SYNOPSYS光学设计软件中的光线控制语法如下: DSL3+%KF#
AANT FJ{6_=@D
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf nUScDb2|
END \e' oAhM
d:JP935
fR#W#n#m
name: j5MUP&/g3
YA YC YP XA XC XP ZA OPD OPP ZZ HH <|1Kh ygv
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG NuR3]Ja\0
DSLOPE UNI FLUX PL Z=9gok\
HFREQ HEFFIC HSFREQ ERROR EqF>=5*
OPL ... jsss jsps K8{ef
9=.7[-6i9
例如: :Ny^-4-N
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 9\!=i
;"JgNad
C=8IQl[^e
VYnB&3%DF