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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 qxx.f5 8H  
    --------------------------------------------------- T9A5L"-6T  
    真空术语 kn.z8%^(  
    w[&BY  
    1.标准环境条件 standard ambient condition: jg(A_V  
    2.气体的标准状态 standard reference conditions forgases: *#_jTwQe  
    3.压力(压强)p pressure: 79DC]48M  
    4.帕斯卡Pa pascal: {PKER$C  
    5.托Torr torr: T5h[{J^  
    6.标准大气压atm standard atmosphere: b+>godTi_  
    7.毫巴mbar millibar: AdNsY/Y(  
    8.分压力 partial pressure: 8TZe=sD~cr  
    9.全压力 total pressure:  ^8iy(  
    10.真空 vacuum: KVCS(oN  
    11.真空度 degree of vacuum: gNeCnf#Xa  
    12.真空区域 ranges of vacuum: :?J$ +bm}  
    13.气体 gas: ~08v]j q  
    14.非可凝气体 non-condensable gas: ilP&ctn6+c  
    15.蒸汽vapor: .z"[z^/uF  
    16.饱和蒸汽压saturation vapor pressure: ?0x;L/d])  
    17.饱和度degree of saturation: ]{hfM  
    18.饱和蒸汽saturated vapor: xjYFTb}!  
    19.未饱和蒸汽unsaturated vapor: ?m6E@.{  
    20.分子数密度n,m-3 number density of molecules: e+mD$(h  
    21.平均自由程ι、λ,m mean free path: 7o<RvM  
    22.碰撞率ψ collision rate: I(.XK ucU  
    23.体积碰撞率χ volume collision rate: P_gQ-pF.  
    24.气体量G quantity of gas: -]e@cevy  
    25.气体的扩散 diffusion of gas: &}r932  
    26.扩散系数D diffusion coefficient; diffusivity: y[cAU:P?  
    27.粘滞流 viscous flow: lQzrf"N'  
    28.粘滞系数η viscous factor: /[OMpP  
    29.泊肖叶流 poiseuille flow: *sTQ9 Kr  
    30.中间流 intermediate flow: s5.2gu|"%  
    31.分子流 molecular flow: T1E=<q4  
    32克努曾数 number of knudsen: }73H$ss:  
    33.分子泻流 molecular effusion; effusive flow: JF7T1T  
    34.流逸 transpiration: 8c9_=8vw  
    35.热流逸 thermal transpiration: Dz?F,g_  
    36.分子流率qN molecular flow rate; molecular flux: b+3pu\w `  
    37.分子流率密度 molecular flow rate density; density of molecular flux: 7j Q`i;L}Y  
    38.质量流率qm mass flow rare: h5JXKR.1]c  
    39.流量qG throughput of gas: n;U|7it7  
    40.体积流率qV volume flow rate: 6=   
    41.摩尔流率qυ molar flow rate: o|+tRl  
    42.麦克斯韦速度分布 maxwellian velocity distribution:  7;XdTx  
    43.传输几率Pc transmission probability: D|xSO~M5  
    44.分子流导CN,UN molecular conductance: yVL~SH|  
    45.流导C,U conductance: AXyuXB  
    46.固有流导Ci,Ui intrinsic conductance: bke 1 F '  
    47.流阻W resistance: 0ode&dB  
    48.吸附 sorption: d+(~{xK:  
    49.表面吸附 adsorption: (w.B_9#  
    50.物理吸附physisorption: B 5?(gb"  
    51.化学吸附 chemisorption: r~sGot+sQA  
    52.吸收absorption: #&2mu  
    53.适应系数α accommodation factor: */1z=  
    54.入射率υ impingement rate: 4l|Am3vzX  
    55.凝结率condensation rate: dL"v*3Fy  
    56.粘着率 sticking rate: 4avM:h  
    57.粘着几率Ps sticking probability: {E9Y)Z9  
    58.滞留时间τ residence time: /4|qfF3  
    59.迁移 migration: ,Yo In  
    60.解吸 desorption: i@2?5U>h  
    61.去气 degassing: a}wB7B;,g  
    62.放气 outgassing: 1G\ugLm  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: n8?gZ` W  
    64.蒸发率 evaporation rate:  np~oF  
    65.渗透 permeation: {M=tw  
    66.渗透率φ permeability: I=1tf;Bsi  
    67.渗透系数P permeability coefficient 1}(g=S  
    2.   1.真空泵 vacuum pumps xzy9~))o  
    1-1.容积真空泵 positive displacement pump: 8Vq,J:+  
    ⑴.气镇真空泵 gas ballast vacuum pump: p\(%bO   
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: W>"i0p  
    ⑶.干封真空泵 dry-sealed vacuum pump: ;{>z\6N  
    ⑷.往复真空泵 piston vacuum pump: QoqdPk#1  
    ⑸.液环真空泵 liquid ring vacuum pump: 03,+uf  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: ?0%lB=qQ  
    ⑺.定片真空泵 rotary piston vacuum pump: (\Dd9a8V-  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: "^u|vCqw  
    ⑼.余摆线真空泵 trochoidal vacuum pump: <'/+E4m  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: 0c]Lm?&  
    ⑾.罗茨真空泵 roots vacuum pump: fD!O aK  
    1-2.动量传输泵 kinetic vacuum pump: 4Ld0AApncy  
    ⑴.牵引分子泵molecular drag pump: F Hv|6zUX  
    ⑵.涡轮分子泵turbo molecular pump: Tj>~#~  
    ⑶.喷射真空泵ejector vacuum pump: pdE=9l'  
    ⑷.液体喷射真空泵liquid jet vacuum pump: ?-(E$ll  
    ⑸.气体喷射真空泵gas jet vacuum pump: >iq^Ts  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : W nVX)o  
    ⑺.扩散泵diffusion pump : BqR8%F  
    ⑻.自净化扩散泵self purifying diffusion pump: b2Ct^`|M5  
    ⑼.分馏扩散泵 fractionating diffusion pump : c=ZX7U  
    ⑽.扩散喷射泵diffusion ejector pump : %DiZ&}^Ck  
    ⑾.离子传输泵ion transfer pump: Jx 'p\*  
    1-3.捕集真空泵 entrapment vacuum pump: -8-Aqh8|  
    ⑴吸附泵adsorption pump: L%<1cE))  
    ⑵.吸气剂泵 getter pump: N^)L@6  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : Nf3L  
    ⑷.吸气剂离子泵getter ion pump: 9m<>G3Jr  
    ⑸.蒸发离子泵 evaporation ion pump: N 4Dyec\  
    ⑹.溅射离子泵sputter ion pump: = uOFaZ4  
    ⑺.低温泵cryopump: JeiW z1t  
    `/#6k>  
    2.真空泵零部件 o\2#o5#  
    2-1.泵壳 pump case: ,cpPXcz?,  
    2-2.入口 inlet: L!5%;!>.P  
    2-3.出口outlet: S9mj/GpL3  
    2-4.旋片(滑片、滑阀)vane; blade : Wvcj\2'yd  
    2-5.排气阀discharge valve: wJ+"JQY.J+  
    2-6.气镇阀gas ballast valve: Zr`:A$  
    2-7.膨胀室expansion chamber: HmQuRW  
    2-8.压缩室compression chamber: D7 .R NXo  
    2-9.真空泵油 vacuum pump oil: 4j/8Otn  
    2-10.泵液 pump fluid: 3EAu#c@q"  
    2-11.喷嘴 nozzle: '*W/Bett  
    2-13.喷嘴扩张率nozzle expansion rate: V" I+E  
    2-14.喷嘴间隙面积 nozzle clearance area : 9!PJLI=D  
    2-15.喷嘴间隙nozzle clearance: mw.9cDf  
    2-16.射流jet: " >;},$  
    2-17.扩散器diffuser: cp[k[7XGD  
    2-18.扩散器喉部diffuser thoat: 1J^{h5?lU  
    2-19.蒸汽导管vapor tube(pipe;chimney): K47W7zR  
    2-20.喷嘴组件nozzle assembly: :)bm+xWFF  
    2-21.下裙skirt: LR}b^QU7  
    #Ey!?Z  
    3.附件 ~g)gXPjke  
    3-1阱trap: *y7^4I-J  
    ⑴.冷阱 cold trap: \Z<' u;  
    ⑵.吸附阱sorption trap: Haiuf)a  
    ⑶.离子阱ion trap: '@rGX+"  
    ⑷.冷冻升华阱 cryosublimation trap: y~;Kf0~  
    3-2.挡板baffle: HJM-;C](  
    3-3.油分离器oil separator: Pr/K5aJeg  
    3-4.油净化器oil purifier: ><5tnBP|+L  
    3-5.冷凝器condenser: jFnq{L t  
    K6_{AuL}4  
    4.泵按工作分类 ~- JkuRJ\  
    4-1.主泵main pump: `AQv\@wp  
    4-2.粗抽泵roughing vacuum pump: t<x0?vfD  
    4-3.前级真空泵backing vacuum pump: HBeOK  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: .\qZkk}2l  
    4-5.维持真空泵holding vacuum pump: \,lgv  
    4-6.高真空泵high vacuum pump: BY6QJkI9x  
    4-7.超高真空泵ultra-high vacuum pump: r `VKb  
    4-8.增压真空泵booster vacuum pump: W8R@Pf  
    $D\SueZ  
    5.真空泵特性 JT,8/o  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: V6Z2!Ht  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 ]xb R:CYJ  
    5-3.起动压力starting pressure: } 5FdX3YR  
    5-4.前级压力 backing pressure : 5 J61PuH   
    5-5.临界前级压力 critical backing pressure: U C3?XoT\  
    5-6.最大前级压力maximum backing pressure: yiiYq(\{  
    5-7.最大工作压力maximum working pressure: m^%[  
    5-8.真空泵的极限压力ultimate pressure of a pump: Fz~-m#Ts  
    5-9.压缩比compression ratio: C]p3,G,oN  
    5-10.何氏系数Ho coefficient: +hqsIx  
    5-11.抽速系数speed factor: rx CSs  
    5-12.气体的反扩散back-diffusion of gas: }LN +V~  
    5-13.泵液返流back-streaming of pump fluid: St^s"A  
    5-14.返流率back-streaming rate a3sXl+$D@  
    5-15.返迁移back-migration: d7qHUx'=z  
    5-16.爆腾bumping: C1Slx !}  
    5-17.水蒸气允许量qm water vapor tolerable load: vn9_tL&  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: &AG,]#  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: sTU`@}}  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump *O+G}_}  
    3.   1.一般术语 M9[Fx= qY  
    1-1.压力计pressure gauge: &ScADmZP^d  
    1-2.真空计vacuum gauge: bT2b)nf  
    ⑴.规头(规管)gauge head: XL1v&'HLV  
    ⑵.裸规nude gauge : 49E<`f0  
    ⑶.真空计控制单元gauge control unit : U5[xW  
    ⑷.真空计指示单元gauge indicating unit : ^ duNEu0*  
    #%rXDGDS  
    2.真空计一般分类 c~K^ooS-  
    2-1.压差式真空计differential vacuum gauge: Gcna:w>6d  
    2-2.绝对真空计 absolute vacuum gauge: t-)C0<  
    2-3.全压真空计total pressure vacuum gauge: DP6M4  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: TW8E^k7  
    2-5.相对真空计relative vacuum gauge : GNlP]9wX  
    3.Oc8(N^}  
    3.真空计特性 $*tq$DZ4&  
    3-1.真空计测量范围pressure range of vacuum gauge: @2yi%_ ]h  
    3-2.灵敏度系数sensitivity coefficient: y2bL!Y<s9  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): Q-k{Lqa-  
    3-5.规管光电流photon current of vacuum gauge head: ,W;\6"Iwx'  
    3-6.等效氮压力equivalent nitrogen pressure : >gtKyn]  
    3-7.X射线极限值 X-ray limit: >jD,%yG  
    3-8.逆X射线效应anti X-ray effect: QWp,(Mv:r  
    3-9.布利尔斯效应blears effect: SQ9s  
    &'uFy0d,  
    4.全压真空计 @kw#\%Uz  
    4-1.液位压力计liquid level manometer: ],YIEOx6  
    4-2.弹性元件真空计elastic element vacuum gauge: /f@VRME  
    4-3.压缩式真空计compression gauge: "T|%F D&[  
    4-4.压力天平pressure balance: n a,j  
    4-5.粘滞性真空计viscosity gauge : hqd}L~o:  
    4-6.热传导真空计thermal conductivity vacuum gauge : Hr |De8#f  
    4-7.热分子真空计thermo-molecular gauge: y w)q3zC  
    4-8.电离真空计ionization vacuum gauge: 6r4o47_t8#  
    4-9.放射性电离真空计radioactive ionization gauge: B`3RyM"J@  
    4-10.冷阴极电离真空计cold cathode ionization gauge: _h", ,"p#o  
    4-11.潘宁真空计penning gauge: G%_6" s  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: #Cks&[!c  
    4-13.放电管指示器discharge tube indicator: B#9rqC  
    4-14.热阴极电离真空计hot cathode ionization gauge: Z6F>SL  
    4-15.三极管式真空计triode gauge: 0*o)k6?q3  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: ^|M\vO  
    4-17.B-A型电离真空计Bayard-Alpert gauge: 1bs 8fUPB3  
    4-18.调制型电离真空计modulator gauge: ~$-Nl  
    4-19.抑制型电离真空计suppressor gauge: 20h|e+3  
    4-20.分离型电离真空计extractor gauge: _-$O6eZ  
    4-21.弯注型电离真空计bent beam gauge: ]V \qX+K  
    4-22.弹道型电离真空计 orbitron gauge : zA4m !l*eM  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: yNMnByg3?  
    0vbiq  
    5.分压真空计(分压分析器) 28>PmH]7  
    5-1.射频质谱仪radio frequency mass spectrometer: !{tkv4  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: ;`Eie2y{M  
    5-3.单极质谱仪momopole mass spectrometer: o-"/1zLg4  
    5-4.双聚焦质谱仪double focusing mass spectrometer: 4)./d2/E  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: eJFGgJRIvF  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: I%.KFPV  
    5-7.回旋质谱仪omegatron mass spectrometer: t>p!qKrE'J  
    5-8.飞行时间质谱仪time of flight mass spectrometer: chv0\k"'  
    S(<r-bV<  
    6.真空计校准 6yEYX'_  
    6-1.标准真空计reference gauges: VU6nu4   
    6-2.校准系统system of calibration: 7 \)OWp  
    6-3.校准系数K calibration coefficient: +NL^/y<;  
    6-4.压缩计法meleod gauge method: PF5;2  
    6-5.膨胀法expansion method: gn"Y?IZ?  
    6-6.流导法flow method: 8Yfg@"Tn  
    4.   1.真空系统vacuum system z'N_9=  
    1-1.真空机组pump system: JQ|qg\[  
    1-2.有油真空机组pump system used oil : +mP&B<=H)  
    1-3.无油真空机组oil free pump system AY{#!RtV  
    1-4.连续处理真空设备continuous treatment vacuum plant: z*?-*6W  
    1-5.闸门式真空系统vacuum system with an air-lock: pGEYke NU  
    1-6.压差真空系统differentially pumped vacuum system: J!r,ktO^U?  
    1-7.进气系统gas admittance system: d3Dw[4  
    *PQu9>1w  
    2.真空系统特性参量 wBlfQ w-N  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : $U=E7JO  
    2-2.抽气装置的抽气量throughput of a pumping unit : M JJ]8:%  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: *K#7,*Oz  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: t<S]YA~N'  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: u%n6!Zx  
    2-6.极限压力ultimate pressure: +c&n7  
    2-7.残余压力residual pressure: LB*qL  
    2-8.残余气体谱residual gas spectrum: .Y B}w  
    2-9.基础压力base pressure: ]C.x8(2!f  
    2-10.工作压力working pressure: gD&/ k  
    2-11.粗抽时间roughing time: f4.k%|]  
    2-12.抽气时间pump-down time: D4 {?f<G0F  
    2-13.真空系统时间常数time constant of a vacuum system: Fe8JsB-  
    2-14.真空系统进气时间venting time: c32IO&W4  
     !]]QbB  
    3.真空容器 [KrWL;[1 <  
    3-1.真空容器;真空室vacuum chamber: hT:+x3  
    3-2.封离真空装置sealed vacuum device: J[E_n;d1  
    3-3.真空钟罩vacuum bell jar: %jaB>4.A:  
    3-4.真空容器底板vacuum base plate: B&^WRM;7t  
    3-5.真空岐管vacuum manifold: cBICG",TA  
    3-6.前级真空容器(贮气罐)backing reservoir: m8KJ~02l#  
    3-7.真空保护层outer chamber: ::13$g=T9s  
    3-8.真空闸室vacuum air lock: w`Q"mx*  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: &0B< iO<f  
    x1:#rb'  
    4.真空封接和真空引入线 a^yBtb~,P  
    4-1.永久性真空封接permanent seal : Ki#({~  
    4.2.玻璃分级过渡封接graded seal : ~F5JN^5Y  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: J6x#c`Y  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: dre@V(\;hQ  
    4-5.陶瓷金属封接ceramic-to-metal seal: =%u\x=u|  
    4-6.半永久性真空封接semi-permanent seal : 8`bQ,E+2  
    4-7.可拆卸的真空封接demountable joint: f8]Qn8  
    4-8.液体真空封接liquid seal En&bwLu:s  
    4-9.熔融金属真空封接molten metal seal: uK6_HvHuy  
    4-10.研磨面搭接封接ground and lapped seal: qyXx`'e  
    4-11.真空法兰连接vacuum flange connection: t;BvKH77  
    4-12.真空密封垫vacuum-tight gasket: q^{Z"ifL  
    4-13.真空密封圈ring gasket: ?f1PQ  
    4-14.真空平密封垫flat gasket: BR8W8nRb  
    4-15.真空引入线feedthrough leadthrough: e">$[IhXtV  
    4-16.真空轴密封shaft seal: X4<!E#  
    4-17.真空窗vacuum window: =)Z!qjf1U  
    4-18.观察窗viewing window: O6rrv,+_L  
    |Ad1/>8i  
    5.真空阀门 /4 zO  
    5-1.真空阀门的特性characteristic of vacuum valves: B35zmFX|}N  
    ⑴.真空阀门的流导conductance of vacuum valves: `c 3IS5  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: Q _}i8p '  
    5-2.真空调节阀regulating valve: =GO/r; 4  
    5-3.微调阀 micro-adjustable valve: RB]K?  
    5-4.充气阀charge valve: u Qy5t:!  
    5-5.进气阀gas admittance valve: ">b~k;M?  
    5-6.真空截止阀break valve: \Y'#}J"dh  
    5-7.前级真空阀backing valve: - w41Bvz0  
    5-8.旁通阀 by-pass valve: HnvE\t9`  
    5-9.主真空阀main vacuum valve: %(4G[R[  
    5-10.低真空阀low vacuum valve: BoZ G^  
    5-11.高真空阀high vacuum valve: tT7< V{i4  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: 2u9^ )6/  
    5-13.手动阀manually operated valve: <:#O*Y{  
    5-14.气动阀pneumatically operated valve: p/V  
    5-15.电磁阀electromagnetically operated valve: X|.M9zIx  
    5-16.电动阀valve with electrically motorized operation: }qUNXE@  
    5-17.挡板阀baffle valve: Y.$InQ gL  
    5-18.翻板阀flap valve: F?j;3@z[A  
    5-19.插板阀gate valve: Mwdh]I,#  
    5-20.蝶阀butterfly valve: =~r?(u6d  
    y^; =+Z  
    6.真空管路 $@_7HE3  
    6-1.粗抽管路roughing line: Ph&AP*Fq  
    6-2.前级真空管路backing line: dZ!Wj7K)  
    6-3.旁通管路;By-Pass管路 by-pass line: ?sl 7C gl  
    6-4.抽气封口接头pumping stem: @_0 g "Ul  
    6-5.真空限流件limiting conductance:       hjiU{@q  
    6-6.过滤器filter: s PNX)  
    5.   1.一般术语 a,Gd\.D  
    1-1真空镀膜vacuum coating: \Cx) ~bq<  
    1-2基片substrate: _]E ~ci}  
    1-3试验基片testing substrate: )c@I|L  
    1-4镀膜材料coating material: yI9~LTlA3  
    1-5蒸发材料evaporation material: 7^k`:Z  
    1-6溅射材料sputtering material: Oq{&hH/'}  
    1-7膜层材料(膜层材质)film material: u>;#.N/  
    1-8蒸发速率evaporation rate: H[o'j@0  
    1-9溅射速率sputtering rate: yhr\eiJ@6  
    1-10沉积速率deposition rate: bhXH<=  
    1-11镀膜角度coating angle: `Rj<qz^7  
    `n8) o%E9  
    2.工艺 R7us9qM4e  
    2-1真空蒸膜vacuum evaporation coating: HtOo*\Ne  
    (1).同时蒸发simultaneous evaporation: S~vbISl  
    (2).蒸发场蒸发evaporation field evaporation: "s$v?voo  
    (3).反应性真空蒸发reactive vacuum evaporation: w<_.T#  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: OVO0Emv  
    (5).直接加热的蒸发direct heating evaporation: * [*#cMZ   
    (6).感应加热蒸发induced heating evaporation: g~d}?B\<@  
    (7).电子束蒸发electron beam evaporation: JH2?^h|{  
    (8).激光束蒸发laser beam evaporation: sm}q&m]ad  
    (9).间接加热的蒸发indirect heating evaporation: G8`q-B}q  
    (10).闪蒸flash evaportion: =Mq=\T  
    2-2真空溅射vacuum sputtering: GCrh4rxgg  
    (1).反应性真空溅射 reactive vacuum sputtering: >HnD'y*  
    (2).偏压溅射bias sputtering: 2F-!SI  
    (3).直流二级溅射direct current diode sputtering: 64}Oa+*s  
    (4).非对称性交流溅射asymmtric alternate current sputtering: q`09   
    (5).高频二极溅射high frequency diode sputtering: k ]x64hgm  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: !B?/6XRUx  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: j'-akXo<  
    (8).离子束溅射ion beam sputtering: t~p9iGX<  
    (9).辉光放电清洗glow discharge cleaning: eif<aG5  
    2-3物理气相沉积PVD physical vapor deposition: ?PWD[mQE\  
    2-4化学气相沉积CVD chemical vapor deposition: _,b%t1v  
    2-5磁控溅射magnetron sputtering: P*/px4;6  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: !-r@_tn|  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: >H@ dgb  
    2-8电弧离子镀arc discharge deposition: e =& abu  
    Z~g~,q  
    3.专用部件 VS^%PM#:/  
    3-1镀膜室coating chamber: uc%75TJ@  
    3-2蒸发器装置evaporator device: W<;i~W  
    3-3蒸发器evaporator: -$;H_B+.  
    3-4直接加热式蒸发器evaporator by direct heat: 6KhHS@Z  
    3-5间接加热式蒸发器evaporator by indirect heat: \~xsBPX+x  
    3-7溅射装置sputtering device: xXZ$#z\ Z,  
    3-8靶target: uf`o\wqU  
    3-10时控挡板timing shutter: 8x'rNb  
    3-11掩膜mask: %-]j;'6}cX  
    3-12基片支架substrate holder: <(d ^2-0  
    3-13夹紧装置clamp: N!;Y;<Ro_  
    3-14换向装置reversing device: =b,$jCv<,5  
    3-15基片加热装置substrate heating device: | x{:GWq  
    3-16基片冷却装置substrate colding device: M#})  
    xpFu$2T6P.  
    4.真空镀膜设备 )aqu f<u@  
    4-1真空镀膜设备vacuum coating plant: * ok89 ad  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: 3Q[]lFJ}F  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: KBzEEvx/$  
    4-2连续镀膜设备continuous coating plant: yqlkf$?  
    4-3半连续镀膜设备semi- continuous coating plant e@p` -;<  
    6.   1.漏孔 \ ;Hj,z\  
    1-1漏孔leaks: a%ec: %  
    1-2通道漏孔channel leak: jb)z[!FbM  
    1-3薄膜漏孔membrane leak: 6,_CL M  
    1-4分子漏孔molecular leak: 3w {4G<I  
    1-5粘滞漏孔vixcous leak: 8c+i+gp!  
    1-6校准漏孔calibrated leak: *|$s0ga C  
    1-7标准漏孔reference leak : nP'ab_>b  
    1-8虚漏virtual leak: @)VJ,Ql$Y  
    1-9漏率leak rate: ]S,I}NP  
    1-10标准空气漏率standard air leak rate: ]9zc[_ !  
    1-11等值标准空气漏率equivalent standard air leak rate: n5S$Dl  
    1-12探索(示漏)气体: \R&`bAdk  
    g_>)Q  
    2.本底 peGXU/5.I  
    2-1本底background: HJBUN1n  
    2-2探索气体本底search gas background : 8XX ,(k_b  
    2-3漂移drift: 3KB)\nF#%  
    2-4噪声noise: kp<9o!?)  
    ICq;jfML  
    3.检漏仪 sPkT>q  
    3-1检漏仪leak detector: @Z@yI2#e  
    3-2高频火花检漏仪H.F. spark leak detector: j@UW[,UI  
    3-3卤素检漏仪halide leak detector: I$qL=  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: 6JRee[  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: s26s:A3rh  
    o,bV.O.W  
    4.检漏 ~<v`&Gm?"  
    4-1气泡检漏leak detection by bubbles: ^ 9;s nr  
    4-2氨检漏leak detection by ammonia: ?_\Hv@t;  
    4-3升压检漏leak detection of rise pressure: _sZ/tU@_-K  
    4-4放射性同位素检漏radioactive isotope leak detection: BT d$n!'$n  
    4-5荧光检漏fluorescence leak detection LfOGq%&  
    7.   1.一般术语 FD_0FMZ9,  
    1-1真空干燥vacuum drying: gADt%K2 #Z  
    1-2冷冻干燥freeze drying : $C#~c1w  
    1-3物料material: F\-qXSA  
    1-4待干燥物料material to be dried: *i5&x/ds  
    1-5干燥物料dried material : Z`b,0[rG[  
    1-6湿气moisture;humidity: X:8=jHkz  
    1-7自由湿气free moisture: ( }JX ]-  
    1-8结合湿气bound moisture: Kh<v2  
    1-9分湿气partial moisture: *XtZ;os]  
    1-10含湿量moisture content: 5Odi\SJ&  
    1-11初始含湿量initial moisture content: ^Po\:x%o  
    1-12最终含湿量final residual moisture: s%4)}w;z  
    1-13湿度degree of moisture ,degree of humidity : s)/i_Oe$\  
    1-14干燥物质dry matter : :Oq!.uO  
    1-15干燥物质含量content of dry matter: |r0j>F  
    zb9d{e   
    2.干燥工艺 G-"#3{~2  
    2-1干燥阶段stages of drying : > )#*}JI  
    (1).预干燥preliminary dry: 0" R|lTYq  
    (2).一次干燥(广义)primary drying(in general): Mv4JF(,S  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): %5F=!( w  
    (4).二次干燥secondary drying: Y 3KCIL9  
    2-2.(1).接触干燥contact drying: "]MF =-v  
    (2).辐射干燥 drying by radiation : K3 ]hUe#  
    (3).微波干燥microwave drying: & NOKrN~HX  
    (4).气相干燥vapor phase drying: ZP%^.wxC  
    (5).静态干燥static drying: ;'gzR C  
    (6).动态干燥dynamic drying: : ] Y=  
    2-3干燥时间drying time: p' /$)klt  
    2-4停留时间length of stay(in the drying chamber): |":^3  
    2-5循环时间cycle time: -pqShDar|  
    2-6干燥率 dessication ratio : >-)i_C2  
    2-7去湿速率mass flow rate of humidity: >b{%j8u M  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: C=PBF\RkKu  
    2-9干燥速度 drying speed : i"w$D{N  
    2-10干燥过程drying process: m?<C\&)6x  
    2-11加热温度heating temperature: qQpR gzw  
    2-12干燥温度temperature of the material being dried : %j^=  
    2-13干燥损失loss of material during the drying process : @*%.V.  
    2-14飞尘lift off (particles):  ZfvFs  
    2-15堆层厚度thickness of the material: "me J n/  
    zhN'@Wj'_  
    3.冷冻干燥 hrcR"OZ~X  
    3-1冷冻freezing: H%faRUonz  
    (1).静态冷冻static freezing: s BRw#xyS  
    (2).动态冷冻dynamic freezing: Q`19YX  
    (3).离心冷冻centrifugal freezing: /5yW vra  
    (4).滚动冷冻shell freezing: |L`w4;  
    (5).旋转冷冻spin-freezing: Yj0Ss{Ep  
    (6).真空旋转冷冻vacuum spin-freezing: ;AG5WPI  
    (7).喷雾冷冻spray freezing: JN3Oe5yB2@  
    (8).气流冷冻air blast freezing:  NsJUruN  
    3-2冷冻速率rate of freezing: U8< GD|  
    3-3冷冻物料frozen material: +(|T\%$DT  
    3-4冰核ice core: n$b/@hp$z  
    3-5干燥物料外壳envelope of dried matter: `?Y/:4  
    3-6升华表面sublimation front: dAAE2}e  
    3-7融化位置freezer burn: /ebYk-c  
    pazFVzT  
    4.真空干燥设备;真空冷冻干燥设备 vhhsOga  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: YO-O-NEP  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: t~@TUTbx  
    4-3加热表面heating surface: TSuHY0. cp  
    4-4物品装载面shelf : PeE'#&w n  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): Sm,%>  
    4-6单位面积干燥器处理能力throughput per shelf area: })"9TfC  
    4-7冰冷凝器ice condenser: RqcX_x(p  
    4-8冰冷凝器的负载load of the ice condenser: @p `#y  
    4-9冰冷凝器的额定负载rated load of the ice condenser fMLm_5(H  
    8.   1.一般术语 2I>CA [qp  
    1-1试样sample : ]@WJ&e/'@  
    (1).表面层surface layer: @~a52'\  
    (2).真实表面true surface: `^w5/v#  
    (3).有效表面积effective surface area: g~Q#U;]  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: y6G[-?"/Q  
    (5).表面粒子密度surface particle density: 'MC) %N,  
    (6).单分子层monolayer: {qh`8  
    (7).表面单分子层粒子密度monolayer density: oR3$A :!P=  
    (8).覆盖系数coverage ratio: *Jp>)>  
    1-2激发excitation: 5@Rf]'1B0  
    (1).一次粒子primary particle: a:P% r  
    (2).一次粒子通量primary particle flux: &Cdd  
    (3).一次粒子通量密度density of primary particle flux: s[Njk@y,  
    (4).一次粒子负荷primary particle load: Ak4iG2  
    (5).一次粒子积分负荷integral load of primary particle: f5`exfdHE  
    (6).一次粒子的入射能量energy of the incident primary particle: $R"~BZbt;  
    (7).激发体积excited volume: _YbHnb  
    (8).激发面积excited area: +n%WmRf6!  
    (9).激发深度excited death: Le_?x  
    (10).二次粒子secondary particles: L18Olu  
    (11).二次粒子通量secondary particle flux: WXGLo;+>I  
    (12).二次粒子发射能energy of the emitted secondary particles: i%-c/ lop  
    (13).发射体积emitting volume: |E!xt6B  
    (14).发射面积emitting area: 4?d2#Xhs8  
    (15).发射深度emitting depth: F1 MPo;e  
    (16).信息深度information depth: Z;Tjjws  
    (17).平均信息深度mean information depth: <4Ujk8Zj  
    1-3入射角angle of incidence: < v0 d8  
    1-4发射角angle of emission: >5XE*9  
    1-5观测角observation: !QC->  
    1-6分析表面积analyzed surface area: S* <: He&1  
    1-7产额 yield : \t )Zk2  
    1-8表面层微小损伤分析minimum damage surface analysis: LoNz 1KJL  
    1-9表面层无损伤分析non-destructive surface analysis: UG1^G07s  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : r)h+pga5^E  
    1-11可观测面积observable area: 5w{_WR6,  
    1-12可观测立体角observable solid angle : $'kIo*cZ  
    1-13接受立体角;观测立体角angle of acceptance: {AQ3y,sh  
    1-14角分辨能力angular resolving power: t0hg!_$bq  
    1-15发光度luminosity: =Ermh7,  
    1-16二次粒子探测比detection ratio of secondary particles: @'~v~3 $S  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: (}c}=V  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: LD#]"k  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: }JvyjE  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: L# (o(4g2  
    1-21本底压力base pressure: N{oD1%  
    1-22工作压力working pressure: 8]+hfB/  
    u'P@3'P  
    2.分析方法 >'E'Mp.  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: i wK,XnIR  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : u9}=g%TV  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: S,qsCnz  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: yg/.=M  
    2-3离子散射表面分析ion scattering spectroscopy: MJDFm,  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: +*F ;l\R  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: eX $u  
    2-6离子散射谱仪ion scattering spectrometer: \$GlB+ iCx  
    2-7俄歇效应Auger process: '6[0NuB  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: L?<V KT  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: -*+7-9A I  
    2-10光电子谱术photoelectron spectroscopy : 6uR :/PTG  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: E3sl"d;~  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: \*a7DuVw  
    2-11光电子谱仪photoelectron spectrometer: &5c)qap;n  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: XeJx/'9o{  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: & P,8 )YA  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): ^%*%=LJm  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊