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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 by0M(h  
    --------------------------------------------------- >TZyax<:  
    真空术语 jsnk*>j  
    W\JwEb9Y  
    1.标准环境条件 standard ambient condition: e2$k %c~  
    2.气体的标准状态 standard reference conditions forgases: 8iwqy0<  
    3.压力(压强)p pressure: A>W8^|l6+-  
    4.帕斯卡Pa pascal: tu0agSpU  
    5.托Torr torr: 7.`:Z_  
    6.标准大气压atm standard atmosphere: UBve a(z-#  
    7.毫巴mbar millibar: *S=zJyAO  
    8.分压力 partial pressure: l<=Y.P_2  
    9.全压力 total pressure: uP veAK}h  
    10.真空 vacuum: 0'4V*Y  
    11.真空度 degree of vacuum: Uk|(VR9  
    12.真空区域 ranges of vacuum: D\i8WU  
    13.气体 gas: Fb9!x/$tGV  
    14.非可凝气体 non-condensable gas: b(|1DE0Cv  
    15.蒸汽vapor: V?"SrXN>  
    16.饱和蒸汽压saturation vapor pressure: Q7@.WG5  
    17.饱和度degree of saturation: $d _%7xx  
    18.饱和蒸汽saturated vapor: F~tT5?+  
    19.未饱和蒸汽unsaturated vapor: or{X{_X7  
    20.分子数密度n,m-3 number density of molecules: U4ELlxGe  
    21.平均自由程ι、λ,m mean free path: j^'op|l  
    22.碰撞率ψ collision rate: }qOj^pkJ  
    23.体积碰撞率χ volume collision rate: Y]gb`z$?  
    24.气体量G quantity of gas: sX$EdIq  
    25.气体的扩散 diffusion of gas: c>nXnN  
    26.扩散系数D diffusion coefficient; diffusivity: W_ hckq.  
    27.粘滞流 viscous flow: N++jI(  
    28.粘滞系数η viscous factor: }+Ne)B E  
    29.泊肖叶流 poiseuille flow: bI?YNt,  
    30.中间流 intermediate flow: 3>t^Xu~  
    31.分子流 molecular flow: L+o"<LV]  
    32克努曾数 number of knudsen: V"{+cPBO)  
    33.分子泻流 molecular effusion; effusive flow: o:irwfArv  
    34.流逸 transpiration: _mJnhT3  
    35.热流逸 thermal transpiration: 5??\[C^"}  
    36.分子流率qN molecular flow rate; molecular flux: ,Bg)p_B  
    37.分子流率密度 molecular flow rate density; density of molecular flux: | p"E0av  
    38.质量流率qm mass flow rare: =Vm"2g,aA  
    39.流量qG throughput of gas: g1s\6%g  
    40.体积流率qV volume flow rate: kt*""&R  
    41.摩尔流率qυ molar flow rate: 8V$:th('  
    42.麦克斯韦速度分布 maxwellian velocity distribution: >uN)O-  
    43.传输几率Pc transmission probability: #A '|O\RGP  
    44.分子流导CN,UN molecular conductance: Ow\dk^\-G8  
    45.流导C,U conductance: #}Qzu~  
    46.固有流导Ci,Ui intrinsic conductance: &58+-jzW  
    47.流阻W resistance: SuU_psF  
    48.吸附 sorption: %@jL? u  
    49.表面吸附 adsorption: }t^N|I  
    50.物理吸附physisorption: \Gk4J<  
    51.化学吸附 chemisorption: @GpM 4>:  
    52.吸收absorption: ] %y3*N@AZ  
    53.适应系数α accommodation factor: ] _WB^  
    54.入射率υ impingement rate: "=S< xT+  
    55.凝结率condensation rate: X<<hb  
    56.粘着率 sticking rate: l" #}g%E  
    57.粘着几率Ps sticking probability: :7w^2/ZGo  
    58.滞留时间τ residence time: t<|S7EqIL  
    59.迁移 migration: 23AMrDF=N  
    60.解吸 desorption: [o0Z; }fU  
    61.去气 degassing: P~5[.6gW  
    62.放气 outgassing: D/ SM/  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: IP]"D"  
    64.蒸发率 evaporation rate: !6UtwCVR  
    65.渗透 permeation: 1b,,uI_  
    66.渗透率φ permeability: nCz_gYcIx  
    67.渗透系数P permeability coefficient t'@qb~sf  
    2.   1.真空泵 vacuum pumps JQhw>H9&  
    1-1.容积真空泵 positive displacement pump: `T gwa  
    ⑴.气镇真空泵 gas ballast vacuum pump: ^" EsBt  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: zIyMq3  
    ⑶.干封真空泵 dry-sealed vacuum pump: 0 =2D 90  
    ⑷.往复真空泵 piston vacuum pump: MifPZQ  
    ⑸.液环真空泵 liquid ring vacuum pump: dvAvG.;U  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: ;;9W/m~]  
    ⑺.定片真空泵 rotary piston vacuum pump: %6vf~oG  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: Uo!#p'<w)p  
    ⑼.余摆线真空泵 trochoidal vacuum pump: $cxulcay=  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: YtzB/q8I  
    ⑾.罗茨真空泵 roots vacuum pump: /"Bm1  
    1-2.动量传输泵 kinetic vacuum pump: [=63xPxs.  
    ⑴.牵引分子泵molecular drag pump: S|{'.XG  
    ⑵.涡轮分子泵turbo molecular pump: }CiB+  
    ⑶.喷射真空泵ejector vacuum pump: /WlpRf%  
    ⑷.液体喷射真空泵liquid jet vacuum pump: UUf-G0/P  
    ⑸.气体喷射真空泵gas jet vacuum pump: V?a+u7*U&  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : l.#iMi(@p~  
    ⑺.扩散泵diffusion pump : I?l%RdGW  
    ⑻.自净化扩散泵self purifying diffusion pump: G/2| *H  
    ⑼.分馏扩散泵 fractionating diffusion pump : 0<8p G:BQ  
    ⑽.扩散喷射泵diffusion ejector pump : TfD]`v`]   
    ⑾.离子传输泵ion transfer pump: LG0z|x(  
    1-3.捕集真空泵 entrapment vacuum pump: /$ -^k[%  
    ⑴吸附泵adsorption pump: m@r+M"!R  
    ⑵.吸气剂泵 getter pump: x2|YrkGv  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : W3XVr&  
    ⑷.吸气剂离子泵getter ion pump: +wAH?q8f  
    ⑸.蒸发离子泵 evaporation ion pump: 'Y ZYRFWXM  
    ⑹.溅射离子泵sputter ion pump: 8Rgvb3u  
    ⑺.低温泵cryopump: P,2FH2Eyj  
    5ayM}u%\~  
    2.真空泵零部件 bOt6q/f  
    2-1.泵壳 pump case: !ys82  
    2-2.入口 inlet: GWNLET  
    2-3.出口outlet: (8(7:aE $  
    2-4.旋片(滑片、滑阀)vane; blade : +J^-B}v  
    2-5.排气阀discharge valve: z%Xz*uu(|  
    2-6.气镇阀gas ballast valve: p97}HT}  
    2-7.膨胀室expansion chamber: . C g2Y  
    2-8.压缩室compression chamber: `uO(#au,U  
    2-9.真空泵油 vacuum pump oil: w"Q6'/P  
    2-10.泵液 pump fluid: D;pfogK @  
    2-11.喷嘴 nozzle: +bG^SH2ke  
    2-13.喷嘴扩张率nozzle expansion rate: Q-3o k7  
    2-14.喷嘴间隙面积 nozzle clearance area : tSr.0'CE  
    2-15.喷嘴间隙nozzle clearance: 6;02_C]\o  
    2-16.射流jet: l (EDe  
    2-17.扩散器diffuser: "k)}qI{  
    2-18.扩散器喉部diffuser thoat: ~nQv yM!$  
    2-19.蒸汽导管vapor tube(pipe;chimney): gEVN;G'B<=  
    2-20.喷嘴组件nozzle assembly: }tvLe3O  
    2-21.下裙skirt: X=i^[?C  
    )T-C/ 3  
    3.附件 GOT@  
    3-1阱trap: [jPUAr}  
    ⑴.冷阱 cold trap: 0Q81$% @<  
    ⑵.吸附阱sorption trap: dM%#DN8 l  
    ⑶.离子阱ion trap: 4z^ ?3@:K  
    ⑷.冷冻升华阱 cryosublimation trap: VJK?"mX  
    3-2.挡板baffle: K3uNR w  
    3-3.油分离器oil separator: P}] xz Vy  
    3-4.油净化器oil purifier: 1:7 uS.  
    3-5.冷凝器condenser: 3ErW3Ac Ou  
    .AIlv^:|U  
    4.泵按工作分类 HLL[r0P`F  
    4-1.主泵main pump: =J2\"6BnzA  
    4-2.粗抽泵roughing vacuum pump: :L~{Q>o  
    4-3.前级真空泵backing vacuum pump: b51{sL  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: :[;]6;  
    4-5.维持真空泵holding vacuum pump: cQ= "3M)~r  
    4-6.高真空泵high vacuum pump: g"Eg=CU  
    4-7.超高真空泵ultra-high vacuum pump: v8 Q/DJ~  
    4-8.增压真空泵booster vacuum pump: \7W4)>At-  
    (=hXt=hZ  
    5.真空泵特性 huMNt6P[  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: :xn/9y+s  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 < r6e23  
    5-3.起动压力starting pressure: zh5$$*\  
    5-4.前级压力 backing pressure : 85>WK+=  
    5-5.临界前级压力 critical backing pressure: (zW;&A  
    5-6.最大前级压力maximum backing pressure: 8<,b5  
    5-7.最大工作压力maximum working pressure: /%El0X  
    5-8.真空泵的极限压力ultimate pressure of a pump: f L @rv  
    5-9.压缩比compression ratio: "A_,Ga  
    5-10.何氏系数Ho coefficient: 7MRu=Z.-b  
    5-11.抽速系数speed factor: h/I'9&J>*  
    5-12.气体的反扩散back-diffusion of gas: KC+C?]~M  
    5-13.泵液返流back-streaming of pump fluid: /i$-ws-  
    5-14.返流率back-streaming rate K+3dwQo  
    5-15.返迁移back-migration: @x9DV{j)V  
    5-16.爆腾bumping: N|Cx";,|FZ  
    5-17.水蒸气允许量qm water vapor tolerable load: K k 5 vC{  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: Y,-?oBY  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: -P|EV|8=  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump YeN /J.R  
    3.   1.一般术语 4>q^W$  
    1-1.压力计pressure gauge: G k'j<a  
    1-2.真空计vacuum gauge: %Pr P CT  
    ⑴.规头(规管)gauge head: "qL4D4  
    ⑵.裸规nude gauge : %9|}H [x  
    ⑶.真空计控制单元gauge control unit : TTg>g~t`  
    ⑷.真空计指示单元gauge indicating unit : )_*<uSl  
    aE[>^~Lv}  
    2.真空计一般分类 ^P5+ _P  
    2-1.压差式真空计differential vacuum gauge: Va^AEuzF  
    2-2.绝对真空计 absolute vacuum gauge: O]ZP- WG  
    2-3.全压真空计total pressure vacuum gauge: 'qGKS:8  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: l?>sLKo9  
    2-5.相对真空计relative vacuum gauge : $"P9I-\m  
    ,@+ 7(W  
    3.真空计特性 8"!Z^_y)  
    3-1.真空计测量范围pressure range of vacuum gauge: <E2+P,Lgw  
    3-2.灵敏度系数sensitivity coefficient: aq ~g 54  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): ;DMv?-H  
    3-5.规管光电流photon current of vacuum gauge head: em^|E73  
    3-6.等效氮压力equivalent nitrogen pressure : _%g}d/v}pO  
    3-7.X射线极限值 X-ray limit: Yg 8AMi  
    3-8.逆X射线效应anti X-ray effect: `;[ j`v8O  
    3-9.布利尔斯效应blears effect: oY!nM%z/  
    Qr`WPTQr"  
    4.全压真空计 !Vtt.j &4  
    4-1.液位压力计liquid level manometer: owClnp9K  
    4-2.弹性元件真空计elastic element vacuum gauge: aGK=VN}r  
    4-3.压缩式真空计compression gauge: +Eil:Jz  
    4-4.压力天平pressure balance: g~ tG  
    4-5.粘滞性真空计viscosity gauge : K6#9HF'2I  
    4-6.热传导真空计thermal conductivity vacuum gauge : 5):2;hk  
    4-7.热分子真空计thermo-molecular gauge: % K$om|]p  
    4-8.电离真空计ionization vacuum gauge: wRgh`Hc\}  
    4-9.放射性电离真空计radioactive ionization gauge: -4P2 2  
    4-10.冷阴极电离真空计cold cathode ionization gauge: E?c)WA2iH  
    4-11.潘宁真空计penning gauge: {}Y QB'}  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: >>lT-w  
    4-13.放电管指示器discharge tube indicator: _ Je k;N  
    4-14.热阴极电离真空计hot cathode ionization gauge: I(6k.PQ  
    4-15.三极管式真空计triode gauge: [al,UO  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: 0qXkWGB  
    4-17.B-A型电离真空计Bayard-Alpert gauge: p5<2tSD  
    4-18.调制型电离真空计modulator gauge: TGnyN'P|  
    4-19.抑制型电离真空计suppressor gauge: |*4)G6J@n  
    4-20.分离型电离真空计extractor gauge: auOYi<<>W  
    4-21.弯注型电离真空计bent beam gauge: GO@pwq<  
    4-22.弹道型电离真空计 orbitron gauge : :Jp$_T&E  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: 5#~ARk*?a  
    5t6!K?}  
    5.分压真空计(分压分析器) )|>LSKT El  
    5-1.射频质谱仪radio frequency mass spectrometer: 28l",j)S  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: yVe<[!hJ  
    5-3.单极质谱仪momopole mass spectrometer: (k?,+jnR  
    5-4.双聚焦质谱仪double focusing mass spectrometer: /1X0h  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: /yHM =&Vg]  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: 8Z;wF  
    5-7.回旋质谱仪omegatron mass spectrometer: vkmTd4g  
    5-8.飞行时间质谱仪time of flight mass spectrometer: %G9: M;|'  
    q2VQS1R`8  
    6.真空计校准 ien >Ou  
    6-1.标准真空计reference gauges: n7~!klF-  
    6-2.校准系统system of calibration: <UJgl{ -  
    6-3.校准系数K calibration coefficient: 6l|pTyb1  
    6-4.压缩计法meleod gauge method: (5@9j  
    6-5.膨胀法expansion method: sY?pp '}a  
    6-6.流导法flow method: @";z?xj  
    4.   1.真空系统vacuum system o[AQS`  
    1-1.真空机组pump system: E.v~<[g  
    1-2.有油真空机组pump system used oil : &wj;:f  
    1-3.无油真空机组oil free pump system x Z2 }1D  
    1-4.连续处理真空设备continuous treatment vacuum plant: ;^)(q<]  
    1-5.闸门式真空系统vacuum system with an air-lock: y6KI.LWR9  
    1-6.压差真空系统differentially pumped vacuum system: V}732?Jy  
    1-7.进气系统gas admittance system: l 6wX18~XJ  
    Ba/Z<1)  
    2.真空系统特性参量 ~ei\~;n\@  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : v'`9^3(-  
    2-2.抽气装置的抽气量throughput of a pumping unit : Dx/!^L02  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: v#/Uq?us  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: Ou IoO  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: VNx|nP&  
    2-6.极限压力ultimate pressure: }?B=R#5  
    2-7.残余压力residual pressure: >So)KB  
    2-8.残余气体谱residual gas spectrum: ]saf<?fzr  
    2-9.基础压力base pressure: (j-[m\wF  
    2-10.工作压力working pressure: kvh}{@|-  
    2-11.粗抽时间roughing time: 1 O+4A[cr  
    2-12.抽气时间pump-down time: @YyTXg{ZK  
    2-13.真空系统时间常数time constant of a vacuum system: bu"R2~sb  
    2-14.真空系统进气时间venting time: ;i`X&[y;  
    S5ka;g  
    3.真空容器 CQfrAk4mu  
    3-1.真空容器;真空室vacuum chamber: ShanwaCDqv  
    3-2.封离真空装置sealed vacuum device: }J t( H  
    3-3.真空钟罩vacuum bell jar: HxJKS*H;  
    3-4.真空容器底板vacuum base plate:  =%AFn9q  
    3-5.真空岐管vacuum manifold: k))*Sg  
    3-6.前级真空容器(贮气罐)backing reservoir: $NP5Z0v7  
    3-7.真空保护层outer chamber: FKflN  
    3-8.真空闸室vacuum air lock: ' >[KVvm  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: 42LlR 0  
    "HFS5Bj'  
    4.真空封接和真空引入线 +F ~;Q$T  
    4-1.永久性真空封接permanent seal : XJnDx 09h  
    4.2.玻璃分级过渡封接graded seal : S1^u/$*6  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: dwks"5l  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: O4FW/)gq  
    4-5.陶瓷金属封接ceramic-to-metal seal: 5,>1rd<B  
    4-6.半永久性真空封接semi-permanent seal : NUBzmnA>8  
    4-7.可拆卸的真空封接demountable joint: vTYI ez`g  
    4-8.液体真空封接liquid seal 8Dpf{9Y-E  
    4-9.熔融金属真空封接molten metal seal: #V[ ?puE@  
    4-10.研磨面搭接封接ground and lapped seal: -CW&!oW  
    4-11.真空法兰连接vacuum flange connection: Lys4l$J]  
    4-12.真空密封垫vacuum-tight gasket: }gL9G  
    4-13.真空密封圈ring gasket: xd8UdQ, lt  
    4-14.真空平密封垫flat gasket: s)<#a(!  
    4-15.真空引入线feedthrough leadthrough: $DW3H1iW  
    4-16.真空轴密封shaft seal: &NV[)6!  
    4-17.真空窗vacuum window: sChMIbq!Av  
    4-18.观察窗viewing window: o9M[Zr1@k  
    jJl6H~ "q  
    5.真空阀门 O!='U!X@P  
    5-1.真空阀门的特性characteristic of vacuum valves: |jm|/{lc  
    ⑴.真空阀门的流导conductance of vacuum valves: { 'Hi_b3  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: 35Nwx<  
    5-2.真空调节阀regulating valve: 5gW`;Cdbyc  
    5-3.微调阀 micro-adjustable valve: xEaRuH c  
    5-4.充气阀charge valve: ~u1ox_v`%(  
    5-5.进气阀gas admittance valve: 8Q^yh6z  
    5-6.真空截止阀break valve: ';??0M  
    5-7.前级真空阀backing valve: qVC_K/w 7  
    5-8.旁通阀 by-pass valve: `(1em%}  
    5-9.主真空阀main vacuum valve: ~c[} %Ir>  
    5-10.低真空阀low vacuum valve: B{!)GZ(}  
    5-11.高真空阀high vacuum valve: A|tee@H*0  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: ` =dD6r  
    5-13.手动阀manually operated valve: !*u5HVn  
    5-14.气动阀pneumatically operated valve: )F&@ M;2p'  
    5-15.电磁阀electromagnetically operated valve: @~fg[)7M  
    5-16.电动阀valve with electrically motorized operation: ?GU/Rf!H#  
    5-17.挡板阀baffle valve: #(h~l> r  
    5-18.翻板阀flap valve: FCQoz"M  
    5-19.插板阀gate valve: 3tI=? E#  
    5-20.蝶阀butterfly valve: r9@O`i  
    .%`|vGF  
    6.真空管路 +Uq9C-Iu  
    6-1.粗抽管路roughing line: wNDLN`,^H  
    6-2.前级真空管路backing line: `|wH=  
    6-3.旁通管路;By-Pass管路 by-pass line: mp0p#8txi  
    6-4.抽气封口接头pumping stem: JU:!lyd  
    6-5.真空限流件limiting conductance:       zB\g'F/  
    6-6.过滤器filter: KgVit+4u/  
    5.   1.一般术语 rwFR5  
    1-1真空镀膜vacuum coating: 8,YF>O&  
    1-2基片substrate: i9k7rEW^  
    1-3试验基片testing substrate: zc]F  
    1-4镀膜材料coating material: C=@BkneQ  
    1-5蒸发材料evaporation material: <1&kCfE&  
    1-6溅射材料sputtering material: Vj4 if@Z  
    1-7膜层材料(膜层材质)film material: 5. :To2  
    1-8蒸发速率evaporation rate: 9:A>a3KOH  
    1-9溅射速率sputtering rate: tu77Sb  
    1-10沉积速率deposition rate: Nv*x^y]  
    1-11镀膜角度coating angle: rfYu8-  
    7GfgW02  
    2.工艺 ,oIZ5u{#,  
    2-1真空蒸膜vacuum evaporation coating: %H>vMR-,~  
    (1).同时蒸发simultaneous evaporation: EVNTn`J_  
    (2).蒸发场蒸发evaporation field evaporation: NmST1pMk  
    (3).反应性真空蒸发reactive vacuum evaporation: 9 f-T>}  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: aRq7x~j )\  
    (5).直接加热的蒸发direct heating evaporation: q?8MKf[N  
    (6).感应加热蒸发induced heating evaporation: a\vf{2  
    (7).电子束蒸发electron beam evaporation: b@^M|h.Va  
    (8).激光束蒸发laser beam evaporation: VbM5]UT/  
    (9).间接加热的蒸发indirect heating evaporation: V-A^9AAPm  
    (10).闪蒸flash evaportion: yNc>s/  
    2-2真空溅射vacuum sputtering: tzi+A;>c(v  
    (1).反应性真空溅射 reactive vacuum sputtering: m<8j' [+  
    (2).偏压溅射bias sputtering: nen6!bw4  
    (3).直流二级溅射direct current diode sputtering: KU-z;}9s  
    (4).非对称性交流溅射asymmtric alternate current sputtering: cAyR)Y!I  
    (5).高频二极溅射high frequency diode sputtering: ro@Zbm;P  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: @ 5 kKMz  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: !/< 5.9!9r  
    (8).离子束溅射ion beam sputtering: qt/syF&s  
    (9).辉光放电清洗glow discharge cleaning: =/6.4;8  
    2-3物理气相沉积PVD physical vapor deposition: Z/q%%(fh 0  
    2-4化学气相沉积CVD chemical vapor deposition: `m3@mJ!>\  
    2-5磁控溅射magnetron sputtering: z:u`W#Rf  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: 1?(BWX)7  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: ifTVTd7O  
    2-8电弧离子镀arc discharge deposition: Rt7}e09HV  
    ;DC0LJ  
    3.专用部件 ?MKf=! w  
    3-1镀膜室coating chamber: @E O #Ms  
    3-2蒸发器装置evaporator device: GOJi/R.{  
    3-3蒸发器evaporator: 6xdu}l=%  
    3-4直接加热式蒸发器evaporator by direct heat: {N)\It  
    3-5间接加热式蒸发器evaporator by indirect heat: )@eBe^  
    3-7溅射装置sputtering device: j`,;J[Zd`h  
    3-8靶target: Ep5lm zg  
    3-10时控挡板timing shutter: W{ eu_  
    3-11掩膜mask: 8o-?Y.2  
    3-12基片支架substrate holder: JsnavI6  
    3-13夹紧装置clamp: Z;%  
    3-14换向装置reversing device: &@dMk4BH<  
    3-15基片加热装置substrate heating device: CSr{MF`]e  
    3-16基片冷却装置substrate colding device: cnLC>_hY  
    v^@L?{" }8  
    4.真空镀膜设备 1"/V?ArfL  
    4-1真空镀膜设备vacuum coating plant: <$?:|  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: O b8[P=  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: V.y+u7<3}  
    4-2连续镀膜设备continuous coating plant: LvWU %?  
    4-3半连续镀膜设备semi- continuous coating plant T d;e\s/]  
    6.   1.漏孔 rFx2 S  
    1-1漏孔leaks: W**=X\"'  
    1-2通道漏孔channel leak: LWVO%@)w  
    1-3薄膜漏孔membrane leak: q/;mxq$  
    1-4分子漏孔molecular leak: T"QY@#E  
    1-5粘滞漏孔vixcous leak: 7e8hnTzl8<  
    1-6校准漏孔calibrated leak: * uEU9fX  
    1-7标准漏孔reference leak : 4 T^M@+&|  
    1-8虚漏virtual leak: @lTUag'U0  
    1-9漏率leak rate: 7y[B[$P  
    1-10标准空气漏率standard air leak rate: +D h=D*  
    1-11等值标准空气漏率equivalent standard air leak rate: g!~j Wn?A  
    1-12探索(示漏)气体: ]G1j\wnF  
    e\yj>tQJg  
    2.本底 V?_%Y<|L  
    2-1本底background: xje{ kx#  
    2-2探索气体本底search gas background : b%oma{I=.c  
    2-3漂移drift: c'G\AbUVjE  
    2-4噪声noise: `/HygC6  
    20fCWVw}?}  
    3.检漏仪 W/\7m\ B  
    3-1检漏仪leak detector: Qb(CH  
    3-2高频火花检漏仪H.F. spark leak detector: spl*[ d  
    3-3卤素检漏仪halide leak detector: s &.Z;X  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: U!e4_JBR'  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: 2X*epU_1h  
    CC)9Ks\  
    4.检漏 &1Y+ q]  
    4-1气泡检漏leak detection by bubbles: }s)Z:6;(,q  
    4-2氨检漏leak detection by ammonia: 8p5'}Lq  
    4-3升压检漏leak detection of rise pressure: iEU(1?m2-  
    4-4放射性同位素检漏radioactive isotope leak detection: S;t~"87v*  
    4-5荧光检漏fluorescence leak detection 5vpf;  
    7.   1.一般术语 {^\-%3$  
    1-1真空干燥vacuum drying: bTiw?i+6Dv  
    1-2冷冻干燥freeze drying : ;m5M: Z"  
    1-3物料material: iF%q 6R  
    1-4待干燥物料material to be dried: yr=r? h}  
    1-5干燥物料dried material : yq<YGNy!  
    1-6湿气moisture;humidity: %]R#}amW  
    1-7自由湿气free moisture: YLCwo]\+>  
    1-8结合湿气bound moisture: :?p{ga9  
    1-9分湿气partial moisture: xO.7cSqgw  
    1-10含湿量moisture content: ;=7z!:)  
    1-11初始含湿量initial moisture content: mi-\PD>X  
    1-12最终含湿量final residual moisture: "~[Rwh?  
    1-13湿度degree of moisture ,degree of humidity : r]E$uq bR  
    1-14干燥物质dry matter : jNyC%$  
    1-15干燥物质含量content of dry matter: )ld7^G  
    [-CG&l2?L  
    2.干燥工艺 jqLyX  
    2-1干燥阶段stages of drying : V\G>e{  
    (1).预干燥preliminary dry: `j(+Y  
    (2).一次干燥(广义)primary drying(in general): O[`Ob6Q{F  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): uVk8KMYU  
    (4).二次干燥secondary drying: H,I}R  
    2-2.(1).接触干燥contact drying: cpy"1=K~M  
    (2).辐射干燥 drying by radiation : 9F-k:hD |  
    (3).微波干燥microwave drying: y H'\<bT  
    (4).气相干燥vapor phase drying: |`okIqp  
    (5).静态干燥static drying: E??%)q  
    (6).动态干燥dynamic drying: |4c==7.  
    2-3干燥时间drying time: eeDhTw9  
    2-4停留时间length of stay(in the drying chamber): J{Ay(  
    2-5循环时间cycle time: o2|(0uN'  
    2-6干燥率 dessication ratio : RasoOj$  
    2-7去湿速率mass flow rate of humidity: l6 WcnJ  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: xC{NIOYn'  
    2-9干燥速度 drying speed : <-?B#  
    2-10干燥过程drying process: HUghl2L.<  
    2-11加热温度heating temperature: Lg?'1dg  
    2-12干燥温度temperature of the material being dried : 6+FON$8  
    2-13干燥损失loss of material during the drying process : Y]lqtre*Y  
    2-14飞尘lift off (particles): em]K7B=  
    2-15堆层厚度thickness of the material: "h2Ny#  
    C1/jA>XW  
    3.冷冻干燥 -hzza1DP  
    3-1冷冻freezing: p3S c4  
    (1).静态冷冻static freezing: 47RYpd  
    (2).动态冷冻dynamic freezing: ;1dz?'%V  
    (3).离心冷冻centrifugal freezing: O)Qz$  
    (4).滚动冷冻shell freezing: aYgJTep>r  
    (5).旋转冷冻spin-freezing: 'l:2R,cP  
    (6).真空旋转冷冻vacuum spin-freezing: y#0w\/<  
    (7).喷雾冷冻spray freezing: g@2.A;N0  
    (8).气流冷冻air blast freezing: #SYWAcTkO}  
    3-2冷冻速率rate of freezing: Q#N+5<]J)#  
    3-3冷冻物料frozen material: |z'?3?,~  
    3-4冰核ice core: 6ZR0_v;TD  
    3-5干燥物料外壳envelope of dried matter: 9yh@_~rZ  
    3-6升华表面sublimation front: V\"5<>+O  
    3-7融化位置freezer burn: NM@An2  
    ]'Yw#YB  
    4.真空干燥设备;真空冷冻干燥设备 /RM-+D:Y  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: @>]3xHE6#=  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: J$Epj  
    4-3加热表面heating surface: Q8x{V_Pot  
    4-4物品装载面shelf : 2FzS_\":I  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): w#T,g9  
    4-6单位面积干燥器处理能力throughput per shelf area: PR?clg=z  
    4-7冰冷凝器ice condenser: q?L(V+X  
    4-8冰冷凝器的负载load of the ice condenser: {*U:Wm<  
    4-9冰冷凝器的额定负载rated load of the ice condenser 3\+p1f4  
    8.   1.一般术语 hBhkb ~Oky  
    1-1试样sample : d mz3O(]$  
    (1).表面层surface layer: }L!`K"^O&  
    (2).真实表面true surface: JNaW> X$K  
    (3).有效表面积effective surface area: \2pFFVT  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: |esjhf}H>v  
    (5).表面粒子密度surface particle density: [QbXj0en$  
    (6).单分子层monolayer: >n~p1:$  
    (7).表面单分子层粒子密度monolayer density: P;%QA+%7  
    (8).覆盖系数coverage ratio: v|@n8ED|@K  
    1-2激发excitation: cEdJn@ ,  
    (1).一次粒子primary particle: pXv[]v  
    (2).一次粒子通量primary particle flux: 6ZpcT&yL  
    (3).一次粒子通量密度density of primary particle flux: #&83;uys  
    (4).一次粒子负荷primary particle load: =-LX)|x}  
    (5).一次粒子积分负荷integral load of primary particle: <y!r~?  
    (6).一次粒子的入射能量energy of the incident primary particle: fR4l4 GU?)  
    (7).激发体积excited volume: AJfi,rFPg  
    (8).激发面积excited area: lM^!^6=v0l  
    (9).激发深度excited death: HY;?z `=  
    (10).二次粒子secondary particles: b U]N^og^  
    (11).二次粒子通量secondary particle flux: [IFRwQ^%_O  
    (12).二次粒子发射能energy of the emitted secondary particles: 4D$sFR|?t  
    (13).发射体积emitting volume: oxQID  
    (14).发射面积emitting area: WG !t!1p  
    (15).发射深度emitting depth: `?^w  
    (16).信息深度information depth: DXW?;|8)O  
    (17).平均信息深度mean information depth: > x ghq  
    1-3入射角angle of incidence: %8CT -mQ  
    1-4发射角angle of emission: /}`/i(k  
    1-5观测角observation: 3C=clB9<  
    1-6分析表面积analyzed surface area: h5rP]dbhXU  
    1-7产额 yield : QX.6~*m1  
    1-8表面层微小损伤分析minimum damage surface analysis: |8 2tw|<o  
    1-9表面层无损伤分析non-destructive surface analysis: NcBe|qxQ  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : /Jf`x>eiH  
    1-11可观测面积observable area: |4. o$*0Y  
    1-12可观测立体角observable solid angle : q'F_ j"  
    1-13接受立体角;观测立体角angle of acceptance: F[D0x26 ^  
    1-14角分辨能力angular resolving power: QYfAf3te  
    1-15发光度luminosity: nX\]i~  
    1-16二次粒子探测比detection ratio of secondary particles: V/}>>4  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: %;(|KrUN  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: ht3T{4qCS  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: iW1ih Q X  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: Of7) A  
    1-21本底压力base pressure: Di<J6xu  
    1-22工作压力working pressure: h2"|tTm,a  
    ]9&q'7*L  
    2.分析方法 }SMJD  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: #VdI{IbW  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : ;q,)NAr&  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: Kwl qi]~  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: ;5Vk01R  
    2-3离子散射表面分析ion scattering spectroscopy: B_"OA3d_  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: \W`}L  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: 2Cd --W+=  
    2-6离子散射谱仪ion scattering spectrometer: r` `i C5Ii  
    2-7俄歇效应Auger process: ?[ S >&Vq  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: AIl$qPKj&  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: hG~]~ )  
    2-10光电子谱术photoelectron spectroscopy : O<dZA=Oez  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: ))IgB).3M  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: =F %wlzF:  
    2-11光电子谱仪photoelectron spectrometer: g)9JO6]  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: X}j'L&{F@  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: cl8_rt  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): @ojg`!,  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊