SYNOPSYS光学设计软件中的光线控制语法如下: `:iMGqZN
AANT 1|p\rHGd
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf zu}uW,XH-
END dcrvEc_/
Zna6-0o
e)HFI|>
name: D\G 8p;
YA YC YP XA XC XP ZA OPD OPP ZZ HH \;-Yz
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG C/!P&`<6
DSLOPE UNI FLUX PL >7WT4l)7!b
HFREQ HEFFIC HSFREQ ERROR L[zTT\a
OPL ... jsss jsps F7} yt
)P7oL.)
例如: <@M5 C-hH
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 3SY1>}(Y
;R+Gf!1
):Fg {7b]n
z/j*zU
`