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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 nX\mCO4T  
    --------------------------------------------------- @<&u;8y-Cn  
    真空术语 M@Ti$=  
    Xpt9$=d  
    1.标准环境条件 standard ambient condition: Mcq!QaO}&  
    2.气体的标准状态 standard reference conditions forgases: [NV/*>"j&  
    3.压力(压强)p pressure: //RD$e?h~  
    4.帕斯卡Pa pascal: *U$%mZS]1  
    5.托Torr torr: 8c>xgFWp9  
    6.标准大气压atm standard atmosphere: Vt,P.CfdC  
    7.毫巴mbar millibar: Xkk 8#Y":  
    8.分压力 partial pressure: =\mJ5v"hA  
    9.全压力 total pressure: ~z,qr09  
    10.真空 vacuum: d%RH]j4  
    11.真空度 degree of vacuum: 4$81ilBcL  
    12.真空区域 ranges of vacuum: :i|]iXEI"  
    13.气体 gas: $/$Hi U`.  
    14.非可凝气体 non-condensable gas: wk{]eD%  
    15.蒸汽vapor: 4dm0:, G  
    16.饱和蒸汽压saturation vapor pressure: y0p\Gu;3j  
    17.饱和度degree of saturation: )[u'LgVN/L  
    18.饱和蒸汽saturated vapor: FlUO3rc|  
    19.未饱和蒸汽unsaturated vapor: Y/?z8g'p  
    20.分子数密度n,m-3 number density of molecules: dn:\V?9  
    21.平均自由程ι、λ,m mean free path: jeB"j  
    22.碰撞率ψ collision rate: X\>/'fC$  
    23.体积碰撞率χ volume collision rate:  d^zuo  
    24.气体量G quantity of gas: abCxB^5VL  
    25.气体的扩散 diffusion of gas: H7k@Br  
    26.扩散系数D diffusion coefficient; diffusivity: sk*vmxClY  
    27.粘滞流 viscous flow: 3sW!ya-VZ  
    28.粘滞系数η viscous factor: J#q^CWN3R  
    29.泊肖叶流 poiseuille flow: |>1#)cONW  
    30.中间流 intermediate flow: !}5rd\  
    31.分子流 molecular flow: _xy[\X;9  
    32克努曾数 number of knudsen: -8R SE4)  
    33.分子泻流 molecular effusion; effusive flow: \cf'Hj}  
    34.流逸 transpiration: @%YbptT}  
    35.热流逸 thermal transpiration: x 0#u2j?zj  
    36.分子流率qN molecular flow rate; molecular flux: e{3%-  
    37.分子流率密度 molecular flow rate density; density of molecular flux: \(&&ed:  
    38.质量流率qm mass flow rare: o,S(;6pDJ  
    39.流量qG throughput of gas: fJ6Q:7  
    40.体积流率qV volume flow rate: U9*< dR  
    41.摩尔流率qυ molar flow rate: 6L)7Q0Z  
    42.麦克斯韦速度分布 maxwellian velocity distribution: )eqF21\  
    43.传输几率Pc transmission probability: 7#Uzz"^  
    44.分子流导CN,UN molecular conductance: F/[m.!Eo  
    45.流导C,U conductance: J1Az+m  
    46.固有流导Ci,Ui intrinsic conductance: /a9CqK  
    47.流阻W resistance: NqveL<r`  
    48.吸附 sorption: {B e9$$W,  
    49.表面吸附 adsorption: M%RH4%NZ0  
    50.物理吸附physisorption: Y\+LBbB8  
    51.化学吸附 chemisorption: G]{^.5  
    52.吸收absorption: 8EX?/33$  
    53.适应系数α accommodation factor: }`!-WY  
    54.入射率υ impingement rate: lR9uD9Dr  
    55.凝结率condensation rate: {oR@'^N  
    56.粘着率 sticking rate: TP~1-(M)}  
    57.粘着几率Ps sticking probability: IGi9YpI&K  
    58.滞留时间τ residence time: )]4=anJu@|  
    59.迁移 migration: /{[p?7x>  
    60.解吸 desorption: T LF'7ufq  
    61.去气 degassing: Koj9]2<0  
    62.放气 outgassing: ^SW9J^9  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: #{^qBP[  
    64.蒸发率 evaporation rate: uBn35%  
    65.渗透 permeation: M{jq6c  
    66.渗透率φ permeability: BjA$^i|8  
    67.渗透系数P permeability coefficient #&fu"W+D96  
    2.   1.真空泵 vacuum pumps & JJ*?Dl  
    1-1.容积真空泵 positive displacement pump: VE1j2=3+o  
    ⑴.气镇真空泵 gas ballast vacuum pump: Aon.Y Z  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: wA)n ryXV  
    ⑶.干封真空泵 dry-sealed vacuum pump: %iJ}H6m  
    ⑷.往复真空泵 piston vacuum pump: <G`1(,g  
    ⑸.液环真空泵 liquid ring vacuum pump: ;t,v/(/3  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: Pl-9FLJ  
    ⑺.定片真空泵 rotary piston vacuum pump: O: #Sj jK  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: F?0Q AA  
    ⑼.余摆线真空泵 trochoidal vacuum pump: )qOcx I  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: 0IP0z il  
    ⑾.罗茨真空泵 roots vacuum pump: -_eG/o=M  
    1-2.动量传输泵 kinetic vacuum pump: Y>ATL  
    ⑴.牵引分子泵molecular drag pump: 0&b;!N!vJ  
    ⑵.涡轮分子泵turbo molecular pump: KmM:V2@A$  
    ⑶.喷射真空泵ejector vacuum pump: TIR Is1  
    ⑷.液体喷射真空泵liquid jet vacuum pump: G;/l[mvh,  
    ⑸.气体喷射真空泵gas jet vacuum pump: '5~l{3Lw  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : w`3.wALb  
    ⑺.扩散泵diffusion pump : N93R(x)%  
    ⑻.自净化扩散泵self purifying diffusion pump: UI%4d3   
    ⑼.分馏扩散泵 fractionating diffusion pump : ^tI&5S]nE  
    ⑽.扩散喷射泵diffusion ejector pump : x25zk4-  
    ⑾.离子传输泵ion transfer pump: Df:/r%  
    1-3.捕集真空泵 entrapment vacuum pump: h@\HPYi#.  
    ⑴吸附泵adsorption pump:  Y(2Z<d  
    ⑵.吸气剂泵 getter pump: rKd|s7l  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : 53pT{2]zAi  
    ⑷.吸气剂离子泵getter ion pump: yF%e)6  
    ⑸.蒸发离子泵 evaporation ion pump: )0"T?Ivp]  
    ⑹.溅射离子泵sputter ion pump: }UQ,B  
    ⑺.低温泵cryopump: K[ S>EITr  
     -T-yt2h(  
    2.真空泵零部件 X8?@Y@  
    2-1.泵壳 pump case: v&3" (fp  
    2-2.入口 inlet: JnIG;/  
    2-3.出口outlet: :XPat9 3w  
    2-4.旋片(滑片、滑阀)vane; blade : &GvSgdttv  
    2-5.排气阀discharge valve: |"9vq<`  
    2-6.气镇阀gas ballast valve: fX6pW%Q'6  
    2-7.膨胀室expansion chamber: nZc6 *jiz  
    2-8.压缩室compression chamber: YI> xxWA  
    2-9.真空泵油 vacuum pump oil: }[MkJ21!  
    2-10.泵液 pump fluid: ]=I2:Rb  
    2-11.喷嘴 nozzle: QD%6K=8Q  
    2-13.喷嘴扩张率nozzle expansion rate: mH5>50H;  
    2-14.喷嘴间隙面积 nozzle clearance area : _x#y   
    2-15.喷嘴间隙nozzle clearance: k B4Fz  
    2-16.射流jet: _`0DO4IU  
    2-17.扩散器diffuser: VM\\.L  
    2-18.扩散器喉部diffuser thoat: aGsO~ODc  
    2-19.蒸汽导管vapor tube(pipe;chimney): +aPe)U<t  
    2-20.喷嘴组件nozzle assembly: J^%E$ s  
    2-21.下裙skirt: U5@B7v1  
    ]#rV]As  
    3.附件 jO|`aUY Tf  
    3-1阱trap: 8*&73cp  
    ⑴.冷阱 cold trap: ;C , g6{  
    ⑵.吸附阱sorption trap: 5 wN)N~JE  
    ⑶.离子阱ion trap:  w}t}Sh  
    ⑷.冷冻升华阱 cryosublimation trap: GC3d7  
    3-2.挡板baffle: Br&&#  
    3-3.油分离器oil separator: x2aG5@<3  
    3-4.油净化器oil purifier: <w8H[y"c  
    3-5.冷凝器condenser: $ndBT+ i  
    aRI.&3-  
    4.泵按工作分类 ,1lW`Krx  
    4-1.主泵main pump: dn Xu(e%  
    4-2.粗抽泵roughing vacuum pump: C=U4z|Ym  
    4-3.前级真空泵backing vacuum pump: X}C8!LA  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: "&^KnWk=  
    4-5.维持真空泵holding vacuum pump: (b&Z\?"  
    4-6.高真空泵high vacuum pump: R\#5;W^  
    4-7.超高真空泵ultra-high vacuum pump: $AMcU5^b7  
    4-8.增压真空泵booster vacuum pump: .pm%qEh  
    TL7qOA7^X  
    5.真空泵特性 0Q,Tcj  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: T2)CiR-b  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 t7xJ "  
    5-3.起动压力starting pressure: {)!ua7GF0H  
    5-4.前级压力 backing pressure : d7zZ~n  
    5-5.临界前级压力 critical backing pressure: YN:Sn\`D 8  
    5-6.最大前级压力maximum backing pressure: ^gpd '*b  
    5-7.最大工作压力maximum working pressure: xXmlHo<D  
    5-8.真空泵的极限压力ultimate pressure of a pump: o8%o68py  
    5-9.压缩比compression ratio: T?.l_"%%d  
    5-10.何氏系数Ho coefficient: KZ^>_K&  
    5-11.抽速系数speed factor: EGFPv'De  
    5-12.气体的反扩散back-diffusion of gas: CtD<% v3`  
    5-13.泵液返流back-streaming of pump fluid: {Dy,|}7s  
    5-14.返流率back-streaming rate ;:J"- p  
    5-15.返迁移back-migration: ,pf\g[tz  
    5-16.爆腾bumping: QyZ' %T5J  
    5-17.水蒸气允许量qm water vapor tolerable load: sE|8a  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: ;b=7m#5  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: HJpx,NU'  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump ~HT:BO$  
    3.   1.一般术语 'xa EG,P  
    1-1.压力计pressure gauge: |o(te  
    1-2.真空计vacuum gauge: $M4_"!  
    ⑴.规头(规管)gauge head: R3)ccom  
    ⑵.裸规nude gauge : v~._]f$:  
    ⑶.真空计控制单元gauge control unit : aYHs35  
    ⑷.真空计指示单元gauge indicating unit : ^"vmIC.h  
     :fy,%su  
    2.真空计一般分类 ^( 7l!  
    2-1.压差式真空计differential vacuum gauge: EBQ_c@  
    2-2.绝对真空计 absolute vacuum gauge: IEJ)Q$GI#  
    2-3.全压真空计total pressure vacuum gauge: X9^q-3&60  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser:  dBN:  
    2-5.相对真空计relative vacuum gauge : 6!*zgA5M'  
    ybv< 1  
    3.真空计特性 +#(GU9_i+M  
    3-1.真空计测量范围pressure range of vacuum gauge: ^U,C])n  
    3-2.灵敏度系数sensitivity coefficient: <+b~E,  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): PG|Zu3[  
    3-5.规管光电流photon current of vacuum gauge head: %P#| }  
    3-6.等效氮压力equivalent nitrogen pressure : >Kl_948  
    3-7.X射线极限值 X-ray limit: =_Z.x&fi  
    3-8.逆X射线效应anti X-ray effect: M.)z;[3O  
    3-9.布利尔斯效应blears effect: Nr]guC?rE  
    HyYJ"54  
    4.全压真空计 `(O#$n  
    4-1.液位压力计liquid level manometer: H&k&mRi  
    4-2.弹性元件真空计elastic element vacuum gauge: d+ $:u  
    4-3.压缩式真空计compression gauge: ,,)'YhG(  
    4-4.压力天平pressure balance: Zny9TP  
    4-5.粘滞性真空计viscosity gauge : MD,BGO?C  
    4-6.热传导真空计thermal conductivity vacuum gauge : G#uB%:)&0u  
    4-7.热分子真空计thermo-molecular gauge: YX3NZW2i  
    4-8.电离真空计ionization vacuum gauge: Fy.!amXu  
    4-9.放射性电离真空计radioactive ionization gauge: 7nW <kA  
    4-10.冷阴极电离真空计cold cathode ionization gauge: s(L!]d.S$y  
    4-11.潘宁真空计penning gauge: "(';UFa  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: g0;6}n  
    4-13.放电管指示器discharge tube indicator: 3qV\XC+  
    4-14.热阴极电离真空计hot cathode ionization gauge: e-lc2$o7{  
    4-15.三极管式真空计triode gauge: >I&s%4  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: *Id[6Z  
    4-17.B-A型电离真空计Bayard-Alpert gauge: [?2?7>D8  
    4-18.调制型电离真空计modulator gauge: mU||(;I  
    4-19.抑制型电离真空计suppressor gauge:  Sb)}  
    4-20.分离型电离真空计extractor gauge: ^EmePkPI  
    4-21.弯注型电离真空计bent beam gauge: 65RD68a  
    4-22.弹道型电离真空计 orbitron gauge : -h8Z@r~a/  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: u`!Dp$P  
    X>]<rEh  
    5.分压真空计(分压分析器) %y)hYLOJ  
    5-1.射频质谱仪radio frequency mass spectrometer: 1h)K3cC  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: hOdU%  
    5-3.单极质谱仪momopole mass spectrometer: $"0`2C  
    5-4.双聚焦质谱仪double focusing mass spectrometer: wg:\$_Og  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: uOd1:\%*  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 7c@5tCcC-  
    5-7.回旋质谱仪omegatron mass spectrometer: YNp-A.o W@  
    5-8.飞行时间质谱仪time of flight mass spectrometer: =i/ r:  
    %\!0*(8  
    6.真空计校准 N7X(gh2h  
    6-1.标准真空计reference gauges: E^pn-rB  
    6-2.校准系统system of calibration: 3z"%ht~;  
    6-3.校准系数K calibration coefficient: tejpY  
    6-4.压缩计法meleod gauge method: t [G7&ovj  
    6-5.膨胀法expansion method: RYl\Q,#  
    6-6.流导法flow method: AF{@lDa1h  
    4.   1.真空系统vacuum system z> N73 u  
    1-1.真空机组pump system: @;S)j!m`  
    1-2.有油真空机组pump system used oil : {?3i^Q=V  
    1-3.无油真空机组oil free pump system 4>N ig.#   
    1-4.连续处理真空设备continuous treatment vacuum plant: <9;X1XtpI  
    1-5.闸门式真空系统vacuum system with an air-lock: t+0/$  
    1-6.压差真空系统differentially pumped vacuum system: yK_$d0ZGE~  
    1-7.进气系统gas admittance system: |H 5$VSw  
    =xb/zu(  
    2.真空系统特性参量 ?dCJv_w  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : #wh[F"zX  
    2-2.抽气装置的抽气量throughput of a pumping unit : IZd~Am3f  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: AD6 b  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: 'BVI^H4  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: 0 r;tI"  
    2-6.极限压力ultimate pressure: C9>^!?>  
    2-7.残余压力residual pressure: |n(b>.X  
    2-8.残余气体谱residual gas spectrum: PevT`\>  
    2-9.基础压力base pressure: 4v#s!W  
    2-10.工作压力working pressure: !4YmaijeN  
    2-11.粗抽时间roughing time: 9.6ni1a'  
    2-12.抽气时间pump-down time: B!)Tytm9u  
    2-13.真空系统时间常数time constant of a vacuum system: w.=rea~  
    2-14.真空系统进气时间venting time: ,z+n@sUR:  
    1{qG?1<zZ6  
    3.真空容器 xBqZ: BQ  
    3-1.真空容器;真空室vacuum chamber: 8Qkwg]X  
    3-2.封离真空装置sealed vacuum device: )cm^;(#pV  
    3-3.真空钟罩vacuum bell jar: T[J8zL O  
    3-4.真空容器底板vacuum base plate: #V Z js`d6  
    3-5.真空岐管vacuum manifold: &m TYMpA  
    3-6.前级真空容器(贮气罐)backing reservoir: .j"@7#tW  
    3-7.真空保护层outer chamber: A 0;ng2&  
    3-8.真空闸室vacuum air lock: }|znQ3A2\l  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: SUsdX[byb  
    @ xTVX'$  
    4.真空封接和真空引入线 1h{7dLA  
    4-1.永久性真空封接permanent seal : '\"5qB  
    4.2.玻璃分级过渡封接graded seal : vJb/.)gh]  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: DYgz;Y/%l  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: =}SLQdT  
    4-5.陶瓷金属封接ceramic-to-metal seal: W"tGCnd  
    4-6.半永久性真空封接semi-permanent seal : F-D$Y?m  
    4-7.可拆卸的真空封接demountable joint: ~!/agLwY  
    4-8.液体真空封接liquid seal }=u#,nDl>$  
    4-9.熔融金属真空封接molten metal seal: DJ!pZUO{  
    4-10.研磨面搭接封接ground and lapped seal: 7<X!Xok  
    4-11.真空法兰连接vacuum flange connection: g$qM}#s0}  
    4-12.真空密封垫vacuum-tight gasket: 3u,B<  
    4-13.真空密封圈ring gasket: FbW$H]C$  
    4-14.真空平密封垫flat gasket: Xp fw2;`U'  
    4-15.真空引入线feedthrough leadthrough: NpS =_QeNw  
    4-16.真空轴密封shaft seal: LO38}w<k  
    4-17.真空窗vacuum window: /?}2OCq  
    4-18.观察窗viewing window: U8<C4  
    Z55C4F5v  
    5.真空阀门 d?/>Qqw:#  
    5-1.真空阀门的特性characteristic of vacuum valves: e&NJj:Ph*  
    ⑴.真空阀门的流导conductance of vacuum valves: /!*=*  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: x,GLGGi}_x  
    5-2.真空调节阀regulating valve: S&c5Q*->[  
    5-3.微调阀 micro-adjustable valve: -Q%Pg<Q-#  
    5-4.充气阀charge valve: o ethO  
    5-5.进气阀gas admittance valve: IL"N_ux~w~  
    5-6.真空截止阀break valve: VaO[SW^  
    5-7.前级真空阀backing valve: s&\krW &  
    5-8.旁通阀 by-pass valve: qga?-oz,<6  
    5-9.主真空阀main vacuum valve: bfK4ps}m*  
    5-10.低真空阀low vacuum valve: lLU8eHf\  
    5-11.高真空阀high vacuum valve: NGW:hgf  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: J58S8:c  
    5-13.手动阀manually operated valve: 9H+Q/Q*-a  
    5-14.气动阀pneumatically operated valve: 8cuI-Swz  
    5-15.电磁阀electromagnetically operated valve: ENFM``dV#  
    5-16.电动阀valve with electrically motorized operation: ^^*Ia'9   
    5-17.挡板阀baffle valve: rshUF  
    5-18.翻板阀flap valve: WDt6{5T  
    5-19.插板阀gate valve: }$(\,SzW  
    5-20.蝶阀butterfly valve: +/hd;s$x  
    `dRqheX  
    6.真空管路 c Ze59  
    6-1.粗抽管路roughing line: $\PU Y8  
    6-2.前级真空管路backing line: M6].V*k'2  
    6-3.旁通管路;By-Pass管路 by-pass line: q*cEosi'F?  
    6-4.抽气封口接头pumping stem: r4b-.>w  
    6-5.真空限流件limiting conductance:       #RHt;SFx  
    6-6.过滤器filter: sFsf~|  
    5.   1.一般术语 .-Dc%ap]  
    1-1真空镀膜vacuum coating: +M<W8KF  
    1-2基片substrate: 2)-4?uz~  
    1-3试验基片testing substrate: NnaO!QW%  
    1-4镀膜材料coating material: m!]J{OGG:  
    1-5蒸发材料evaporation material: d;{k,rP6  
    1-6溅射材料sputtering material: Bi>]s%zp  
    1-7膜层材料(膜层材质)film material: amWKykVS5  
    1-8蒸发速率evaporation rate: FwD q@Oj  
    1-9溅射速率sputtering rate: M; YJpi  
    1-10沉积速率deposition rate: )RQQhB  
    1-11镀膜角度coating angle: !t\sg  
    F 6C7k9  
    2.工艺 QXgfjo  
    2-1真空蒸膜vacuum evaporation coating: t=fP^bJ  
    (1).同时蒸发simultaneous evaporation: c6SXz%'k  
    (2).蒸发场蒸发evaporation field evaporation: [8K :ml  
    (3).反应性真空蒸发reactive vacuum evaporation: ]ZNFrpq  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: zMd><UQP{  
    (5).直接加热的蒸发direct heating evaporation: OU!."r`9  
    (6).感应加热蒸发induced heating evaporation: z";(0%  
    (7).电子束蒸发electron beam evaporation: 0?O_]SD  
    (8).激光束蒸发laser beam evaporation: MZ~N}y  
    (9).间接加热的蒸发indirect heating evaporation: m7i(0jd +  
    (10).闪蒸flash evaportion: : t /0  
    2-2真空溅射vacuum sputtering: D]N)  
    (1).反应性真空溅射 reactive vacuum sputtering: k$pND,Ws  
    (2).偏压溅射bias sputtering: oA@c.%&  
    (3).直流二级溅射direct current diode sputtering: '%o^#gJp  
    (4).非对称性交流溅射asymmtric alternate current sputtering: ln8es{q  
    (5).高频二极溅射high frequency diode sputtering: .K`n;lVs  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: m;L 3c(r.  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: W>: MK-_ J  
    (8).离子束溅射ion beam sputtering: h0I5zQZm  
    (9).辉光放电清洗glow discharge cleaning: M}q;\}  
    2-3物理气相沉积PVD physical vapor deposition: L!,@_   
    2-4化学气相沉积CVD chemical vapor deposition: b~@+6 ?  
    2-5磁控溅射magnetron sputtering: w\{#nrhYU  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: XL'\$f  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: $xcZ{C  
    2-8电弧离子镀arc discharge deposition: qk(bA/+e  
    M0OIcMTv  
    3.专用部件 s!>9od6^  
    3-1镀膜室coating chamber: S(CVkCP  
    3-2蒸发器装置evaporator device: $`lm]} {&  
    3-3蒸发器evaporator: m9+?>/R  
    3-4直接加热式蒸发器evaporator by direct heat: Q>cEG"  
    3-5间接加热式蒸发器evaporator by indirect heat: ,t:P  
    3-7溅射装置sputtering device: T8Q_JQ  
    3-8靶target: )d2:r 07a  
    3-10时控挡板timing shutter: 1}+b4 "7]  
    3-11掩膜mask: M^>l>?#rl  
    3-12基片支架substrate holder: &0fV;%N  
    3-13夹紧装置clamp: 'f.k'2T  
    3-14换向装置reversing device: PsD)]V9%:  
    3-15基片加热装置substrate heating device: H4j1yD(d  
    3-16基片冷却装置substrate colding device: *'\HG  
    Mc!LC .8  
    4.真空镀膜设备 5UG9&:zu'V  
    4-1真空镀膜设备vacuum coating plant: q8FpJ\  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: rBy0hGx  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: 8Op^6rX4  
    4-2连续镀膜设备continuous coating plant: _*b`;{3  
    4-3半连续镀膜设备semi- continuous coating plant a'. 7)f[g}  
    6.   1.漏孔 k GYsjhL\d  
    1-1漏孔leaks: `"<hO 'WU  
    1-2通道漏孔channel leak: }^j8<  
    1-3薄膜漏孔membrane leak: e4tC[6;  
    1-4分子漏孔molecular leak: ]qu6/Z  
    1-5粘滞漏孔vixcous leak: )=MK&72r  
    1-6校准漏孔calibrated leak: d 2^/  
    1-7标准漏孔reference leak : *<6dB#' J  
    1-8虚漏virtual leak: $R+gA{49%  
    1-9漏率leak rate: 3IB9-wG  
    1-10标准空气漏率standard air leak rate: `!(%R k  
    1-11等值标准空气漏率equivalent standard air leak rate: MI(;0   
    1-12探索(示漏)气体: x'..j5  
    pU'>!<zGr  
    2.本底 _Hfpizm  
    2-1本底background: Z @ef2y;  
    2-2探索气体本底search gas background : wu`+KUx  
    2-3漂移drift: >]C/ Q6  
    2-4噪声noise: $5&~gHc,  
    I,HtW),  
    3.检漏仪 V\opC6*L_e  
    3-1检漏仪leak detector: !H{>c@i  
    3-2高频火花检漏仪H.F. spark leak detector: O:pg+o&  
    3-3卤素检漏仪halide leak detector: DT)] [V^w  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: "@/pQoLy  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: =&qH%S6  
    YRr,{[e  
    4.检漏 $xq04ejJ  
    4-1气泡检漏leak detection by bubbles: d_0(;'  
    4-2氨检漏leak detection by ammonia: UK1)U)*+  
    4-3升压检漏leak detection of rise pressure: qu dY9_  
    4-4放射性同位素检漏radioactive isotope leak detection: r|jM;  
    4-5荧光检漏fluorescence leak detection ZGsd cnz  
    7.   1.一般术语 V2M4g  
    1-1真空干燥vacuum drying: m%>}T 75C^  
    1-2冷冻干燥freeze drying : _nEVmz!zg  
    1-3物料material: R5(([C1  
    1-4待干燥物料material to be dried: vw(ecs^C  
    1-5干燥物料dried material : 3dLqlJ^7B  
    1-6湿气moisture;humidity: Il(o[Q>jJ3  
    1-7自由湿气free moisture: p@uHzu7  
    1-8结合湿气bound moisture: n:) [ %on  
    1-9分湿气partial moisture: b6sf1E  
    1-10含湿量moisture content: e84%Y8,0  
    1-11初始含湿量initial moisture content: dv3u<XM~  
    1-12最终含湿量final residual moisture: 6 w{_+=T  
    1-13湿度degree of moisture ,degree of humidity : Dm8fcD  
    1-14干燥物质dry matter : Az8ZA~Op=  
    1-15干燥物质含量content of dry matter: DI2e%`$  
    I"x|U[*B  
    2.干燥工艺 %dq%+yw{%m  
    2-1干燥阶段stages of drying : w?^[*_Y  
    (1).预干燥preliminary dry: 6sQ;Z|!Pz  
    (2).一次干燥(广义)primary drying(in general): Ql l{;A  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): <)T~_s  
    (4).二次干燥secondary drying: >A6W^J|[  
    2-2.(1).接触干燥contact drying: -PGxG 8S  
    (2).辐射干燥 drying by radiation : !6RDq`  
    (3).微波干燥microwave drying: {=mGXd`x?l  
    (4).气相干燥vapor phase drying: GiEt;8  
    (5).静态干燥static drying: vt *  
    (6).动态干燥dynamic drying: K%mR=u#%&  
    2-3干燥时间drying time: JoiGuZd>  
    2-4停留时间length of stay(in the drying chamber): BG?>)]6  
    2-5循环时间cycle time: `XK\', }F  
    2-6干燥率 dessication ratio : II.: k.D`  
    2-7去湿速率mass flow rate of humidity: .74C~{}$  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: j 4=iHnE;  
    2-9干燥速度 drying speed : Ddg!1SF  
    2-10干燥过程drying process: " M?dU^U^  
    2-11加热温度heating temperature: aGi`(|shW  
    2-12干燥温度temperature of the material being dried :  JJ}DYv  
    2-13干燥损失loss of material during the drying process : H)gc"aRe;Y  
    2-14飞尘lift off (particles): q{f\_2[  
    2-15堆层厚度thickness of the material: EA8plQ~GtE  
    0zSz[;A  
    3.冷冻干燥 \gPMYMd  
    3-1冷冻freezing: Ry]9n.y  
    (1).静态冷冻static freezing: 0:u:#))1  
    (2).动态冷冻dynamic freezing: nQ+5jGP1  
    (3).离心冷冻centrifugal freezing: Uuu2wz3O0  
    (4).滚动冷冻shell freezing: w)@Wug  
    (5).旋转冷冻spin-freezing: $`/UG0rdC  
    (6).真空旋转冷冻vacuum spin-freezing: ZCc23UwI  
    (7).喷雾冷冻spray freezing: E&y)`>Nq{  
    (8).气流冷冻air blast freezing: :?g+\:`/0j  
    3-2冷冻速率rate of freezing: xRXvTNEg  
    3-3冷冻物料frozen material: 7_l Wr  
    3-4冰核ice core: K|-m6!C!7  
    3-5干燥物料外壳envelope of dried matter: ]3f[v:JQ  
    3-6升华表面sublimation front: \ f+;X  
    3-7融化位置freezer burn: 5 D^#6h 4  
    @_-,Q5  
    4.真空干燥设备;真空冷冻干燥设备 Z.Z;p/4F  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: $6wSqH?q  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber:  'F.P93  
    4-3加热表面heating surface: Qr3!6  
    4-4物品装载面shelf : #!UJY%c ~  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): ``VE<:2+  
    4-6单位面积干燥器处理能力throughput per shelf area: 6?<lS.s  
    4-7冰冷凝器ice condenser: ov,s]g83  
    4-8冰冷凝器的负载load of the ice condenser: 5!qf{4j  
    4-9冰冷凝器的额定负载rated load of the ice condenser K&NH?  
    8.   1.一般术语 0LL0\ly]  
    1-1试样sample : 63Gq5dF  
    (1).表面层surface layer: u_9c>  
    (2).真实表面true surface: 8uLS7\,$z  
    (3).有效表面积effective surface area: g1[BrT,  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: Er j{_i?R?  
    (5).表面粒子密度surface particle density: T:{r*zLSN  
    (6).单分子层monolayer: jF}kV%E  
    (7).表面单分子层粒子密度monolayer density: GEf=A.WAfw  
    (8).覆盖系数coverage ratio: $Uy+]9  
    1-2激发excitation: -WqhOZ  
    (1).一次粒子primary particle: ROQ]sQpk  
    (2).一次粒子通量primary particle flux: j;_  
    (3).一次粒子通量密度density of primary particle flux: Ru*gbv,U  
    (4).一次粒子负荷primary particle load: a}FyJp  
    (5).一次粒子积分负荷integral load of primary particle: H(76sE  
    (6).一次粒子的入射能量energy of the incident primary particle: W#P\hx  
    (7).激发体积excited volume: r.#r!.6 q  
    (8).激发面积excited area: <Y}m/-sD5  
    (9).激发深度excited death: z!bT^_Cc0  
    (10).二次粒子secondary particles: -sJD:G,%  
    (11).二次粒子通量secondary particle flux: s a o&  
    (12).二次粒子发射能energy of the emitted secondary particles: 7JQ4*RM  
    (13).发射体积emitting volume: K\U`gTGc  
    (14).发射面积emitting area: 9Q s5e  
    (15).发射深度emitting depth: *,lDo9  
    (16).信息深度information depth: vMou`[\WlJ  
    (17).平均信息深度mean information depth: =oL:|$Pj  
    1-3入射角angle of incidence: E#(e2Z=  
    1-4发射角angle of emission: Q2m[XcnX  
    1-5观测角observation: {q8|/{;  
    1-6分析表面积analyzed surface area: vJ'22)n  
    1-7产额 yield : aQx6;PC  
    1-8表面层微小损伤分析minimum damage surface analysis: }>BNdm"Er  
    1-9表面层无损伤分析non-destructive surface analysis: _yN5sLLyb  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : W1"NKg~4  
    1-11可观测面积observable area: P`Ku. ONQ  
    1-12可观测立体角observable solid angle : SQf[1}$ .  
    1-13接受立体角;观测立体角angle of acceptance: F=e;[uK\  
    1-14角分辨能力angular resolving power: j`.&4.7+  
    1-15发光度luminosity: g*oX`K.  
    1-16二次粒子探测比detection ratio of secondary particles: Y(7&3+'K  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: gtMR/P:S  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: xtv%C  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: q`2dL)E  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: X(BxC<!D.  
    1-21本底压力base pressure: "M iJM+,  
    1-22工作压力working pressure: U~ a\v8l~  
    #btf|\D  
    2.分析方法 p!:oT1U  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: K(u pz n*a  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : S5>ztK.e  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: _4Eq_w`  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: QEt"T7a[/  
    2-3离子散射表面分析ion scattering spectroscopy: oZY|o0/9  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: ?y>ji1  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: Y2l;NSWU  
    2-6离子散射谱仪ion scattering spectrometer: 0g: q%P0  
    2-7俄歇效应Auger process: nn:'<6"oV  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: ya~;Of5  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: iKPgiL~  
    2-10光电子谱术photoelectron spectroscopy : I[K4/91  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: au50%sA~  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: Gy):hGgN  
    2-11光电子谱仪photoelectron spectrometer: &K'*67h  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: --l UEo~  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: \w1XOm [)  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): y ]@JkF(  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊