SYNOPSYS光学设计软件中的光线控制语法如下: Y]R=z*i%
AANT TS=%iMa
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf XH0{|#hwN
END *W2] Kxx*
e{2Za
LkeYzQH/l
name: SN[yC
YA YC YP XA XC XP ZA OPD OPP ZZ HH Wsd_RT }ww
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG &VjPdu57
DSLOPE UNI FLUX PL !K_<7iExI\
HFREQ HEFFIC HSFREQ ERROR LVP6vs
OPL ... jsss jsps *>iJ=H
GXx'"SK9
例如: =S^ vIo)
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 5-a^Frmg#"
(q7;/n
eG1A7n'6W
ViOXmK"