应加热蒸发induced heating evaporation: CNZz]H  
    (7).电子束蒸发electron beam evaporation: i:]*P  
    (8).激光束蒸发laser beam evaporation: r0;:t   
    (9).间接加热的蒸发indirect heating evaporation: @gC=$A#  
    (10).闪蒸flash evaportion: \JEXX4%  
    2-2真空溅射vacuum sputtering: q[q?hQ/b  
    (1).反应性真空溅射 reactive vacuum sputtering: RGKYW>$0RR  
    (2).偏压溅射bias sputtering: t]jFo  
    (3).直流二级溅射direct current diode sputtering: ~}EMk3  
    (4).非对称性交流溅射asymmtric alternate current sputtering: 1RcSTg  
    (5).高频二极溅射high frequency diode sputtering: JF&$t}  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: b V+(b9  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: v{zMO:3  
    (8).离子束溅射ion beam sputtering: JxE53ev  
    (9).辉光放电清洗glow discharge cleaning: Q/uwQ o/  
    2-3物理气相沉积PVD physical vapor deposition: vX0f,y  
    2-4化学气相沉积CVD chemical vapor deposition: J]l rS  
    2-5磁控溅射magnetron sputtering: jp8@vdRg  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: m7a#qs; ,  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: )c n+1R  
    2-8电弧离子镀arc discharge deposition: KqBk~-G  
    3~S'LxV  
    3.专用部件 y&}E~5O  
    3-1镀膜室coating chamber: {vUN+We  
    3-2蒸发器装置evaporator device: u0aJu  
    3-3蒸发器evaporator: [[PEa-992  
    3-4直接加热式蒸发器evaporator by direct heat: (~CLn;'  
    3-5间接加热式蒸发器evaporator by indirect heat: $3`>{3x$  
    3-7溅射装置sputtering device: S#)Eom?V  
    3-8靶target: L^2FQti>  
    3-10时控挡板timing shutter: wW>zgTG  
    3-11掩膜mask: mMsTyM-f  
    3-12基片支架substrate holder: Bj k]ZU0T  
    3-13夹紧装置clamp: jK \T|vGJa  
    3-14换向装置reversing device: kB?al#`  
    3-15基片加热装置substrate heating device: w0w G-R ?  
    3-16基片冷却装置substrate colding device: Ox#\M0Wn$3  
    6"Bic rY  
    4.真空镀膜设备 3)-/`iy#  
    4-1真空镀膜设备vacuum coating plant: 7VcmVq}X  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: ;};wq&b#  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: l @^3Exwt  
    4-2连续镀膜设备continuous coating plant: }|PY!O  
    4-3半连续镀膜设备semi- continuous coating plant 9Gv[ 8'I  
    6.   1.漏孔 @d Jr/6Yx  
    1-1漏孔leaks: :Y9NLbv  
    1-2通道漏孔channel leak: qM#R0ZUIe\  
    1-3薄膜漏孔membrane leak: j'9"cE5_  
    1-4分子漏孔molecular leak: b Q]/?cCYV  
    1-5粘滞漏孔vixcous leak: K>*a*[t0Sy  
    1-6校准漏孔calibrated leak: ylt`*|$  
    1-7标准漏孔reference leak : 0a-:<zm  
    1-8虚漏virtual leak: :_!8 WB  
    1-9漏率leak rate: FQ g~l4WX  
    1-10标准空气漏率standard air leak rate: 8_T6_jL<  
    1-11等值标准空气漏率equivalent standard air leak rate: v) vkn/:  
    1-12探索(示漏)气体: 7 S?4XyU/o  
    A&nU]R8S  
    2.本底 zZVfj:i8  
    2-1本底background: @V03a )6,h  
    2-2探索气体本底search gas background : J_s>N  
    2-3漂移drift: v\p;SwI   
    2-4噪声noise: e{m2l2Tx:  
    v4C{<8:X  
    3.检漏仪 @)Ofi j  
    3-1检漏仪leak detector: um9_ru~  
    3-2高频火花检漏仪H.F. spark leak detector: bV ZMW/w  
    3-3卤素检漏仪halide leak detector: ]Dw]p! @  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: rETRTp0HT  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: Iu$K i  
    4~B> 9<$e>  
    4.检漏 Mn)@{^  
    4-1气泡检漏leak detection by bubbles: ~%YBI9$+  
    4-2氨检漏leak detection by ammonia: OE}*2P/M>  
    4-3升压检漏leak detection of rise pressure: wE~V]bmtW  
    4-4放射性同位素检漏radioactive isotope leak detection:  cReB~wk  
    4-5荧光检漏fluorescence leak detection CiB%B`,N  
    7.   1.一般术语 HuOIFv  
    1-1真空干燥vacuum drying: 8MSC.0   
    1-2冷冻干燥freeze drying : $m42:amM  
    1-3物料material: D9z|VIw8  
    1-4待干燥物料material to be dried: H,b5C_D29  
    1-5干燥物料dried material : hZ.Z3`v70  
    1-6湿气moisture;humidity: {)-aSywe  
    1-7自由湿气free moisture: )I3NeKWz  
    1-8结合湿气bound moisture: fMOU$0]$<  
    1-9分湿气partial moisture: eut-U/3:#  
    1-10含湿量moisture content: V{JAB]?^  
    1-11初始含湿量initial moisture content: #-bA[eQV  
    1-12最终含湿量final residual moisture: q5?# 3T=  
    1-13湿度degree of moisture ,degree of humidity : gvL f|+m  
    1-14干燥物质dry matter : 7D<#(CE{  
    1-15干燥物质含量content of dry matter: 2$Tj84'X  
    92EWIHEWZ  
    2.干燥工艺 Y'ow  
    2-1干燥阶段stages of drying : |`cKD >  
    (1).预干燥preliminary dry: l,kUhZ@W  
    (2).一次干燥(广义)primary drying(in general): 0(S"{Ov  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): 1PpyVf  
    (4).二次干燥secondary drying: ,G2TVjz  
    2-2.(1).接触干燥contact drying: M8tRjNWS?  
    (2).辐射干燥 drying by radiation : bFW=ylF9  
    (3).微波干燥microwave drying: $C `;fA  
    (4).气相干燥vapor phase drying: %@u;5qD&  
    (5).静态干燥static drying: 8?%-'z.  
    (6).动态干燥dynamic drying: QDu2?EYZq  
    2-3干燥时间drying time: d!$Z (W0  
    2-4停留时间length of stay(in the drying chamber): UX dUO@  
    2-5循环时间cycle time: Ry'= ke  
    2-6干燥率 dessication ratio : #W|'1 OX4  
    2-7去湿速率mass flow rate of humidity: .,OVzW  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: [<6S%s  
    2-9干燥速度 drying speed : Z-l=\ekJ  
    2-10干燥过程drying process: f`[R7Q5  
    2-11加热温度heating temperature: ; d J1  
    2-12干燥温度temperature of the material being dried : 1~PV[2a  
    2-13干燥损失loss of material during the drying process : :AE&Ny4  
    2-14飞尘lift off (particles): (JM5`XwM  
    2-15堆层厚度thickness of the material: |6$p;Aar  
    9pX&ZjYP-  
    3.冷冻干燥 AT%u%cE-  
    3-1冷冻freezing: w'UVKpG+  
    (1).静态冷冻static freezing: >M`CVUf  
    (2).动态冷冻dynamic freezing: *" {lMZ +  
    (3).离心冷冻centrifugal freezing: `I3r3WyA  
    (4).滚动冷冻shell freezing: W' s  
    (5).旋转冷冻spin-freezing: F~P%AjAx'  
    (6).真空旋转冷冻vacuum spin-freezing: *cgI.+  
    (7).喷雾冷冻spray freezing: wbst8 *$  
    (8).气流冷冻air blast freezing: (,8$V\  
    3-2冷冻速率rate of freezing: %;rHrDP(>  
    3-3冷冻物料frozen material: F 9@h|#an  
    3-4冰核ice core: u4/kR  
    3-5干燥物料外壳envelope of dried matter: $GTU$4u  
    3-6升华表面sublimation front: D`$hPYK|_  
    3-7融化位置freezer burn: ;9c<K  
    apu4DAy&8  
    4.真空干燥设备;真空冷冻干燥设备 sL\L"rQN6  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: BYMi6wts  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: cj1cZ-  
    4-3加热表面heating surface: |%' nVxc4r  
    4-4物品装载面shelf : 6Q${U7%7  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): ~W{2Jd  
    4-6单位面积干燥器处理能力throughput per shelf area: |563D#?cR  
    4-7冰冷凝器ice condenser: ;oy-#p>N%  
    4-8冰冷凝器的负载load of the ice condenser: L{8xlx`  
    4-9冰冷凝器的额定负载rated load of the ice condenser 28UU60  
    8.   1.一般术语 BBtzs^C|  
    1-1试样sample : <=>=.kmGt  
    (1).表面层surface layer: G{6;>8h  
    (2).真实表面true surface: <psZQdH  
    (3).有效表面积effective surface area: 6x%h6<#xh*  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: ZR(x%ews  
    (5).表面粒子密度surface particle density: Bq$rf < W  
    (6).单分子层monolayer: SN1}xR$  
    (7).表面单分子层粒子密度monolayer density: 1q,{0s_kp  
    (8).覆盖系数coverage ratio:  [D<1 CF  
    1-2激发excitation: /\4'ddGU  
    (1).一次粒子primary particle: jbS\vyG  
    (2).一次粒子通量primary particle flux: *tK\R&4,4s  
    (3).一次粒子通量密度density of primary particle flux: ;{U@qQD7  
    (4).一次粒子负荷primary particle load: d2H|LMhJ  
    (5).一次粒子积分负荷integral load of primary particle: 2(#7[mgPI  
    (6).一次粒子的入射能量energy of the incident primary particle: %3ICI  
    (7).激发体积excited volume: -De9_0#R  
    (8).激发面积excited area: UOxkO  
    (9).激发深度excited death: ''0fF_P  
    (10).二次粒子secondary particles: u[DfzH  
    (11).二次粒子通量secondary particle flux: '*"vkgN  
    (12).二次粒子发射能energy of the emitted secondary particles: a-|*?{o  
    (13).发射体积emitting volume: 4X+ifZO  
    (14).发射面积emitting area: ):b$xNn  
    (15).发射深度emitting depth: }x07^4$j  
    (16).信息深度information depth: V0P>YQq9s  
    (17).平均信息深度mean information depth: M!REygyx  
    1-3入射角angle of incidence: Cd>WUw  
    1-4发射角angle of emission: 2AO~HxF  
    1-5观测角observation: Vnr[}<L  
    1-6分析表面积analyzed surface area: %)0*&a 4  
    1-7产额 yield : )'6DNa[y  
    1-8表面层微小损伤分析minimum damage surface analysis: id2j7|$,  
    1-9表面层无损伤分析non-destructive surface analysis: [YUv7|\  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : p IU&^yX>  
    1-11可观测面积observable area: U qFv}VsnF  
    1-12可观测立体角observable solid angle : /Z@tv .f  
    1-13接受立体角;观测立体角angle of acceptance: 4Za7^c.  
    1-14角分辨能力angular resolving power: 5*,f Fib  
    1-15发光度luminosity: ;;:-l99  
    1-16二次粒子探测比detection ratio of secondary particles: ~;#Y9>7\\'  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: +i@y@<l:+  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: T<55a6NoK  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: U8LtG/  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: P dhEQ}H  
    1-21本底压力base pressure: K"4>DaK2P  
    1-22工作压力working pressure:  wv\w;'  
    '<ZlGFt'n  
    2.分析方法 .U?'i<  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: h3z{(-~y  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : gT#&"aP5S  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: w[I E  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: >76\nGO  
    2-3离子散射表面分析ion scattering spectroscopy: 4:dH]  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: `O[};3O&  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: "hzB9*"t  
    2-6离子散射谱仪ion scattering spectrometer: X bD4:i%  
    2-7俄歇效应Auger process: O4^8jK}  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: 7:)n$,31FW  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: 8p@Piy{p  
    2-10光电子谱术photoelectron spectroscopy : p%*%n3bw  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: r0,:J   
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: pJt,9e6  
    2-11光电子谱仪photoelectron spectrometer: n=c 2K c  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: q(.:9A*0  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: "F.;Dv9V[0  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): Z`KC%!8K  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊