SYNOPSYS光学设计软件中的光线控制语法如下: rS\mFt X
AANT kH0kf-4\
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf lp$,`Uz`
END aF"PB
h=
U/U_q-z]
E]a,2{&8<
name: su\Lxv
YA YC YP XA XC XP ZA OPD OPP ZZ HH O[1Q#
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG O>X!78]#K
DSLOPE UNI FLUX PL uKIR$n"
HFREQ HEFFIC HSFREQ ERROR UeBSt.
OPL ... jsss jsps :Oj!J&A
cru&nH*O^
例如: !h1|B7N
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 P1TTaYu
{2g?+8L$Z
GZ:1bV37%
}darXtZKkK