SYNOPSYS光学设计软件中的光线控制语法如下: ILO+=xU
AANT $3[cBX.=
M tar wt {A/S/MUL/DIV} {icol/P} name hbar xen yen gbar surf kCwTv:)
END jo |q,t
eB\r/B]
6m.Ku13;
name: j0%0yb{-^
YA YC YP XA XC XP ZA OPD OPP ZZ HH RYV6hp)|
XL YL ZL XG YG ZG XE YE ZE ZZL HHL ZZG HHG I|j tpv}
DSLOPE UNI FLUX PL hZ'oCRM
HFREQ HEFFIC HSFREQ ERROR 5"gRz9Ta`
OPL ... jsss jsps 2 Lamvf
kR6 t
.
例如: (wlsn6h
M 0 1 A P YA 0 0 1 ! 0视场的边缘光线控制为 0 XF7W'^
!Q(xOc9>Ug
#pe{:f?
L~oFW'