SYNOPSYS光学设计软件中的光线控制语法如下： $>^DkrOd
AANT ZcJa:
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf [ye!3h&]
END khFr%u ?S
*Rm"3S
_v=S4A#tF
name: / bm2v;
YA YC YP XA XC XP ZA OPD OPP ZZ HH 9O(vh(C
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG 4-j3&(
DSLOPE UNI FLUX PL _yx~t
HFREQ HEFFIC HSFREQ ERROR iM
\3~3'
OPL ... jsss jsps V9KI?}q:W
Vx'82CIC
例如: 'k^d-Mh>h
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 'N aNh0y
P;~`%,+S
9ZXkuP9vm
T0HNld
