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    [分享]真空术语全集 [复制链接]

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    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 KhR3$|fH<  
    --------------------------------------------------- ~+\=X`y  
    真空术语 UR'[?  
    :s *  
    1.标准环境条件 standard ambient condition: Z<X=00,wg  
    2.气体的标准状态 standard reference conditions forgases: =8]`-(  
    3.压力(压强)p pressure: 4/(#masIL  
    4.帕斯卡Pa pascal: U"Gx Xrl  
    5.托Torr torr: h@ lz  
    6.标准大气压atm standard atmosphere: %0Ur3  
    7.毫巴mbar millibar: Ch"wp/[  
    8.分压力 partial pressure: u> {aF{  
    9.全压力 total pressure: vkG#G]Qs";  
    10.真空 vacuum: yJ?=##  
    11.真空度 degree of vacuum: 01mu6)  
    12.真空区域 ranges of vacuum: !ZTghX}D  
    13.气体 gas: 0nt@}\j  
    14.非可凝气体 non-condensable gas: \TP$2i%W  
    15.蒸汽vapor: gv67+Mf  
    16.饱和蒸汽压saturation vapor pressure: 9nAP%MA`  
    17.饱和度degree of saturation: kK75(x  
    18.饱和蒸汽saturated vapor: Tt: (l/1  
    19.未饱和蒸汽unsaturated vapor: &PC6C<<f  
    20.分子数密度n,m-3 number density of molecules: sa.H,<;  
    21.平均自由程ι、λ,m mean free path: xNIrmqm5]  
    22.碰撞率ψ collision rate: "l&SRX?g  
    23.体积碰撞率χ volume collision rate: # xO PF9  
    24.气体量G quantity of gas: Jr5S8 c|"  
    25.气体的扩散 diffusion of gas: m1W) PUy  
    26.扩散系数D diffusion coefficient; diffusivity: cW*v))@2  
    27.粘滞流 viscous flow: V?EX`2S  
    28.粘滞系数η viscous factor: UBL{3s^"  
    29.泊肖叶流 poiseuille flow: lAnq2j|  
    30.中间流 intermediate flow: Wc@ ,#v  
    31.分子流 molecular flow: t'2A)S  
    32克努曾数 number of knudsen: 6Q:Wo)^!  
    33.分子泻流 molecular effusion; effusive flow: 'w ,gYW  
    34.流逸 transpiration: !=YEhQ-  
    35.热流逸 thermal transpiration: W`x.qumN  
    36.分子流率qN molecular flow rate; molecular flux: l,o'J%<%  
    37.分子流率密度 molecular flow rate density; density of molecular flux: 7^i7U-A<A  
    38.质量流率qm mass flow rare: Rw'}>?k]  
    39.流量qG throughput of gas: ho=!Yy  
    40.体积流率qV volume flow rate: ]T)N{"&N/  
    41.摩尔流率qυ molar flow rate: y,:WLk~  
    42.麦克斯韦速度分布 maxwellian velocity distribution: LuySa2 ,  
    43.传输几率Pc transmission probability: kN/YnY*J<  
    44.分子流导CN,UN molecular conductance: $ W7}Igx#  
    45.流导C,U conductance: 0`E G-Hw  
    46.固有流导Ci,Ui intrinsic conductance: _*H Hdd5I  
    47.流阻W resistance: %Yu~56c-  
    48.吸附 sorption: D?dBm  
    49.表面吸附 adsorption: i bzY&f  
    50.物理吸附physisorption: qWH^/o  
    51.化学吸附 chemisorption: :E-$:\V0}k  
    52.吸收absorption: Rrh6-]A  
    53.适应系数α accommodation factor: bll[E}E|3  
    54.入射率υ impingement rate: uF<34  
    55.凝结率condensation rate: ?kR1T0lKkE  
    56.粘着率 sticking rate: OJu>#   
    57.粘着几率Ps sticking probability: /xUF@%rT  
    58.滞留时间τ residence time: [7}3k?42X  
    59.迁移 migration: mo^E8t.  
    60.解吸 desorption: %?[gBf[y  
    61.去气 degassing: 9D14/9*(dU  
    62.放气 outgassing: <eXGtD  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: dU3A:uS^  
    64.蒸发率 evaporation rate: XYvj3+  
    65.渗透 permeation: jSpj6:@B  
    66.渗透率φ permeability: y#a,d||N1  
    67.渗透系数P permeability coefficient kn}^oRT  
    2.   1.真空泵 vacuum pumps &pY '  
    1-1.容积真空泵 positive displacement pump: Tw';;euw  
    ⑴.气镇真空泵 gas ballast vacuum pump: -+[Lc_oNPx  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: W(]A^C=/  
    ⑶.干封真空泵 dry-sealed vacuum pump: x\'3UKQP+^  
    ⑷.往复真空泵 piston vacuum pump: f+9eB  
    ⑸.液环真空泵 liquid ring vacuum pump: v7pu  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: ou-#+Sdd  
    ⑺.定片真空泵 rotary piston vacuum pump: 68j1s vz9  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: n{N0S^h  
    ⑼.余摆线真空泵 trochoidal vacuum pump: ry|a_3X(I  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: rQl9SUs  
    ⑾.罗茨真空泵 roots vacuum pump: !-)!UQ~|8  
    1-2.动量传输泵 kinetic vacuum pump: m]V#fRC  
    ⑴.牵引分子泵molecular drag pump: ueJ^Q,-t  
    ⑵.涡轮分子泵turbo molecular pump: :h(RS ;  
    ⑶.喷射真空泵ejector vacuum pump: x'0_lf</ #  
    ⑷.液体喷射真空泵liquid jet vacuum pump: F'|K>!H  
    ⑸.气体喷射真空泵gas jet vacuum pump: ho$}#o  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : 9 C)VW  
    ⑺.扩散泵diffusion pump : \i+AMduAo  
    ⑻.自净化扩散泵self purifying diffusion pump: c1E{J <pZ  
    ⑼.分馏扩散泵 fractionating diffusion pump : Ub\^3f  
    ⑽.扩散喷射泵diffusion ejector pump : hV~M!vFxA  
    ⑾.离子传输泵ion transfer pump: nl}LT/N  
    1-3.捕集真空泵 entrapment vacuum pump: JOG- i  
    ⑴吸附泵adsorption pump: LBq2({="  
    ⑵.吸气剂泵 getter pump: @Y`Z3LiR$  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : 0UJ6> Rj  
    ⑷.吸气剂离子泵getter ion pump: {XIpH r  
    ⑸.蒸发离子泵 evaporation ion pump: 8Ygf@*9L4  
    ⑹.溅射离子泵sputter ion pump: %T$>E7]!  
    ⑺.低温泵cryopump: b_`h2dUq  
    K&&T:'=/  
    2.真空泵零部件 v)np.j0V7  
    2-1.泵壳 pump case: LCSvw  
    2-2.入口 inlet: Aa_@&e  
    2-3.出口outlet: vLxaZWr  
    2-4.旋片(滑片、滑阀)vane; blade : hdWVvN  
    2-5.排气阀discharge valve: ~D@YLW1z(  
    2-6.气镇阀gas ballast valve: &Z>??|f  
    2-7.膨胀室expansion chamber: +EjXoW7V  
    2-8.压缩室compression chamber: r-YJ$/J  
    2-9.真空泵油 vacuum pump oil: OK v2..8  
    2-10.泵液 pump fluid: f/c&Ya(D~  
    2-11.喷嘴 nozzle: -ysNo4#e&  
    2-13.喷嘴扩张率nozzle expansion rate: Ej)7[  
    2-14.喷嘴间隙面积 nozzle clearance area : [R1|=kGU  
    2-15.喷嘴间隙nozzle clearance: cz,CL/rno  
    2-16.射流jet: p@O Ip  
    2-17.扩散器diffuser: ]d[e  
    2-18.扩散器喉部diffuser thoat: !U:&8Le  
    2-19.蒸汽导管vapor tube(pipe;chimney): >yKz8SV#  
    2-20.喷嘴组件nozzle assembly: g4k3~,=D3  
    2-21.下裙skirt: C9?mxa*z  
    I'BHNZO5tf  
    3.附件 %\HE1d5;  
    3-1阱trap: x2t&Wpvt  
    ⑴.冷阱 cold trap: qCI7)L`  
    ⑵.吸附阱sorption trap: /&|p7  
    ⑶.离子阱ion trap: Csy$1;"A  
    ⑷.冷冻升华阱 cryosublimation trap: zWU]4;,"  
    3-2.挡板baffle: 'k]~Q{K$  
    3-3.油分离器oil separator: EpO2%|@  
    3-4.油净化器oil purifier: b>QdP$>  
    3-5.冷凝器condenser: OqS!y( (  
    2]?=\_T  
    4.泵按工作分类 @:RoYvk$  
    4-1.主泵main pump: i`e[Vwe2x@  
    4-2.粗抽泵roughing vacuum pump: ]e),#_M  
    4-3.前级真空泵backing vacuum pump: K" VcPDK  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: uvJHkAi  
    4-5.维持真空泵holding vacuum pump: '*L6@e#U  
    4-6.高真空泵high vacuum pump: LI@BB:)[  
    4-7.超高真空泵ultra-high vacuum pump: Wk7E&?-:6  
    4-8.增压真空泵booster vacuum pump: fZ &  
    ~C^:SND7  
    5.真空泵特性 ;G}  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: NA2={RB;  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 ,ja!OZ0$  
    5-3.起动压力starting pressure: 0ZwXuq  
    5-4.前级压力 backing pressure : `B"sy8}x  
    5-5.临界前级压力 critical backing pressure: z H-a%$5  
    5-6.最大前级压力maximum backing pressure: {e|.AD  
    5-7.最大工作压力maximum working pressure: m W>Iib|  
    5-8.真空泵的极限压力ultimate pressure of a pump: :8eI_X  
    5-9.压缩比compression ratio: UH6 7<_mK  
    5-10.何氏系数Ho coefficient: tqpO3  
    5-11.抽速系数speed factor: [m{sl(Q  
    5-12.气体的反扩散back-diffusion of gas: VO eVS&}  
    5-13.泵液返流back-streaming of pump fluid: s !?uLSEdb  
    5-14.返流率back-streaming rate g(tVghHxt$  
    5-15.返迁移back-migration: Dfzj/spFV  
    5-16.爆腾bumping: @%x2d1FS  
    5-17.水蒸气允许量qm water vapor tolerable load: Lfi6b%/z  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: 1xEOYM)  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: MhCU; !  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump mj$Ucql  
    3.   1.一般术语 /;(ji?wN  
    1-1.压力计pressure gauge: C`t @tgT  
    1-2.真空计vacuum gauge: (eU4{X7  
    ⑴.规头(规管)gauge head: 'I/_vqp@  
    ⑵.裸规nude gauge : }NyQ<,+mq&  
    ⑶.真空计控制单元gauge control unit : QPB,B>Z  
    ⑷.真空计指示单元gauge indicating unit : |?VJf3 A  
    p&RC#wYu  
    2.真空计一般分类 B%uY/Mwz$  
    2-1.压差式真空计differential vacuum gauge: /a^ R$RHl'  
    2-2.绝对真空计 absolute vacuum gauge: HdxP:s.T  
    2-3.全压真空计total pressure vacuum gauge: 'o}[9ZBjn  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: Z[IM\# "  
    2-5.相对真空计relative vacuum gauge : B2j1G JEO  
    \Aro Sy9  
    3.真空计特性 bD,X.  
    3-1.真空计测量范围pressure range of vacuum gauge: [s[ZOi!;I  
    3-2.灵敏度系数sensitivity coefficient: R6(:l; W  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): sq`Xz 8u  
    3-5.规管光电流photon current of vacuum gauge head: \t=0rFV)t  
    3-6.等效氮压力equivalent nitrogen pressure :  "&k(lQ4  
    3-7.X射线极限值 X-ray limit: V>T?'GbS  
    3-8.逆X射线效应anti X-ray effect: HuTtp|zM>  
    3-9.布利尔斯效应blears effect: -JgNujt#9  
    \fTQNF  
    4.全压真空计 )L:e0u  
    4-1.液位压力计liquid level manometer: wxvi)|)  
    4-2.弹性元件真空计elastic element vacuum gauge: j~{cT/5Y_  
    4-3.压缩式真空计compression gauge: :+Ukwno?/  
    4-4.压力天平pressure balance: #{|cSaX<  
    4-5.粘滞性真空计viscosity gauge : I<940PZ  
    4-6.热传导真空计thermal conductivity vacuum gauge : _|GbU1Hz  
    4-7.热分子真空计thermo-molecular gauge: Oh$:qu7o0&  
    4-8.电离真空计ionization vacuum gauge: ?'P}ZC8P  
    4-9.放射性电离真空计radioactive ionization gauge: -sQ[f18  
    4-10.冷阴极电离真空计cold cathode ionization gauge: @p*)^D6E\  
    4-11.潘宁真空计penning gauge: Zw9;g+9  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: * $f`ouJl  
    4-13.放电管指示器discharge tube indicator: XJe=+_K9  
    4-14.热阴极电离真空计hot cathode ionization gauge: @/<UhnI  
    4-15.三极管式真空计triode gauge:  viAAb  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: >E<ib[vK[  
    4-17.B-A型电离真空计Bayard-Alpert gauge: 7m-%  
    4-18.调制型电离真空计modulator gauge: =lJ ?yuc  
    4-19.抑制型电离真空计suppressor gauge: 4c< s"2F  
    4-20.分离型电离真空计extractor gauge: 9 5mf  
    4-21.弯注型电离真空计bent beam gauge: DSz[,AaR]  
    4-22.弹道型电离真空计 orbitron gauge : WSHPh hM  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: GVXdyi  
    {3`385  
    5.分压真空计(分压分析器) EB*sd S  
    5-1.射频质谱仪radio frequency mass spectrometer: Z71m(//*}  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: g.Xk6"kO  
    5-3.单极质谱仪momopole mass spectrometer: &Pr\n&9A  
    5-4.双聚焦质谱仪double focusing mass spectrometer: +\Vm t[v  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: \A[l(aB  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: Lg7A[\c ~  
    5-7.回旋质谱仪omegatron mass spectrometer: GjhTF|  
    5-8.飞行时间质谱仪time of flight mass spectrometer: d5m -f/  
    3^y(@XFt  
    6.真空计校准 "O jAhKfG  
    6-1.标准真空计reference gauges: _f[Q\gK  
    6-2.校准系统system of calibration: Q>%n&;:  
    6-3.校准系数K calibration coefficient: /g<Oh{o8  
    6-4.压缩计法meleod gauge method: cFL~< [>_  
    6-5.膨胀法expansion method: kMQ /9~  
    6-6.流导法flow method: ZUQ _u  
    4.   1.真空系统vacuum system C[^V\?3ly:  
    1-1.真空机组pump system: NGc~%0n  
    1-2.有油真空机组pump system used oil : K29/7A/  
    1-3.无油真空机组oil free pump system 7s(tAbPdB  
    1-4.连续处理真空设备continuous treatment vacuum plant: uNzc,OH  
    1-5.闸门式真空系统vacuum system with an air-lock: 1]7gYNzV"  
    1-6.压差真空系统differentially pumped vacuum system: _B^zm-}8|B  
    1-7.进气系统gas admittance system: n"EKVw7Y  
    $6"(t=%{  
    2.真空系统特性参量 F^O83[S  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : ~gfR1SE  
    2-2.抽气装置的抽气量throughput of a pumping unit : D!&(#Vl _  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: 6TW7E }a.  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: KMRPleF  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: Nwi|>'\C  
    2-6.极限压力ultimate pressure: /\8I l+0  
    2-7.残余压力residual pressure: (wDE!H7  
    2-8.残余气体谱residual gas spectrum: FO2e7p^Q  
    2-9.基础压力base pressure: o <q*3L5  
    2-10.工作压力working pressure: sAkr-x?+M  
    2-11.粗抽时间roughing time: !ZBtXt#P  
    2-12.抽气时间pump-down time: $`F9e5}G  
    2-13.真空系统时间常数time constant of a vacuum system: kTvM,<  
    2-14.真空系统进气时间venting time: 'h*jL@%TT  
    L^+rsxR  
    3.真空容器 ShB]U5b:k  
    3-1.真空容器;真空室vacuum chamber: EA& 3rI>U)  
    3-2.封离真空装置sealed vacuum device: C%XO|sP  
    3-3.真空钟罩vacuum bell jar: s*izhjjX  
    3-4.真空容器底板vacuum base plate: l[}4 X/  
    3-5.真空岐管vacuum manifold: n<ZPWlJ  
    3-6.前级真空容器(贮气罐)backing reservoir: LIZB!S@V\  
    3-7.真空保护层outer chamber: C ^Y\?2h1  
    3-8.真空闸室vacuum air lock: =c[tHf  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: =hPXLCeC  
    x|6]+?l@6  
    4.真空封接和真空引入线 o<`hj&s  
    4-1.永久性真空封接permanent seal : 3P cVE\GN  
    4.2.玻璃分级过渡封接graded seal : Z?axrGmg0  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: oh9 ;_~  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: W: ]FYC  
    4-5.陶瓷金属封接ceramic-to-metal seal: ~e{ @5.g  
    4-6.半永久性真空封接semi-permanent seal : _wq?Pa<)e  
    4-7.可拆卸的真空封接demountable joint: z5>I9R^q;  
    4-8.液体真空封接liquid seal NQ9v[gv  
    4-9.熔融金属真空封接molten metal seal: H9cPtP~a)  
    4-10.研磨面搭接封接ground and lapped seal: cl4E6\?z  
    4-11.真空法兰连接vacuum flange connection: V0nQmsP1U  
    4-12.真空密封垫vacuum-tight gasket: \|;\  
    4-13.真空密封圈ring gasket: +hxG!o?O  
    4-14.真空平密封垫flat gasket: $83B10OQ&L  
    4-15.真空引入线feedthrough leadthrough: NX @FUct;  
    4-16.真空轴密封shaft seal: ZaFt4#  
    4-17.真空窗vacuum window: O*EV~ {K  
    4-18.观察窗viewing window: "s+4!,k  
    v4P"|vZ$&  
    5.真空阀门 JB_fS/I  
    5-1.真空阀门的特性characteristic of vacuum valves: >Fel) a  
    ⑴.真空阀门的流导conductance of vacuum valves: (j: ptQ2$  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: Wl j&_~  
    5-2.真空调节阀regulating valve: / ;]5X  
    5-3.微调阀 micro-adjustable valve: %ByPwu:f  
    5-4.充气阀charge valve: xA] L0h]  
    5-5.进气阀gas admittance valve: ,WT>"9+  
    5-6.真空截止阀break valve: h!EA;2yGKa  
    5-7.前级真空阀backing valve: j|eA*UE  
    5-8.旁通阀 by-pass valve: OZ[YB  
    5-9.主真空阀main vacuum valve: ',+yD9 @  
    5-10.低真空阀low vacuum valve: /R)wM#&  
    5-11.高真空阀high vacuum valve: ^kez]>   
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: m~=~DMj  
    5-13.手动阀manually operated valve: G95,J/w  
    5-14.气动阀pneumatically operated valve: +# W94s~0V  
    5-15.电磁阀electromagnetically operated valve: 6  63o  
    5-16.电动阀valve with electrically motorized operation: W'lqNOX[v  
    5-17.挡板阀baffle valve: zzqJeIS  
    5-18.翻板阀flap valve: }Mc b\+[  
    5-19.插板阀gate valve: }r:o8+4  
    5-20.蝶阀butterfly valve: sibYJKOy  
    ccD+AGM.  
    6.真空管路 NxT"A)u  
    6-1.粗抽管路roughing line: )9QtnM  
    6-2.前级真空管路backing line: Rj8%% G-pt  
    6-3.旁通管路;By-Pass管路 by-pass line: GIC1]y-'  
    6-4.抽气封口接头pumping stem: X#B b?Pv  
    6-5.真空限流件limiting conductance:       MmuT~d/  
    6-6.过滤器filter: wX$:NOO  
    5.   1.一般术语 jc} G+|`  
    1-1真空镀膜vacuum coating: qQ&uU7,#  
    1-2基片substrate: 8.E"[QktZ  
    1-3试验基片testing substrate: 7s9h:/Lu  
    1-4镀膜材料coating material: nwRltK  
    1-5蒸发材料evaporation material: f:T?oR>2  
    1-6溅射材料sputtering material: sDY~jP[Oa  
    1-7膜层材料(膜层材质)film material: gq?:n.;TY  
    1-8蒸发速率evaporation rate: Tkbao D  
    1-9溅射速率sputtering rate: PNU(;&2<  
    1-10沉积速率deposition rate: em$pU*`P  
    1-11镀膜角度coating angle: 7R+(3NU1A  
    5j%G7.S\  
    2.工艺 ,$P,x  
    2-1真空蒸膜vacuum evaporation coating: Jd2.j?P=  
    (1).同时蒸发simultaneous evaporation: jG5HW*>k0  
    (2).蒸发场蒸发evaporation field evaporation: 4w4B\Na>l  
    (3).反应性真空蒸发reactive vacuum evaporation: *7BfK(9T  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: [}RoZB&I  
    (5).直接加热的蒸发direct heating evaporation: 1J@Iekat  
    (6).感应加热蒸发induced heating evaporation: 2z.ot'  
    (7).电子束蒸发electron beam evaporation: 2Xb, i  
    (8).激光束蒸发laser beam evaporation: ]S|FK>U[  
    (9).间接加热的蒸发indirect heating evaporation: ZykMri3bi  
    (10).闪蒸flash evaportion: >tD=t8  
    2-2真空溅射vacuum sputtering: zM0NRERi  
    (1).反应性真空溅射 reactive vacuum sputtering: }[*'  
    (2).偏压溅射bias sputtering: [,%=\%5  
    (3).直流二级溅射direct current diode sputtering: 8xpplo8  
    (4).非对称性交流溅射asymmtric alternate current sputtering: q2GW3t  
    (5).高频二极溅射high frequency diode sputtering: a QH6akH  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: vDy&sgS$<  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: _;<!8e$C  
    (8).离子束溅射ion beam sputtering: z\YIwrq3*  
    (9).辉光放电清洗glow discharge cleaning: }\pI`;*O|  
    2-3物理气相沉积PVD physical vapor deposition: jvT'N@  
    2-4化学气相沉积CVD chemical vapor deposition: dWqn7+:  
    2-5磁控溅射magnetron sputtering: D}-.<  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: :5d>^6eoB?  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: W&z jb>0b0  
    2-8电弧离子镀arc discharge deposition: xQy,1f3s+  
    GkIE;7#2kX  
    3.专用部件 yNTd_XPL  
    3-1镀膜室coating chamber: %+7]/_JO&  
    3-2蒸发器装置evaporator device: /--p#Gh'  
    3-3蒸发器evaporator: 9KSi-2?H  
    3-4直接加热式蒸发器evaporator by direct heat: xad`-vw  
    3-5间接加热式蒸发器evaporator by indirect heat: @=J|%NO  
    3-7溅射装置sputtering device: | HazM9=  
    3-8靶target: @Mk`Tl  
    3-10时控挡板timing shutter: ]B8 A  
    3-11掩膜mask: q76POytV|  
    3-12基片支架substrate holder: }d$-:l ,w  
    3-13夹紧装置clamp: 0X$mT:=9  
    3-14换向装置reversing device: ^?z%f_ri  
    3-15基片加热装置substrate heating device: Cj5mM[:s  
    3-16基片冷却装置substrate colding device: O*yxOb*  
    Iv`IJQH>  
    4.真空镀膜设备 w~'xZ?  
    4-1真空镀膜设备vacuum coating plant: T U%@_vYR  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: MNT~[Z9L5G  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: 6( HF)z  
    4-2连续镀膜设备continuous coating plant: 6iC>CY3CG  
    4-3半连续镀膜设备semi- continuous coating plant Ebg8qDE  
    6.   1.漏孔 8^mE<  
    1-1漏孔leaks: &H(yLd[  
    1-2通道漏孔channel leak: ]`^! ]Ql  
    1-3薄膜漏孔membrane leak: ^E&PZA\,;  
    1-4分子漏孔molecular leak: W{p}N  
    1-5粘滞漏孔vixcous leak: [B0 BHJ~  
    1-6校准漏孔calibrated leak: Z%T Ajm  
    1-7标准漏孔reference leak : 9+.wj/75  
    1-8虚漏virtual leak: *4,Q9K_  
    1-9漏率leak rate: Uj@th  
    1-10标准空气漏率standard air leak rate: ~^t@TMk$  
    1-11等值标准空气漏率equivalent standard air leak rate: 6r7>nU&d  
    1-12探索(示漏)气体: )0{`}7X  
    %idBR7?`g  
    2.本底 > A#5` $i  
    2-1本底background: Q=~"xB8  
    2-2探索气体本底search gas background : p6M9uu  
    2-3漂移drift: cx}Yu8  
    2-4噪声noise: [g}Cve#i  
    MqmQ52HR  
    3.检漏仪 Ik G&  
    3-1检漏仪leak detector:  ZR.k'  
    3-2高频火花检漏仪H.F. spark leak detector: 0.GFg${v`  
    3-3卤素检漏仪halide leak detector: ,0l Od<  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: =]5tYIU  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: 4vhf!!1  
    =C %)(|  
    4.检漏 \ovs[&  
    4-1气泡检漏leak detection by bubbles: 3bEcKA_z(  
    4-2氨检漏leak detection by ammonia: ~uQ*u.wi  
    4-3升压检漏leak detection of rise pressure: =~^b  
    4-4放射性同位素检漏radioactive isotope leak detection: ]>3Y~KH(  
    4-5荧光检漏fluorescence leak detection %"RJi?  
    7.   1.一般术语 X+vKY  
    1-1真空干燥vacuum drying: 0b&# w  
    1-2冷冻干燥freeze drying : Pwh}hG1s a  
    1-3物料material: l1KMEGmG  
    1-4待干燥物料material to be dried: U S^% $Z:  
    1-5干燥物料dried material : )>a~%~:  
    1-6湿气moisture;humidity: xATx2*@X2  
    1-7自由湿气free moisture: E0HqXd?  
    1-8结合湿气bound moisture: V"Q\7,_k.  
    1-9分湿气partial moisture: -FeXG#{)  
    1-10含湿量moisture content: A#U! KX  
    1-11初始含湿量initial moisture content: XM'tIE+|  
    1-12最终含湿量final residual moisture: A U~DbU0O  
    1-13湿度degree of moisture ,degree of humidity : i'Y8-})  
    1-14干燥物质dry matter : Q_mphW:[  
    1-15干燥物质含量content of dry matter: >hunV'vu'  
    ;hj lRQ\  
    2.干燥工艺 Rv1W&s&  
    2-1干燥阶段stages of drying : -L2.cN_  
    (1).预干燥preliminary dry: 6?Ncgj &@  
    (2).一次干燥(广义)primary drying(in general): 7FX4|]  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): r@G*Fx8Z  
    (4).二次干燥secondary drying: F^,:p.ihm<  
    2-2.(1).接触干燥contact drying: /9vi  
    (2).辐射干燥 drying by radiation : Tigw+2  
    (3).微波干燥microwave drying: +eVYy_bL-  
    (4).气相干燥vapor phase drying: J)nK9  
    (5).静态干燥static drying: VcjbRpTy&  
    (6).动态干燥dynamic drying: ]n^iG7aB?  
    2-3干燥时间drying time: y oW ~  
    2-4停留时间length of stay(in the drying chamber): `46~j  
    2-5循环时间cycle time: BabaKSm}LP  
    2-6干燥率 dessication ratio : ?v^NimcZ  
    2-7去湿速率mass flow rate of humidity: G e;67  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: m8n)sw,,  
    2-9干燥速度 drying speed : ~^wSwd[  
    2-10干燥过程drying process: _^ hg7&dF  
    2-11加热温度heating temperature: 2D 4,#X  
    2-12干燥温度temperature of the material being dried : {f06Ki  
    2-13干燥损失loss of material during the drying process : :{u`qi  
    2-14飞尘lift off (particles): qS?o22  
    2-15堆层厚度thickness of the material: >$ q   
    7_~ A*LM  
    3.冷冻干燥 reu[rZ&  
    3-1冷冻freezing: s'HsLe0|  
    (1).静态冷冻static freezing: Emlj,c<?j  
    (2).动态冷冻dynamic freezing: Ak[X`e T  
    (3).离心冷冻centrifugal freezing: x0j5D  
    (4).滚动冷冻shell freezing: C-M_:kQ[U  
    (5).旋转冷冻spin-freezing: %H{pU:[5*  
    (6).真空旋转冷冻vacuum spin-freezing: x*OdMr\n8?  
    (7).喷雾冷冻spray freezing: *_D/_Rp7  
    (8).气流冷冻air blast freezing: H cmW  
    3-2冷冻速率rate of freezing: uq5?t  
    3-3冷冻物料frozen material: XgxE M1(  
    3-4冰核ice core: _CD~5EA:  
    3-5干燥物料外壳envelope of dried matter: w8lrpbLh  
    3-6升华表面sublimation front: 5 -i,Tx&:  
    3-7融化位置freezer burn: G ;j1zs  
    }M4dze  
    4.真空干燥设备;真空冷冻干燥设备 9xA4;)36  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: N+&uR!:.C  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: *aErwGLB8  
    4-3加热表面heating surface: e=;A3S  
    4-4物品装载面shelf : xG!~TQ  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): Vh-8pF t  
    4-6单位面积干燥器处理能力throughput per shelf area: St5;X&Q  
    4-7冰冷凝器ice condenser: I Q_6DF  
    4-8冰冷凝器的负载load of the ice condenser: `gSMb UgF  
    4-9冰冷凝器的额定负载rated load of the ice condenser -YNpHd/;,  
    8.   1.一般术语 !*]i3 ,{7v  
    1-1试样sample : 99yWUC,  
    (1).表面层surface layer: 2"&GH1  
    (2).真实表面true surface: |>Q>d8|k  
    (3).有效表面积effective surface area: t/ \S9  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: z;JV3) E  
    (5).表面粒子密度surface particle density: ^E}?YgNp  
    (6).单分子层monolayer: 461g7R%r  
    (7).表面单分子层粒子密度monolayer density: 21TR_0g&<  
    (8).覆盖系数coverage ratio: KV0*dB;  
    1-2激发excitation: b1Vr>:sK47  
    (1).一次粒子primary particle: eT b!xb  
    (2).一次粒子通量primary particle flux: A]c'T T@6  
    (3).一次粒子通量密度density of primary particle flux: X>I3N?5  
    (4).一次粒子负荷primary particle load: )N 3^r>(e<  
    (5).一次粒子积分负荷integral load of primary particle: ] SJ#:7  
    (6).一次粒子的入射能量energy of the incident primary particle: N7?]eD  
    (7).激发体积excited volume: tW/k  
    (8).激发面积excited area: Y`~B> J  
    (9).激发深度excited death: h,c*:  
    (10).二次粒子secondary particles: Kq[4I[+R  
    (11).二次粒子通量secondary particle flux: "_/ih1z]  
    (12).二次粒子发射能energy of the emitted secondary particles: W&5/1``u\  
    (13).发射体积emitting volume: kQkc+sGJf  
    (14).发射面积emitting area: [}szM^  
    (15).发射深度emitting depth: ,HP }}K+S  
    (16).信息深度information depth: Avw=*ZW  
    (17).平均信息深度mean information depth: pU_3Z3CeE  
    1-3入射角angle of incidence: ?NwrdcQ  
    1-4发射角angle of emission: A8f.h5~9  
    1-5观测角observation: ^kfqw0!  
    1-6分析表面积analyzed surface area: }y6)d.  
    1-7产额 yield : *2 Pr1U  
    1-8表面层微小损伤分析minimum damage surface analysis: biHacm  
    1-9表面层无损伤分析non-destructive surface analysis: <0d2{RQ;  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : M5{#!d}^D  
    1-11可观测面积observable area: +2`BZ}5y  
    1-12可观测立体角observable solid angle : TuQGF$n@  
    1-13接受立体角;观测立体角angle of acceptance: JuO47}i]5  
    1-14角分辨能力angular resolving power: M50I.Rd  
    1-15发光度luminosity: xhP~]akHN7  
    1-16二次粒子探测比detection ratio of secondary particles: P<g(i 6]  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: 0&s6PS%  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: |gE1P/%k  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: X&9: ^$m  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: mB-,\{)  
    1-21本底压力base pressure: L/"MRQ"  
    1-22工作压力working pressure: 1<ag=D`F_"  
    JP8}+  
    2.分析方法 - rO34l  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: G _cJI  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : @v2<T1UC  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: f$dPDbZQ  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: DFMpU.BN W  
    2-3离子散射表面分析ion scattering spectroscopy: TAXsL&Tz>  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: <>6j>w_|  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: $z=%e#(!I  
    2-6离子散射谱仪ion scattering spectrometer: Y(Oh7VwY*P  
    2-7俄歇效应Auger process: 6qT@M0)i  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: F` ybe\  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: R!dC20IMvH  
    2-10光电子谱术photoelectron spectroscopy : FMdu30JV  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: ? Ek)" l  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: 6U{A6hH]  
    2-11光电子谱仪photoelectron spectrometer: y?OP- 27y  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: Z1 Nep !  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: r,;ca6>5H  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): ) lUS'I  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
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    离线zuiyuan
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    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
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    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
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    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
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    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
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    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
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    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
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    呵呵,楼主辛苦啦!
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    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
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    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊