SYNOPSYS光学设计软件中的光线控制语法如下: wi*Ke2YKP
AANT sXoBw.^Ir_
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf 3dadeu^{A
END z(1h ^.
QHMXQyr(
pl fz)x3
name: ,X$S4>
YA YC YP XA XC XP ZA OPD OPP ZZ HH _sZ/tU@_-K
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG t47 f$gq
DSLOPE UNI FLUX PL 5?9}^s4
HFREQ HEFFIC HSFREQ ERROR S)g5Tu)
OPL ... jsss jsps Y0|~]J(B
zRvYN
例如: e"^1- U\
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 nkN]z
^j
B+zq!+ HJ
pPQ]#v
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