“真空术语”好像论坛中没有,发一个希望有朋友喜欢。 <?@46d?C
--------------------------------------------------- O*Pe[T5x'
真空术语 [ Zqg"`
cZF;f{t
1.标准环境条件 standard ambient condition: ]x{ H
2.气体的标准状态 standard reference conditions forgases: &MLhCekY
3.压力(压强)p pressure: l fhKZX
4.帕斯卡Pa pascal: H9m2Whq
5.托Torr torr: NP`ll0s
6.标准大气压atm standard atmosphere: GT}#iM
7.毫巴mbar millibar: $[;eb,
8.分压力 partial pressure: %.gjBI=
9.全压力 total pressure: :H:}t>X6Vo
10.真空 vacuum: >h-6B=
11.真空度 degree of vacuum: X?xm1|\
12.真空区域 ranges of vacuum: Vk=<,<BB
13.气体 gas: _IGa8=~
14.非可凝气体 non-condensable gas: " yl"A4p
S
15.蒸汽vapor: @?AE75E{
16.饱和蒸汽压saturation vapor pressure: D(?#oCCA
17.饱和度degree of saturation: @9
tvN}
18.饱和蒸汽saturated vapor: s"!}=kX
19.未饱和蒸汽unsaturated vapor: |}Z"|-Z
20.分子数密度n,m-3 number density of molecules: znpZ0O\!
21.平均自由程ι、λ,m mean free path: FOyfk$
22.碰撞率ψ collision rate: J-?(sjIX
23.体积碰撞率χ volume collision rate: qiJ;v1
24.气体量G quantity of gas: Ybiz]1d
25.气体的扩散 diffusion of gas: GB Un" _J
26.扩散系数D diffusion coefficient; diffusivity: Bm>(m{sX>
27.粘滞流 viscous flow: D\~$6#B>>
28.粘滞系数η viscous factor: PEhLzZX+
29.泊肖叶流 poiseuille flow: j-\u_#kx%
30.中间流 intermediate flow: D)$k{v#~
31.分子流 molecular flow: G2k71{jK
32克努曾数 number of knudsen: ttt&sW`
33.分子泻流 molecular effusion; effusive flow: E1[%~Cpw*
34.流逸 transpiration: dL"i\5#%A
35.热流逸 thermal transpiration: K`2DhJC
36.分子流率qN molecular flow rate; molecular flux: }i~ j"m
37.分子流率密度 molecular flow rate density; density of molecular flux: r/:'}os;
38.质量流率qm mass flow rare: Efd[ZJxS6
39.流量qG throughput of gas: 4tKf
40.体积流率qV volume flow rate: Li$k<AM
41.摩尔流率qυ molar flow rate: ?%n9g)>Yej
42.麦克斯韦速度分布 maxwellian velocity distribution: %?wE/LU>
43.传输几率Pc transmission probability: skArocs
44.分子流导CN,UN molecular conductance: [$+61n}.12
45.流导C,U conductance: zOp"n\
46.固有流导Ci,Ui intrinsic conductance: (jMp`4P
47.流阻W resistance: 3Or3@e5r
48.吸附 sorption: j* ja)
49.表面吸附 adsorption: ai2}vR
50.物理吸附physisorption: 2Vr'AEIQ
51.化学吸附 chemisorption: M"
\y2
52.吸收absorption: 7:<>#
53.适应系数α accommodation factor: nJw1Sl5
54.入射率υ impingement rate: g}h0J%s
55.凝结率condensation rate: -p~B
-,
56.粘着率 sticking rate: }RK9Onh3G
57.粘着几率Ps sticking probability: aa!c>"g6
58.滞留时间τ residence time: _Y~?. hs^
59.迁移 migration: |mX8fRh
60.解吸 desorption: >?xVr
61.去气 degassing: o4795r,jz
62.放气 outgassing: :v48y.Ij7s
63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: P0<uF`87
64.蒸发率 evaporation rate: yV`vu/3K
65.渗透 permeation: *()#*0
66.渗透率φ permeability: #SOe&W5
67.渗透系数P permeability coefficient b`=rd 4cpU
2. 1.真空泵 vacuum pumps O#k+.LU
1-1.容积真空泵 positive displacement pump: sk/Mh8z
⑴.气镇真空泵 gas ballast vacuum pump: xbIA97g-O,
⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: o)DKP>IM#
⑶.干封真空泵 dry-sealed vacuum pump: **[p{R]8o
⑷.往复真空泵 piston vacuum pump: eIl&=gZ6>
⑸.液环真空泵 liquid ring vacuum pump: 1uE[ %M
⑹.旋片真空泵 sliding vane rotary vacuum pump: )nV x 2m4
⑺.定片真空泵 rotary piston vacuum pump: -ybupUJcbv
⑻.滑阀真空泵 rotary plunger vacuum pump: % *hBrjbj
⑼.余摆线真空泵 trochoidal vacuum pump: H2p;J#cv@
⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: xCD+qP^
⑾.罗茨真空泵 roots vacuum pump: g'@+#NMw
1-2.动量传输泵 kinetic vacuum pump: XO>Y*7rO
⑴.牵引分子泵molecular drag pump: 7Q&P4{hi0
⑵.涡轮分子泵turbo molecular pump: oKiu6=
⑶.喷射真空泵ejector vacuum pump: s,=^V/c
⑷.液体喷射真空泵liquid jet vacuum pump: 6w#v,RDEu
⑸.气体喷射真空泵gas jet vacuum pump: Z )I4U
⑹.蒸汽喷射真空泵vapor jet vacuum pump : ^
T S\x/P
⑺.扩散泵diffusion pump : fC[gu$f][
⑻.自净化扩散泵self purifying diffusion pump: }W J`q`g
⑼.分馏扩散泵 fractionating diffusion pump : 7#`:m|$
⑽.扩散喷射泵diffusion ejector pump : XafyI*pOX
⑾.离子传输泵ion transfer pump: ~f:fOrLE#
1-3.捕集真空泵 entrapment vacuum pump: uq_SF.a'v
⑴吸附泵adsorption pump: /:)4tIV
⑵.吸气剂泵 getter pump: 'Z[R*Ikzq
⑶.升华(蒸发)泵 sublimation (evaporation)pump : aJts
⑷.吸气剂离子泵getter ion pump: ZBWe,Xvq
⑸.蒸发离子泵 evaporation ion pump: O)?0G$0
⑹.溅射离子泵sputter ion pump: :A[/;|&
⑺.低温泵cryopump: l;fH5z
qn .
2.真空泵零部件 EOiKwhrV
2-1.泵壳 pump case: P:o<kRj1
2-2.入口 inlet: H+Wd#7l,
2-3.出口outlet: a &j?"o
2-4.旋片(滑片、滑阀)vane; blade : B^Q#@[T
2-5.排气阀discharge valve: L xO'$oKZV
2-6.气镇阀gas ballast valve: =
zSrre
2-7.膨胀室expansion chamber: <f%9w]
2-8.压缩室compression chamber: cW2:D$Pe
2-9.真空泵油 vacuum pump oil: ),_bDI L+
2-10.泵液 pump fluid: H D>{UU?
2-11.喷嘴 nozzle: _<8y^ymo
2-13.喷嘴扩张率nozzle expansion rate: RL%{VE
2-14.喷嘴间隙面积 nozzle clearance area : 9z?F_=PB!
2-15.喷嘴间隙nozzle clearance: bP[/
2-16.射流jet: !
^W|;bq
2-17.扩散器diffuser: f{J7a1 `_
2-18.扩散器喉部diffuser thoat: )8_0 d)
2-19.蒸汽导管vapor tube(pipe;chimney): u'C4d6\wS
2-20.喷嘴组件nozzle assembly: U8dwb
2-21.下裙skirt: Jg:'gF]jt
JmK+#o
3.附件 sdY6_HtE
3-1阱trap: W$&Q.Z
⑴.冷阱 cold trap: X*sF-T$.
⑵.吸附阱sorption trap: (]JJ?aAF
⑶.离子阱ion trap: er_aol e
⑷.冷冻升华阱 cryosublimation trap: cb+!H>+
3-2.挡板baffle: @1pdyKK
3-3.油分离器oil separator: .'4*'i:
3-4.油净化器oil purifier: P_;oSN|>
3-5.冷凝器condenser: nL$tXm-x
BBX4^;t
4.泵按工作分类 E-/]UH3u H
4-1.主泵main pump: %ug`dZ/
4-2.粗抽泵roughing vacuum pump: c}Qc2D3*
4-3.前级真空泵backing vacuum pump: *6h.#$\
4-4.粗(低)真空泵 roughing(low)vacuum pump: !#r]f9QP
4-5.维持真空泵holding vacuum pump: FvkKM+?F
4-6.高真空泵high vacuum pump: T]:5y_4?[
4-7.超高真空泵ultra-high vacuum pump: Deam%)bXM]
4-8.增压真空泵booster vacuum pump: 2`z+_DA
1F=x~FMvY
5.真空泵特性 r"n)I$
5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: \3KCZ
5-2.真空泵的抽气量Q throughput of vacuum pump:。 /f#sg7)
5-3.起动压力starting pressure: {3;4=R3
5-4.前级压力 backing pressure : 71~V*
5-5.临界前级压力 critical backing pressure: Mfgd;FsX#
5-6.最大前级压力maximum backing pressure: NEN br$,G
5-7.最大工作压力maximum working pressure: A_2ppEG
5-8.真空泵的极限压力ultimate pressure of a pump: jj^CW"IB
5-9.压缩比compression ratio: PBUc9/
5-10.何氏系数Ho coefficient: F2u{Wzr_@
5-11.抽速系数speed factor: `pKQ|zGw
5-12.气体的反扩散back-diffusion of gas: N=wB1gJ
5-13.泵液返流back-streaming of pump fluid: Y-Z.AA,
5-14.返流率back-streaming rate {30A1>0#P
5-15.返迁移back-migration: F4k`x/ak
5-16.爆腾bumping: $}&6p6|
5-17.水蒸气允许量qm water vapor tolerable load: _ K9jj
5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: /g_}5s-Z
5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: n>@(gDq
5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump ThHK1{87X}
3. 1.一般术语 uv@4/M`
1-1.压力计pressure gauge: ]-O:| q>]
1-2.真空计vacuum gauge: EZ$m4:{e
⑴.规头(规管)gauge head: SDot0`s>
⑵.裸规nude gauge : %9M_*]
⑶.真空计控制单元gauge control unit : ^@N@gB
⑷.真空计指示单元gauge indicating unit : K(_nfE{
E;+3VJ+F"
2.真空计一般分类 O=yUAAD$
2-1.压差式真空计differential vacuum gauge: <AB]FBo(
2-2.绝对真空计 absolute vacuum gauge: `InS8PLr
2-3.全压真空计total pressure vacuum gauge: !7_Q_h',
2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: d9E:LZy
2-5.相对真空计relative vacuum gauge : . [C~a
m:'fk;khN
3.真空计特性 YpAjZQZ,
3-1.真空计测量范围pressure range of vacuum gauge: aK,G6y
3-2.灵敏度系数sensitivity coefficient: kQYX[e7n
3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): :#+VH_%N
3-5.规管光电流photon current of vacuum gauge head: |n~-LH++
3-6.等效氮压力equivalent nitrogen pressure : zX)uC<
3-7.X射线极限值 X-ray limit: Q|;8\5
3-8.逆X射线效应anti X-ray effect: !"_\5$5i<X
3-9.布利尔斯效应blears effect: IAg#YFI
Xbfn@7m
4.全压真空计 Zj$U_
4-1.液位压力计liquid level manometer: Ru2kC} Dx!
4-2.弹性元件真空计elastic element vacuum gauge: M[SWMVN{
4-3.压缩式真空计compression gauge: h_H$+!Nzb
4-4.压力天平pressure balance: `|Ih"EZ
4-5.粘滞性真空计viscosity gauge : aQcJjF5x
4-6.热传导真空计thermal conductivity vacuum gauge : j134iVF%
4-7.热分子真空计thermo-molecular gauge: |E|d"_Ma
4-8.电离真空计ionization vacuum gauge: _%Jqyc"-
4-9.放射性电离真空计radioactive ionization gauge: uP<tP:
4-10.冷阴极电离真空计cold cathode ionization gauge: c\7~_w2
4-11.潘宁真空计penning gauge: WOquG
4-12.冷阴极磁控管真空计cold cathode magnetron gauge: G/=tC8eX
4-13.放电管指示器discharge tube indicator: 8M!If
4-14.热阴极电离真空计hot cathode ionization gauge: B!6?+<J"
4-15.三极管式真空计triode gauge: S)p1[&" M
4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: PY~cu@'k{
4-17.B-A型电离真空计Bayard-Alpert gauge: @=:( b"Sg
4-18.调制型电离真空计modulator gauge: '`^`NI`
4-19.抑制型电离真空计suppressor gauge: u0\?aeg`
4-20.分离型电离真空计extractor gauge: r6JdF!\d
4-21.弯注型电离真空计bent beam gauge: usX
aT(K
4-22.弹道型电离真空计 orbitron gauge : e0qU2
4-23.热阴极磁控管真空计hot cathode magnetron gauge: 66!cfpM
n-0RA~5z
5.分压真空计(分压分析器) ]|'Mf;
5-1.射频质谱仪radio frequency mass spectrometer: xV}-[W5sr'
5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: ``DS?pUY
5-3.单极质谱仪momopole mass spectrometer: %,1bh
5-4.双聚焦质谱仪double focusing mass spectrometer: yMB*/vs
5-5.磁偏转质谱仪magnetic deflection mass spectrometer: a}EO7tcg,
5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: a;8q7nC
5-7.回旋质谱仪omegatron mass spectrometer: { LZ` _1D
5-8.飞行时间质谱仪time of flight mass spectrometer: %9C_p]P*
#Fm, mO$v
6.真空计校准 OLg=kF[[
6-1.标准真空计reference gauges: #+>8gq^5
6-2.校准系统system of calibration: +a0q?$\
6-3.校准系数K calibration coefficient: /p}^Tpu
6-4.压缩计法meleod gauge method: rI23e[
6-5.膨胀法expansion method: `2.[8%6
6-6.流导法flow method: ^Q0%_V,
4. 1.真空系统vacuum system B}Qpqa=_c
1-1.真空机组pump system: E>NRC\^@
1-2.有油真空机组pump system used oil : ^`?2g[AA
1-3.无油真空机组oil free pump system 86y)+h`
1-4.连续处理真空设备continuous treatment vacuum plant: [Wf% iwB
1-5.闸门式真空系统vacuum system with an air-lock: ER-X1fD
1-6.压差真空系统differentially pumped vacuum system: L"e8S%UqX
1-7.进气系统gas admittance system: g]%sX6T
'So,*>]63
2.真空系统特性参量 G
|033(j
2-1.抽气装置的抽速volume flow rate of a pumping unit : `\Z7It?aDs
2-2.抽气装置的抽气量throughput of a pumping unit : V $Y=JK@
2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: .ww~'5b0
2-4.真空系统的漏气速率leak throughput of a vacuum system: HtFc+%=
2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: }04EM
2-6.极限压力ultimate pressure: tX)l_?jVH
2-7.残余压力residual pressure: Okxuhzn>"
2-8.残余气体谱residual gas spectrum: X"lPXoCN
2-9.基础压力base pressure: )"KKBil0
2-10.工作压力working pressure: kn9ul3c
2-11.粗抽时间roughing time: gn,D9d+
2-12.抽气时间pump-down time: _3YZz$07
2-13.真空系统时间常数time constant of a vacuum system: ))ArM-02
2-14.真空系统进气时间venting time: awu18(;J
\7]0vG
3.真空容器 oA+/F]XJ
3-1.真空容器;真空室vacuum chamber: &p