SYNOPSYS光学设计软件中的光线控制语法如下: (yduU
AANT UDHk@M
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf m-lUgx7
END a3L]'E'*#
"PBUyh-Z
y(B~)T~e@
name: nKJJ7'$'3
YA YC YP XA XC XP ZA OPD OPP ZZ HH 9N|O*h1;u
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG b<qv
/t)$
DSLOPE UNI FLUX PL u2^oXl
HFREQ HEFFIC HSFREQ ERROR (u-i{<
OPL ... jsss jsps e*e}X&|(g
MPMJkL$F^
例如: &E$jAqc
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 }'dnL
L=Q-r[
4`G":nE?We
P8e1J0A