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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 4]18=?r>  
    --------------------------------------------------- :v>Nz7SB  
    真空术语 @XL5$k[Y  
    nD51,1>  
    1.标准环境条件 standard ambient condition: =~f\m:Y  
    2.气体的标准状态 standard reference conditions forgases: BQfq]ti  
    3.压力(压强)p pressure: P 4|p[V8  
    4.帕斯卡Pa pascal: kg^VzNX  
    5.托Torr torr: ,_(AiQK  
    6.标准大气压atm standard atmosphere: yhpeP  
    7.毫巴mbar millibar: .sOEqwO}>  
    8.分压力 partial pressure: hPB^|#}  
    9.全压力 total pressure: t5Oeb<REz  
    10.真空 vacuum: m<X[s  
    11.真空度 degree of vacuum: Ghb Jty`  
    12.真空区域 ranges of vacuum: awic9 uMH  
    13.气体 gas: Ob#d;F  
    14.非可凝气体 non-condensable gas: *lT:P-  
    15.蒸汽vapor: = olmBXn/  
    16.饱和蒸汽压saturation vapor pressure: exHg<18WSe  
    17.饱和度degree of saturation: \6)]!$F6:  
    18.饱和蒸汽saturated vapor: tr t^o  
    19.未饱和蒸汽unsaturated vapor: hmQ;!9  
    20.分子数密度n,m-3 number density of molecules: Oe/\@f0bLT  
    21.平均自由程ι、λ,m mean free path: e(~9JP9  
    22.碰撞率ψ collision rate: (q]_&%yW  
    23.体积碰撞率χ volume collision rate: #oX8EMqs<  
    24.气体量G quantity of gas: /eO :1c  
    25.气体的扩散 diffusion of gas: 4fyds< f  
    26.扩散系数D diffusion coefficient; diffusivity: ^I CSs]}1  
    27.粘滞流 viscous flow: -E(0}\  
    28.粘滞系数η viscous factor: P`xQL  
    29.泊肖叶流 poiseuille flow: 4{rqGC /  
    30.中间流 intermediate flow: ~>"m`Q&[  
    31.分子流 molecular flow: P< 5v\\  
    32克努曾数 number of knudsen: fZ5zsm'N  
    33.分子泻流 molecular effusion; effusive flow: gZHuyp(B  
    34.流逸 transpiration: ZZu{c t9  
    35.热流逸 thermal transpiration: $,)PO Z  
    36.分子流率qN molecular flow rate; molecular flux: !5}u\  
    37.分子流率密度 molecular flow rate density; density of molecular flux: ,|RN?1?U  
    38.质量流率qm mass flow rare: H6t'V%Ys  
    39.流量qG throughput of gas: Qu;cl/&  
    40.体积流率qV volume flow rate: R0A|} Ee*  
    41.摩尔流率qυ molar flow rate: 9k.5'#  
    42.麦克斯韦速度分布 maxwellian velocity distribution: :yi?<  
    43.传输几率Pc transmission probability: G=ly .  
    44.分子流导CN,UN molecular conductance: =} D9sT  
    45.流导C,U conductance: 6^l|/\Y{  
    46.固有流导Ci,Ui intrinsic conductance: l{o,"P"  
    47.流阻W resistance: :2zga=)g  
    48.吸附 sorption: J_S8=`f%  
    49.表面吸附 adsorption: 2t,N9@u=UN  
    50.物理吸附physisorption: )4MM>Q  
    51.化学吸附 chemisorption: Q_r}cL/A  
    52.吸收absorption: W2Ik!wEe&  
    53.适应系数α accommodation factor: 8=  kwc   
    54.入射率υ impingement rate: YLsOA`5X  
    55.凝结率condensation rate: 90[6PSXk  
    56.粘着率 sticking rate: R0g^0K.  
    57.粘着几率Ps sticking probability: kfV}ta'^S  
    58.滞留时间τ residence time: e=^^TX`I  
    59.迁移 migration: DEw>f%&4  
    60.解吸 desorption: !*1 $j7`tP  
    61.去气 degassing: v8} vk]b  
    62.放气 outgassing: @u @~gEt  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: [o"<DP6w  
    64.蒸发率 evaporation rate: ZccvZl ;b  
    65.渗透 permeation: \_]X+o;  
    66.渗透率φ permeability: ]?6Pt:N2  
    67.渗透系数P permeability coefficient H[_i=X3-~  
    2.   1.真空泵 vacuum pumps jP{&U&!i  
    1-1.容积真空泵 positive displacement pump: F1)5"7f  
    ⑴.气镇真空泵 gas ballast vacuum pump: ;l %$-/%  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: lDSF  
    ⑶.干封真空泵 dry-sealed vacuum pump: bEKhU\@=J  
    ⑷.往复真空泵 piston vacuum pump: @tvz9N  
    ⑸.液环真空泵 liquid ring vacuum pump: @9tzk [  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: re~T,PPM  
    ⑺.定片真空泵 rotary piston vacuum pump: s(Bcw`'#  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: ZuFcJ?8i  
    ⑼.余摆线真空泵 trochoidal vacuum pump: uCr :+"C  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: oo\7\b#Jx  
    ⑾.罗茨真空泵 roots vacuum pump: {vq| 0t\-  
    1-2.动量传输泵 kinetic vacuum pump: QR2S67-  
    ⑴.牵引分子泵molecular drag pump: 9 {wRqY  
    ⑵.涡轮分子泵turbo molecular pump: ]t0St~qUL)  
    ⑶.喷射真空泵ejector vacuum pump: w^"IR  
    ⑷.液体喷射真空泵liquid jet vacuum pump: W#P`Y< u$  
    ⑸.气体喷射真空泵gas jet vacuum pump: BW:HKH.k  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : `/O AgV"`  
    ⑺.扩散泵diffusion pump : >qz#&  
    ⑻.自净化扩散泵self purifying diffusion pump: Y}]-o9Rl  
    ⑼.分馏扩散泵 fractionating diffusion pump : RH.qbPjx  
    ⑽.扩散喷射泵diffusion ejector pump : Nq%ir8hE  
    ⑾.离子传输泵ion transfer pump: ^) (-7H  
    1-3.捕集真空泵 entrapment vacuum pump: K9{RU4<  
    ⑴吸附泵adsorption pump: +CM>]Ze  
    ⑵.吸气剂泵 getter pump: : eCeJ~&E  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : )ViBH\.*p  
    ⑷.吸气剂离子泵getter ion pump: :sQ>oNnz  
    ⑸.蒸发离子泵 evaporation ion pump: EE^x34&=  
    ⑹.溅射离子泵sputter ion pump: P8(hHuO  
    ⑺.低温泵cryopump: 31~nay15  
    Gp{,v  
    2.真空泵零部件 [!De|,u(^  
    2-1.泵壳 pump case: nwp(% fBo  
    2-2.入口 inlet: Xhq7)/jp  
    2-3.出口outlet: f14^VTzP/#  
    2-4.旋片(滑片、滑阀)vane; blade : %q}[ZD/HD  
    2-5.排气阀discharge valve: WfD fj  
    2-6.气镇阀gas ballast valve: egvb#:zW?  
    2-7.膨胀室expansion chamber: #R>x]Nt}  
    2-8.压缩室compression chamber: j^7A }fz  
    2-9.真空泵油 vacuum pump oil: u0GHcpOm  
    2-10.泵液 pump fluid: O%3Hp.|!  
    2-11.喷嘴 nozzle: vK%*5  
    2-13.喷嘴扩张率nozzle expansion rate: QtwQVOK  
    2-14.喷嘴间隙面积 nozzle clearance area : &JXb) W  
    2-15.喷嘴间隙nozzle clearance: ~o>Gm>5!HH  
    2-16.射流jet: m<49<O6o  
    2-17.扩散器diffuser: XZ . T%g  
    2-18.扩散器喉部diffuser thoat: @0 'U p  
    2-19.蒸汽导管vapor tube(pipe;chimney): _1NK9dp:  
    2-20.喷嘴组件nozzle assembly: xbBqR _ H_  
    2-21.下裙skirt: J\Hv42  
    i!zFW-*5  
    3.附件 |{&M#qXe  
    3-1阱trap: >{N}UNZ$}  
    ⑴.冷阱 cold trap: >MGWN  
    ⑵.吸附阱sorption trap: zs~Tu  
    ⑶.离子阱ion trap: #1/~eIEY  
    ⑷.冷冻升华阱 cryosublimation trap: \n t~K}a  
    3-2.挡板baffle: 'f!U[Qatg  
    3-3.油分离器oil separator: i84!x%|P  
    3-4.油净化器oil purifier: e{7\pQK  
    3-5.冷凝器condenser: +Q[uq!<VJk  
    p]%di8&;N  
    4.泵按工作分类 4 s ax  
    4-1.主泵main pump: 0:`|T jf_  
    4-2.粗抽泵roughing vacuum pump: %uN<^`JZ  
    4-3.前级真空泵backing vacuum pump: HeO:=OE~>  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: 4;I\% qes  
    4-5.维持真空泵holding vacuum pump: g_1#if&  
    4-6.高真空泵high vacuum pump: +4.s4&f)  
    4-7.超高真空泵ultra-high vacuum pump: !( rAI  
    4-8.增压真空泵booster vacuum pump: 4WJY+)  
    >UMxlvTg&  
    5.真空泵特性 4/Y?eUQ  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: $8)XN-%(  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 X3\PVsH$K  
    5-3.起动压力starting pressure: "~5cz0 H3v  
    5-4.前级压力 backing pressure : H.m]Dm,z  
    5-5.临界前级压力 critical backing pressure: H; NV?CD  
    5-6.最大前级压力maximum backing pressure: R7/S SuG6\  
    5-7.最大工作压力maximum working pressure: vY-CXWC7  
    5-8.真空泵的极限压力ultimate pressure of a pump: u0h%4f!X  
    5-9.压缩比compression ratio: ?id) 2V0s  
    5-10.何氏系数Ho coefficient: =nGFLH6)  
    5-11.抽速系数speed factor: ;NR|Hi]  
    5-12.气体的反扩散back-diffusion of gas: *qwN9b/!  
    5-13.泵液返流back-streaming of pump fluid: c1"wS*u  
    5-14.返流率back-streaming rate b2OwLt9  
    5-15.返迁移back-migration: ;l;jTb^l  
    5-16.爆腾bumping: DNmC   
    5-17.水蒸气允许量qm water vapor tolerable load: 1O Ft}>1  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: ~;HASHu  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: RhJ3>DL  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump =_OJ 7K'  
    3.   1.一般术语 U9]&KNx  
    1-1.压力计pressure gauge: <W!T+sMQj  
    1-2.真空计vacuum gauge: t XzuP_0  
    ⑴.规头(规管)gauge head: Jj ]<SWh  
    ⑵.裸规nude gauge : F7}yt  
    ⑶.真空计控制单元gauge control unit : D!* SA  
    ⑷.真空计指示单元gauge indicating unit : `m'RvUc  
    w?D=  
    2.真空计一般分类 bzG vnaTt  
    2-1.压差式真空计differential vacuum gauge: 3SY1>}(Y  
    2-2.绝对真空计 absolute vacuum gauge: Z84w9y7O<  
    2-3.全压真空计total pressure vacuum gauge: -d?<t}a  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: @u+LF]MY  
    2-5.相对真空计relative vacuum gauge : HHx5 VI  
    _&HFKpHQ  
    3.真空计特性 -n@,r%`UK  
    3-1.真空计测量范围pressure range of vacuum gauge: p_xJ KQS  
    3-2.灵敏度系数sensitivity coefficient: T7qp ({v?Q  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units):  \&d1bq  
    3-5.规管光电流photon current of vacuum gauge head: iw.F8[})  
    3-6.等效氮压力equivalent nitrogen pressure : Y3|_&\ v6  
    3-7.X射线极限值 X-ray limit: *vNAm(\N  
    3-8.逆X射线效应anti X-ray effect: h/5V~ :)  
    3-9.布利尔斯效应blears effect: c CjN8<  
    "S@]yL  
    4.全压真空计 l )r^|9{  
    4-1.液位压力计liquid level manometer: D8k >f ]  
    4-2.弹性元件真空计elastic element vacuum gauge: o JVdFE  
    4-3.压缩式真空计compression gauge: 1&h\\&ic  
    4-4.压力天平pressure balance: QfjoHeG7  
    4-5.粘滞性真空计viscosity gauge : tv-SX=T  
    4-6.热传导真空计thermal conductivity vacuum gauge : HZ(giAyjq  
    4-7.热分子真空计thermo-molecular gauge: `m V(:  
    4-8.电离真空计ionization vacuum gauge: VVF9X(^rQ  
    4-9.放射性电离真空计radioactive ionization gauge: F`;q9<NYRW  
    4-10.冷阴极电离真空计cold cathode ionization gauge: b 2\J<Nw  
    4-11.潘宁真空计penning gauge: ^!m%:r7Dr  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: 2kgSIvk\  
    4-13.放电管指示器discharge tube indicator: "Ml#,kU<T  
    4-14.热阴极电离真空计hot cathode ionization gauge: 0}Kyj"-3  
    4-15.三极管式真空计triode gauge: :S`12*_g"  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: k-4z2qB  
    4-17.B-A型电离真空计Bayard-Alpert gauge: f !7fz~&Sh  
    4-18.调制型电离真空计modulator gauge: auB+g'l  
    4-19.抑制型电离真空计suppressor gauge: Us[F@  
    4-20.分离型电离真空计extractor gauge:  zW?=^bE  
    4-21.弯注型电离真空计bent beam gauge: r" |do2s  
    4-22.弹道型电离真空计 orbitron gauge : L{ej<0yr  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: Yl1l$[A$  
    ~Y1nU-  
    5.分压真空计(分压分析器) 0#5&*  
    5-1.射频质谱仪radio frequency mass spectrometer: [+@T"2h2b  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: zl, Vj%d  
    5-3.单极质谱仪momopole mass spectrometer: MO1H?U hx  
    5-4.双聚焦质谱仪double focusing mass spectrometer: ]:#W$9,WL  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: &G-dxET]  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 75h]# k9\  
    5-7.回旋质谱仪omegatron mass spectrometer: D=f$-rn  
    5-8.飞行时间质谱仪time of flight mass spectrometer: k/U rz*O  
    OgK' ~j  
    6.真空计校准 TCgW^iu  
    6-1.标准真空计reference gauges: XB[EJGaX  
    6-2.校准系统system of calibration: #T>pu/EQX_  
    6-3.校准系数K calibration coefficient: `OZiN;*|  
    6-4.压缩计法meleod gauge method: tH vP0RxM  
    6-5.膨胀法expansion method: J6 A3Hrg  
    6-6.流导法flow method: 1vh[sKv9%  
    4.   1.真空系统vacuum system /+<G@+(  
    1-1.真空机组pump system: M?m@o1\;W  
    1-2.有油真空机组pump system used oil : 16ip:/5  
    1-3.无油真空机组oil free pump system x=W5e ^0?  
    1-4.连续处理真空设备continuous treatment vacuum plant: D;:p6q}hT  
    1-5.闸门式真空系统vacuum system with an air-lock: bvl!^xO]  
    1-6.压差真空系统differentially pumped vacuum system: z2A,*|I  
    1-7.进气系统gas admittance system: Q{ g{  
    2`V0k.$?p  
    2.真空系统特性参量 1#zD7b~  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : K,bX<~e5  
    2-2.抽气装置的抽气量throughput of a pumping unit : ;b|=osyT\  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: V_4=0(  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: ,{'ZP_  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: b$/7rVH!  
    2-6.极限压力ultimate pressure: -|:mRAe  
    2-7.残余压力residual pressure: $}H,g}@0  
    2-8.残余气体谱residual gas spectrum: Rx@0EPV  
    2-9.基础压力base pressure: (V}?y:)  
    2-10.工作压力working pressure: (F#2z\$;  
    2-11.粗抽时间roughing time: !Ks<%; rb  
    2-12.抽气时间pump-down time: |lIgvHgg  
    2-13.真空系统时间常数time constant of a vacuum system: `Gg,oCQg  
    2-14.真空系统进气时间venting time: (s51GRC  
    Eh *u6K)Z  
    3.真空容器 yx<-M  
    3-1.真空容器;真空室vacuum chamber: 5^{2 g^jH6  
    3-2.封离真空装置sealed vacuum device: j^/^PUR  
    3-3.真空钟罩vacuum bell jar: B?d+^sz]  
    3-4.真空容器底板vacuum base plate: y=}o|/5"  
    3-5.真空岐管vacuum manifold: , 9buI='  
    3-6.前级真空容器(贮气罐)backing reservoir: EO/TuKt  
    3-7.真空保护层outer chamber: +~xzgaL  
    3-8.真空闸室vacuum air lock: - ^>7\]  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: ] $F%  
    AI$\wp#aw  
    4.真空封接和真空引入线 7#P Q1UWl  
    4-1.永久性真空封接permanent seal : h\6 t\_^\  
    4.2.玻璃分级过渡封接graded seal : <I{Yyl^  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: =>e> r~cW  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: > =Na,D  
    4-5.陶瓷金属封接ceramic-to-metal seal: !^aJS'aq  
    4-6.半永久性真空封接semi-permanent seal : \ 5#eBJ  
    4-7.可拆卸的真空封接demountable joint: ;YrmT9Jx6  
    4-8.液体真空封接liquid seal  cj|Urt  
    4-9.熔融金属真空封接molten metal seal: DH])Q5  
    4-10.研磨面搭接封接ground and lapped seal: ]_m(q`_  
    4-11.真空法兰连接vacuum flange connection: 6"2IV  
    4-12.真空密封垫vacuum-tight gasket: W#L/|K!S  
    4-13.真空密封圈ring gasket: p-6T,')  
    4-14.真空平密封垫flat gasket: {afIr1j/m  
    4-15.真空引入线feedthrough leadthrough: Dd:48sN:Jq  
    4-16.真空轴密封shaft seal: [n$6 T  
    4-17.真空窗vacuum window: "i\^GK=  
    4-18.观察窗viewing window:  %d0BQ|  
    r:t3Kf`+E-  
    5.真空阀门 PSU}fo  
    5-1.真空阀门的特性characteristic of vacuum valves: >%c>R'~h  
    ⑴.真空阀门的流导conductance of vacuum valves: /b."d\  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: u y13SkW  
    5-2.真空调节阀regulating valve: G9~ 4?v6:  
    5-3.微调阀 micro-adjustable valve: O]?PC^GGY  
    5-4.充气阀charge valve: xH>j  
    5-5.进气阀gas admittance valve: j HEt   
    5-6.真空截止阀break valve: Pu,2a+0N  
    5-7.前级真空阀backing valve: "BC;zH:  
    5-8.旁通阀 by-pass valve: 0>ce~KU  
    5-9.主真空阀main vacuum valve: ]4,eCT  
    5-10.低真空阀low vacuum valve: 9bUFxSH  
    5-11.高真空阀high vacuum valve: 8)YDUE%VH  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: w u0q.]  
    5-13.手动阀manually operated valve: +-Z `v  
    5-14.气动阀pneumatically operated valve: vSwRj<|CF  
    5-15.电磁阀electromagnetically operated valve: 0\wW%3C  
    5-16.电动阀valve with electrically motorized operation: lB   
    5-17.挡板阀baffle valve: *~`BG5w  
    5-18.翻板阀flap valve: 2I_~] X53[  
    5-19.插板阀gate valve: 6P0 2=  
    5-20.蝶阀butterfly valve: 1P G"IaOb  
    WIw*//nw  
    6.真空管路  ^]?ju L  
    6-1.粗抽管路roughing line: Fm[3Btn  
    6-2.前级真空管路backing line: jaQH1^~l/-  
    6-3.旁通管路;By-Pass管路 by-pass line: r"`7ezun:  
    6-4.抽气封口接头pumping stem: n]jw!;  
    6-5.真空限流件limiting conductance:       {n(/ c33  
    6-6.过滤器filter: KESM5p"f  
    5.   1.一般术语 [$ z-  
    1-1真空镀膜vacuum coating: ~P'i /*:  
    1-2基片substrate: f%rZ2h)  
    1-3试验基片testing substrate: rXq{WS`  
    1-4镀膜材料coating material: <sls1,  
    1-5蒸发材料evaporation material: ">vi=Tr  
    1-6溅射材料sputtering material: /Edq[5Ah  
    1-7膜层材料(膜层材质)film material: kG`&Z9P  
    1-8蒸发速率evaporation rate: !gJw?(8"  
    1-9溅射速率sputtering rate: H4<Q}([w  
    1-10沉积速率deposition rate: &W{v(@  
    1-11镀膜角度coating angle: 7\yh<?`V8  
    _7'5IA  
    2.工艺 P[tYu:  
    2-1真空蒸膜vacuum evaporation coating: ZKai*q4?  
    (1).同时蒸发simultaneous evaporation: 9A *gW j  
    (2).蒸发场蒸发evaporation field evaporation: Cl!9/l?z  
    (3).反应性真空蒸发reactive vacuum evaporation: "NTiQ}i  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: Yh; A)N p  
    (5).直接加热的蒸发direct heating evaporation: >+):eB L  
    (6).感应加热蒸发induced heating evaporation: / |isRh|  
    (7).电子束蒸发electron beam evaporation: M[(pLYq:  
    (8).激光束蒸发laser beam evaporation: )T^xDx  
    (9).间接加热的蒸发indirect heating evaporation: #@F.wV0  
    (10).闪蒸flash evaportion: ?/8V%PL~$  
    2-2真空溅射vacuum sputtering: J|`.d46  
    (1).反应性真空溅射 reactive vacuum sputtering: Z}.ZTEB  
    (2).偏压溅射bias sputtering: #\\|:`YV  
    (3).直流二级溅射direct current diode sputtering: 1:J+`mzpl  
    (4).非对称性交流溅射asymmtric alternate current sputtering: c7RQ7\  
    (5).高频二极溅射high frequency diode sputtering: B:Hr{%O  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: PlCj<b1D:  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: ilAhw4A  
    (8).离子束溅射ion beam sputtering: _tE55X&  
    (9).辉光放电清洗glow discharge cleaning: JX{_,2*$  
    2-3物理气相沉积PVD physical vapor deposition: ^9kx3Pw?8  
    2-4化学气相沉积CVD chemical vapor deposition: 2+ywl}9  
    2-5磁控溅射magnetron sputtering: w"C,oo3  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: Nnq1&j"m  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: ~0@fK<C)O  
    2-8电弧离子镀arc discharge deposition: 8e1Z:axn0  
    Pb sxjP  
    3.专用部件 %`YR+J/V  
    3-1镀膜室coating chamber: -!}3bl*(7  
    3-2蒸发器装置evaporator device: c=X+uO-  
    3-3蒸发器evaporator: F< XOt3VY.  
    3-4直接加热式蒸发器evaporator by direct heat: '.k'*=cq0  
    3-5间接加热式蒸发器evaporator by indirect heat: (>NZYPw^3  
    3-7溅射装置sputtering device: ;a| ~YM2I  
    3-8靶target: <y?=;54a  
    3-10时控挡板timing shutter: @_1cY#!  
    3-11掩膜mask: 5lM2nhlf'b  
    3-12基片支架substrate holder: h~ZLULW)B  
    3-13夹紧装置clamp: @0d"^  
    3-14换向装置reversing device: _W^;a  
    3-15基片加热装置substrate heating device: Nd&UWk^  
    3-16基片冷却装置substrate colding device: U_ l9CZ  
    3R0ioi 7  
    4.真空镀膜设备 (|NCxey  
    4-1真空镀膜设备vacuum coating plant: W/AF  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: *ifz@8C }  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: keFH CC  
    4-2连续镀膜设备continuous coating plant: [c;#>UQMf  
    4-3半连续镀膜设备semi- continuous coating plant e .~11bx  
    6.   1.漏孔 T^(> 8/O  
    1-1漏孔leaks: .ws86stFSb  
    1-2通道漏孔channel leak: Rc &m4|cw7  
    1-3薄膜漏孔membrane leak: RB|i<`Z  
    1-4分子漏孔molecular leak: 9\c]I0)3p  
    1-5粘滞漏孔vixcous leak: 3bYjW=_hA  
    1-6校准漏孔calibrated leak: c+ e~BN  
    1-7标准漏孔reference leak : gn&Zt}@[  
    1-8虚漏virtual leak: 5OzEY7K)  
    1-9漏率leak rate: }>d  
    1-10标准空气漏率standard air leak rate: f 9Kt>2IN  
    1-11等值标准空气漏率equivalent standard air leak rate: eLnS1w 2  
    1-12探索(示漏)气体: n,2   
    0Qq<h;8xEc  
    2.本底 bwH[rT!n  
    2-1本底background: |`t 6lVO,Z  
    2-2探索气体本底search gas background : E2d'P  
    2-3漂移drift: tW/g0lC%  
    2-4噪声noise: cR_pC 9z  
    7eAV2.  
    3.检漏仪 y.c6r> }  
    3-1检漏仪leak detector: D>-r `  
    3-2高频火花检漏仪H.F. spark leak detector: t ^[fu,  
    3-3卤素检漏仪halide leak detector: (:HT|gKoE  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: P_w4 DU  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: KmTFJ,iM  
    }\Rmwm-  
    4.检漏 f:ObI  
    4-1气泡检漏leak detection by bubbles: >36,lNt  
    4-2氨检漏leak detection by ammonia: <|jh3Hlp  
    4-3升压检漏leak detection of rise pressure: kDMvTVd  
    4-4放射性同位素检漏radioactive isotope leak detection: yDwh]t  
    4-5荧光检漏fluorescence leak detection y<E]; ub  
    7.   1.一般术语 r9OgezER  
    1-1真空干燥vacuum drying: ?-vWNv  
    1-2冷冻干燥freeze drying : L*tfY onq  
    1-3物料material: `SsoRPW&$  
    1-4待干燥物料material to be dried: rpK&OR/  
    1-5干燥物料dried material : ; Byt'S  
    1-6湿气moisture;humidity: tP7<WGHd/  
    1-7自由湿气free moisture: PPr Pj^%z=  
    1-8结合湿气bound moisture: #Uu,yHMv:;  
    1-9分湿气partial moisture: L_RVHvA=M/  
    1-10含湿量moisture content: ,1#? 0q  
    1-11初始含湿量initial moisture content: T7.Iqw3p  
    1-12最终含湿量final residual moisture: H8FvI"J  
    1-13湿度degree of moisture ,degree of humidity : ]i$y;]f  
    1-14干燥物质dry matter : R`Z"ey@C  
    1-15干燥物质含量content of dry matter: +tT"  
    gTXpaB<  
    2.干燥工艺 $3G^}A"  
    2-1干燥阶段stages of drying : _huJ*W7lR  
    (1).预干燥preliminary dry: t]@>kAA>2L  
    (2).一次干燥(广义)primary drying(in general): eIY`RMo (  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): YHQ]]#'  
    (4).二次干燥secondary drying: uR5+")r@S  
    2-2.(1).接触干燥contact drying: $t.oGd@N  
    (2).辐射干燥 drying by radiation : Sb/?<$>  
    (3).微波干燥microwave drying: iX]OF.:   
    (4).气相干燥vapor phase drying: uBx\xeI  
    (5).静态干燥static drying: y>aO90wJ  
    (6).动态干燥dynamic drying: Ee2P]4_d  
    2-3干燥时间drying time: $t):r@L  
    2-4停留时间length of stay(in the drying chamber): *VsVCUCz5*  
    2-5循环时间cycle time: V;xPZ2C;  
    2-6干燥率 dessication ratio : =J IceLL  
    2-7去湿速率mass flow rate of humidity: z&amYwQcI  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: ~3?-l/$  
    2-9干燥速度 drying speed : Zek@xr;]  
    2-10干燥过程drying process: x2"1,1%H7  
    2-11加热温度heating temperature: S3ooG14Ls  
    2-12干燥温度temperature of the material being dried : ]yf?i350  
    2-13干燥损失loss of material during the drying process : >] 'oN  
    2-14飞尘lift off (particles): 'NhQBk  
    2-15堆层厚度thickness of the material: 1"ZtE\{ "  
    5MB`yRVv  
    3.冷冻干燥 id1cZig  
    3-1冷冻freezing: OR+qi*)  
    (1).静态冷冻static freezing: 7sxX?u  
    (2).动态冷冻dynamic freezing: @F<{/|P  
    (3).离心冷冻centrifugal freezing: <J&S[`U!  
    (4).滚动冷冻shell freezing: ?l/6DT>e  
    (5).旋转冷冻spin-freezing: LUMbRrD-  
    (6).真空旋转冷冻vacuum spin-freezing: B-rE8 \  
    (7).喷雾冷冻spray freezing: ^[x cfTN  
    (8).气流冷冻air blast freezing: Z)`)9]*  
    3-2冷冻速率rate of freezing: *#XZ*Ga  
    3-3冷冻物料frozen material: ~DInd-<5  
    3-4冰核ice core: <#C,66k  
    3-5干燥物料外壳envelope of dried matter: PR.3EL  
    3-6升华表面sublimation front: >o?v[:u*  
    3-7融化位置freezer burn: 4|`>}Nu  
    <u!cdYo@  
    4.真空干燥设备;真空冷冻干燥设备 u[b |QR=5  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: sE% $]Jp  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: mQ:{>`  
    4-3加热表面heating surface: lI=<lmM0|/  
    4-4物品装载面shelf : \"a{\E,{;  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): P }sr  
    4-6单位面积干燥器处理能力throughput per shelf area: MNd\)nX  
    4-7冰冷凝器ice condenser: )@N d3Z  
    4-8冰冷凝器的负载load of the ice condenser: 13X}pnW  
    4-9冰冷凝器的额定负载rated load of the ice condenser ^?VQ$o2  
    8.   1.一般术语 JI5o~; }m  
    1-1试样sample : bqcCA9 1  
    (1).表面层surface layer: kXSX<b<%  
    (2).真实表面true surface: 1#A$&'&\J;  
    (3).有效表面积effective surface area: 8F}drK9>F  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: |"gL {De  
    (5).表面粒子密度surface particle density: 0kkDlWkzo  
    (6).单分子层monolayer: p'K`K\X  
    (7).表面单分子层粒子密度monolayer density: >$4# G)s  
    (8).覆盖系数coverage ratio: ,dIev<  
    1-2激发excitation: ,QcS[9$  
    (1).一次粒子primary particle: m-Eh0Zl>Z  
    (2).一次粒子通量primary particle flux: g_Z tDxz  
    (3).一次粒子通量密度density of primary particle flux: w>%@Ug["  
    (4).一次粒子负荷primary particle load: KxkBP/`3Q  
    (5).一次粒子积分负荷integral load of primary particle: ==dKC;  
    (6).一次粒子的入射能量energy of the incident primary particle: DzAZv/h76  
    (7).激发体积excited volume: "hsT^sy  
    (8).激发面积excited area: .Kb3VNgwvm  
    (9).激发深度excited death: |\,OlX,  
    (10).二次粒子secondary particles: M13HD/~O  
    (11).二次粒子通量secondary particle flux: yix[zfQt0  
    (12).二次粒子发射能energy of the emitted secondary particles: h aAY=:  
    (13).发射体积emitting volume: ;g|Vt}a&4  
    (14).发射面积emitting area: hYW9a`Ht/  
    (15).发射深度emitting depth: 928_e)V  
    (16).信息深度information depth: Fv$tl)p*  
    (17).平均信息深度mean information depth: m{/7)2.  
    1-3入射角angle of incidence: _?tpO61g>  
    1-4发射角angle of emission: %fj5 ;}E.  
    1-5观测角observation: <`}P  
    1-6分析表面积analyzed surface area: Og\k5.! ,  
    1-7产额 yield : r]3-}:vU  
    1-8表面层微小损伤分析minimum damage surface analysis: ^D+J k8  
    1-9表面层无损伤分析non-destructive surface analysis: WMB%?30  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : V@ >(xe7  
    1-11可观测面积observable area: bv+u7B6,  
    1-12可观测立体角observable solid angle : ~aob@(  
    1-13接受立体角;观测立体角angle of acceptance: 4{P+p!4  
    1-14角分辨能力angular resolving power: zPby+BP  
    1-15发光度luminosity: 6mM9p)"$  
    1-16二次粒子探测比detection ratio of secondary particles: \Vyys[MMY8  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: aFnel8  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: (>al-vZ6A  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: FdU]!GO- X  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: =oBpS=<7  
    1-21本底压力base pressure:  ;l$$!PJ  
    1-22工作压力working pressure: |mEWN/@C  
    M>AxVL  
    2.分析方法 `'YX>u/  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: @>2pY_  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : /DQYlNa  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: Lljn\5!r<  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: MGg(d  
    2-3离子散射表面分析ion scattering spectroscopy: :`bC3Mr  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: ={BD*= i  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: $L/`nd  
    2-6离子散射谱仪ion scattering spectrometer: (80m'.X  
    2-7俄歇效应Auger process: ula-o)S  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: {9x_E {  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: ]E`<8hRB  
    2-10光电子谱术photoelectron spectroscopy : &2 tfj(ms  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: \x<8   
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: ^6s im2  
    2-11光电子谱仪photoelectron spectrometer: Ew8@{X y  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: eADCT  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: (@?mm  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): CFtQPTw  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊