SYNOPSYS光学设计软件中的光线控制语法如下: K>XZrt
AANT * 0JF|'
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf i??+5o@uTF
END j>v8i
bS(
.N\t3\9}
Txpj#JD
name: mY XL
YA YC YP XA XC XP ZA OPD OPP ZZ HH qvhG^b0h
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG
z{V#_(
DSLOPE UNI FLUX PL YWV)C?5x&
HFREQ HEFFIC HSFREQ ERROR ?@Tsd@s~r
OPL ... jsss jsps fmUrwI1 %
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例如: $`0,N_C<}
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 a8k`Wog
1 un!
j"zW0g!S
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