SYNOPSYS光学设计软件中的光线控制语法如下: 5?f!hB|6
AANT
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M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf ]VS:5kOj`
END nZEew.T:6
y-~_ W 6\
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name: 7zowvE?#
YA YC YP XA XC XP ZA OPD OPP ZZ HH r,:acK
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG ` ^;J<l
DSLOPE UNI FLUX PL 4hkyq>c}
HFREQ HEFFIC HSFREQ ERROR j_z@VT}y
OPL ... jsss jsps 4,BJK`{
VeOM `jy
例如: B)dG:~
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 8=g~+<A
Xi w
1E0!?kRK
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