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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 8+Bu+|c%f  
    --------------------------------------------------- c1xrn4f@a  
    真空术语 42\-~]  
    U-^[lWn[@4  
    1.标准环境条件 standard ambient condition: 8#D:H/`'  
    2.气体的标准状态 standard reference conditions forgases: %r iK+  
    3.压力(压强)p pressure: PG]%Bv57  
    4.帕斯卡Pa pascal: W@2vjz  
    5.托Torr torr: W#Qmv^StZ  
    6.标准大气压atm standard atmosphere: \-*eL;qP  
    7.毫巴mbar millibar: aSP4a+\*  
    8.分压力 partial pressure: |G/7_+J6  
    9.全压力 total pressure: efY8M2  
    10.真空 vacuum: 9TAj) {U%'  
    11.真空度 degree of vacuum: {W\T"7H  
    12.真空区域 ranges of vacuum: P6Mhbmt9*  
    13.气体 gas: ]LZ`LL'#Y_  
    14.非可凝气体 non-condensable gas: Hp|}~xjn  
    15.蒸汽vapor: Cbs5dn(Y  
    16.饱和蒸汽压saturation vapor pressure: y4Er @8I`  
    17.饱和度degree of saturation: wIf {6z{  
    18.饱和蒸汽saturated vapor: "Y=+Ls(3o(  
    19.未饱和蒸汽unsaturated vapor: nP UqMn'  
    20.分子数密度n,m-3 number density of molecules: ^W7X(LQ*+  
    21.平均自由程ι、λ,m mean free path: Ux2U*a ;  
    22.碰撞率ψ collision rate: 1J? dK|% b  
    23.体积碰撞率χ volume collision rate:  LZ~"VV^  
    24.气体量G quantity of gas: NS C/@._  
    25.气体的扩散 diffusion of gas: dC1V-x10ju  
    26.扩散系数D diffusion coefficient; diffusivity: RL[E X5U  
    27.粘滞流 viscous flow: F6hmku>\1  
    28.粘滞系数η viscous factor: vOgC>_x7  
    29.泊肖叶流 poiseuille flow: 8by@iQ  
    30.中间流 intermediate flow: }!TL2er_  
    31.分子流 molecular flow: AddeaB5<  
    32克努曾数 number of knudsen: *XWq?hi  
    33.分子泻流 molecular effusion; effusive flow: wLV~F[:  
    34.流逸 transpiration: 7'N S9|  
    35.热流逸 thermal transpiration: :|1.seLQ  
    36.分子流率qN molecular flow rate; molecular flux: 7P7b8 ]  
    37.分子流率密度 molecular flow rate density; density of molecular flux: [ REf>_R  
    38.质量流率qm mass flow rare: ; "3+YTtp  
    39.流量qG throughput of gas: $c&0F,   
    40.体积流率qV volume flow rate: 1=2^90  
    41.摩尔流率qυ molar flow rate: },[;O^Do^{  
    42.麦克斯韦速度分布 maxwellian velocity distribution: yGp z,X4x  
    43.传输几率Pc transmission probability: CCDDK L]N:  
    44.分子流导CN,UN molecular conductance: 3^=+gsc  
    45.流导C,U conductance: bqx0d=Z~[  
    46.固有流导Ci,Ui intrinsic conductance: 0D~ C 5}/4  
    47.流阻W resistance: _DP|-bp D  
    48.吸附 sorption: iK_c.b  
    49.表面吸附 adsorption: Ejq#~Zhr!  
    50.物理吸附physisorption: s:y ^_W)d  
    51.化学吸附 chemisorption: F&;   
    52.吸收absorption: Rb}KZ+o "Z  
    53.适应系数α accommodation factor: K^t?gt@k}  
    54.入射率υ impingement rate: uENdI2EY8y  
    55.凝结率condensation rate: 2yo cu!4l  
    56.粘着率 sticking rate: insY(.N  
    57.粘着几率Ps sticking probability: |vFj*XU  
    58.滞留时间τ residence time: ;pRcVL_4  
    59.迁移 migration: tK%c@gGU9  
    60.解吸 desorption: D';eTy Y  
    61.去气 degassing: y0ckm6^  
    62.放气 outgassing: !~-6wN"k  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: xeTgV&$@  
    64.蒸发率 evaporation rate: E&~nps8e  
    65.渗透 permeation: rSV gWr8  
    66.渗透率φ permeability: Z%gx%$  
    67.渗透系数P permeability coefficient y~<@x.  
    2.   1.真空泵 vacuum pumps H]#Rg`~n  
    1-1.容积真空泵 positive displacement pump: 99 wc  
    ⑴.气镇真空泵 gas ballast vacuum pump: o!&W sD  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: F:37MUQi  
    ⑶.干封真空泵 dry-sealed vacuum pump: BC\S/5~k  
    ⑷.往复真空泵 piston vacuum pump: gd^Js 1Z  
    ⑸.液环真空泵 liquid ring vacuum pump: X21dX`eMN  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: s.jO<{  
    ⑺.定片真空泵 rotary piston vacuum pump: D!TZI  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: t0m*PJcF  
    ⑼.余摆线真空泵 trochoidal vacuum pump: v vE\  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: g.Hio.fVd  
    ⑾.罗茨真空泵 roots vacuum pump: #%S0PL"x U  
    1-2.动量传输泵 kinetic vacuum pump: PoD^`()FR{  
    ⑴.牵引分子泵molecular drag pump: v@u<Ww;=@  
    ⑵.涡轮分子泵turbo molecular pump: K3p@$3hQ  
    ⑶.喷射真空泵ejector vacuum pump: $->d!  
    ⑷.液体喷射真空泵liquid jet vacuum pump: NyPd5m:  
    ⑸.气体喷射真空泵gas jet vacuum pump: h ; kfh.  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : s'_,:R\VM>  
    ⑺.扩散泵diffusion pump : PCfo  
    ⑻.自净化扩散泵self purifying diffusion pump: G{c#\?12C  
    ⑼.分馏扩散泵 fractionating diffusion pump : .]76!(fWZ  
    ⑽.扩散喷射泵diffusion ejector pump : xX@FWAj  
    ⑾.离子传输泵ion transfer pump: oO=o|w|T  
    1-3.捕集真空泵 entrapment vacuum pump: >xd<YwXZ  
    ⑴吸附泵adsorption pump: fnH3 CE  
    ⑵.吸气剂泵 getter pump: uMFV% +I  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump :  . gT4_  
    ⑷.吸气剂离子泵getter ion pump: N\R=cwk  
    ⑸.蒸发离子泵 evaporation ion pump: F,v 7ifo#f  
    ⑹.溅射离子泵sputter ion pump: %cW;}Y[?P  
    ⑺.低温泵cryopump: x0Bw{>Q  
    68 x}w Ae  
    2.真空泵零部件 t=dO  
    2-1.泵壳 pump case:  93w~.p  
    2-2.入口 inlet: M#0 @X  
    2-3.出口outlet: i7eI=f-Q  
    2-4.旋片(滑片、滑阀)vane; blade : &:!ij  
    2-5.排气阀discharge valve: kX8=cL9G  
    2-6.气镇阀gas ballast valve: am:.NG+  
    2-7.膨胀室expansion chamber: W(@>?$&  
    2-8.压缩室compression chamber: ]C *10S`  
    2-9.真空泵油 vacuum pump oil: =s[ &;B`s  
    2-10.泵液 pump fluid:  Tb#  
    2-11.喷嘴 nozzle: %D^bah f  
    2-13.喷嘴扩张率nozzle expansion rate:  wOHEv^,  
    2-14.喷嘴间隙面积 nozzle clearance area : Bxv8RB  
    2-15.喷嘴间隙nozzle clearance: |U=(b,  
    2-16.射流jet: 6ojo##j  
    2-17.扩散器diffuser: 6q%ed UED  
    2-18.扩散器喉部diffuser thoat: dt ~iw  
    2-19.蒸汽导管vapor tube(pipe;chimney): F!~l MpuE  
    2-20.喷嘴组件nozzle assembly: "=A|K~b  
    2-21.下裙skirt: ?'2 v.5TQt  
    BLW]|p|1:  
    3.附件 .Z5[_'T  
    3-1阱trap: },6*Y*?{  
    ⑴.冷阱 cold trap: 37K U~9-A  
    ⑵.吸附阱sorption trap: v*L '{3f  
    ⑶.离子阱ion trap: $Q4=37H+  
    ⑷.冷冻升华阱 cryosublimation trap: eU~?p|Np  
    3-2.挡板baffle: 6_ ]8\n  
    3-3.油分离器oil separator: .&(8(C  
    3-4.油净化器oil purifier:  ^Fp=y,D  
    3-5.冷凝器condenser: cQ,9Rnfl,  
    (C~dkR?  
    4.泵按工作分类 <|V'pim  
    4-1.主泵main pump: "%kG RHq  
    4-2.粗抽泵roughing vacuum pump: s]bPV,"p  
    4-3.前级真空泵backing vacuum pump: yfq>,  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: )KE_t^$  
    4-5.维持真空泵holding vacuum pump: b_ JWnh  
    4-6.高真空泵high vacuum pump:  h,hL?imD  
    4-7.超高真空泵ultra-high vacuum pump: 2[BA( B  
    4-8.增压真空泵booster vacuum pump: (txt8q  
    &(0N.=R  
    5.真空泵特性 s7|3zqi  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: ;o%:7 &  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 ) MBS  
    5-3.起动压力starting pressure: eE,;K1  
    5-4.前级压力 backing pressure : LJ l1v  
    5-5.临界前级压力 critical backing pressure: O=`o'%K<  
    5-6.最大前级压力maximum backing pressure: pVz pN8!  
    5-7.最大工作压力maximum working pressure: (uT^Nn9L=  
    5-8.真空泵的极限压力ultimate pressure of a pump: CKN8z  
    5-9.压缩比compression ratio: q]+)c2M  
    5-10.何氏系数Ho coefficient: zP|*(*  
    5-11.抽速系数speed factor: Zx9.pFc"  
    5-12.气体的反扩散back-diffusion of gas: .m!s". ?[  
    5-13.泵液返流back-streaming of pump fluid: r?afv.@L2  
    5-14.返流率back-streaming rate IrUi E q  
    5-15.返迁移back-migration: R ^^ 1/%  
    5-16.爆腾bumping: Vs|sw  
    5-17.水蒸气允许量qm water vapor tolerable load: `rq<jtf+  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: 7p !zp9|  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: @92gb$xT  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump #!Ze\fOC  
    3.   1.一般术语 FSVS4mtiX\  
    1-1.压力计pressure gauge: -7,vtd[h  
    1-2.真空计vacuum gauge: y\@SC\jk|  
    ⑴.规头(规管)gauge head: N[]U%9[=2F  
    ⑵.裸规nude gauge : Yd.027  
    ⑶.真空计控制单元gauge control unit : F\Y,JUn[G  
    ⑷.真空计指示单元gauge indicating unit : #a.\P.{L  
    CHg]Ul  
    2.真空计一般分类 &R0OeRToUb  
    2-1.压差式真空计differential vacuum gauge: *<?XTs<  
    2-2.绝对真空计 absolute vacuum gauge: l&$*}yCK  
    2-3.全压真空计total pressure vacuum gauge: 8`DO[Z  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: KKV)DExv?  
    2-5.相对真空计relative vacuum gauge : =;g=GcVK  
    rEg+i@~  
    3.真空计特性 `M,Nd'5&|  
    3-1.真空计测量范围pressure range of vacuum gauge: #,)P N @P  
    3-2.灵敏度系数sensitivity coefficient: V!H(;Tuuo  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): o;*]1  
    3-5.规管光电流photon current of vacuum gauge head: Ys)+9yPPn  
    3-6.等效氮压力equivalent nitrogen pressure : 5UPPk$8 `  
    3-7.X射线极限值 X-ray limit: h1E PaL  
    3-8.逆X射线效应anti X-ray effect: *WD;C0?z  
    3-9.布利尔斯效应blears effect: v^;-@ddr  
    l~CZW*/  
    4.全压真空计 exsQmbj* %  
    4-1.液位压力计liquid level manometer: _qEWu Do  
    4-2.弹性元件真空计elastic element vacuum gauge: AmgWj/>  
    4-3.压缩式真空计compression gauge: 'G52<sF  
    4-4.压力天平pressure balance: i+U@\:=  
    4-5.粘滞性真空计viscosity gauge : ~NA1SZ{Y+  
    4-6.热传导真空计thermal conductivity vacuum gauge : KQ-,W8Q5  
    4-7.热分子真空计thermo-molecular gauge: (K<Z=a  
    4-8.电离真空计ionization vacuum gauge: dG" K/|  
    4-9.放射性电离真空计radioactive ionization gauge: ~@[(U!G  
    4-10.冷阴极电离真空计cold cathode ionization gauge: C0P*D,  
    4-11.潘宁真空计penning gauge: O{Dm;@J-aM  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: d\\r_ bGW  
    4-13.放电管指示器discharge tube indicator: S!u6dz^[$X  
    4-14.热阴极电离真空计hot cathode ionization gauge: zUNH8=U  
    4-15.三极管式真空计triode gauge: uAc@ Z-  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: IU7$%6<Y  
    4-17.B-A型电离真空计Bayard-Alpert gauge: 56"#Syj  
    4-18.调制型电离真空计modulator gauge: fm[_@L% x  
    4-19.抑制型电离真空计suppressor gauge: VjC*(6<Gj  
    4-20.分离型电离真空计extractor gauge: ?rky6  
    4-21.弯注型电离真空计bent beam gauge: Nvi Fq  
    4-22.弹道型电离真空计 orbitron gauge : 0`V3s]%iu  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: @< wYT$  
    xq#U 4E  
    5.分压真空计(分压分析器)  { VS''Lv  
    5-1.射频质谱仪radio frequency mass spectrometer: B:B8"ODV  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: 8e]z6:}'E  
    5-3.单极质谱仪momopole mass spectrometer: "w(N62z/  
    5-4.双聚焦质谱仪double focusing mass spectrometer: #Tup]czO  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: <Z2(qZ^Z  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: nXv 7OEpTx  
    5-7.回旋质谱仪omegatron mass spectrometer: E]e, cd  
    5-8.飞行时间质谱仪time of flight mass spectrometer: GU:r vS!  
    )!'Fa_$ e  
    6.真空计校准 <jpeu^7  
    6-1.标准真空计reference gauges: x-w`KFS  
    6-2.校准系统system of calibration: Lhl$w'r  
    6-3.校准系数K calibration coefficient: := ]sq}IN  
    6-4.压缩计法meleod gauge method: [`y:M&@  
    6-5.膨胀法expansion method:  i<B:  
    6-6.流导法flow method: _!CK   
    4.   1.真空系统vacuum system SPfD2%jjC  
    1-1.真空机组pump system: #;5[('&[  
    1-2.有油真空机组pump system used oil : IXbdS9,>F  
    1-3.无油真空机组oil free pump system nYI/&B{p  
    1-4.连续处理真空设备continuous treatment vacuum plant: 4 *Bp  
    1-5.闸门式真空系统vacuum system with an air-lock: (45NZBs  
    1-6.压差真空系统differentially pumped vacuum system: 3'?h;`v\Lo  
    1-7.进气系统gas admittance system: C/{nr-V3u  
    fBHkLRFH  
    2.真空系统特性参量 83{x"G3>  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : ,`ZPtnH+  
    2-2.抽气装置的抽气量throughput of a pumping unit : MV Hz$hyB  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: YRg=yVo 2  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: Z}sG3p  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: R59e&   
    2-6.极限压力ultimate pressure: H.jLGe>  
    2-7.残余压力residual pressure: }2-[Ki yv  
    2-8.残余气体谱residual gas spectrum: Bpk@{E9  
    2-9.基础压力base pressure: ?)Tz'9l  
    2-10.工作压力working pressure: ^U-vD[O8  
    2-11.粗抽时间roughing time: +O;OSZ  
    2-12.抽气时间pump-down time: }9L 40)8  
    2-13.真空系统时间常数time constant of a vacuum system: l-DGy#h+z  
    2-14.真空系统进气时间venting time: U@o2gjGN  
    nu\  
    3.真空容器 &(5^v w<0  
    3-1.真空容器;真空室vacuum chamber: |#DC.Ga!  
    3-2.封离真空装置sealed vacuum device: Y|hzF:ll  
    3-3.真空钟罩vacuum bell jar: 9f@#SB_H  
    3-4.真空容器底板vacuum base plate: n;-x!Gs  
    3-5.真空岐管vacuum manifold: r~S!<9f  
    3-6.前级真空容器(贮气罐)backing reservoir: c,6<7  
    3-7.真空保护层outer chamber: G=r(SJq  
    3-8.真空闸室vacuum air lock:  IgzCh  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: %f_)<NP9=  
    LV}UBao5n  
    4.真空封接和真空引入线 m NUN6qVP~  
    4-1.永久性真空封接permanent seal : BxSk%$J  
    4.2.玻璃分级过渡封接graded seal : 377j3dP  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: 1Y H4a|bc  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: kr/1Dsr4  
    4-5.陶瓷金属封接ceramic-to-metal seal: ?=/}Ft  
    4-6.半永久性真空封接semi-permanent seal : [oQ`HX1g  
    4-7.可拆卸的真空封接demountable joint: ~ERRp3Ee ?  
    4-8.液体真空封接liquid seal ?:#>^eWYe7  
    4-9.熔融金属真空封接molten metal seal: ]>VJ--fH  
    4-10.研磨面搭接封接ground and lapped seal: t7U,AQ=;P5  
    4-11.真空法兰连接vacuum flange connection: TS\A`{^T  
    4-12.真空密封垫vacuum-tight gasket: EWu iaw.  
    4-13.真空密封圈ring gasket: ,wry u|7"$  
    4-14.真空平密封垫flat gasket: o*O "\/pmF  
    4-15.真空引入线feedthrough leadthrough: ?L<UOv7;t  
    4-16.真空轴密封shaft seal: <2o.,2?G  
    4-17.真空窗vacuum window: 6T{o3wc;  
    4-18.观察窗viewing window: u7WTSL%  
    c~^]jqid]  
    5.真空阀门 Q7 0**qm  
    5-1.真空阀门的特性characteristic of vacuum valves: +LQs.*  
    ⑴.真空阀门的流导conductance of vacuum valves: ;qMnO_ E  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: VurP1@e&  
    5-2.真空调节阀regulating valve: SU_] C+  
    5-3.微调阀 micro-adjustable valve: 'gk81@|  
    5-4.充气阀charge valve: (!XYH@Mz<w  
    5-5.进气阀gas admittance valve: }\`-G+i{W  
    5-6.真空截止阀break valve: ]AFM Y<mB  
    5-7.前级真空阀backing valve: s60:0>  
    5-8.旁通阀 by-pass valve: 6]@|7|N>X  
    5-9.主真空阀main vacuum valve: *oX  
    5-10.低真空阀low vacuum valve: i#M a -0#  
    5-11.高真空阀high vacuum valve: :o.x=c B  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: 8 ACY uN\  
    5-13.手动阀manually operated valve: ,<^tsCI  
    5-14.气动阀pneumatically operated valve: aowPji$H  
    5-15.电磁阀electromagnetically operated valve: 9d,]_l.sB  
    5-16.电动阀valve with electrically motorized operation: YaY;o^11/  
    5-17.挡板阀baffle valve: JEm?26n X  
    5-18.翻板阀flap valve: lH,]ZA./  
    5-19.插板阀gate valve: FkJ>]k  
    5-20.蝶阀butterfly valve: $8X tI  
    Fl#VKU3h  
    6.真空管路 )L(d$N=Bd  
    6-1.粗抽管路roughing line: Vtz yB  
    6-2.前级真空管路backing line: 9GtVI^]  
    6-3.旁通管路;By-Pass管路 by-pass line: (8@h F#N1  
    6-4.抽气封口接头pumping stem: {g!exbVf  
    6-5.真空限流件limiting conductance:       }]39 iK`w  
    6-6.过滤器filter: Vlp*'2VO  
    5.   1.一般术语 R>e3@DQ~  
    1-1真空镀膜vacuum coating: 02J6Pn3  
    1-2基片substrate: `%mBu`A  
    1-3试验基片testing substrate: aoakTi!}  
    1-4镀膜材料coating material: 08K.\3  
    1-5蒸发材料evaporation material: 11@2;vw  
    1-6溅射材料sputtering material: +Qi52OG  
    1-7膜层材料(膜层材质)film material: 1EAVMJ  
    1-8蒸发速率evaporation rate: Zjp5\+hHV  
    1-9溅射速率sputtering rate: ku[=QsMv  
    1-10沉积速率deposition rate: @]ptY*   
    1-11镀膜角度coating angle: d4/`:?w  
    gGiV1jN _  
    2.工艺 v_@#hf3  
    2-1真空蒸膜vacuum evaporation coating: YP\4XI  
    (1).同时蒸发simultaneous evaporation: z)<pqN  
    (2).蒸发场蒸发evaporation field evaporation: Q,,fDBN  
    (3).反应性真空蒸发reactive vacuum evaporation: RZ/+ K=  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: j]F#p R}p  
    (5).直接加热的蒸发direct heating evaporation: X_tW#`  
    (6).感应加热蒸发induced heating evaporation: >;'1k'  
    (7).电子束蒸发electron beam evaporation: xeP;"J}  
    (8).激光束蒸发laser beam evaporation: N5w]2xz!  
    (9).间接加热的蒸发indirect heating evaporation: uZ2v;]\Y6  
    (10).闪蒸flash evaportion: &;@b&p+  
    2-2真空溅射vacuum sputtering: R0YC:rAt  
    (1).反应性真空溅射 reactive vacuum sputtering: Z_OqXo=  
    (2).偏压溅射bias sputtering: ;5oH6{7_Z  
    (3).直流二级溅射direct current diode sputtering: 4G;`KqR@  
    (4).非对称性交流溅射asymmtric alternate current sputtering: A]SB c2   
    (5).高频二极溅射high frequency diode sputtering: |E_+*1lq.  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: xU\:Vid+A  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: 9J;H.:WH  
    (8).离子束溅射ion beam sputtering: fssL'DD  
    (9).辉光放电清洗glow discharge cleaning: [vjkU7;7A  
    2-3物理气相沉积PVD physical vapor deposition: e2h k  
    2-4化学气相沉积CVD chemical vapor deposition: s<r.+zqW  
    2-5磁控溅射magnetron sputtering: <T.3ZZ%  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: A^Hp#b @  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: "w|k\1D  
    2-8电弧离子镀arc discharge deposition: BE2\?q-  
    a+a%}76N  
    3.专用部件 z`r4edk3  
    3-1镀膜室coating chamber: GLKN<2|2@y  
    3-2蒸发器装置evaporator device: (27F   
    3-3蒸发器evaporator: tv=FFfQ  
    3-4直接加热式蒸发器evaporator by direct heat: l& ^B   
    3-5间接加热式蒸发器evaporator by indirect heat: ;'18  
    3-7溅射装置sputtering device: A_q3p\b  
    3-8靶target: %k;FxUKi  
    3-10时控挡板timing shutter: M"$RtS|h  
    3-11掩膜mask: "RJk7]p`*  
    3-12基片支架substrate holder: z#E,96R  
    3-13夹紧装置clamp: O"-PNF,J  
    3-14换向装置reversing device: em9]WSfZ@`  
    3-15基片加热装置substrate heating device: ?L#SnnE  
    3-16基片冷却装置substrate colding device: z Q|x>3   
    eNC5' Z  
    4.真空镀膜设备 (_n8$3T75  
    4-1真空镀膜设备vacuum coating plant: cSs/XJZ  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: mlw BATi  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: {FmFu$z+[  
    4-2连续镀膜设备continuous coating plant: Z-p^3t'{  
    4-3半连续镀膜设备semi- continuous coating plant Lp]C![\>U  
    6.   1.漏孔 G-i_s6Wu  
    1-1漏孔leaks: Y)5uK:)^  
    1-2通道漏孔channel leak: AA& dZjz  
    1-3薄膜漏孔membrane leak: [ MXXY  
    1-4分子漏孔molecular leak: {)[g  
    1-5粘滞漏孔vixcous leak: !zJ67-G  
    1-6校准漏孔calibrated leak: o-CJdOS  
    1-7标准漏孔reference leak :  iIEIGQx  
    1-8虚漏virtual leak: Joo)GIB  
    1-9漏率leak rate: 5sCk y)N  
    1-10标准空气漏率standard air leak rate: gLxy RbVI  
    1-11等值标准空气漏率equivalent standard air leak rate: gGdYh.K&e5  
    1-12探索(示漏)气体: F5Q. Vh  
    K$vRk5U  
    2.本底 .p0n\ $r  
    2-1本底background: Ay6rUN1ef  
    2-2探索气体本底search gas background : [3NV #  
    2-3漂移drift: COL8YY  
    2-4噪声noise: }N9a!,{P=b  
    Sm_:SF!<D6  
    3.检漏仪 L#@$Mtc  
    3-1检漏仪leak detector: k 5r*?Os  
    3-2高频火花检漏仪H.F. spark leak detector: jW$f(qAbm  
    3-3卤素检漏仪halide leak detector: Oc+L^}elJ  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: O xaua  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: N)y;owgo  
    ~HI0<;r=eL  
    4.检漏 ZU@jtqq  
    4-1气泡检漏leak detection by bubbles: AX Jj"hN  
    4-2氨检漏leak detection by ammonia: XN%D`tbvJ  
    4-3升压检漏leak detection of rise pressure: G8-d%O p  
    4-4放射性同位素检漏radioactive isotope leak detection: daJ-H  
    4-5荧光检漏fluorescence leak detection m/B9)JzY  
    7.   1.一般术语 ';!UJWYl  
    1-1真空干燥vacuum drying: J 2~B<=V  
    1-2冷冻干燥freeze drying : I}0 -  
    1-3物料material: p 8Hv7*  
    1-4待干燥物料material to be dried: AG%es0D[H  
    1-5干燥物料dried material : ;ypO'  
    1-6湿气moisture;humidity: W&[9x%Ba  
    1-7自由湿气free moisture: c+XR  
    1-8结合湿气bound moisture: 2qR@: ^  
    1-9分湿气partial moisture: H$iMP.AK  
    1-10含湿量moisture content: J@{ Bv%  
    1-11初始含湿量initial moisture content: k ZEy  
    1-12最终含湿量final residual moisture: `fVA. %  
    1-13湿度degree of moisture ,degree of humidity : +mPB?5  
    1-14干燥物质dry matter : 1L9 <1  
    1-15干燥物质含量content of dry matter: 8k% :w0H  
    V0B4<TTAo~  
    2.干燥工艺 4[j) $!l`  
    2-1干燥阶段stages of drying : gz:c_HJ  
    (1).预干燥preliminary dry: )p](*Z^  
    (2).一次干燥(广义)primary drying(in general):  0d)n} fm  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): Y mSaIf  
    (4).二次干燥secondary drying: iU|C<A%Hh  
    2-2.(1).接触干燥contact drying: \srOU|  
    (2).辐射干燥 drying by radiation : u-cC}DP  
    (3).微波干燥microwave drying: kQcQi}e  
    (4).气相干燥vapor phase drying: 2a}_|#*  
    (5).静态干燥static drying: .SFwjriZ  
    (6).动态干燥dynamic drying: 8u23@?  
    2-3干燥时间drying time: :{imRa-  
    2-4停留时间length of stay(in the drying chamber): >CA1Ub&ls  
    2-5循环时间cycle time: !LESRh?  
    2-6干燥率 dessication ratio : XwGJ 8&N  
    2-7去湿速率mass flow rate of humidity:  %tjEVQa  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: 7P(:!ce4-  
    2-9干燥速度 drying speed : #jR?C9&!(  
    2-10干燥过程drying process: @g?z>n n  
    2-11加热温度heating temperature: c9K\K~bk  
    2-12干燥温度temperature of the material being dried : 0(.C f.B~  
    2-13干燥损失loss of material during the drying process : v0p EN\  
    2-14飞尘lift off (particles): E$baQU hKS  
    2-15堆层厚度thickness of the material: U_04QwhK7  
    ON^u|*kO  
    3.冷冻干燥 7] H4E.(l  
    3-1冷冻freezing: !b Km}1T  
    (1).静态冷冻static freezing: ^ `9OA`2  
    (2).动态冷冻dynamic freezing: hTqJDP"&F  
    (3).离心冷冻centrifugal freezing: /;J;,G`?  
    (4).滚动冷冻shell freezing: AS398L  
    (5).旋转冷冻spin-freezing: wjs7K|PK  
    (6).真空旋转冷冻vacuum spin-freezing: ~'Hwszp b  
    (7).喷雾冷冻spray freezing: FL}8h/  
    (8).气流冷冻air blast freezing: 4cL=f  
    3-2冷冻速率rate of freezing: 34:=A0z  
    3-3冷冻物料frozen material: Z!6G (zz:>  
    3-4冰核ice core: NIGFu{S  
    3-5干燥物料外壳envelope of dried matter: HkCme_y"  
    3-6升华表面sublimation front: O5"80z38[  
    3-7融化位置freezer burn: 6&cU*Io@  
    T!AQJ:;1  
    4.真空干燥设备;真空冷冻干燥设备 m[rJFSpef  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: GH!#"Sl8Z  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: _=p|"~rN$  
    4-3加热表面heating surface: vOU -bF%u  
    4-4物品装载面shelf : ?J AzN  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): UJ+JVj   
    4-6单位面积干燥器处理能力throughput per shelf area: _t7A'`Dh]  
    4-7冰冷凝器ice condenser: /vU31_eZt  
    4-8冰冷凝器的负载load of the ice condenser: $1F9TfA  
    4-9冰冷凝器的额定负载rated load of the ice condenser :>u{BG;=79  
    8.   1.一般术语 eAEVpC2  
    1-1试样sample : C$ 5x*`y  
    (1).表面层surface layer: # jyAq$I0  
    (2).真实表面true surface: g>{=R|uO5  
    (3).有效表面积effective surface area: <7+.5iB3  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: o@-cT`HP  
    (5).表面粒子密度surface particle density: HvU)GJ u b  
    (6).单分子层monolayer: *HUqW}_r  
    (7).表面单分子层粒子密度monolayer density: ]cK@nq)  
    (8).覆盖系数coverage ratio: )XWL'':bF  
    1-2激发excitation: q^)(p' X  
    (1).一次粒子primary particle: -rBj-4|"  
    (2).一次粒子通量primary particle flux: YrX{,YtiX  
    (3).一次粒子通量密度density of primary particle flux: 1{qg@xlj  
    (4).一次粒子负荷primary particle load: iW)Ou?aS  
    (5).一次粒子积分负荷integral load of primary particle: W3#L!&z_wK  
    (6).一次粒子的入射能量energy of the incident primary particle: W&nVVV8s@  
    (7).激发体积excited volume: "|H0 X#  
    (8).激发面积excited area: 8dNJZoV  
    (9).激发深度excited death: psBBiHB[L  
    (10).二次粒子secondary particles: 8^~]Ym:  
    (11).二次粒子通量secondary particle flux: >2r/d  
    (12).二次粒子发射能energy of the emitted secondary particles: P^z)]K#sw  
    (13).发射体积emitting volume: += QboUN  
    (14).发射面积emitting area: U8z,N1]r*`  
    (15).发射深度emitting depth: ;3_'{  
    (16).信息深度information depth: BRT2=}A  
    (17).平均信息深度mean information depth: 4_eq@'9-q  
    1-3入射角angle of incidence: ^"I!+Teb  
    1-4发射角angle of emission: ,k4 (b  
    1-5观测角observation: te_D  ,  
    1-6分析表面积analyzed surface area: <_}u5E)7(  
    1-7产额 yield : ]dH; +3 }  
    1-8表面层微小损伤分析minimum damage surface analysis: asb") NfIm  
    1-9表面层无损伤分析non-destructive surface analysis: mi+I)b=  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : $t^`Pt*:u  
    1-11可观测面积observable area: *@< jJP4  
    1-12可观测立体角observable solid angle : (Qnn  
    1-13接受立体角;观测立体角angle of acceptance: 4^ A\w  
    1-14角分辨能力angular resolving power: 6mZFsB  
    1-15发光度luminosity: q QQ~ [JL  
    1-16二次粒子探测比detection ratio of secondary particles: mOBS[M5*  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: S; >_9  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: 7_LE2jpC,5  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: b=sc2 )3?  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: z\a#"2(G.  
    1-21本底压力base pressure: gs'( px  
    1-22工作压力working pressure: :?zOLw?(  
    KpWQ;3D2  
    2.分析方法 ><Z2uJZ4x  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy:  I2b[  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : -7u4f y{T  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: 16AYB17  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: #qzozQ4  
    2-3离子散射表面分析ion scattering spectroscopy: !,]_tw>R  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: {Q0"uE)-.  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: hP #>`)aNY  
    2-6离子散射谱仪ion scattering spectrometer: +%0+  
    2-7俄歇效应Auger process: r'j*f"uAm  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: a`}HFHm\2,  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: "&An9H'  
    2-10光电子谱术photoelectron spectroscopy : *v6'I-#  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: L(iWFy1& T  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: \ /o`CV{O  
    2-11光电子谱仪photoelectron spectrometer: V`G]4}  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: h4]yIM `8d  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: w%kxY5q  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): N=(rl#<  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊