SYNOPSYS光学设计软件中的光线控制语法如下: ]ovtH.y
AANT HG /fp<[
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf b81^756
END 'g<"@SS+
:UT\L2 q=
?9xWTVa8
name: 8nZ_.
YA YC YP XA XC XP ZA OPD OPP ZZ HH (<B%Gy@
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG B _ J2Bf
DSLOPE UNI FLUX PL m>Z3p7!N}
HFREQ HEFFIC HSFREQ ERROR 8'E7Uj
OPL ... jsss jsps qJ5b;=
)
YB'W_
例如: nKd'5f1
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 u~,hTY(%
!'!\>x$
"KF]s.
BNk >D|D;