“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 KhR3$|fH<
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真空术语 UR'[?
: s
*
1.标准环境条件 standard ambient condition: Z<X=00,wg
2.气体的标准状态 standard reference conditions forgases: =8]`-(
3.压力(压强)p pressure: 4/(#masIL
4.帕斯卡Pa pascal: U"GxXrl
5.托Torr torr: h@
lz
6.标准大气压atm standard atmosphere: %0Ur3
7.毫巴mbar millibar: Ch"wp/[
8.分压力 partial pressure: u>
{aF{
9.全压力 total pressure: vkG#G]Qs";
10.真空 vacuum: yJ?=##
11.真空度 degree of vacuum: 01mu6)
12.真空区域 ranges of vacuum: !ZTghX}D
13.气体 gas: 0nt@}\j
14.非可凝气体 non-condensable gas: \TP$2i%W
15.蒸汽vapor: gv67+Mf
16.饱和蒸汽压saturation vapor pressure: 9nAP%MA`
17.饱和度degree of saturation: kK75 (x
18.饱和蒸汽saturated vapor: Tt: (l/1
19.未饱和蒸汽unsaturated vapor: &PC6C<<f
20.分子数密度n,m-3 number density of molecules: sa.H,<;
21.平均自由程ι、λ,m mean free path: xNIrmqm5]
22.碰撞率ψ collision rate: "l&SRX?g
23.体积碰撞率χ volume collision rate: # xO PF9
24.气体量G quantity of gas: Jr5S8c|"
25.气体的扩散 diffusion of gas: m1W) PUy
26.扩散系数D diffusion coefficient; diffusivity: cW*v))@2
27.粘滞流 viscous flow: V?EX`2S
28.粘滞系数η viscous factor: UBL{3s^"
29.泊肖叶流 poiseuille flow: lAnq2j|
30.中间流 intermediate flow: Wc@
,#v
31.分子流 molecular flow: t'2A)S
32克努曾数 number of knudsen: 6Q :Wo)^!
33.分子泻流 molecular effusion; effusive flow: 'w,gYW
34.流逸 transpiration: !=YE hQ-
35.热流逸 thermal transpiration: W` x.qumN
36.分子流率qN molecular flow rate; molecular flux: l,o'J%<%
37.分子流率密度 molecular flow rate density; density of molecular flux: 7^i7U-A<A
38.质量流率qm mass flow rare: Rw'}>?k]
39.流量qG throughput of gas: ho=!Yy
40.体积流率qV volume flow rate: ]T)N{"&N/
41.摩尔流率qυ molar flow rate: y,:WLk~
42.麦克斯韦速度分布 maxwellian velocity distribution: LuySa2,
43.传输几率Pc transmission probability: kN/YnY*J<
44.分子流导CN,UN molecular conductance: $W7}Igx#
45.流导C,U conductance: 0`E G-Hw
46.固有流导Ci,Ui intrinsic conductance: _*H Hdd5I
47.流阻W resistance: %Yu~56c-
48.吸附 sorption: D?dBm
49.表面吸附 adsorption: i
bzY&f
50.物理吸附physisorption: qWH^/o
51.化学吸附 chemisorption: :E-$:\V0}k
52.吸收absorption: Rrh6-]A
53.适应系数α accommodation factor: bll[E}E|3
54.入射率υ impingement rate:
uF<34
55.凝结率condensation rate: ?kR1T0lKkE
56.粘着率 sticking rate: OJu>#
57.粘着几率Ps sticking probability: /xUF@%rT
58.滞留时间τ residence time: [7}3k?42X
59.迁移 migration: mo^E8t.
60.解吸 desorption: %?[gBf[y
61.去气 degassing: 9D14/9*(dU
62.放气 outgassing: <eXGtD
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: dU3A:uS^
64.蒸发率 evaporation rate: XYvj3+
65.渗透 permeation: jSpj6:@B
66.渗透率φ permeability: y#a,d||N1
67.渗透系数P permeability coefficient kn}^oRT
2. 1.真空泵 vacuum pumps &pY'
1-1.容积真空泵 positive displacement pump: Tw';;euw
⑴.气镇真空泵 gas ballast vacuum pump: -+[Lc_oNPx
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: W(]A^C=/
⑶.干封真空泵 dry-sealed vacuum pump: x\'3UKQP+^
⑷.往复真空泵 piston vacuum pump: f+9eB
⑸.液环真空泵 liquid ring vacuum pump: v7pu
⑹.旋片真空泵 sliding vane rotary vacuum pump: ou-#+Sdd
⑺.定片真空泵 rotary piston vacuum pump: 68j1svz9
⑻.滑阀真空泵 rotary plunger vacuum pump: n{N0S^h
⑼.余摆线真空泵 trochoidal vacuum pump: ry|a_3X(I
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: rQl9SUs
⑾.罗茨真空泵 roots vacuum pump: !-)!UQ~|8
1-2.动量传输泵 kinetic vacuum pump: m]V#fRC
⑴.牵引分子泵molecular drag pump: ueJ^Q,-t
⑵.涡轮分子泵turbo molecular pump: :h(RS ;
⑶.喷射真空泵ejector vacuum pump: x'0_lf</#
⑷.液体喷射真空泵liquid jet vacuum pump: F'|K>!H
⑸.气体喷射真空泵gas jet vacuum pump: ho$}#o
⑹.蒸汽喷射真空泵vapor jet vacuum pump : 9C)VW
⑺.扩散泵diffusion pump : \i+AMduAo
⑻.自净化扩散泵self purifying diffusion pump: c1E{J<pZ
⑼.分馏扩散泵 fractionating diffusion pump : Ub\^3f
⑽.扩散喷射泵diffusion ejector pump : hV~M!vFxA
⑾.离子传输泵ion transfer pump: nl}LT/N
1-3.捕集真空泵 entrapment vacuum pump: JOG-i
⑴吸附泵adsorption pump: LBq2({="
⑵.吸气剂泵 getter pump: @Y `Z3LiR$
⑶.升华(蒸发)泵 sublimation (evaporation)pump : 0UJ6>Rj
⑷.吸气剂离子泵getter ion pump: {XIpHr
⑸.蒸发离子泵 evaporation ion pump: 8Ygf@*9L4
⑹.溅射离子泵sputter ion pump: %T$>E7]!
⑺.低温泵cryopump: b_`h2dUq
K&&T:'=/
2.真空泵零部件 v)np.j0V7
2-1.泵壳 pump case: LCSvw
2-2.入口 inlet: Aa_@&e
2-3.出口outlet: vLxaZWr
2-4.旋片(滑片、滑阀)vane; blade : hdWV vN
2-5.排气阀discharge valve: ~D@ YLW1z(
2-6.气镇阀gas ballast valve: &Z>??|f
2-7.膨胀室expansion chamber: +EjXoW7V
2-8.压缩室compression chamber: r-YJ$/J
2-9.真空泵油 vacuum pump oil: OK v2..8
2-10.泵液 pump fluid: f/c&Ya(D~
2-11.喷嘴 nozzle: -ysNo4#e&
2-13.喷嘴扩张率nozzle expansion rate: Ej)7[
2-14.喷嘴间隙面积 nozzle clearance area : [R1|=kGU
2-15.喷嘴间隙nozzle clearance: cz,CL/rno
2-16.射流jet: p@O Ip
2-17.扩散器diffuser: ]d[e
2-18.扩散器喉部diffuser thoat: !U:&8Le
2-19.蒸汽导管vapor tube(pipe;chimney): >yKz8SV#
2-20.喷嘴组件nozzle assembly: g4k3~,=D3
2-21.下裙skirt: C9?mxa*z
I'BHNZO5tf
3.附件 %\HE1d5;
3-1阱trap: x2t&Wpvt
⑴.冷阱 cold trap: qCI7)L`
⑵.吸附阱sorption trap: /&|p7
⑶.离子阱ion trap: Csy$1;"A
⑷.冷冻升华阱 cryosublimation trap: zWU]4;,"
3-2.挡板baffle: 'k]~Q{K$
3-3.油分离器oil separator: EpO2%|@
3-4.油净化器oil purifier: b>QdP$>
3-5.冷凝器condenser: OqS!y(
(
2]?=\_T
4.泵按工作分类 @:RoY vk$
4-1.主泵main pump: i`e[Vwe2x@
4-2.粗抽泵roughing vacuum pump: ]e),#_M
4-3.前级真空泵backing vacuum pump: K"VcPDK
4-4.粗(低)真空泵 roughing(low)vacuum pump: uvJHkAi
4-5.维持真空泵holding vacuum pump: '*L6@e#U
4-6.高真空泵high vacuum pump: LI@BB:)[
4-7.超高真空泵ultra-high vacuum pump: Wk7E&?-:6
4-8.增压真空泵booster vacuum pump: fZ &
~C^:SND7
5.真空泵特性 ;G}
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: NA2={RB;
5-2.真空泵的抽气量Q throughput of vacuum pump:。 ,ja!OZ0$
5-3.起动压力starting pressure: 0ZwXuq
5-4.前级压力 backing pressure : `B"sy8}x
5-5.临界前级压力 critical backing pressure: z H-a%$5
5-6.最大前级压力maximum backing pressure: {e|.AD
5-7.最大工作压力maximum working pressure: m
W>Iib|
5-8.真空泵的极限压力ultimate pressure of a pump: :8eI_X
5-9.压缩比compression ratio: UH6 7<_mK
5-10.何氏系数Ho coefficient: tqpO3
5-11.抽速系数speed factor: [m{sl(Q
5-12.气体的反扩散back-diffusion of gas: VO eVS&}
5-13.泵液返流back-streaming of pump fluid: s!?uLSEdb
5-14.返流率back-streaming rate g(tVghHxt$
5-15.返迁移back-migration: Dfzj/spFV
5-16.爆腾bumping: @%x2d1FS
5-17.水蒸气允许量qm water vapor tolerable load: Lfi6b%/z
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: 1xEOYM)
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: MhCU;
!
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump mj$Ucql
3. 1.一般术语 /;(ji?wN
1-1.压力计pressure gauge: C`t@tgT
1-2.真空计vacuum gauge: (eU 4{X7
⑴.规头(规管)gauge head: 'I/_vqp@
⑵.裸规nude gauge : }NyQ<,+mq&
⑶.真空计控制单元gauge control unit : QPB,B>Z
⑷.真空计指示单元gauge indicating unit : |?VJf3A
p&RC#wYu
2.真空计一般分类 B%uY/Mwz$
2-1.压差式真空计differential vacuum gauge: /a^
R$RHl'
2-2.绝对真空计 absolute vacuum gauge: HdxP:s.T
2-3.全压真空计total pressure vacuum gauge: 'o}[9ZBjn
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: Z[IM\# "
2-5.相对真空计relative vacuum gauge : B2j1GJEO
\AroSy9
3.真空计特性 bD ,X.
3-1.真空计测量范围pressure range of vacuum gauge: [s[ZOi!;I
3-2.灵敏度系数sensitivity coefficient: R6(:l;
W
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): sq`Xz8u
3-5.规管光电流photon current of vacuum gauge head: \t=0rFV)t
3-6.等效氮压力equivalent nitrogen pressure :
"&k(lQ4
3-7.X射线极限值 X-ray limit: V>T?'GbS
3-8.逆X射线效应anti X-ray effect: HuTtp|zM>
3-9.布利尔斯效应blears effect: -JgNujt#9
\fTQNF
4.全压真空计 )L:e0u
4-1.液位压力计liquid level manometer: wxvi)|)
4-2.弹性元件真空计elastic element vacuum gauge: j~{cT/5Y_
4-3.压缩式真空计compression gauge: :+Ukwno?/
4-4.压力天平pressure balance: #{|cSaX<
4-5.粘滞性真空计viscosity gauge : I<940PZ
4-6.热传导真空计thermal conductivity vacuum gauge : _|GbU1Hz
4-7.热分子真空计thermo-molecular gauge: Oh$:qu7o0&
4-8.电离真空计ionization vacuum gauge: ?'P}ZC8P
4-9.放射性电离真空计radioactive ionization gauge: -sQ[f18
4-10.冷阴极电离真空计cold cathode ionization gauge: @p*)^D6E\
4-11.潘宁真空计penning gauge: Zw9;g+9
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: * $f`ouJl
4-13.放电管指示器discharge tube indicator: XJe=+_K9
4-14.热阴极电离真空计hot cathode ionization gauge: @/<UhnI
4-15.三极管式真空计triode gauge: viAAb
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: >E<ib[vK[
4-17.B-A型电离真空计Bayard-Alpert gauge: 7m-%
4-18.调制型电离真空计modulator gauge: =lJ
?yuc
4-19.抑制型电离真空计suppressor gauge: 4c<
s"2F
4-20.分离型电离真空计extractor gauge: 95mf
4-21.弯注型电离真空计bent beam gauge: DSz[,AaR]
4-22.弹道型电离真空计 orbitron gauge : WSHPhhM
4-23.热阴极磁控管真空计hot cathode magnetron gauge: GV Xdyi
{3`385
5.分压真空计(分压分析器) EB*sd S
5-1.射频质谱仪radio frequency mass spectrometer: Z71m(//*}
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: g.Xk6"kO
5-3.单极质谱仪momopole mass spectrometer: &Pr\n&9A
5-4.双聚焦质谱仪double focusing mass spectrometer: +\Vm t[v
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: \A[l(aB
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: Lg7A[\c
~
5-7.回旋质谱仪omegatron mass spectrometer: GjhTF|
5-8.飞行时间质谱仪time of flight mass spectrometer: d5m-f/
3^y(@XFt
6.真空计校准 "OjAhKfG
6-1.标准真空计reference gauges: _f[Q\gK
6-2.校准系统system of calibration: Q>%n&;:
6-3.校准系数K calibration coefficient: /g<Oh{o8
6-4.压缩计法meleod gauge method: cFL~<
[>_
6-5.膨胀法expansion method: kMQ
/9~
6-6.流导法flow method: ZUQ
_u
4. 1.真空系统vacuum system C[^V\?3ly:
1-1.真空机组pump system: NGc~%0n
1-2.有油真空机组pump system used oil : K29/7A/
1-3.无油真空机组oil free pump system 7s(tAbPdB
1-4.连续处理真空设备continuous treatment vacuum plant: uNzc,OH
1-5.闸门式真空系统vacuum system with an air-lock: 1]7gYNzV"
1-6.压差真空系统differentially pumped vacuum system: _B^zm-}8|B
1-7.进气系统gas admittance system: n"EKVw7Y
$6"(t= %{
2.真空系统特性参量 F^O83[S
2-1.抽气装置的抽速volume flow rate of a pumping unit : ~gfR1SE
2-2.抽气装置的抽气量throughput of a pumping unit : D!&(#Vl
_
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 6TW7E}a.
2-4.真空系统的漏气速率leak throughput of a vacuum system: KMRPleF
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: Nwi|>'\C
2-6.极限压力ultimate pressure: /\8Il+0
2-7.残余压力residual pressure: (wDE!H7
2-8.残余气体谱residual gas spectrum: FO2e7p^Q
2-9.基础压力base pressure: o
<q*3L5
2-10.工作压力working pressure: sAkr-x?+M
2-11.粗抽时间roughing time: !ZBtXt#P
2-12.抽气时间pump-down time: $`F9e5}G
2-13.真空系统时间常数time constant of a vacuum system: kTvM,<
2-14.真空系统进气时间venting time: 'h*jL@%TT
L^+rsxR
3.真空容器 ShB]U5b:k
3-1.真空容器;真空室vacuum chamber: EA& 3rI>U)
3-2.封离真空装置sealed vacuum device: C%XO|sP
3-3.真空钟罩vacuum bell jar: s*izhjjX
3-4.真空容器底板vacuum base plate: l[}4
X/
3-5.真空岐管vacuum manifold: n<ZPWlJ
3-6.前级真空容器(贮气罐)backing reservoir: LIZB!S@V \
3-7.真空保护层outer chamber: C ^Y\?2h1
3-8.真空闸室vacuum air lock: =c[tHf
3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: =hPXLCeC
x|6]+?l@6
4.真空封接和真空引入线 o<`hj&s
4-1.永久性真空封接permanent seal : 3P
cVE\GN
4.2.玻璃分级过渡封接graded seal : Z?axrGmg0
4-3.压缩玻璃金属封接compression glass-to-metal seal: oh9
;_~
4-4.匹配式玻璃金属封接matched glass-to-metal seal: W:]FYC
4-5.陶瓷金属封接ceramic-to-metal seal: ~e{ @ 5.g
4-6.半永久性真空封接semi-permanent seal : _wq?Pa<)e
4-7.可拆卸的真空封接demountable joint: z5>I9R^q;
4-8.液体真空封接liquid seal NQ9v[gv
4-9.熔融金属真空封接molten metal seal: H9cPtP~a)
4-10.研磨面搭接封接ground and lapped seal: cl4E6\?z
4-11.真空法兰连接vacuum flange connection: V0nQmsP1U
4-12.真空密封垫vacuum-tight gasket: \|;\
4-13.真空密封圈ring gasket: +hxG!o?O
4-14.真空平密封垫flat gasket: $83B10OQ&L
4-15.真空引入线feedthrough leadthrough: NX @FUct;
4-16.真空轴密封shaft seal: ZaFt4#
4-17.真空窗vacuum window: O*EV~{K
4-18.观察窗viewing window: "s+4!, k
v4P"|vZ$&
5.真空阀门 JB_fS/I
5-1.真空阀门的特性characteristic of vacuum valves: >Fel) a
⑴.真空阀门的流导conductance of vacuum valves: (j:
ptQ2$
⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: Wlj&_~
5-2.真空调节阀regulating valve: / ;]5X
5-3.微调阀 micro-adjustable valve: %By Pwu:f
5-4.充气阀charge valve: xA] L0h]
5-5.进气阀gas admittance valve: ,WT>"9+
5-6.真空截止阀break valve: h!EA;2yGKa
5-7.前级真空阀backing valve: j|eA*UE
5-8.旁通阀 by-pass valve: OZ[ YB
5-9.主真空阀main vacuum valve: ',+yD9 @
5-10.低真空阀low vacuum valve: /R)wM#&
5-11.高真空阀high vacuum valve: ^kez]>
5-12.超高真空阀;UHV阀 ultra-high vacuum valve: m~=~DMj
5-13.手动阀manually operated valve: G95,J/w
5-14.气动阀pneumatically operated valve: +#W94s~0V
5-15.电磁阀electromagnetically operated valve: 6
63o
5-16.电动阀valve with electrically motorized operation: W'lqNOX[v
5-17.挡板阀baffle valve: zzqJeIS
5-18.翻板阀flap valve: }Mcb\+[
5-19.插板阀gate valve: }r:o8+4
5-20.蝶阀butterfly valve: sibYJK Oy
ccD+AGM.
6.真空管路 NxT"A)u
6-1.粗抽管路roughing line: )9QtnM
6-2.前级真空管路backing line: Rj8%% G-pt
6-3.旁通管路;By-Pass管路 by-pass line: GIC1]y-'
6-4.抽气封口接头pumping stem: X#Bb?Pv
6-5.真空限流件limiting conductance: MmuT~d/
6-6.过滤器filter: wX$:NOO
5. 1.一般术语 jc}G+|`
1-1真空镀膜vacuum coating: qQ&uU7,#
1-2基片substrate: 8.E"[QktZ
1-3试验基片testing substrate: 7s9h:/Lu
1-4镀膜材料coating material: nwRltK
1-5蒸发材料evaporation material: f:T?oR>2
1-6溅射材料sputtering material: sDY~jP[Oa
1-7膜层材料(膜层材质)film material: gq?:n.;TY
1-8蒸发速率evaporation rate: TkbaoD
1-9溅射速率sputtering rate: PNU(;&2<
1-10沉积速率deposition rate: em$pU*`P
1-11镀膜角度coating angle: 7R+(3NU1A
5j%G7.S\
2.工艺 ,$P,x
2-1真空蒸膜vacuum evaporation coating: Jd2.j?P=
(1).同时蒸发simultaneous evaporation: jG5HW*>k0
(2).蒸发场蒸发evaporation field evaporation: 4w4B\Na>l
(3).反应性真空蒸发reactive vacuum evaporation: *7BfK(9T
(4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: [}RoZB&I
(5).直接加热的蒸发direct heating evaporation: 1J@Iekat
(6).感应加热蒸发induced heating evaporation: 2z.ot'
(7).电子束蒸发electron beam evaporation: 2Xb,
i
(8).激光束蒸发laser beam evaporation: ]S|FK>U[
(9).间接加热的蒸发indirect heating evaporation: ZykMri3bi
(10).闪蒸flash evaportion: >t D=t8
2-2真空溅射vacuum sputtering: zM0NRERi
(1).反应性真空溅射 reactive vacuum sputtering: }[*'
(2).偏压溅射bias sputtering: [,%=\%5
(3).直流二级溅射direct current diode sputtering: 8xpplo8
(4).非对称性交流溅射asymmtric alternate current sputtering: q2GW3t
(5).高频二极溅射high frequency diode sputtering: a QH6akH
(6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: vDy&sgS$<
(7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: _;<!8e$C
(8).离子束溅射ion beam sputtering: z\YIwrq3*
(9).辉光放电清洗glow discharge cleaning: }\pI`;*O|
2-3物理气相沉积PVD physical vapor deposition: jvT'N@
2-4化学气相沉积CVD chemical vapor deposition: dWqn7+:
2-5磁控溅射magnetron sputtering: D}-.<
2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: :5d>^6eoB?
2-7空心阴极离子镀HCD hollow cathode discharge deposition: W&z jb>0b0
2-8电弧离子镀arc discharge deposition: xQy,1f3s+
GkIE;7#2kX
3.专用部件 yNTd_XPL
3-1镀膜室coating chamber: %+7]/_JO&