“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 }GnwY97
--------------------------------------------------- 6j8<Q 2
真空术语 tllBCuAe
Y5!b)vke
1.标准环境条件 standard ambient condition: 22KI]$D#f
2.气体的标准状态 standard reference conditions forgases: dyFKxn`,
3.压力(压强)p pressure: {rkn q_;0
4.帕斯卡Pa pascal: ZAg;q#z j
5.托Torr torr: /k7wwZiY@
6.标准大气压atm standard atmosphere: tnW;E\cR
7.毫巴mbar millibar: !Zw f
397
8.分压力 partial pressure: Wc#:f8dr
9.全压力 total pressure: abY0)t
10.真空 vacuum: voRfjsS~
11.真空度 degree of vacuum: _Nu`)m
12.真空区域 ranges of vacuum: G79C {|c\
13.气体 gas: j=.g:&r)
14.非可凝气体 non-condensable gas: ^w6eWzI
15.蒸汽vapor: .~dEUt/|)
16.饱和蒸汽压saturation vapor pressure: 5(}H
?
17.饱和度degree of saturation: `5"/dC
18.饱和蒸汽saturated vapor: B {i&~k
19.未饱和蒸汽unsaturated vapor: lfMH1llx
20.分子数密度n,m-3 number density of molecules: \!X?zR_
21.平均自由程ι、λ,m mean free path: wd`R4CKhP]
22.碰撞率ψ collision rate: p6blD-v
23.体积碰撞率χ volume collision rate: iE{Oit^aG
24.气体量G quantity of gas: ~&[u]u[
25.气体的扩散 diffusion of gas: RUrymkHFB
26.扩散系数D diffusion coefficient; diffusivity: *Ypq q
27.粘滞流 viscous flow: 3Bd4
C]E
28.粘滞系数η viscous factor: :Ba-u
29.泊肖叶流 poiseuille flow: v =+k"gm6
30.中间流 intermediate flow: uf0^E3H
31.分子流 molecular flow: fbL!=]A*3
32克努曾数 number of knudsen: 5k`e^ARf
33.分子泻流 molecular effusion; effusive flow: LsotgQ8
34.流逸 transpiration: xf UhSt
35.热流逸 thermal transpiration: IgiqFV{
36.分子流率qN molecular flow rate; molecular flux: K-Y*T}?
37.分子流率密度 molecular flow rate density; density of molecular flux: v7$9QVze
38.质量流率qm mass flow rare: ][N) 2_^M
39.流量qG throughput of gas: 'v`~(9'Rcj
40.体积流率qV volume flow rate: x_pMG!2
41.摩尔流率qυ molar flow rate: K/A ? ]y
42.麦克斯韦速度分布 maxwellian velocity distribution: Suj}MEiv
43.传输几率Pc transmission probability: m4\g o
44.分子流导CN,UN molecular conductance: 8ST~$!z$
45.流导C,U conductance: Fj48quW1\P
46.固有流导Ci,Ui intrinsic conductance: EXH!glR[$
47.流阻W resistance: G:){^Z?
48.吸附 sorption: l+'`BBh*]
49.表面吸附 adsorption: 3Y=,r!F.h
50.物理吸附physisorption: L)=8mF.
51.化学吸附 chemisorption: u<J2p?`\&`
52.吸收absorption: >dcqPNDg1^
53.适应系数α accommodation factor: tgS+"ugl
54.入射率υ impingement rate: T\.7f~3
55.凝结率condensation rate: e*6U |+kJ
56.粘着率 sticking rate: Udg&
eEF
57.粘着几率Ps sticking probability: Fj36K6!#?
58.滞留时间τ residence time: ~&vA_/M
59.迁移 migration: H{&a)!Ms
60.解吸 desorption: v_[)FN"]Y.
61.去气 degassing: R'jUS7]Y
62.放气 outgassing: A;b=E[iv
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: :$+D
2*(
64.蒸发率 evaporation rate: j
P{:A9T\
65.渗透 permeation: ZJ)3GF}4
66.渗透率φ permeability: e@6RC bj
67.渗透系数P permeability coefficient {-:4O\/
2. 1.真空泵 vacuum pumps ~Tpe,juG_
1-1.容积真空泵 positive displacement pump: u)N2
⑴.气镇真空泵 gas ballast vacuum pump: OcyiL)tv 5
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: 5( mCBH
⑶.干封真空泵 dry-sealed vacuum pump: ,'/HcF?yf
⑷.往复真空泵 piston vacuum pump: dlU
JYI
⑸.液环真空泵 liquid ring vacuum pump: 5#N"WHz!
⑹.旋片真空泵 sliding vane rotary vacuum pump: mgJ]@s}9
⑺.定片真空泵 rotary piston vacuum pump: z&6]vN'
⑻.滑阀真空泵 rotary plunger vacuum pump: Q6e'0EIKC
⑼.余摆线真空泵 trochoidal vacuum pump: )VV4HoH]8
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: QSl:=Q'
⑾.罗茨真空泵 roots vacuum pump: ?Oe_}
jv;
1-2.动量传输泵 kinetic vacuum pump: C.Wms}XA
⑴.牵引分子泵molecular drag pump: DKaG?Y,*p
⑵.涡轮分子泵turbo molecular pump: !=k*hl0h
⑶.喷射真空泵ejector vacuum pump: Q8M:7#ySji
⑷.液体喷射真空泵liquid jet vacuum pump: P?yOLG+)l)
⑸.气体喷射真空泵gas jet vacuum pump: P^uP$D
⑹.蒸汽喷射真空泵vapor jet vacuum pump : p:
Q%Lg_I
⑺.扩散泵diffusion pump : d=.n|rS4
W
⑻.自净化扩散泵self purifying diffusion pump: :"y7Weh
⑼.分馏扩散泵 fractionating diffusion pump : }tl8(kjm
⑽.扩散喷射泵diffusion ejector pump : 8) ebXc
⑾.离子传输泵ion transfer pump: %i]uW\~U
1-3.捕集真空泵 entrapment vacuum pump: leX7(Y;!a7
⑴吸附泵adsorption pump: f;_K}23
⑵.吸气剂泵 getter pump: dmTW]P2
⑶.升华(蒸发)泵 sublimation (evaporation)pump : EnsNO_"e|
⑷.吸气剂离子泵getter ion pump: ?@,f[ U-
⑸.蒸发离子泵 evaporation ion pump: GmEJ,%A
⑹.溅射离子泵sputter ion pump: aLyhxmn ^)
⑺.低温泵cryopump: tp,mw24
V+"*A
2.真空泵零部件 Xj@
2-1.泵壳 pump case: <EM LiiNY
2-2.入口 inlet: \qK}(xq[
2-3.出口outlet: "n2xn%t{
2-4.旋片(滑片、滑阀)vane; blade : l2KxZteXY0
2-5.排气阀discharge valve: +ke42Jwt
2-6.气镇阀gas ballast valve: X0r#,u
2-7.膨胀室expansion chamber: GXvo't@N
2-8.压缩室compression chamber: V
n!az}
2-9.真空泵油 vacuum pump oil: 6O|\4c;
2-10.泵液 pump fluid: LZAj4|~,m
2-11.喷嘴 nozzle: Lq8Z!AIw>
2-13.喷嘴扩张率nozzle expansion rate: F~0%j}ve
2-14.喷嘴间隙面积 nozzle clearance area : AB|VO4-?
2-15.喷嘴间隙nozzle clearance: !6fpMo
2-16.射流jet: +\(ay"+ d
2-17.扩散器diffuser: }SvWC8
2-18.扩散器喉部diffuser thoat: iJj?~\zp
2-19.蒸汽导管vapor tube(pipe;chimney): -~GJ; Uw
2-20.喷嘴组件nozzle assembly: FSZoT!
2-21.下裙skirt: vgbjvyfN
Y`_X@Q
3.附件 $6x:aG*F
3-1阱trap: D"XQ!1B%
⑴.冷阱 cold trap: 1?#p !;&
⑵.吸附阱sorption trap: )Ai%wCzw*
⑶.离子阱ion trap: ^3@a0J=F
⑷.冷冻升华阱 cryosublimation trap: .AI'L|FQ%c
3-2.挡板baffle: #yRA.;
3-3.油分离器oil separator: I)/7M}t`
3-4.油净化器oil purifier: xgw)`>p,W
3-5.冷凝器condenser: Tq_X8X#p
L<>NL$CrN
4.泵按工作分类 *RE-K36m|u
4-1.主泵main pump: 1,!\7@<CT
4-2.粗抽泵roughing vacuum pump: 1?$!y
4-3.前级真空泵backing vacuum pump:
KGwL09)
4-4.粗(低)真空泵 roughing(low)vacuum pump: W%ZU& YBc
4-5.维持真空泵holding vacuum pump: 6e-h;ylS
4-6.高真空泵high vacuum pump: v 5ddb)
4-7.超高真空泵ultra-high vacuum pump: pXEVI6 }
4-8.增压真空泵booster vacuum pump: R6o<p<fTh
]8nm9qmF<
5.真空泵特性 d?X6x
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: 0$Db@
5-2.真空泵的抽气量Q throughput of vacuum pump:。 !fjU?_[S
5-3.起动压力starting pressure: c)YGwkY,,
5-4.前级压力 backing pressure : w3UJw
5-5.临界前级压力 critical backing pressure: ghR]$SG
5-6.最大前级压力maximum backing pressure: =zGz|YI*?
5-7.最大工作压力maximum working pressure: qfe%\krN{i
5-8.真空泵的极限压力ultimate pressure of a pump: ~}ZX^l&k{P
5-9.压缩比compression ratio: ~?+m=\
5-10.何氏系数Ho coefficient: )% c)-c
5-11.抽速系数speed factor: F=c_PQO
5-12.气体的反扩散back-diffusion of gas: R6.#gb8^oS
5-13.泵液返流back-streaming of pump fluid: )BrqE uX@"
5-14.返流率back-streaming rate <xNM@!'\h
5-15.返迁移back-migration: $X]v;B)J|
5-16.爆腾bumping: }#^F'%zf
5-17.水蒸气允许量qm water vapor tolerable load: bx6}zkf&
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: 0R%58,R
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: ?OdA`!wE
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump o`Brr:
3. 1.一般术语 h /Nt92
1-1.压力计pressure gauge: )ISTb
1-2.真空计vacuum gauge: KPqI(
⑴.规头(规管)gauge head: ir?9{t/()
⑵.裸规nude gauge : y~ LVK8
⑶.真空计控制单元gauge control unit : je%12DM
⑷.真空计指示单元gauge indicating unit : \OH:xW~
DR=1';63
2.真空计一般分类 Rgu^>
~
2-1.压差式真空计differential vacuum gauge: 8A_(]Q
2-2.绝对真空计 absolute vacuum gauge: [%Xfl7;Wh
2-3.全压真空计total pressure vacuum gauge: + k:?;ZG
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: UkKpSL}Q2
2-5.相对真空计relative vacuum gauge : x N)Ck76
,Fiiw
3.真空计特性 w ?aLWySYT
3-1.真空计测量范围pressure range of vacuum gauge: "Xc=<rX
3-2.灵敏度系数sensitivity coefficient: H;ib3?
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): "Q4{6FH+mB
3-5.规管光电流photon current of vacuum gauge head: !}?]&[N=
3-6.等效氮压力equivalent nitrogen pressure : jRc#>;dN
3-7.X射线极限值 X-ray limit: gX<C-y6o
3-8.逆X射线效应anti X-ray effect: g=Jfp$*[
3-9.布利尔斯效应blears effect: xH uyfQLk
Sq>UMfl&
4.全压真空计 $-73}[UA 4
4-1.液位压力计liquid level manometer: iDr0_y*t
4-2.弹性元件真空计elastic element vacuum gauge: 10(N|2'q
4-3.压缩式真空计compression gauge: !WXSrICX[
4-4.压力天平pressure balance: d|3[MnU[a
4-5.粘滞性真空计viscosity gauge : gO%3~f!vY#
4-6.热传导真空计thermal conductivity vacuum gauge : ]h6<o*
4-7.热分子真空计thermo-molecular gauge: RWYA`
4-8.电离真空计ionization vacuum gauge: *RhdoD|a
4-9.放射性电离真空计radioactive ionization gauge: IV76#jL
4-10.冷阴极电离真空计cold cathode ionization gauge: rE
8-MB
4-11.潘宁真空计penning gauge: 1ARIZ;H
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: CAfG3;
4-13.放电管指示器discharge tube indicator: umk[\}Ip+P
4-14.热阴极电离真空计hot cathode ionization gauge: ,b{4GU$3
4-15.三极管式真空计triode gauge: sy;~(rpg
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: :B
im`mHl
4-17.B-A型电离真空计Bayard-Alpert gauge: Jc*A\-qC.
4-18.调制型电离真空计modulator gauge: xQ4Q '9
4-19.抑制型电离真空计suppressor gauge: t+t&eg
4-20.分离型电离真空计extractor gauge: raCxHY
4-21.弯注型电离真空计bent beam gauge: mSs%g L]g
4-22.弹道型电离真空计 orbitron gauge : yd$y\pN=<
4-23.热阴极磁控管真空计hot cathode magnetron gauge: 9"[#\TW9Vb
^VD14V3
5.分压真空计(分压分析器) nL9m{$Zv
5-1.射频质谱仪radio frequency mass spectrometer: 0=NB[eG
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: czafBO6
5-3.单极质谱仪momopole mass spectrometer: z[th@!3
5-4.双聚焦质谱仪double focusing mass spectrometer: /) N[tv2
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: n,`&f~tap
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: rc"yEI-``"
5-7.回旋质谱仪omegatron mass spectrometer: 8D-g%Aj-
5-8.飞行时间质谱仪time of flight mass spectrometer: uXXwMc<p
1r$q $\
6.真空计校准 "~tEmMz
6-1.标准真空计reference gauges: h-V5&em"_
6-2.校准系统system of calibration: ?g1%-F+
6-3.校准系数K calibration coefficient: Xr-eDUEi
6-4.压缩计法meleod gauge method: >k"/:g^t
6-5.膨胀法expansion method: S>nM&758
6-6.流导法flow method: {$b]K-B
4. 1.真空系统vacuum system Rh iiQ
1-1.真空机组pump system: :*1bhk8~
1-2.有油真空机组pump system used oil : K*>lq|iu
1-3.无油真空机组oil free pump system =F6J%$
1-4.连续处理真空设备continuous treatment vacuum plant: !$P&`n]@
1-5.闸门式真空系统vacuum system with an air-lock: 5TqX;=B
1-6.压差真空系统differentially pumped vacuum system: .Um.dXBYU
1-7.进气系统gas admittance system: (h%!Kun
kP3'BBd,
2.真空系统特性参量 z>~Hc8*]3
2-1.抽气装置的抽速volume flow rate of a pumping unit : IWX%6*Zz
2-2.抽气装置的抽气量throughput of a pumping unit : L"9,K8
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 1-4W4"#
2-4.真空系统的漏气速率leak throughput of a vacuum system: Zj%l (OVq
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: r!'\$(m E
2-6.极限压力ultimate pressure: h5>JBLawQP
2-7.残余压力residual pressure: zrri&QDF<
2-8.残余气体谱residual gas spectrum: _Uc le
2-9.基础压力base pressure: > -OQk"o
2-10.工作压力working pressure: $ba3dqbCW
2-11.粗抽时间roughing time: a!vF;J-Zqa
2-12.抽气时间pump-down time: `L /\F,
2-13.真空系统时间常数time constant of a vacuum system: ?*){%eE
2-14.真空系统进气时间venting time: ;b-Y$<
eKsc ["
3.真空容器 ED[`Y.;
3-1.真空容器;真空室vacuum chamber: kO>F, M
3-2.封离真空装置sealed vacuum device: Ey4%N`H-^
3-3.真空钟罩vacuum bell jar: H:TRJ.!w2
3-4.真空容器底板vacuum base plate: W6:ei.d+NS
3-5.真空岐管vacuum manifold: 3=SIIMp7=
3-6.前级真空容器(贮气罐)backing reservoir: eD2u!OKW!
3-7.真空保护层outer chamber: Z:j6AF3;
3-8.真空闸室vacuum air lock: {a;my"ly
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: [<CIh46S.
V~([{
4.真空封接和真空引入线 /i.3v45t"
4-1.永久性真空封接permanent seal : OiAP%7i9
4.2.玻璃分级过渡封接graded seal : ]rU$0)VN
4-3.压缩玻璃金属封接compression glass-to-metal seal: SFP%UfM<