SYNOPSYS光学设计软件中的光线控制语法如下: LjUy*mxw
AANT =|%Cu&
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf nZ@&2YPlem
END \CXQo4P
%_{tzXim
#z2rzM@/:
name: "9^j.
YA YC YP XA XC XP ZA OPD OPP ZZ HH k?z98 >4
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG `>?ra-
DSLOPE UNI FLUX PL x7<\]94
HFREQ HEFFIC HSFREQ ERROR V {pj~D.E
OPL ... jsss jsps 1QU:?_\6@t
HN.3
例如: 7A\~)U@
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 MwR0@S}*
I-WhH>9
H*Kj3NgY
a e*Mf7