“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 *M|\B|A.
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真空术语 #pe{:f?
L~oFW'
1.标准环境条件 standard ambient condition: lQsQRp
2.气体的标准状态 standard reference conditions forgases: 9V66~Bf5
3.压力(压强)p pressure: fD~!t 8J
4.帕斯卡Pa pascal: *QG3 Jz
5.托Torr torr: PD}R7[".>
6.标准大气压atm standard atmosphere: ];I| _fXo%
7.毫巴mbar millibar: ZM vTDH!
8.分压力 partial pressure: Hr+-ndH!Pq
9.全压力 total pressure: y\_S11{v
10.真空 vacuum: ii;WmE&
11.真空度 degree of vacuum: p-pw*wH0
12.真空区域 ranges of vacuum: ILi5WuOYX
13.气体 gas: NVjJ/
14.非可凝气体 non-condensable gas: 0v@/I<
15.蒸汽vapor: [\b_+s)eN
16.饱和蒸汽压saturation vapor pressure: /,Rca1W
17.饱和度degree of saturation: ]hj1.V+
18.饱和蒸汽saturated vapor: [)3 U])w/
19.未饱和蒸汽unsaturated vapor: P*PL6UQ
20.分子数密度n,m-3 number density of molecules: aVP|:OAj
21.平均自由程ι、λ,m mean free path: @1F 'V'
22.碰撞率ψ collision rate: xploFw~
23.体积碰撞率χ volume collision rate: <c ovApx
24.气体量G quantity of gas: )zXyV]xe
25.气体的扩散 diffusion of gas: t%U[\\ic
26.扩散系数D diffusion coefficient; diffusivity: ;-?ZI$
27.粘滞流 viscous flow: &{ {DS
28.粘滞系数η viscous factor: %]ayW$4
29.泊肖叶流 poiseuille flow: }o^A^
30.中间流 intermediate flow: uit-Q5@~
31.分子流 molecular flow: eUkoVr
32克努曾数 number of knudsen: eh(Q^E;*
33.分子泻流 molecular effusion; effusive flow: Z)
Xs;7
34.流逸 transpiration: Ys$YI{
35.热流逸 thermal transpiration: gOyY#]g
36.分子流率qN molecular flow rate; molecular flux: b.4Xn0-M
37.分子流率密度 molecular flow rate density; density of molecular flux: _g 4/%
38.质量流率qm mass flow rare: <}
y p
39.流量qG throughput of gas: r.W,-%=bL
40.体积流率qV volume flow rate: I/Jp,~JT*
41.摩尔流率qυ molar flow rate: &ZE\@Vc
42.麦克斯韦速度分布 maxwellian velocity distribution: h_~|O[5|)
43.传输几率Pc transmission probability: c,q"}nE8w
44.分子流导CN,UN molecular conductance: %%~}Lw
45.流导C,U conductance: _?s %MNaX
46.固有流导Ci,Ui intrinsic conductance: p%"yBpSK
47.流阻W resistance: DAnb.0
48.吸附 sorption: F:J7|<J^F
49.表面吸附 adsorption: )E:,V~< 8
50.物理吸附physisorption: 2Nn1-wdhb
51.化学吸附 chemisorption: JblmXqtC
52.吸收absorption: 5)yOw|Bd
53.适应系数α accommodation factor: P;[Y42\z|
54.入射率υ impingement rate: 6B''9V:s
55.凝结率condensation rate: _~[?>cF%
56.粘着率 sticking rate: |:9Ir^
57.粘着几率Ps sticking probability: 14D7U/zer
58.滞留时间τ residence time: V-_/(xt*
59.迁移 migration: ?Hi}nsw
60.解吸 desorption: lKEX"KQ!
61.去气 degassing: `x}
Dk<HF
62.放气 outgassing: N\q)LM !M
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: `4%;qLxngP
64.蒸发率 evaporation rate: ole|J
65.渗透 permeation: 5!AV!A_Jp
66.渗透率φ permeability: :Sc8PLT
67.渗透系数P permeability coefficient fYhR#FVI
2. 1.真空泵 vacuum pumps \V^*44+
<!
1-1.容积真空泵 positive displacement pump: \ CK(;J
⑴.气镇真空泵 gas ballast vacuum pump: Ud#X@xK<h
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: +~d1;0l|
⑶.干封真空泵 dry-sealed vacuum pump: r!$'!lCR
⑷.往复真空泵 piston vacuum pump: 85D^@{
⑸.液环真空泵 liquid ring vacuum pump: L}W1*L$;<
⑹.旋片真空泵 sliding vane rotary vacuum pump: >+
]R4
⑺.定片真空泵 rotary piston vacuum pump: w(/DTQc~d
⑻.滑阀真空泵 rotary plunger vacuum pump: t'R':+0Vf
⑼.余摆线真空泵 trochoidal vacuum pump: vUYJf99B
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: &xiOTkqB
⑾.罗茨真空泵 roots vacuum pump: IyS"
1-2.动量传输泵 kinetic vacuum pump: .Z=Ce!
⑴.牵引分子泵molecular drag pump: YOV :
⑵.涡轮分子泵turbo molecular pump: pp~3@_)b
⑶.喷射真空泵ejector vacuum pump: 7]|zkjgI
⑷.液体喷射真空泵liquid jet vacuum pump: i3Hz"Qs;
⑸.气体喷射真空泵gas jet vacuum pump: q_T]9d
⑹.蒸汽喷射真空泵vapor jet vacuum pump : cJ(BiL-uF
⑺.扩散泵diffusion pump : u#+RUtM
⑻.自净化扩散泵self purifying diffusion pump: 4.|-m.a
⑼.分馏扩散泵 fractionating diffusion pump : qL|
5-(P
⑽.扩散喷射泵diffusion ejector pump : JI"/N`-?;b
⑾.离子传输泵ion transfer pump: /vjGjb=3U
1-3.捕集真空泵 entrapment vacuum pump: TZ_rsj/t
⑴吸附泵adsorption pump: YwL`>?
⑵.吸气剂泵 getter pump: (=1q!c`
⑶.升华(蒸发)泵 sublimation (evaporation)pump : 53
@oP
⑷.吸气剂离子泵getter ion pump: yo'9x
s
⑸.蒸发离子泵 evaporation ion pump: $PSY:Zz
⑹.溅射离子泵sputter ion pump: TDlZ!$g(
⑺.低温泵cryopump: N = LM?(H
XFW5AP
2.真空泵零部件 6&89~W{
2-1.泵壳 pump case: A&?}w_|9
2-2.入口 inlet: i&`!|X-=R
2-3.出口outlet: 3Y
z]8`C
2-4.旋片(滑片、滑阀)vane; blade : =m}TU)4.
2-5.排气阀discharge valve: s^w\zz Yb
2-6.气镇阀gas ballast valve: 4\M8BRuE
2-7.膨胀室expansion chamber: n]+.
2-8.压缩室compression chamber: lv4(4$T
2-9.真空泵油 vacuum pump oil: iTh
xVD
2-10.泵液 pump fluid: |q;Al
z{
2-11.喷嘴 nozzle: W`$[j0
2-13.喷嘴扩张率nozzle expansion rate: bV@7mmz:X+
2-14.喷嘴间隙面积 nozzle clearance area : eC ~jgB
2-15.喷嘴间隙nozzle clearance: W57&\PXYn
2-16.射流jet: |;P^clS3
2-17.扩散器diffuser: ]pnYvXf>!
2-18.扩散器喉部diffuser thoat: 9\v.qo.
2-19.蒸汽导管vapor tube(pipe;chimney): u4YM^* S.
2-20.喷嘴组件nozzle assembly: k oM]S+1
2-21.下裙skirt: bM"fk&
nbGoJC:U
3.附件 0q{[\51*
3-1阱trap: 3DW3LYo{
⑴.冷阱 cold trap: 6lsL^]7
⑵.吸附阱sorption trap: yRC3
.[
⑶.离子阱ion trap: ic-IN~J-
⑷.冷冻升华阱 cryosublimation trap: gN?0m4[$i
3-2.挡板baffle: <Nex8fiJ9
3-3.油分离器oil separator: jYWw.g<
3-4.油净化器oil purifier: H"+wsM^@
3-5.冷凝器condenser: $jG4pPG
FI{AZb_'
4.泵按工作分类 cZ|lCy^
4-1.主泵main pump: x=-0 zV
4-2.粗抽泵roughing vacuum pump: IIxJqGN:
4-3.前级真空泵backing vacuum pump: /7gi/uh~-(
4-4.粗(低)真空泵 roughing(low)vacuum pump: IaLMWoh
4-5.维持真空泵holding vacuum pump: Seda }
4-6.高真空泵high vacuum pump: aG!
*WHt
4-7.超高真空泵ultra-high vacuum pump: R}r~p?(M
4-8.增压真空泵booster vacuum pump: mb\h^cKaq
T C8`JU=wV
5.真空泵特性 Vl<9=f7[
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 5Z{_m;I.
5-2.真空泵的抽气量Q throughput of vacuum pump:。 .x}gg\
5-3.起动压力starting pressure: W"Q!|#;l.
5-4.前级压力 backing pressure : *Y%Jl
o
5-5.临界前级压力 critical backing pressure: +TN^NE
5-6.最大前级压力maximum backing pressure: %/T7Z;d
5-7.最大工作压力maximum working pressure: :p>hW!~
5-8.真空泵的极限压力ultimate pressure of a pump: -[DWM2C$K4
5-9.压缩比compression ratio: X|b2c+I
5-10.何氏系数Ho coefficient: !>n|c$=;qk
5-11.抽速系数speed factor: \}JrFc%O
5-12.气体的反扩散back-diffusion of gas: ?x3Jv<G0*
5-13.泵液返流back-streaming of pump fluid: & Kmy}q
5-14.返流率back-streaming rate >w.'KR0L
5-15.返迁移back-migration: gn ?YF`
5-16.爆腾bumping: eA=WGy@IcN
5-17.水蒸气允许量qm water vapor tolerable load: /0lC KU!=
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: )(m0cP{7
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: m`6VKp{YD
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump -(#-I$z
3. 1.一般术语 51 b y
1-1.压力计pressure gauge: 2z_2.0/3
1-2.真空计vacuum gauge: $^_|j1z#i
⑴.规头(规管)gauge head: JA^v
⑵.裸规nude gauge : \Q&,ISO\
⑶.真空计控制单元gauge control unit : &yIGr`;
⑷.真空计指示单元gauge indicating unit : 30Drrno7Io
T3N"CUk
2.真空计一般分类 S1bAu
<
2-1.压差式真空计differential vacuum gauge: 8TWTbQ
2-2.绝对真空计 absolute vacuum gauge: 2YOKM#N]
2-3.全压真空计total pressure vacuum gauge: _xrwu;o0}
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: Y3',"
2-5.相对真空计relative vacuum gauge : |`O7nOM
wLJ]&puwm
3.真空计特性 0$HmY2
Men
3-1.真空计测量范围pressure range of vacuum gauge: 8=;k"
3-2.灵敏度系数sensitivity coefficient: WE6\dhJ<
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): W5pb;74|
3-5.规管光电流photon current of vacuum gauge head: t'1Y@e
3-6.等效氮压力equivalent nitrogen pressure : #0"~G][#
3-7.X射线极限值 X-ray limit: O1P=#l iYX
3-8.逆X射线效应anti X-ray effect: 0CAa^Q^w
3-9.布利尔斯效应blears effect: g|%L"-%gJ
^G|98yc!'
4.全压真空计 d]wD[]
4-1.液位压力计liquid level manometer: nFM@@oA
4-2.弹性元件真空计elastic element vacuum gauge: 5[gh|I;D
4-3.压缩式真空计compression gauge: h<6UC%'ac
4-4.压力天平pressure balance: / T
c=
4-5.粘滞性真空计viscosity gauge : E167=BD9<
4-6.热传导真空计thermal conductivity vacuum gauge : $uh z
4-7.热分子真空计thermo-molecular gauge: @;Opx."
4-8.电离真空计ionization vacuum gauge: Y[
zZw~yx
4-9.放射性电离真空计radioactive ionization gauge: {i [y9
4-10.冷阴极电离真空计cold cathode ionization gauge: \7v)iG|#G&
4-11.潘宁真空计penning gauge: q]% T:A=
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: #8h;Bj
4-13.放电管指示器discharge tube indicator: S*
R,FKg
4-14.热阴极电离真空计hot cathode ionization gauge: NHQF^2 \\
4-15.三极管式真空计triode gauge: Di5(9]o2
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: OJO!FH)
4-17.B-A型电离真空计Bayard-Alpert gauge: HU ;#XU1
4-18.调制型电离真空计modulator gauge: !>$4]FkV
4-19.抑制型电离真空计suppressor gauge: 5|8^9Oe5
4-20.分离型电离真空计extractor gauge: s!+
pL|
4-21.弯注型电离真空计bent beam gauge:
aelO3'UN
4-22.弹道型电离真空计 orbitron gauge : !#yq@2QX
4-23.热阴极磁控管真空计hot cathode magnetron gauge: g);^NAA
)_7>nuQ6
5.分压真空计(分压分析器) (bp9Pj w
5-1.射频质谱仪radio frequency mass spectrometer: ,&^3Z
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: 39i9wrP
5-3.单极质谱仪momopole mass spectrometer: 9N8I
ip]w
5-4.双聚焦质谱仪double focusing mass spectrometer: #*%q'gyHT
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: 4Xj4|Rw%
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: .)tSg
5-7.回旋质谱仪omegatron mass spectrometer: +IFw_3$
5-8.飞行时间质谱仪time of flight mass spectrometer: $md%xmQ[
23\RJpKb
6.真空计校准 nIk$7rGLB
6-1.标准真空计reference gauges: g"VMeW^
6-2.校准系统system of calibration: hqvE!Of
6-3.校准系数K calibration coefficient: cre;P5^E
6-4.压缩计法meleod gauge method: d3Mva,bw<
6-5.膨胀法expansion method: XOP"Px@
6-6.流导法flow method: ;,h/
4. 1.真空系统vacuum system r,1e 'd:
1-1.真空机组pump system: 7,
}
$u
1-2.有油真空机组pump system used oil : &[vw 0N-
1-3.无油真空机组oil free pump system Uz7oL8
1-4.连续处理真空设备continuous treatment vacuum plant: friWW^
1-5.闸门式真空系统vacuum system with an air-lock: SLL3v,P(7
1-6.压差真空系统differentially pumped vacuum system:
-fI`3#
1-7.进气系统gas admittance system: ||7x;2e
;bzX%f?|G
2.真空系统特性参量 BaI $S>/Q
2-1.抽气装置的抽速volume flow rate of a pumping unit : #N(= 3Cj
2-2.抽气装置的抽气量throughput of a pumping unit : /^SAC%PD
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: "ww|&-W9
2-4.真空系统的漏气速率leak throughput of a vacuum system: 796\jf$
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: }Db[ 4
2-6.极限压力ultimate pressure: Cwa^"r3P1
2-7.残余压力residual pressure: 3f.b\4 U
2-8.残余气体谱residual gas spectrum: yF}OfK?0f
2-9.基础压力base pressure: 2jJmE&)7,
2-10.工作压力working pressure: 4S"\~><
2-11.粗抽时间roughing time: z;f2*F
2-12.抽气时间pump-down time: |~`as(@Ih
2-13.真空系统时间常数time constant of a vacuum system: C@ZK~Y_g
2-14.真空系统进气时间venting time: "Mw[P [w*
BF*kb2"GZ6
3.真空容器 8H,4kY?Z
3-1.真空容器;真空室vacuum chamber: !l?.5Pm])
3-2.封离真空装置sealed vacuum device: C&LBr|
3-3.真空钟罩vacuum bell jar: lf{e[!ML'
3-4.真空容器底板vacuum base plate: rEhX/(n#
3-5.真空岐管vacuum manifold: lz#GbXn.
3-6.前级真空容器(贮气罐)backing reservoir: bK"SKV
3-7.真空保护层outer chamber: :o-,SrORM
3-8.真空闸室vacuum air lock: *K!|@h{60
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: u@'0Vk0zGH
W:,4 :|3
4.真空封接和真空引入线 ;h6v@)#GX
4-1.永久性真空封接permanent seal : ;7]u!Q
4.2.玻璃分级过渡封接graded seal : (/!r(#K0,'
4-3.压缩玻璃金属封接compression glass-to-metal seal: &X@Bs-
4-4.匹配式玻璃金属封接matched glass-to-metal seal: 6*4's5>?D
4-5.陶瓷金属封接ceramic-to-metal seal: O<PO^pi
4-6.半永久性真空封接semi-permanent seal : ]w T 7*( Y
4-7.可拆卸的真空封接demountable joint: Ac2(O6
4-8.液体真空封接liquid seal N7'OPTKt&
4-9.熔融金属真空封接molten metal seal: M#"524Nz
4-10.研磨面搭接封接ground and lapped seal: fH`P[^N
4-11.真空法兰连接vacuum flange connection: v 8T$ &-HJ
4-12.真空密封垫vacuum-tight gasket: 'j^xbikr
4-13.真空密封圈ring gasket: +;$oJJ
4-14.真空平密封垫flat gasket: W>r#RXmh
4-15.真空引入线feedthrough leadthrough: 3&u_A?;
4-16.真空轴密封shaft seal: iLP7!j
4-17.真空窗vacuum window: H9h@ sSg
4-18.观察窗viewing window: 1c3TN#|)W
I}e3zf>
5.真空阀门 U~h'*nV&
5-1.真空阀门的特性characteristic of vacuum valves: [U}+sTQ
⑴.真空阀门的流导conductance of vacuum valves: _Jwq`]Z
⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: F(4?tX T
5-2.真空调节阀regulating valve: 2LrJ>Mi
5-3.微调阀 micro-adjustable valve: Q~R
~xz
5-4.充气阀charge valve: bCref$|
5-5.进气阀gas admittance valve:
RZM"~ 0
5-6.真空截止阀break valve: @L.82p{h
5-7.前级真空阀backing valve: A+y
5-8.旁通阀 by-pass valve: tz#gClo
5-9.主真空阀main vacuum valve: X37 L\e[c
5-10.低真空阀low vacuum valve: mj|)nOd
5-11.高真空阀high vacuum valve: X;<BzA!H
5-12.超高真空阀;UHV阀 ultra-high vacuum valve: aQI^^$9g
5-13.手动阀manually operated valve: ,Jc m+Wb
5-14.气动阀pneumatically operated valve: m(], r})
5-15.电磁阀electromagnetically operated valve: vN2u34
5-16.电动阀valve with electrically motorized operation: )jq?lw'&
5-17.挡板阀baffle valve: 0ye!R
5-18.翻板阀flap valve: C6O8RHg
5-19.插板阀gate valve: qB)"qFa
5-20.蝶阀butterfly valve: d,8mY/S>w
$P1O>x>LIL
6.真空管路 jp $Z]
6-1.粗抽管路roughing line: :2njp%
6-2.前级真空管路backing line: zBO(`=|
6-3.旁通管路;By-Pass管路 by-pass line: gp$Ucfu'
6-4.抽气封口接头pumping stem: XU+<?%u}z
6-5.真空限流件limiting conductance: LL|7rS|o
6-6.过滤器filter: ?Ma~^0
5. 1.一般术语 !"e5~7
1-1真空镀膜vacuum coating: {R/C0-Q^^
1-2基片substrate: ^Rx9w!pAN
1-3试验基片testing substrate: m*$|GW9
1-4镀膜材料coating material: ?<G]&EK~~]
1-5蒸发材料evaporation material: J8Yd1.Qj
1-6溅射材料sputtering material: P"<U6zM\sP
1-7膜层材料(膜层材质)film material: 5 H#W[^s"
1-8蒸发速率evaporation rate: l>Ub!^;
1-9溅射速率sputtering rate: k`GA\&zt
1-10沉积速率deposition rate: a0Ik`8^`
1-11镀膜角度coating angle: /y^7p9Z`
^z,_+},a3T
2.工艺 *^([ ~[
2-1真空蒸膜vacuum evaporation coating: FQ>`{%>
(1).同时蒸发simultaneous evaporation: C7H/N<VAq
(2).蒸发场蒸发evaporation field evaporation: qF 9NQ;
(3).反应性真空蒸发reactive vacuum evaporation: /r12h|
(4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: e"
]2=5g
(5).直接加热的蒸发direct heating evaporation: -l%J/ :
(6).感应加热蒸发induced heating evaporation: S(\9T1DVe
(7).电子束蒸发electron beam evaporation: ='TE,et@d
(8).激光束蒸发laser beam evaporation: ]v#r4Ert
(9).间接加热的蒸发indirect heating evaporation: 1heS*Fwn'
(10).闪蒸flash evaportion: w[6J
`
2-2真空溅射vacuum sputtering: l2;CQ7
(1).反应性真空溅射 reactive vacuum sputtering: QdLYCR4f
(2).偏压溅射bias sputtering: &Q}*+Y]G
(3).直流二级溅射direct current diode sputtering: )[1)$-Ru
(4).非对称性交流溅射asymmtric alternate current sputtering: kD bhu^~B
(5).高频二极溅射high frequency diode sputtering: tgjr&G}a@0
(6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: z&V+#Ws/
(7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: PvGDTYcKp
(8).离子束溅射ion beam sputtering: T97]P-}
(9).辉光放电清洗glow discharge cleaning: |Yq$sU
2-3物理气相沉积PVD physical vapor deposition: &K/FyY5
2-4化学气相沉积CVD chemical vapor deposition: `# sTmC)
2-5磁控溅射magnetron sputtering: a,78l@d(
2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: *m2=/Sh
2-7空心阴极离子镀HCD hollow cathode discharge deposition: 3pmWDG6L
2-8电弧离子镀arc discharge deposition: )"+(butI&
v=('{/^~>
3.专用部件 ;(}V"i7Hu
3-1镀膜室coating chamber: y^7}oH _
3-2蒸发器装置evaporator device: <L&m4O#|
3-3蒸发器evaporator: wO2_DyMm@
3-4直接加热式蒸发器evaporator by direct heat: Tr^nkD{
3-5间接加热式蒸发器evaporator by indirect heat: P,sjo u^
3-7溅射装置sputtering device: 4nAa`(62
3-8靶target: .'a&33J
3-10时控挡板timing shutter: XT;u<aJs
3-11掩膜mask: ~^+0
3-12基片支架substrate holder: xV%6k{_:G
3-13夹紧装置clamp: C{2xHd/*
3-14换向装置reversing device: M4xi1M#%
3-15基片加热装置substrate heating device: =!m}xdTP
3-16基片冷却装置substrate colding device: $ cu00K
fr!Pj(Q1
4.真空镀膜设备 GJqE!I,.
4-1真空镀膜设备vacuum coating plant: b~-%c_
(1).真空蒸发镀膜设备vacuum evaporation coating plant: f{0F|w<gf
(2).真空溅射镀膜设备vacuum sputtering coating plant: .5!t:FPOv
4-2连续镀膜设备continuous coating plant: ["}rk
4-3半连续镀膜设备semi- continuous coating plant "`asFg
6. 1.漏孔 K!,<7[MBg
1-1漏孔leaks: /t-fjB{=G
1-2通道漏孔channel leak: I5h[%T
1-3薄膜漏孔membrane leak: NAPX_B,6
1-4分子漏孔molecular leak: :rP#I#,7w
1-5粘滞漏孔vixcous leak: Zf5`XslA.
1-6校准漏孔calibrated leak: -[L!3jU
1-7标准漏孔reference leak : ~ H6r.:]
1-8虚漏virtual leak: 'EFyIVezg9
1-9漏率leak rate: pStk/te,XK
1-10标准空气漏率standard air leak rate: 6ksAc%|5
1-11等值标准空气漏率equivalent standard air leak rate: yUPIY:0
1-12探索(示漏)气体: e6_ZjrQf
;Eec5w1
2.本底 -Z-IF#%
2-1本底background: -l}IZY
2-2探索气体本底search gas background : @xc',I
2-3漂移drift: moVbw`T
2-4噪声noise: w{k)XY40sW
Q?AmOo-a
3.检漏仪 %6--}bY^
3-1检漏仪leak detector: 7H>@iI"?
3-2高频火花检漏仪H.F. spark leak detector: ud fe
3-3卤素检漏仪halide leak detector: BnRN;bu
3-4氦质谱检漏仪helium mass spectrometer leak detector: !gnj]k&/c
3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: eiJ2NwR\w
pWu LfX
4.检漏 fIGFHZy,
4-1气泡检漏leak detection by bubbles: SR*wvQnOx
4-2氨检漏leak detection by ammonia: 7 h y&-<
4-3升压检漏leak detection of rise pressure: Z/rTVAs@r
4-4放射性同位素检漏radioactive isotope leak detection: |y<),j6
4-5荧光检漏fluorescence leak detection e?bYjJq
7. 1.一般术语 s( <uo{
1-1真空干燥vacuum drying: LI)!4(WH
1-2冷冻干燥freeze drying : w:'dhr':
1-3物料material: %P;Q|v6/|
1-4待干燥物料material to be dried: <}6{{&mT4
1-5干燥物料dried material : ^`f*'Z
1-6湿气moisture;humidity: m`6Yc:@E
1-7自由湿气free moisture: !EQ@#qW/
1-8结合湿气bound moisture: L !4t[hhe=
1-9分湿气partial moisture: a^5^gId5l!
1-10含湿量moisture content: 0b91y3R+
1-11初始含湿量initial moisture content: ^TB>.c@ `*
1-12最终含湿量final residual moisture: PM":Vd/
1-13湿度degree of moisture ,degree of humidity : ;IK[Y{W/
1-14干燥物质dry matter : jEXW
1-15干燥物质含量content of dry matter: -G,^1AL>
aQ j*KMc
2.干燥工艺 )EyI0R] 5
2-1干燥阶段stages of drying : [#YE^[*qK
(1).预干燥preliminary dry: v}^5Rp&m
(2).一次干燥(广义)primary drying(in general):
htY=w}>
(3).一次干燥(冷冻干燥)primary drying(freeze-drying): G#Ou[*O'
(4).二次干燥secondary drying: ":3 VJ(eY
2-2.(1).接触干燥contact drying: e4OeoQ@ >
(2).辐射干燥 drying by radiation : qW 1V85FG
(3).微波干燥microwave drying:
x{}z ;yG
(4).气相干燥vapor phase drying: ~"Gf<3^y+
(5).静态干燥static drying: JN6-Z2
(6).动态干燥dynamic drying: \n0Oez0z!B
2-3干燥时间drying time: [~D|peM3
2-4停留时间length of stay(in the drying chamber): clI*7j.4E#
2-5循环时间cycle time: 7t9c7HLuj/
2-6干燥率 dessication ratio : hl&-\ dc+
2-7去湿速率mass flow rate of humidity: +MK6zf
2-8单位面积去湿速率mass flow rate of humidity per surface area: iA_8(Yo
2-9干燥速度 drying speed : N?dvuB
2-10干燥过程drying process: e7u^mJ
2-11加热温度heating temperature: *sQcg8{^
2-12干燥温度temperature of the material being dried : m\/(w_/?
2-13干燥损失loss of material during the drying process : zq5'i!s !0
2-14飞尘lift off (particles): 5W
=(+Q>C
2-15堆层厚度thickness of the material: H(0q6~|
sM1RU
3.冷冻干燥 !S%6Uzsj
3-1冷冻freezing: (wRBd
(1).静态冷冻static freezing: W&:[r/8wA
(2).动态冷冻dynamic freezing: PZ8U6K'
(3).离心冷冻centrifugal freezing: ;evCW$G=
(4).滚动冷冻shell freezing: URcR
(5).旋转冷冻spin-freezing: }2)DPP:ic
(6).真空旋转冷冻vacuum spin-freezing: }W)=@t
(7).喷雾冷冻spray freezing: N12:{U
(8).气流冷冻air blast freezing: y?[snrK G
3-2冷冻速率rate of freezing: }wSi~^*
3-3冷冻物料frozen material: +w|9x.&W
3-4冰核ice core: #y]3LC#)^G
3-5干燥物料外壳envelope of dried matter: U3vEdw<lV
3-6升华表面sublimation front: RaSz>-3d
3-7融化位置freezer burn: P];JKE%
jn9 ShF
4.真空干燥设备;真空冷冻干燥设备 XM
Vq-8B0
4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: z/ &