“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 Drg'RR><
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真空术语 %$b
5&>q
WS;3a}u
1.标准环境条件 standard ambient condition: n6oVx5/
2.气体的标准状态 standard reference conditions forgases: |>VHV} 4)<
3.压力(压强)p pressure: ^y&l!,(A
4.帕斯卡Pa pascal: B} &C
h
5.托Torr torr: 9)wjVk
6.标准大气压atm standard atmosphere: -O2QzzE&
7.毫巴mbar millibar: dNIY`u
8.分压力 partial pressure: fz<Y9h=
9.全压力 total pressure: Oi7|R7NE
10.真空 vacuum: (RGl, x:
11.真空度 degree of vacuum: 75<E 0O
12.真空区域 ranges of vacuum: d+=;sJ
13.气体 gas: WMrK8e'
14.非可凝气体 non-condensable gas: 9n$$D;
15.蒸汽vapor: >4bOM@[]
16.饱和蒸汽压saturation vapor pressure: WC}mt%H*O
17.饱和度degree of saturation: a]75z)XR
18.饱和蒸汽saturated vapor: K&Zdk (l)
19.未饱和蒸汽unsaturated vapor: r/8,4:rh
20.分子数密度n,m-3 number density of molecules: ~ 5`Ngpp
21.平均自由程ι、λ,m mean free path: ~d28"p.7
22.碰撞率ψ collision rate: 'M YqCfIK
23.体积碰撞率χ volume collision rate: k5W5 9tz
24.气体量G quantity of gas: |)1"*`z
25.气体的扩散 diffusion of gas: N\mV+f3A@,
26.扩散系数D diffusion coefficient; diffusivity: ;sb0,2YyP
27.粘滞流 viscous flow: :y0'[LV
28.粘滞系数η viscous factor: 0s=GM|y
29.泊肖叶流 poiseuille flow: %kKtPrT
30.中间流 intermediate flow: UI |D?z<
31.分子流 molecular flow: tlG&PVvr
32克努曾数 number of knudsen: ;z!~-ByzL
33.分子泻流 molecular effusion; effusive flow:
Ws}u4t
34.流逸 transpiration: Yr!<O&=
35.热流逸 thermal transpiration: {P(IA2J'S
36.分子流率qN molecular flow rate; molecular flux: QR<IHE{~8
37.分子流率密度 molecular flow rate density; density of molecular flux: <"aPoGda
38.质量流率qm mass flow rare: SC"=M^E
39.流量qG throughput of gas: i7:j(W^I8
40.体积流率qV volume flow rate: n(-XI&Kn
41.摩尔流率qυ molar flow rate: 7RTp+FC]
42.麦克斯韦速度分布 maxwellian velocity distribution: N!^U{;X7/
43.传输几率Pc transmission probability: q48V|6X'q
44.分子流导CN,UN molecular conductance: MhHygZT[}
45.流导C,U conductance: :!J!l u
46.固有流导Ci,Ui intrinsic conductance: " ?n~ /9`
47.流阻W resistance: 3>/Yku)t
48.吸附 sorption: 8BC}D+q
49.表面吸附 adsorption: "P'W@
50.物理吸附physisorption: g@KS\.m]
51.化学吸附 chemisorption: FG1$_zN |
52.吸收absorption: PtwE[YDu
53.适应系数α accommodation factor: / IAK'/
54.入射率υ impingement rate: GS4!c8>
55.凝结率condensation rate: Z#nj[r!l}
56.粘着率 sticking rate: qP *$wKY,
57.粘着几率Ps sticking probability: k g0Z(T:&8
58.滞留时间τ residence time: mvlK~c8
59.迁移 migration: J*A<F'^F1
60.解吸 desorption: d* 7 Tjs{\
61.去气 degassing: rW&8#&
62.放气 outgassing: 7Oru{BQ">
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: =0MW+-
64.蒸发率 evaporation rate: l%rwJLN1
65.渗透 permeation: lpj$\WI=
66.渗透率φ permeability: $:t;WXc.<
67.渗透系数P permeability coefficient nkSYW]aQ1g
2. 1.真空泵 vacuum pumps *3s4JK
1-1.容积真空泵 positive displacement pump: `$fwLC3j
⑴.气镇真空泵 gas ballast vacuum pump: WpWnwQY`#
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: l{E+j%
⑶.干封真空泵 dry-sealed vacuum pump: e{>X2UNW
⑷.往复真空泵 piston vacuum pump: Yq $(Ex
⑸.液环真空泵 liquid ring vacuum pump: $7T3wv9
⑹.旋片真空泵 sliding vane rotary vacuum pump: Yvcd(2
⑺.定片真空泵 rotary piston vacuum pump: Ir_K83VM
⑻.滑阀真空泵 rotary plunger vacuum pump: +q|2j>k@
⑼.余摆线真空泵 trochoidal vacuum pump: /q ;MihK
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: !gWV4vC
⑾.罗茨真空泵 roots vacuum pump: `u3to{
1-2.动量传输泵 kinetic vacuum pump: 6NVf&;laQ
⑴.牵引分子泵molecular drag pump: wyMj^+ 2m
⑵.涡轮分子泵turbo molecular pump: $21+6
⑶.喷射真空泵ejector vacuum pump: 5P,{h
⑷.液体喷射真空泵liquid jet vacuum pump: cP''
⑸.气体喷射真空泵gas jet vacuum pump: j{C+`~O
⑹.蒸汽喷射真空泵vapor jet vacuum pump : }:5AB93(
⑺.扩散泵diffusion pump : DK}k||-
⑻.自净化扩散泵self purifying diffusion pump: n\Uh5P1W"
⑼.分馏扩散泵 fractionating diffusion pump : %K@D{)r_^
⑽.扩散喷射泵diffusion ejector pump : <(TTYf8lS
⑾.离子传输泵ion transfer pump: ^,]'Ut
1-3.捕集真空泵 entrapment vacuum pump:
q+>J'UGb
⑴吸附泵adsorption pump: O['gp~P"
⑵.吸气剂泵 getter pump: )cNG)F
⑶.升华(蒸发)泵 sublimation (evaporation)pump : dq%7A=-
⑷.吸气剂离子泵getter ion pump: Jtnuo]{R
⑸.蒸发离子泵 evaporation ion pump: w4H3($
K
⑹.溅射离子泵sputter ion pump: y TfAS.
⑺.低温泵cryopump: S 0eD
2
Q* ifmnB'
2.真空泵零部件 Yv\.QrxPm
2-1.泵壳 pump case: M:z)uLDw
2-2.入口 inlet: 9JV(}v5[
2-3.出口outlet: *lRP ZN
2-4.旋片(滑片、滑阀)vane; blade : Ml1yk)3G
2-5.排气阀discharge valve: B<i)je!
2-6.气镇阀gas ballast valve: cVv+,l4V0
2-7.膨胀室expansion chamber: `d2}>
2-8.压缩室compression chamber: q$`{$RX
2-9.真空泵油 vacuum pump oil: ?}\aG3_4
2-10.泵液 pump fluid: 4vq,W_n.hQ
2-11.喷嘴 nozzle: +QT(~<
2-13.喷嘴扩张率nozzle expansion rate: 12n5{'H2%
2-14.喷嘴间隙面积 nozzle clearance area : 'L4@|c~x
2-15.喷嘴间隙nozzle clearance: &@u;xc| v
2-16.射流jet: ;A7HEx
2-17.扩散器diffuser: q[`)A?Ae
2-18.扩散器喉部diffuser thoat: "v@$CR9<T
2-19.蒸汽导管vapor tube(pipe;chimney): ,TPNsz|Q
2-20.喷嘴组件nozzle assembly: mk.:V64 >;
2-21.下裙skirt: Z?
u\
^Lr)STh
3.附件 dmI,+hHtL
3-1阱trap: (yIl]ZN*
⑴.冷阱 cold trap: ${Cb1|g>j
⑵.吸附阱sorption trap: :bFCnV`Q
⑶.离子阱ion trap: )X2=x^u*U
⑷.冷冻升华阱 cryosublimation trap: S'm&Ll2i@
3-2.挡板baffle: |!:ImX@
3-3.油分离器oil separator: ( P|Ph
3-4.油净化器oil purifier: X-&t!0O4}`
3-5.冷凝器condenser: t:NTk(
I}a`11xb`
4.泵按工作分类 UUi@
U
4-1.主泵main pump: fWie fv[&
4-2.粗抽泵roughing vacuum pump: 5W_u|z+/g
4-3.前级真空泵backing vacuum pump: b@j**O>[q)
4-4.粗(低)真空泵 roughing(low)vacuum pump: V)#se"GV
4-5.维持真空泵holding vacuum pump: OCmF/B_
4-6.高真空泵high vacuum pump: )HbsUm#
4-7.超高真空泵ultra-high vacuum pump: ^]:w5\DG
4-8.增压真空泵booster vacuum pump: A_3V1<J`]
9a}rE
5.真空泵特性 SXkUtY$
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: ;mH O#
5-2.真空泵的抽气量Q throughput of vacuum pump:。 _)s<E9t2N
5-3.起动压力starting pressure: 3\_ae2GW
5-4.前级压力 backing pressure : 'q%56WAJ
5-5.临界前级压力 critical backing pressure: NH&/=
5-6.最大前级压力maximum backing pressure: j9"uxw@
5-7.最大工作压力maximum working pressure: d,kh6'g2@
5-8.真空泵的极限压力ultimate pressure of a pump: Za68V/Vj
5-9.压缩比compression ratio: qgREkb0
5-10.何氏系数Ho coefficient: ~\_aT2j0
5-11.抽速系数speed factor: "FA&Qm0
5-12.气体的反扩散back-diffusion of gas: gB/4ro8
5-13.泵液返流back-streaming of pump fluid: -6lsR
5-14.返流率back-streaming rate qxS=8#-`(
5-15.返迁移back-migration: X"_,#3Ko!
5-16.爆腾bumping: `x=W)o
}
5-17.水蒸气允许量qm water vapor tolerable load: 2d:<P!B
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: 2fZVBj
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: t^eWFX
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump Hy4c{Ij
3. 1.一般术语 =`RogjbP
1-1.压力计pressure gauge: =eG?O7z&
1-2.真空计vacuum gauge: hP1}Do
⑴.规头(规管)gauge head: b[5$$_[
⑵.裸规nude gauge : 0($@9k4!/
⑶.真空计控制单元gauge control unit : &'%b1CbE
⑷.真空计指示单元gauge indicating unit : %eJolztKZ
-+vA9,pI
2.真空计一般分类 n~~0iU)
2-1.压差式真空计differential vacuum gauge: .Up\ 0|b
2-2.绝对真空计 absolute vacuum gauge: y X%q7ex
2-3.全压真空计total pressure vacuum gauge: Md!L@gX6<
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: WhPwD6l>
2-5.相对真空计relative vacuum gauge : 1Z9_sd~/6
P .I<.e
3.真空计特性 06hzCWm#
3-1.真空计测量范围pressure range of vacuum gauge: ,'=Tf=wq
3-2.灵敏度系数sensitivity coefficient: 61qs`N=k
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): S"t6 *fWr
3-5.规管光电流photon current of vacuum gauge head: rHS;wT
3-6.等效氮压力equivalent nitrogen pressure : -TIrbYS`
3-7.X射线极限值 X-ray limit: <P)U Ggd
3-8.逆X射线效应anti X-ray effect: %V40I{1
3-9.布利尔斯效应blears effect: $U3|.4
9\2<#,R1q
4.全压真空计 [V vTR#^
4-1.液位压力计liquid level manometer: jg2UX
4-2.弹性元件真空计elastic element vacuum gauge: q.
i2BoOd
4-3.压缩式真空计compression gauge: !m7`E
4-4.压力天平pressure balance: "Jd!TLt\x
4-5.粘滞性真空计viscosity gauge : e_eNtVq
4-6.热传导真空计thermal conductivity vacuum gauge :
$f++n5I
4-7.热分子真空计thermo-molecular gauge: >[,ywRJ#_}
4-8.电离真空计ionization vacuum gauge: qN5 ru2
4-9.放射性电离真空计radioactive ionization gauge: ,`4chD
4-10.冷阴极电离真空计cold cathode ionization gauge: t r)[6o#
4-11.潘宁真空计penning gauge: r>!$eqX_
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: j`fQN
4-13.放电管指示器discharge tube indicator: KKrLF?rc
4-14.热阴极电离真空计hot cathode ionization gauge: wR7Ja
cKv
4-15.三极管式真空计triode gauge: |rjHH<
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: ;$`5L"I5$
4-17.B-A型电离真空计Bayard-Alpert gauge: YY!Lv:.7>
4-18.调制型电离真空计modulator gauge: O)0}yF$0
4-19.抑制型电离真空计suppressor gauge: }rWEa^
4-20.分离型电离真空计extractor gauge: AXnuXa(j
4-21.弯注型电离真空计bent beam gauge: 5y
9(<}z
4-22.弹道型电离真空计 orbitron gauge : K-_XdJ\
4-23.热阴极磁控管真空计hot cathode magnetron gauge: s}
I8:ufT
%l4;-x<e
5.分压真空计(分压分析器) [uJfmr EH
5-1.射频质谱仪radio frequency mass spectrometer: fGeDygV^`
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: -<g&U*/E
5-3.单极质谱仪momopole mass spectrometer: jTR>H bh
5-4.双聚焦质谱仪double focusing mass spectrometer: TFfV?rBI
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: e;|:W A
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: G_vcuCHm
5-7.回旋质谱仪omegatron mass spectrometer: W2$MH: j
5-8.飞行时间质谱仪time of flight mass spectrometer: lx'^vK% F
(G>S`B
6.真空计校准 P{bRRn4Z
6-1.标准真空计reference gauges: 0[# zn
6-2.校准系统system of calibration: yt5Sy
6-3.校准系数K calibration coefficient: y;\m1o2
6-4.压缩计法meleod gauge method: '3p7ee&
6-5.膨胀法expansion method: ~nVO%IxM4J
6-6.流导法flow method: <UEta>jj
4. 1.真空系统vacuum system zu,F 0;De
1-1.真空机组pump system: )Ja&Y
1-2.有油真空机组pump system used oil : 8opd0'SNaB
1-3.无油真空机组oil free pump system tk5zq-/d
1-4.连续处理真空设备continuous treatment vacuum plant: O)aWTI
1-5.闸门式真空系统vacuum system with an air-lock: ee}HQ.}Ja
1-6.压差真空系统differentially pumped vacuum system: /q^\g4J
1-7.进气系统gas admittance system: {vhP'!a6W
#Q]^9/;|4n
2.真空系统特性参量 SSAf<44e
2-1.抽气装置的抽速volume flow rate of a pumping unit : Y'{F^VxA/
2-2.抽气装置的抽气量throughput of a pumping unit : +_T`tmQ
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: +F4SU(T
2-4.真空系统的漏气速率leak throughput of a vacuum system: -cONC9=
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: n/6qc3\5i
2-6.极限压力ultimate pressure: TPF5 ?
2-7.残余压力residual pressure: %K[u
2-8.残余气体谱residual gas spectrum: $<s;YhM:u)
2-9.基础压力base pressure: 7C>5XyyJ
2-10.工作压力working pressure: lDX\"Fq
2-11.粗抽时间roughing time: a/{M2
2-12.抽气时间pump-down time: ZnAXb S
2-13.真空系统时间常数time constant of a vacuum system: 2X,`t%o
2-14.真空系统进气时间venting time: !de`K
|
XCd[<\l
3.真空容器 E;bv;RUio
3-1.真空容器;真空室vacuum chamber: p9-s' F|@i
3-2.封离真空装置sealed vacuum device: Tl!}Rw~Pg
3-3.真空钟罩vacuum bell jar: m>9j dsqB
3-4.真空容器底板vacuum base plate: ]2
3-5.真空岐管vacuum manifold: \(&UDG$
3-6.前级真空容器(贮气罐)backing reservoir: ku5vaP(
3-7.真空保护层outer chamber: 60#eTo?}o
3-8.真空闸室vacuum air lock: !T"jvDYH
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: [J8;V|v
REGk2t.L
4.真空封接和真空引入线 \~>
.NH-
4-1.永久性真空封接permanent seal : =$-+~
4.2.玻璃分级过渡封接graded seal : +`f3_Xd
4-3.压缩玻璃金属封接compression glass-to-metal seal: 6hiWgbE
4-4.匹配式玻璃金属封接matched glass-to-metal seal: 4ATIF;G'<
4-5.陶瓷金属封接ceramic-to-metal seal: w2) @o>w
4-6.半永久性真空封接semi-permanent seal : Fv-~v&
4-7.可拆卸的真空封接demountable joint: o/hj~;(]
4-8.液体真空封接liquid seal cBtQ2,<6
4-9.熔融金属真空封接molten metal seal: KP&$Sl
4-10.研磨面搭接封接ground and lapped seal: PY
MofQaZ
4-11.真空法兰连接vacuum flange connection: /8wfI_P>M"
4-12.真空密封垫vacuum-tight gasket: K/0Wp %
4-13.真空密封圈ring gasket: :E.T2na
4-14.真空平密封垫flat gasket: Om(Ir&0
4-15.真空引入线feedthrough leadthrough: k`BS{,=
4-16.真空轴密封shaft seal: :[&QoEZW
4-17.真空窗vacuum window: PYiO l
4-18.观察窗viewing window: 6w4HJZF~
j@R"AP}
5.真空阀门 s+E:
7T9P
5-1.真空阀门的特性characteristic of vacuum valves: 5KTPlqm0qF
⑴.真空阀门的流导conductance of vacuum valves: 0"{-<Wot}
⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: bT^(D^
5-2.真空调节阀regulating valve: iGN6'm`
5-3.微调阀 micro-adjustable valve: n.XgGT=L
5-4.充气阀charge valve: ,AH2/^:%c
5-5.进气阀gas admittance valve: ^Rh}[
5-6.真空截止阀break valve: I)MRAo
5-7.前级真空阀backing valve: ~KczP1p
5-8.旁通阀 by-pass valve: S3s6
5-9.主真空阀main vacuum valve:
"u)e,gu
5-10.低真空阀low vacuum valve:
=fJ /6
5-11.高真空阀high vacuum valve: 3+&k{UZjt
5-12.超高真空阀;UHV阀 ultra-high vacuum valve: &g~NkJc0c
5-13.手动阀manually operated valve: ZK h4:D
5-14.气动阀pneumatically operated valve: \U<d)j/
5-15.电磁阀electromagnetically operated valve: `Hqgahb{P
5-16.电动阀valve with electrically motorized operation: ?R_fg
5-17.挡板阀baffle valve: S`Z[MNY
5-18.翻板阀flap valve: $Gcjm~
5-19.插板阀gate valve: ]cM8TT
5-20.蝶阀butterfly valve: 5Z:T9F4
xXfv({
6.真空管路 4";NT;_q5
6-1.粗抽管路roughing line: sL,|+>7T^M
6-2.前级真空管路backing line: 0\Tp/Ph
6-3.旁通管路;By-Pass管路 by-pass line: v\E6N2.S
6-4.抽气封口接头pumping stem: i-9W8A
6-5.真空限流件limiting conductance: V.ET uS;
6-6.过滤器filter: Ezev
^O]
5. 1.一般术语 2Bi?^kQ#
1-1真空镀膜vacuum coating: NLu[<u U*
1-2基片substrate: N) PkE>%X
1-3试验基片testing substrate: .<Ays?
1-4镀膜材料coating material: eaDR-g"
1-5蒸发材料evaporation material: {pdPp|YDZ-
1-6溅射材料sputtering material: hAsReZ?
1-7膜层材料(膜层材质)film material: N 'n0I^Y1A
1-8蒸发速率evaporation rate: BLAF{vVaf
1-9溅射速率sputtering rate: K{, '%|
1-10沉积速率deposition rate: Z>l|R C
1-11镀膜角度coating angle: * U}-Y*
{|<yZ,,p
2.工艺 5V~vND*
s
2-1真空蒸膜vacuum evaporation coating: *3]2vq
(1).同时蒸发simultaneous evaporation: |Qcj+HH.
(2).蒸发场蒸发evaporation field evaporation: "G,,:H9v
(3).反应性真空蒸发reactive vacuum evaporation: $j8CF3d.6
(4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: (P=WKZMPN
(5).直接加热的蒸发direct heating evaporation: HAo=t
(6).感应加热蒸发induced heating evaporation: w~:F?
(7).电子束蒸发electron beam evaporation: aXzb]">
(8).激光束蒸发laser beam evaporation: 7yXJ\(6R_
(9).间接加热的蒸发indirect heating evaporation: 5;G0$M0
(10).闪蒸flash evaportion: n).*=YLN
2-2真空溅射vacuum sputtering: )wXE\$
(1).反应性真空溅射 reactive vacuum sputtering: D>;_R
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(2).偏压溅射bias sputtering: WnOvU<Z
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(3).直流二级溅射direct current diode sputtering: KJv%t_4'F
(4).非对称性交流溅射asymmtric alternate current sputtering: `'*4B_.
(5).高频二极溅射high frequency diode sputtering: MppT"t
(6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: 9HPmJ`b
(7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: Zy.A9Bh~
(8).离子束溅射ion beam sputtering: 5UOqS#"0
(9).辉光放电清洗glow discharge cleaning: &