SYNOPSYS光学设计软件中的光线控制语法如下: Zm&Zz^s
AANT X*$ 7g;
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf fm&l0
END 1m}'Y@I
"Q2[A]4E
6S"bW)O
name: U
NQup;#h
YA YC YP XA XC XP ZA OPD OPP ZZ HH 0<!kGL5
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG gq Z7Pro.
DSLOPE UNI FLUX PL FE/&<g0,:
HFREQ HEFFIC HSFREQ ERROR F[RhuNa&'W
OPL ... jsss jsps <`-"K+e!J
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例如: xhg{!w
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 LEyn1d
]y.,J
2=F_<Jh|+
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