SYNOPSYS光学设计软件中的光线控制语法如下: Wfgs[
AANT %YLdie6c
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf -S\74hA
END &S9Sl
2V7x
),y{.n:wm
name: C4e3Itc9X
YA YC YP XA XC XP ZA OPD OPP ZZ HH !Vl>?U?AN
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG H Yt&MK
DSLOPE UNI FLUX PL X(kyu,w
HFREQ HEFFIC HSFREQ ERROR !7t,(Id8
OPL ... jsss jsps SbU=Lkx#
o^%4w>|
例如: k/hE68<6i
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 VqV6)6
i&\N_PUm[
/H&:
0@z=0}0Z