SYNOPSYS光学设计软件中的光线控制语法如下: 1q=Q/L4P
AANT {KDN|o+%
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf d&G]k!|\
END 7"Nda3
C-ORI}o
d@^%fVhG
name: O\uIIuy
YA YC YP XA XC XP ZA OPD OPP ZZ HH l4mRNYv)z
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG E
el* P M
DSLOPE UNI FLUX PL +*Wlj8
HFREQ HEFFIC HSFREQ ERROR ;4dFL\KU
OPL ... jsss jsps kE6/d,
erv94acq
例如: VJ
h]j(
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 pC,Z=+:
ObZhQ.&
E"[p_ALdC
h}nS&.