SYNOPSYS光学设计软件中的光线控制语法如下: 8K.R=
AANT =Q+;=-1
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf ^Y=\#-Dd
END
i*|\KM?P
SG6kud\b
P^A!.}d
name: tX5"UQA
YA YC YP XA XC XP ZA OPD OPP ZZ HH O~T@rX9f
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG BcL{se9<
DSLOPE UNI FLUX PL k_sg
?(-!o
HFREQ HEFFIC HSFREQ ERROR h}*/Ge]aM
OPL ... jsss jsps &,}j#3<
u$>4F|=T
例如: +1uF !G&l
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 5>CEl2mSl
dYG,_ji
G'oG</A
YUx.BZf7