SYNOPSYS光学设计软件中的光线控制语法如下: rfonM~3?'
AANT +=/j+S`
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf dCo)en
END @A6iY
Ct'tUF<K5
uzxwJs'fz
name: 9 &r]k8K
YA YC YP XA XC XP ZA OPD OPP ZZ HH v9 \n=Z
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG r]Hrz'C`
DSLOPE UNI FLUX PL #U- y<[
3
HFREQ HEFFIC HSFREQ ERROR K1X-<5]{
OPL ... jsss jsps ';G/,wB?`
t<te{yt%
例如: <h#7;o
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 3m&r?xZs
2D%2k
Do(G;D`h+_
o<A-ETx<