SYNOPSYS光学设计软件中的光线控制语法如下: BbCW3!(
AANT
KR R)pT
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf 7/KK}\NE
END 6cjCn
xFIzq
7$Wbf4
name: o*E32#l
YA YC YP XA XC XP ZA OPD OPP ZZ HH !M)] 1Y
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG .=yv m
DSLOPE UNI FLUX PL e NH9`Aa
HFREQ HEFFIC HSFREQ ERROR S|KUh|=Q
OPL ... jsss jsps 2[1t
)EW
uK#2vgT
例如: p Djt\R<f
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 +~:OUR*>
XL; WU8>
B+jh|@-
B>S>t5$