切换到宽版
  • 广告投放
  • 稿件投递
  • 繁體中文
    • 9999阅读
    • 9回复

    [分享]真空术语全集 [复制链接]

    上一主题 下一主题
    离线cswmsc
     
    发帖
    65
    光币
    81
    光券
    0
    只看楼主 倒序阅读 楼主  发表于: 2007-02-28
    “真空术语”好像论坛中没有,发一个希望有朋友喜欢。 <?@46d?C  
    --------------------------------------------------- O*Pe [T5x'  
    真空术语 [ Zqg"`  
    cZF;f{t  
    1.标准环境条件 standard ambient condition: ]x{H  
    2.气体的标准状态 standard reference conditions forgases: &MLhCekY  
    3.压力(压强)p pressure: lfhKZX  
    4.帕斯卡Pa pascal: H9m2Whq  
    5.托Torr torr: NP`ll0s  
    6.标准大气压atm standard atmosphere: GT}#iM  
    7.毫巴mbar millibar: $[;eb,  
    8.分压力 partial pressure: %.gjBI=  
    9.全压力 total pressure: :H:}t>X6Vo  
    10.真空 vacuum: >h-6B=  
    11.真空度 degree of vacuum: X?xm1|\  
    12.真空区域 ranges of vacuum: Vk=<,<BB  
    13.气体 gas: _IGa8=~  
    14.非可凝气体 non-condensable gas: " yl"A4p S  
    15.蒸汽vapor: @?AE75E{  
    16.饱和蒸汽压saturation vapor pressure: D(?#oCCA  
    17.饱和度degree of saturation: @9 tv N}  
    18.饱和蒸汽saturated vapor: s"!}=k X  
    19.未饱和蒸汽unsaturated vapor: |}Z"|-Z  
    20.分子数密度n,m-3 number density of molecules: znpZ0O\!  
    21.平均自由程ι、λ,m mean free path: FOyfk$  
    22.碰撞率ψ collision rate: J-?(sjIX  
    23.体积碰撞率χ volume collision rate: qiJ;v1  
    24.气体量G quantity of gas: Ybiz]1d  
    25.气体的扩散 diffusion of gas: GB Un" _J  
    26.扩散系数D diffusion coefficient; diffusivity: Bm>(m{sX>  
    27.粘滞流 viscous flow: D\~$6#B>>  
    28.粘滞系数η viscous factor: PEhLzZX+  
    29.泊肖叶流 poiseuille flow: j-\u_#kx%  
    30.中间流 intermediate flow: D)$k{v#~  
    31.分子流 molecular flow: G2k71{jK  
    32克努曾数 number of knudsen: ttt&sW`  
    33.分子泻流 molecular effusion; effusive flow: E1[%~Cpw*  
    34.流逸 transpiration: dL"i\5#%A  
    35.热流逸 thermal transpiration: K`2DhJC  
    36.分子流率qN molecular flow rate; molecular flux: }i~j"m  
    37.分子流率密度 molecular flow rate density; density of molecular flux: r/:'}os;  
    38.质量流率qm mass flow rare: Efd[ZJxS6  
    39.流量qG throughput of gas: 4tKf  
    40.体积流率qV volume flow rate: Li$k<AM  
    41.摩尔流率qυ molar flow rate: ?%n9g)>Yej  
    42.麦克斯韦速度分布 maxwellian velocity distribution: %?wE/LU>  
    43.传输几率Pc transmission probability: skArocs  
    44.分子流导CN,UN molecular conductance: [$+61n}.12  
    45.流导C,U conductance: zOp"n\  
    46.固有流导Ci,Ui intrinsic conductance: (jMp`4P  
    47.流阻W resistance: 3Or3@e5r  
    48.吸附 sorption: j* ja)  
    49.表面吸附 adsorption: ai2}vR  
    50.物理吸附physisorption: 2Vr'AEIQ  
    51.化学吸附 chemisorption: M" \y2   
    52.吸收absorption: 7:<>#  
    53.适应系数α accommodation factor: nJw1Sl5  
    54.入射率υ impingement rate: g}h0J%s  
    55.凝结率condensation rate: -p~B -,  
    56.粘着率 sticking rate: }RK9Onh3G  
    57.粘着几率Ps sticking probability: aa!c>"g6  
    58.滞留时间τ residence time: _Y~?.hs^  
    59.迁移 migration: | mX8fRh  
    60.解吸 desorption: >?x Vr  
    61.去气 degassing: o4795r,jz  
    62.放气 outgassing: :v48y.Ij7s  
    63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate: P0<uF`87  
    64.蒸发率 evaporation rate: yV`vu/3K  
    65.渗透 permeation: *()#*0  
    66.渗透率φ permeability: #SOe &W5  
    67.渗透系数P permeability coefficient b`=rd 4cpU  
    2.   1.真空泵 vacuum pumps O#k+.LU  
    1-1.容积真空泵 positive displacement pump: sk/ Mh8z  
    ⑴.气镇真空泵 gas ballast vacuum pump: xbIA97g-O,  
    ⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump: o)DKP>IM#  
    ⑶.干封真空泵 dry-sealed vacuum pump: **[p{R]8o  
    ⑷.往复真空泵 piston vacuum pump: eIl&=gZ6>  
    ⑸.液环真空泵 liquid ring vacuum pump: 1uE[ %M  
    ⑹.旋片真空泵 sliding vane rotary vacuum pump: )nVx 2m4  
    ⑺.定片真空泵 rotary piston vacuum pump: -ybupUJcbv  
    ⑻.滑阀真空泵 rotary plunger vacuum pump: %*hBrjbj  
    ⑼.余摆线真空泵 trochoidal vacuum pump: H2p;J#cv@  
    ⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump: xCD+qP ^  
    ⑾.罗茨真空泵 roots vacuum pump: g'@+#NMw  
    1-2.动量传输泵 kinetic vacuum pump: XO>Y*7rO  
    ⑴.牵引分子泵molecular drag pump: 7Q&P4{hi0  
    ⑵.涡轮分子泵turbo molecular pump: oKiu6=  
    ⑶.喷射真空泵ejector vacuum pump: s,= ^V/c  
    ⑷.液体喷射真空泵liquid jet vacuum pump: 6w#v,RDEu  
    ⑸.气体喷射真空泵gas jet vacuum pump: Z )I4U  
    ⑹.蒸汽喷射真空泵vapor jet vacuum pump : ^ TS\x/P  
    ⑺.扩散泵diffusion pump : fC[gu$f][  
    ⑻.自净化扩散泵self purifying diffusion pump: }W J`q`g  
    ⑼.分馏扩散泵 fractionating diffusion pump : 7 #`:m|$  
    ⑽.扩散喷射泵diffusion ejector pump : XafyI*pOX  
    ⑾.离子传输泵ion transfer pump: ~f:fOrLE#  
    1-3.捕集真空泵 entrapment vacuum pump: uq_SF.a'v  
    ⑴吸附泵adsorption pump: /:)4tIV  
    ⑵.吸气剂泵 getter pump: 'Z[R*Ikzq  
    ⑶.升华(蒸发)泵 sublimation (evaporation)pump : aJ ts  
    ⑷.吸气剂离子泵getter ion pump: ZBWe,Xvq  
    ⑸.蒸发离子泵 evaporation ion pump: O)?0G$0  
    ⑹.溅射离子泵sputter ion pump: :A[/;|&  
    ⑺.低温泵cryopump: l;fH5z  
     qn .  
    2.真空泵零部件 EOiKwhrV  
    2-1.泵壳 pump case: P:o<kRj1  
    2-2.入口 inlet: H+Wd#7l,  
    2-3.出口outlet: a &j?"o  
    2-4.旋片(滑片、滑阀)vane; blade : B^Q#@[T   
    2-5.排气阀discharge valve: LxO'$oKZV  
    2-6.气镇阀gas ballast valve: = zSrre  
    2-7.膨胀室expansion chamber: <f%9w]  
    2-8.压缩室compression chamber: cW2:D$Pe  
    2-9.真空泵油 vacuum pump oil: ),_bDI L+  
    2-10.泵液 pump fluid: HD>{UU?  
    2-11.喷嘴 nozzle: _<8y^ymo  
    2-13.喷嘴扩张率nozzle expansion rate: RL%{VE  
    2-14.喷嘴间隙面积 nozzle clearance area : 9z?F_=PB!  
    2-15.喷嘴间隙nozzle clearance: bP[/  
    2-16.射流jet: ! ^W|;bq  
    2-17.扩散器diffuser: f{J7a1 `_  
    2-18.扩散器喉部diffuser thoat: )8_0d)  
    2-19.蒸汽导管vapor tube(pipe;chimney): u'C4d6\wS  
    2-20.喷嘴组件nozzle assembly: U8d  wb  
    2-21.下裙skirt: Jg:'gF]jt  
    JmK+#o  
    3.附件 sdY6_HtE  
    3-1阱trap: W$&Q.Z  
    ⑴.冷阱 cold trap: X*sF-T$.  
    ⑵.吸附阱sorption trap: (]JJ?aAF  
    ⑶.离子阱ion trap: er_aol e  
    ⑷.冷冻升华阱 cryosublimation trap: cb+!H>+  
    3-2.挡板baffle: @1pdyKK  
    3-3.油分离器oil separator: .'4*'i:  
    3-4.油净化器oil purifier: P_;oSN|>  
    3-5.冷凝器condenser: nL$tXm-x  
    BBX4^;t  
    4.泵按工作分类 E-/]UH3u H  
    4-1.主泵main pump: %ug`dZ/  
    4-2.粗抽泵roughing vacuum pump: c}Qc2D3*  
    4-3.前级真空泵backing vacuum pump: *6h.#$\  
    4-4.粗(低)真空泵 roughing(low)vacuum pump: !#r]f9QP  
    4-5.维持真空泵holding vacuum pump: FvkKM+?F  
    4-6.高真空泵high vacuum pump: T]:5y_4?[  
    4-7.超高真空泵ultra-high vacuum pump: Deam%)bXM]  
    4-8.增压真空泵booster vacuum pump: 2`z+_DA  
    1F=x~FMvY  
    5.真空泵特性 r"n)I$  
    5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump: \3KCZ  
    5-2.真空泵的抽气量Q throughput of vacuum pump:。 /f#sg7)  
    5-3.起动压力starting pressure: {3;4=R3  
    5-4.前级压力 backing pressure : 71~V*  
    5-5.临界前级压力 critical backing pressure: Mfgd;FsX#  
    5-6.最大前级压力maximum backing pressure: NENbr$,G  
    5-7.最大工作压力maximum working pressure: A_2ppEG  
    5-8.真空泵的极限压力ultimate pressure of a pump: jj^CW"IB  
    5-9.压缩比compression ratio: PBUc9/  
    5-10.何氏系数Ho coefficient: F2u{Wzr_@  
    5-11.抽速系数speed factor: `pKQ|zGw  
    5-12.气体的反扩散back-diffusion of gas: N=wB1gJ  
    5-13.泵液返流back-streaming of pump fluid: Y-Z.AA,  
    5-14.返流率back-streaming rate {30A1>0#P  
    5-15.返迁移back-migration: F 4k`x/ak  
    5-16.爆腾bumping: $ }&6p6|  
    5-17.水蒸气允许量qm water vapor tolerable load: _K9jj  
    5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure: /g_}5s-Z  
    5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump or a diffusion pump or a diffusion ejector pump: n>@(gDq  
    5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump ThHK1{87X}  
    3.   1.一般术语 uv@4/M`  
    1-1.压力计pressure gauge: ]-O:|q>]  
    1-2.真空计vacuum gauge: EZ$m4: {e  
    ⑴.规头(规管)gauge head: SDot0`s>  
    ⑵.裸规nude gauge : %9M_ * ]  
    ⑶.真空计控制单元gauge control unit : ^@N@ gB  
    ⑷.真空计指示单元gauge indicating unit : K(_nfE{  
    E;+3VJ+F"  
    2.真空计一般分类 O=yUA AD$  
    2-1.压差式真空计differential vacuum gauge: <AB]FBo(  
    2-2.绝对真空计 absolute vacuum gauge: `InS8PLr  
    2-3.全压真空计total pressure vacuum gauge: !7_Q_h',  
    2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressure analyser: d9E:LZy  
    2-5.相对真空计relative vacuum gauge : . [C ~a  
    m:'fk;khN  
    3.真空计特性 YpAjZQZ,  
    3-1.真空计测量范围pressure range of vacuum gauge: aK,G6y  
    3-2.灵敏度系数sensitivity coefficient: kQYX[e7n  
    3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): :#+VH_%N  
    3-5.规管光电流photon current of vacuum gauge head: |n~- LH++  
    3-6.等效氮压力equivalent nitrogen pressure : zX)uC<  
    3-7.X射线极限值 X-ray limit: Q|;8\5  
    3-8.逆X射线效应anti X-ray effect: !"_\5$5i<X  
    3-9.布利尔斯效应blears effect: IAg#YFI  
    Xbfn@7m  
    4.全压真空计 Zj$U _  
    4-1.液位压力计liquid level manometer: Ru2kC} Dx!  
    4-2.弹性元件真空计elastic element vacuum gauge: M[SWMVN{  
    4-3.压缩式真空计compression gauge: h_H$+!Nzb  
    4-4.压力天平pressure balance: `|I h"EZ  
    4-5.粘滞性真空计viscosity gauge : aQcJjF5x  
    4-6.热传导真空计thermal conductivity vacuum gauge : j134iVF%  
    4-7.热分子真空计thermo-molecular gauge: |E|d"_Ma  
    4-8.电离真空计ionization vacuum gauge: _%Jqyc"-  
    4-9.放射性电离真空计radioactive ionization gauge: uP<tP:  
    4-10.冷阴极电离真空计cold cathode ionization gauge: c\7~_w2  
    4-11.潘宁真空计penning gauge: WOquG  
    4-12.冷阴极磁控管真空计cold cathode magnetron gauge: G/=tC8eX  
    4-13.放电管指示器discharge tube indicator: 8M !If  
    4-14.热阴极电离真空计hot cathode ionization gauge: B!6?+< J"  
    4-15.三极管式真空计triode gauge: S)p1[&" M  
    4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge: PY~cu@'k{  
    4-17.B-A型电离真空计Bayard-Alpert gauge: @=:( b"Sg  
    4-18.调制型电离真空计modulator gauge: '`^`NI`  
    4-19.抑制型电离真空计suppressor gauge: u0\?aeg`  
    4-20.分离型电离真空计extractor gauge: r6JdF!\d  
    4-21.弯注型电离真空计bent beam gauge: usX aT(K  
    4-22.弹道型电离真空计 orbitron gauge : e0qU2  
    4-23.热阴极磁控管真空计hot cathode magnetron gauge: 66!cfpM  
    n-0RA~5z  
    5.分压真空计(分压分析器) ]|'Mf;  
    5-1.射频质谱仪radio frequency mass spectrometer: xV}-[W5sr'  
    5-2.四极质谱仪(四级滤质器)quadrupole mass spectrometer;quadrupole mass filer: ``DS?pUY  
    5-3.单极质谱仪momopole mass spectrometer: % ,1bh  
    5-4.双聚焦质谱仪double focusing mass spectrometer: yMB*/vs  
    5-5.磁偏转质谱仪magnetic deflection mass spectrometer: a}EO7tcg,  
    5-6.余摆线聚焦质谱仪trochoidal focusing mass spectrometer: a;8q7nC  
    5-7.回旋质谱仪omegatron mass spectrometer: { LZ` _1D  
    5-8.飞行时间质谱仪time of flight mass spectrometer: %9C_p]P*  
    #Fm,mO$v  
    6.真空计校准 OLg=kF[[  
    6-1.标准真空计reference gauges: #+>8gq^5  
    6-2.校准系统system of calibration: +a0q?$\  
    6-3.校准系数K calibration coefficient: / p}^ Tpu  
    6-4.压缩计法meleod gauge method: rI23e[  
    6-5.膨胀法expansion method: `2.[8%6  
    6-6.流导法flow method: ^Q0%_V,  
    4.   1.真空系统vacuum system B}Qpqa=_c  
    1-1.真空机组pump system: E>NRC\^@  
    1-2.有油真空机组pump system used oil : ^`?2g[AA  
    1-3.无油真空机组oil free pump system 8 6y)+h`  
    1-4.连续处理真空设备continuous treatment vacuum plant: [Wf%iwB  
    1-5.闸门式真空系统vacuum system with an air-lock: ER-X1fD  
    1-6.压差真空系统differentially pumped vacuum system: L"e8S%UqX  
    1-7.进气系统gas admittance system: g ]%sX6T  
    'So,*>]63  
    2.真空系统特性参量 G |033(j  
    2-1.抽气装置的抽速volume flow rate of a pumping unit : `\Z7It?aDs  
    2-2.抽气装置的抽气量throughput of a pumping unit : V $Y=JK@  
    2-3.真空系统的放气速率degassing(outgassing) throughput of a vacuum system: .ww~'5b0  
    2-4.真空系统的漏气速率leak throughput of a vacuum system: HtFc+%=  
    2-5.真空容器的升压速率rate of pressure rise of a vacuum chamber: }04 EM  
    2-6.极限压力ultimate pressure: tX)l_ ?jVH  
    2-7.残余压力residual pressure: Okxuhzn>"  
    2-8.残余气体谱residual gas spectrum: X"lPXoCN  
    2-9.基础压力base pressure: )"KKBil0  
    2-10.工作压力working pressure: kn9ul3c  
    2-11.粗抽时间roughing time: gn,D9d+  
    2-12.抽气时间pump-down time: _3YZz$07  
    2-13.真空系统时间常数time constant of a vacuum system: ))ArM-02  
    2-14.真空系统进气时间venting time: awu18(;J  
    \7]0vG  
    3.真空容器 oA+/F]XJ  
    3-1.真空容器;真空室vacuum chamber: &puPn:_  
    3-2.封离真空装置sealed vacuum device: KUD&vqx3  
    3-3.真空钟罩vacuum bell jar: >x'R7z23  
    3-4.真空容器底板vacuum base plate: *,az`U  
    3-5.真空岐管vacuum manifold: lW6$v* s9  
    3-6.前级真空容器(贮气罐)backing reservoir: ,y5,+:Y ~  
    3-7.真空保护层outer chamber: we?# Dui  
    3-8.真空闸室vacuum air lock: VCf/EkC  
    3-9.真空冷凝器;蒸汽冷凝器device for condensing vapor: [0>I6Jl  
    GoSdo  
    4.真空封接和真空引入线 z.Y`"B'j`  
    4-1.永久性真空封接permanent seal : X?f\j"v  
    4.2.玻璃分级过渡封接graded seal : C6` Tck!  
    4-3.压缩玻璃金属封接compression glass-to-metal seal: 5TynAiSD_>  
    4-4.匹配式玻璃金属封接matched glass-to-metal seal: :[\M|iAo  
    4-5.陶瓷金属封接ceramic-to-metal seal: C!X"0]@FA  
    4-6.半永久性真空封接semi-permanent seal : {#U 3A_y  
    4-7.可拆卸的真空封接demountable joint: FW=`Fm@z%%  
    4-8.液体真空封接liquid seal Rq@M~;p  
    4-9.熔融金属真空封接molten metal seal: ;]vJ[mi~  
    4-10.研磨面搭接封接ground and lapped seal: omu )s '8  
    4-11.真空法兰连接vacuum flange connection: |X47&Y  
    4-12.真空密封垫vacuum-tight gasket: W6^YFN  
    4-13.真空密封圈ring gasket: BWF>;*Xro  
    4-14.真空平密封垫flat gasket: JfLoGl;p m  
    4-15.真空引入线feedthrough leadthrough: .(g"(fgF  
    4-16.真空轴密封shaft seal: %n B}Hq ;  
    4-17.真空窗vacuum window: P1G;JK  
    4-18.观察窗viewing window: &iI5^b-P  
    )=TS)C4  
    5.真空阀门 \p.eY)>  
    5-1.真空阀门的特性characteristic of vacuum valves: O_ 4 j"0  
    ⑴.真空阀门的流导conductance of vacuum valves: /0 2-0mNv  
    ⑵.真空阀门的阀座漏气率leak rate of the vacuum seat: .dPy<6E  
    5-2.真空调节阀regulating valve: 5}Z_A?gy  
    5-3.微调阀 micro-adjustable valve: [cso$Tv  
    5-4.充气阀charge valve: X+KQ%Efo  
    5-5.进气阀gas admittance valve: q=x1:^rVH  
    5-6.真空截止阀break valve: 2A&Y})D  
    5-7.前级真空阀backing valve: PN"SBsc*j-  
    5-8.旁通阀 by-pass valve: p>h&SD?b  
    5-9.主真空阀main vacuum valve: 4Ai#$SHLm  
    5-10.低真空阀low vacuum valve: ;&9wG`  
    5-11.高真空阀high vacuum valve: @:w[(K[^b/  
    5-12.超高真空阀;UHV阀 ultra-high vacuum valve: HDHC9E6  
    5-13.手动阀manually operated valve: irooFR[L9  
    5-14.气动阀pneumatically operated valve: \AY*x=PF  
    5-15.电磁阀electromagnetically operated valve: {Rtl<W0  
    5-16.电动阀valve with electrically motorized operation: HDQH7Bs  
    5-17.挡板阀baffle valve: 'U*Kb  
    5-18.翻板阀flap valve: y^}00Z+l  
    5-19.插板阀gate valve: N$! Vm(S  
    5-20.蝶阀butterfly valve: } m&La4E  
    FA$1&Fu3Y  
    6.真空管路 @+&QNI06S  
    6-1.粗抽管路roughing line: bL"!z"NA  
    6-2.前级真空管路backing line: YH^h ?s  
    6-3.旁通管路;By-Pass管路 by-pass line: j@4AY}[tX  
    6-4.抽气封口接头pumping stem: v cZg3:j  
    6-5.真空限流件limiting conductance:       }vspjplk^  
    6-6.过滤器filter: [mJmT->  
    5.   1.一般术语 JOvRU DZ  
    1-1真空镀膜vacuum coating: afNqK~  
    1-2基片substrate: Ihn+_H u  
    1-3试验基片testing substrate: (M,IgSn9  
    1-4镀膜材料coating material: oGXndfd"  
    1-5蒸发材料evaporation material: Hd9vS"TN]  
    1-6溅射材料sputtering material: ** !  
    1-7膜层材料(膜层材质)film material: mf\eg`'4?  
    1-8蒸发速率evaporation rate: kjVJ!R\  
    1-9溅射速率sputtering rate: W]U}, g8Z  
    1-10沉积速率deposition rate: G.[,P~yy.  
    1-11镀膜角度coating angle: d9kN @W  
    Q>[Xm)jr:  
    2.工艺  a }m>  
    2-1真空蒸膜vacuum evaporation coating: i9 Tq h  
    (1).同时蒸发simultaneous evaporation: r#;GVJR6  
    (2).蒸发场蒸发evaporation field evaporation: @#CZ7~Hn  
    (3).反应性真空蒸发reactive vacuum evaporation: rjLPX  
    (4).蒸发器中的反应性真空蒸发reactive vacuum evaporation in evaporator: p ! _\a  
    (5).直接加热的蒸发direct heating evaporation: CW9vC  
    (6).感应加热蒸发induced heating evaporation: -=)Al^V4T  
    (7).电子束蒸发electron beam evaporation: DLP G  
    (8).激光束蒸发laser beam evaporation: * c1)x  
    (9).间接加热的蒸发indirect heating evaporation: 4>I >y@^  
    (10).闪蒸flash evaportion: Nt5`F@;B  
    2-2真空溅射vacuum sputtering: OqcM3#  
    (1).反应性真空溅射 reactive vacuum sputtering: 4' MmT'  
    (2).偏压溅射bias sputtering: Z2cumx(  
    (3).直流二级溅射direct current diode sputtering: ]#*S.  r]  
    (4).非对称性交流溅射asymmtric alternate current sputtering: mtunD;_Dek  
    (5).高频二极溅射high frequency diode sputtering: rrL gBeQa  
    (6).热阴极直流溅射(三极型溅射)hot cathode direct current sputtering: Tb@r@j:V  
    (7).热阴极高频溅射(三极型溅射)hot cathode high frequency sputtering: ^}PG*h|  
    (8).离子束溅射ion beam sputtering: t6JM%  
    (9).辉光放电清洗glow discharge cleaning: dr~6}S#  
    2-3物理气相沉积PVD physical vapor deposition: {Jx-Zo>'  
    2-4化学气相沉积CVD chemical vapor deposition:  <RaM@E  
    2-5磁控溅射magnetron sputtering: UG5AF Z\  
    2-6等离子体化学气相沉积;PCVD plasma chemistry vapor deposition: {#o0vWS>  
    2-7空心阴极离子镀HCD hollow cathode discharge deposition: >&g^ `  
    2-8电弧离子镀arc discharge deposition: V ~%C me  
    XHER[8l  
    3.专用部件 l}jC$B`5  
    3-1镀膜室coating chamber: iXsX@ S^F  
    3-2蒸发器装置evaporator device: rUL_=>3  
    3-3蒸发器evaporator: q<Sb>M/\,  
    3-4直接加热式蒸发器evaporator by direct heat: =}1)/gcM  
    3-5间接加热式蒸发器evaporator by indirect heat: CNkI9>L=W`  
    3-7溅射装置sputtering device: N3rq8Rk  
    3-8靶target: Am @o}EC  
    3-10时控挡板timing shutter: >=+: lD  
    3-11掩膜mask: q@(MD3OE  
    3-12基片支架substrate holder: ;if PqL kO  
    3-13夹紧装置clamp: 5z~O3QX  
    3-14换向装置reversing device: w28&qNha  
    3-15基片加热装置substrate heating device: ZCC T  
    3-16基片冷却装置substrate colding device: hq|I%>y  
    J\%SAit@  
    4.真空镀膜设备 9m+ejTK{U  
    4-1真空镀膜设备vacuum coating plant: e\7AtlW"  
    (1).真空蒸发镀膜设备vacuum evaporation coating plant: 1&.q#,EMn(  
    (2).真空溅射镀膜设备vacuum sputtering coating plant: f]C`]qg  
    4-2连续镀膜设备continuous coating plant: ARd*c?Om  
    4-3半连续镀膜设备semi- continuous coating plant o6Jhl8  
    6.   1.漏孔 + \jn$>E  
    1-1漏孔leaks: Mc@_[q!xY?  
    1-2通道漏孔channel leak: gCL?{oVU  
    1-3薄膜漏孔membrane leak: T jrz_o)  
    1-4分子漏孔molecular leak: #Y%(CI  
    1-5粘滞漏孔vixcous leak: Bag_0.H&m  
    1-6校准漏孔calibrated leak: ?[#4WH-G  
    1-7标准漏孔reference leak : HrS-o=  
    1-8虚漏virtual leak: qp{3I("_  
    1-9漏率leak rate: 9  M90X8  
    1-10标准空气漏率standard air leak rate: +k{l]-)1  
    1-11等值标准空气漏率equivalent standard air leak rate: 7:'5q]9  
    1-12探索(示漏)气体: %% +@s   
    .Mxt F\  
    2.本底 KSve_CBOh  
    2-1本底background: %zYTTPLZ  
    2-2探索气体本底search gas background : gHox>r6.A  
    2-3漂移drift: U&o ~U] rm  
    2-4噪声noise: WiqkC#N  
    3U9leY'2N  
    3.检漏仪 ]vjMfT%]W  
    3-1检漏仪leak detector: %4x,^ K]  
    3-2高频火花检漏仪H.F. spark leak detector: 1B`JvNtd  
    3-3卤素检漏仪halide leak detector: [H=l# W@  
    3-4氦质谱检漏仪helium mass spectrometer leak detector: i;<K)5Z  
    3-5检漏仪的最小可检漏率minimum detectable rate of leak detector: + %H2;8{F  
    ,T8fo\a4  
    4.检漏 49Hgq/uO  
    4-1气泡检漏leak detection by bubbles: e/Y& d9` I  
    4-2氨检漏leak detection by ammonia: *fp4u_:`  
    4-3升压检漏leak detection of rise pressure: SD.c 9  
    4-4放射性同位素检漏radioactive isotope leak detection: M5`wfF,j  
    4-5荧光检漏fluorescence leak detection vpP8'f.  
    7.   1.一般术语 /rnP/X)T  
    1-1真空干燥vacuum drying: CA3`Ee+rD  
    1-2冷冻干燥freeze drying : OyATb{`'  
    1-3物料material: _Kv;hR>  
    1-4待干燥物料material to be dried: 1Ba.'~:  
    1-5干燥物料dried material : {W%/?d9m  
    1-6湿气moisture;humidity: cHUj6'neO  
    1-7自由湿气free moisture: )%bY2 pk  
    1-8结合湿气bound moisture: QuBaG<  
    1-9分湿气partial moisture: /'L/O;H20  
    1-10含湿量moisture content: zJTSg  
    1-11初始含湿量initial moisture content:  V/t-  
    1-12最终含湿量final residual moisture: ]64?S0p1c!  
    1-13湿度degree of moisture ,degree of humidity : g.x]x #BC  
    1-14干燥物质dry matter : 0kL tL!3  
    1-15干燥物质含量content of dry matter: V&>mD"~MP  
    XB+Juk&d  
    2.干燥工艺 bX`VIFc  
    2-1干燥阶段stages of drying : X`0`A2 n  
    (1).预干燥preliminary dry: h"(HDnq  
    (2).一次干燥(广义)primary drying(in general): jEW@~e  
    (3).一次干燥(冷冻干燥)primary drying(freeze-drying): N=;VS-  
    (4).二次干燥secondary drying: a*?,wmzl  
    2-2.(1).接触干燥contact drying: PHqIfH [  
    (2).辐射干燥 drying by radiation : )5l9!1j  
    (3).微波干燥microwave drying: gro@+^DmT  
    (4).气相干燥vapor phase drying: #6za  
    (5).静态干燥static drying: 0BQ<a  
    (6).动态干燥dynamic drying: BZRC0^-C@  
    2-3干燥时间drying time: E{E%nXR)  
    2-4停留时间length of stay(in the drying chamber): (Q6}N'T  
    2-5循环时间cycle time: vY(xH>Fd  
    2-6干燥率 dessication ratio : XkuZ2(  
    2-7去湿速率mass flow rate of humidity: WHv xBd  
    2-8单位面积去湿速率mass flow rate of humidity per surface area: `KJ BQK  
    2-9干燥速度 drying speed : ^ ,yh384  
    2-10干燥过程drying process: APY*SeI V  
    2-11加热温度heating temperature: /@f3|L<1@V  
    2-12干燥温度temperature of the material being dried : ntEf-x<  
    2-13干燥损失loss of material during the drying process : '>"-e'1m(  
    2-14飞尘lift off (particles): qY%{c-aMA  
    2-15堆层厚度thickness of the material: (ZHEPN  
    Auf2JH~  
    3.冷冻干燥 s(M8 Y  
    3-1冷冻freezing: \!,qXfTMB  
    (1).静态冷冻static freezing: a%)-iL X8&  
    (2).动态冷冻dynamic freezing: tJ@5E^'4  
    (3).离心冷冻centrifugal freezing: %2TjG  
    (4).滚动冷冻shell freezing: . [5{  
    (5).旋转冷冻spin-freezing: 9|RR;k[  
    (6).真空旋转冷冻vacuum spin-freezing: u7kw/_f  
    (7).喷雾冷冻spray freezing: 3*$)9'  
    (8).气流冷冻air blast freezing: \hFIg3  
    3-2冷冻速率rate of freezing: tO]` I-  
    3-3冷冻物料frozen material: Hm55R  
    3-4冰核ice core: Rjz~n38.  
    3-5干燥物料外壳envelope of dried matter: d}RR!i`<N  
    3-6升华表面sublimation front: s7}46\/U  
    3-7融化位置freezer burn: H}B%OFI\+  
    "R v],O"  
    4.真空干燥设备;真空冷冻干燥设备 a5# B&|#q  
    4-1真空干燥设备和真空冷冻干燥设备vacuum drying plant and vacuum freeze drying plant: 0N19R5NN8  
    4-2真空干燥器和冷冻干燥器vacuum drying chamber and freeze drying chamber: T?'Vb  
    4-3加热表面heating surface: sy;_%,}N  
    4-4物品装载面shelf : Gw)>i45 :  
    4-5干燥器的处理能力throughput (of the vacuum drying chamber): GV T[)jS  
    4-6单位面积干燥器处理能力throughput per shelf area: ]EZiPW-uy  
    4-7冰冷凝器ice condenser: d y^zOqc  
    4-8冰冷凝器的负载load of the ice condenser: O5eTkKUc  
    4-9冰冷凝器的额定负载rated load of the ice condenser f/6,b&l,  
    8.   1.一般术语 (5(TbyWwD  
    1-1试样sample : 1y($h<  
    (1).表面层surface layer: KWH l+p L  
    (2).真实表面true surface: L\Y4$e9bF8  
    (3).有效表面积effective surface area: t\%gP@?  
    (4).宏观表面;几何表面macroscopic surface area; geometric surface area: o0'!u  
    (5).表面粒子密度surface particle density: YB1uudW9  
    (6).单分子层monolayer: \tx4bV#  
    (7).表面单分子层粒子密度monolayer density: :7-2^7z)  
    (8).覆盖系数coverage ratio: b qNM  
    1-2激发excitation: >=Pn\" j  
    (1).一次粒子primary particle: >l3iAy!sZ  
    (2).一次粒子通量primary particle flux: nVt,= ?_ U  
    (3).一次粒子通量密度density of primary particle flux: ^yo~C3 r~  
    (4).一次粒子负荷primary particle load: M$0-!$RY  
    (5).一次粒子积分负荷integral load of primary particle: QFtf.")[.  
    (6).一次粒子的入射能量energy of the incident primary particle: aX$Q}mgb  
    (7).激发体积excited volume: F+3}Gkn  
    (8).激发面积excited area:  nW*D  
    (9).激发深度excited death: J@vL,C)E6  
    (10).二次粒子secondary particles: C>:'@o Z  
    (11).二次粒子通量secondary particle flux: 7A mnxFC  
    (12).二次粒子发射能energy of the emitted secondary particles: #7}1W[y9}l  
    (13).发射体积emitting volume: Ghb Jty`  
    (14).发射面积emitting area: LnZC)cL P/  
    (15).发射深度emitting depth: B<" `<oG@|  
    (16).信息深度information depth: 6,q}1-  
    (17).平均信息深度mean information depth: $)O=3dNbo  
    1-3入射角angle of incidence: yHk}'YP  
    1-4发射角angle of emission: B3V;  
    1-5观测角observation: -)p S\$GC  
    1-6分析表面积analyzed surface area: o'SZ sG  
    1-7产额 yield : ,p\:Z3{ZH  
    1-8表面层微小损伤分析minimum damage surface analysis: 9cwy;au  
    1-9表面层无损伤分析non-destructive surface analysis: v?=y9lEH@%  
    1-10断面深度分析 profile analysis in depth; depth profile analysis : k:qS'  
    1-11可观测面积observable area: 1\aJ[t  
    1-12可观测立体角observable solid angle : 74p=uQ  
    1-13接受立体角;观测立体角angle of acceptance: >{HQ"{Q  
    1-14角分辨能力angular resolving power: 8$TSQ~  
    1-15发光度luminosity: R#^.8g)t  
    1-16二次粒子探测比detection ratio of secondary particles: (rfR:[JkC2  
    1-17表面分析仪的探测极限detection limit of an apparatus for surface analysis: JE<w7:R&  
    1-18表面层分析仪灵敏度sensitivity of an apparatus for surface analysis: NlG~{rfI  
    1-19表面层分析仪质量分辨能力mass resolving power of an apparatus for surface analysis: 0lm7'H*~  
    1-20表面层分析仪能量分辨能力energy resolving power of an apparatus for surface analysis: 8h%oJ4da   
    1-21本底压力base pressure: %Y:"5fH  
    1-22工作压力working pressure: OkV*,n  
    h7"c_=w+  
    2.分析方法 s1GR!*z>  
    2-1二次离子质谱术;SIMS secondary ion mass spectroscopy: hRwj-N%C  
    (1).静态二次离子质谱术;静态SIMS static secondary ion mass spectroscopy : iX|K4.Pz{  
    (2).动态二次离子质谱术;动态SIMS dynamic secondary ion mass spectroscopy ;dynamic SIMS: .;$Ub[  
    2-2二次离子质谱仪;SIMS仪secondary ion mass spectrometer; SIMS apparatus: CVt:tV  
    2-3离子散射表面分析ion scattering spectroscopy: aVvma=  
    2-4低能离子散射的表面分析;离子散射谱测定ISS low energy ion scattering spectroscopy; ISS: +>}LT_  
    2-5卢瑟福后向散射的表面分析;RBS;卢瑟福离子后向散射的表面分析;RIBS Rutherford backscattering spectroscopy; RBS; Rutherford ion backscattering spectroscopy; RIBS: =} D9sT  
    2-6离子散射谱仪ion scattering spectrometer: 6^l|/\Y{  
    2-7俄歇效应Auger process: pRys 5/&v  
    2-8俄歇电子谱术;AES仪 Auger electron spectroscopy; AES: :2zga=)g  
    2-9俄歇电子能谱仪;AES仪Auger electron spectrometer ;AES apparatus: / :z<+SCh  
    2-10光电子谱术photoelectron spectroscopy :  B8~JUGD  
    (1).紫外光电子谱术;UPS ultraviolet photoelectron spectroscopy; UPS: {KGEv%  
    (2).X射线光电子谱术;X-ray photoelectron spectroscopy ; XPS: K8bKTG\  
    2-11光电子谱仪photoelectron spectrometer: SYE+A`a  
    2-12低能电子衍射;LEED low energy electron diffraction ;LEED: VchI0KL?  
    2-13低能电子衍射仪;LEED仪 apparatus for low energy electron diffraction ; LEED-apparatus: S T1V  
    2-14电子能损失谱术;ELS(也称EELS) electron energy loss spectroscopy(ELS): h0O t>e"  
    2-15电子能损失光谱仪;ELS仪 electron energy loss spectrometer ; ELS apparatus
    1条评分
    cyqdesign 金钱 +5 - 2007-02-28
     
    分享到
    离线zuiyuan
    发帖
    40
    光币
    15
    光券
    0
    只看该作者 1楼 发表于: 2007-03-13
    太好了啊,多谢了啊
    离线zhy980730
    发帖
    18
    光币
    27
    光券
    0
    只看该作者 2楼 发表于: 2007-03-14
    多谢,了解点.
    离线flyinlove79
    发帖
    571
    光币
    10401
    光券
    0
    只看该作者 3楼 发表于: 2007-03-15
    不错,多谢楼主分享资料
    离线飞花无心
    发帖
    69
    光币
    10
    光券
    0
    只看该作者 4楼 发表于: 2007-03-26
    很好,谢谢楼主啊
    离线wottlin100
    发帖
    8
    光币
    0
    光券
    0
    只看该作者 5楼 发表于: 2007-04-02
    呵呵,楼主辛苦啦!如果有定义解释更好!
    离线xingmeng1227
    发帖
    299
    光币
    422
    光券
    0
    只看该作者 6楼 发表于: 2011-10-29
    呵呵,楼主辛苦啦!
    离线zh9607109
    发帖
    17
    光币
    0
    光券
    0
    只看该作者 7楼 发表于: 2011-11-03
    呵呵,楼主辛苦啦!
    离线wym87
    发帖
    878
    光币
    1567
    光券
    0
    只看该作者 8楼 发表于: 2011-11-13
    谢谢楼主的分享!Thanks!
    离线douyongming
    发帖
    8
    光币
    7
    光券
    0
    只看该作者 9楼 发表于: 2012-06-17
    太好了啊,多谢了啊